WO2006036560A3 - Mems switches with deforming membranes - Google Patents

Mems switches with deforming membranes Download PDF

Info

Publication number
WO2006036560A3
WO2006036560A3 PCT/US2005/032782 US2005032782W WO2006036560A3 WO 2006036560 A3 WO2006036560 A3 WO 2006036560A3 US 2005032782 W US2005032782 W US 2005032782W WO 2006036560 A3 WO2006036560 A3 WO 2006036560A3
Authority
WO
WIPO (PCT)
Prior art keywords
mems switches
membranes
deforming
deforming membranes
application
Prior art date
Application number
PCT/US2005/032782
Other languages
French (fr)
Other versions
WO2006036560A2 (en
Inventor
Clarence Chui
Manish Kothari
Original Assignee
Idc Llc
Clarence Chui
Manish Kothari
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/144,546 external-priority patent/US8008736B2/en
Priority claimed from US11/150,407 external-priority patent/US7345805B2/en
Priority claimed from US11/198,925 external-priority patent/US7724993B2/en
Application filed by Idc Llc, Clarence Chui, Manish Kothari filed Critical Idc Llc
Priority to JP2007533542A priority Critical patent/JP2008515150A/en
Priority to MX2007003577A priority patent/MX2007003577A/en
Priority to EP05798437A priority patent/EP1809568A2/en
Publication of WO2006036560A2 publication Critical patent/WO2006036560A2/en
Publication of WO2006036560A3 publication Critical patent/WO2006036560A3/en

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/3466—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on interferometric effect
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Push-Button Switches (AREA)
  • Micromachines (AREA)

Abstract

MEMS switches are formed with membranes or layers that are deformable upon the application of a voltage. In some embodiments, the application of a voltage opens switch contacts.
PCT/US2005/032782 2004-09-27 2005-09-14 Mems switches with deforming membranes WO2006036560A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007533542A JP2008515150A (en) 2004-09-27 2005-09-14 MEMS switch with deformable thin film
MX2007003577A MX2007003577A (en) 2004-09-27 2005-09-14 Mems switches with deforming membranes.
EP05798437A EP1809568A2 (en) 2004-09-27 2005-09-14 Mems switches with deforming membranes

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
US61350104P 2004-09-27 2004-09-27
US61346504P 2004-09-27 2004-09-27
US60/613,501 2004-09-27
US60/613,465 2004-09-27
US11/144,546 2005-06-03
US11/144,546 US8008736B2 (en) 2004-09-27 2005-06-03 Analog interferometric modulator device
US11/150,407 2005-06-10
US11/150,407 US7345805B2 (en) 2004-09-27 2005-06-10 Interferometric modulator array with integrated MEMS electrical switches
US11/198,925 2005-08-05
US11/198,925 US7724993B2 (en) 2004-09-27 2005-08-05 MEMS switches with deforming membranes

Publications (2)

Publication Number Publication Date
WO2006036560A2 WO2006036560A2 (en) 2006-04-06
WO2006036560A3 true WO2006036560A3 (en) 2006-05-04

Family

ID=35501242

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/032782 WO2006036560A2 (en) 2004-09-27 2005-09-14 Mems switches with deforming membranes

Country Status (5)

Country Link
EP (1) EP1809568A2 (en)
JP (1) JP2008515150A (en)
MX (1) MX2007003577A (en)
TW (1) TW200635845A (en)
WO (1) WO2006036560A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1850360A1 (en) * 2006-04-26 2007-10-31 Seiko Epson Corporation Microswitch with a first actuated portion and a second contact portion
US7649671B2 (en) * 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7724417B2 (en) 2006-12-19 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
WO2010054244A2 (en) * 2008-11-07 2010-05-14 Cavendish Kinetics, Inc. Method of using a plurality of smaller mems devices to replace a larger mems device
US8115383B2 (en) * 2009-10-29 2012-02-14 Global Oled Technology Llc Electroluminescent area illumination with integrated mechanical switch
US8576029B2 (en) * 2010-06-17 2013-11-05 General Electric Company MEMS switching array having a substrate arranged to conduct switching current
RU2532684C2 (en) * 2013-05-23 2014-11-10 Общество с ограниченной ответственностью "СПИНТЕК" Switch and commutator switch
US11615924B2 (en) * 2020-10-25 2023-03-28 AAC Technologies Pte. Ltd. MEMS switch

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003060940A1 (en) * 2002-01-18 2003-07-24 Abb Research Ltd Micro-electromechanical system and method for production thereof
US20040022044A1 (en) * 2001-01-30 2004-02-05 Masazumi Yasuoka Switch, integrated circuit device, and method of manufacturing switch

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040022044A1 (en) * 2001-01-30 2004-02-05 Masazumi Yasuoka Switch, integrated circuit device, and method of manufacturing switch
WO2003060940A1 (en) * 2002-01-18 2003-07-24 Abb Research Ltd Micro-electromechanical system and method for production thereof

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PEROULIS D ET AL: "LOW CONTACT RESISTANCE SERIES MEMS SWITCHES", 2002 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST. (IMS 2002). SEATTLE, WA, JUNE 2 - 7, 2002, vol. 1, 2 June 2002 (2002-06-02), NEW YORK, NY, US, pages 223 - 226, XP001099477, ISBN: 0-7803-7239-5 *

Also Published As

Publication number Publication date
WO2006036560A2 (en) 2006-04-06
TW200635845A (en) 2006-10-16
MX2007003577A (en) 2007-05-23
EP1809568A2 (en) 2007-07-25
JP2008515150A (en) 2008-05-08

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