WO2006033731A2 - Atomic layer deposition of copper using surface-activating agents - Google Patents
Atomic layer deposition of copper using surface-activating agents Download PDFInfo
- Publication number
- WO2006033731A2 WO2006033731A2 PCT/US2005/029439 US2005029439W WO2006033731A2 WO 2006033731 A2 WO2006033731 A2 WO 2006033731A2 US 2005029439 W US2005029439 W US 2005029439W WO 2006033731 A2 WO2006033731 A2 WO 2006033731A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- group
- copper
- substrate
- independently selected
- alkyl
- Prior art date
Links
- 239000010949 copper Substances 0.000 title claims abstract description 46
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 46
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 44
- 239000003795 chemical substances by application Substances 0.000 title claims description 17
- 238000000231 atomic layer deposition Methods 0.000 title abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 238000000034 method Methods 0.000 claims abstract description 47
- 230000008569 process Effects 0.000 claims abstract description 45
- 239000012691 Cu precursor Substances 0.000 claims description 28
- 239000003638 chemical reducing agent Substances 0.000 claims description 25
- 229910052739 hydrogen Inorganic materials 0.000 claims description 22
- 239000003446 ligand Substances 0.000 claims description 21
- 238000000151 deposition Methods 0.000 claims description 20
- 150000004699 copper complex Chemical class 0.000 claims description 19
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- -1 4-pyridinyl Chemical group 0.000 claims description 14
- 239000001257 hydrogen Substances 0.000 claims description 12
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 12
- FEJUGLKDZJDVFY-UHFFFAOYSA-N 9-borabicyclo(3.3.1)nonane Chemical compound C1CCC2CCCC1B2 FEJUGLKDZJDVFY-UHFFFAOYSA-N 0.000 claims description 10
- 150000001879 copper Chemical class 0.000 claims description 10
- 125000000217 alkyl group Chemical group 0.000 claims description 9
- 125000000008 (C1-C10) alkyl group Chemical group 0.000 claims description 8
- HBEDSQVIWPRPAY-UHFFFAOYSA-N 2,3-dihydrobenzofuran Chemical compound C1=CC=C2OCCC2=C1 HBEDSQVIWPRPAY-UHFFFAOYSA-N 0.000 claims description 8
- UCXUKTLCVSGCNR-UHFFFAOYSA-N diethylsilane Chemical compound CC[SiH2]CC UCXUKTLCVSGCNR-UHFFFAOYSA-N 0.000 claims description 7
- 238000010926 purge Methods 0.000 claims description 7
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 6
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 6
- UORVGPXVDQYIDP-UHFFFAOYSA-N borane Chemical class B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 claims description 6
- 125000002147 dimethylamino group Chemical group [H]C([H])([H])N(*)C([H])([H])[H] 0.000 claims description 6
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 6
- 229910052731 fluorine Inorganic materials 0.000 claims description 6
- 239000011737 fluorine Substances 0.000 claims description 6
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 claims description 6
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims description 6
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 6
- 125000001971 neopentyl group Chemical group [H]C([*])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 claims description 6
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 6
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 5
- 125000006527 (C1-C5) alkyl group Chemical group 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 150000001336 alkenes Chemical class 0.000 claims description 4
- 150000001345 alkine derivatives Chemical class 0.000 claims description 4
- 125000002947 alkylene group Chemical group 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims description 4
- 229910000085 borane Inorganic materials 0.000 claims description 4
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 150000002825 nitriles Chemical class 0.000 claims description 4
- 150000003003 phosphines Chemical class 0.000 claims description 4
- DNXIASIHZYFFRO-UHFFFAOYSA-N pyrazoline Chemical compound C1CN=NC1 DNXIASIHZYFFRO-UHFFFAOYSA-N 0.000 claims description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910000077 silane Inorganic materials 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- SUZOCIFIGKCISE-UHFFFAOYSA-N 1-(dimethylamino)propan-1-ol Chemical compound CCC(O)N(C)C SUZOCIFIGKCISE-UHFFFAOYSA-N 0.000 claims description 2
- UJPKMTDFFUTLGM-UHFFFAOYSA-N 1-aminoethanol Chemical compound CC(N)O UJPKMTDFFUTLGM-UHFFFAOYSA-N 0.000 claims description 2
- WTKZEGDFNFYCGP-UHFFFAOYSA-N Pyrazole Chemical compound C=1C=NNC=1 WTKZEGDFNFYCGP-UHFFFAOYSA-N 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 2
- VQYPKWOGIPDGPN-UHFFFAOYSA-N [C].[Ta] Chemical compound [C].[Ta] VQYPKWOGIPDGPN-UHFFFAOYSA-N 0.000 claims description 2
- UGACIEPFGXRWCH-UHFFFAOYSA-N [Si].[Ti] Chemical compound [Si].[Ti] UGACIEPFGXRWCH-UHFFFAOYSA-N 0.000 claims description 2
- 125000003368 amide group Chemical group 0.000 claims description 2
- CFJRGWXELQQLSA-UHFFFAOYSA-N azanylidyneniobium Chemical compound [Nb]#N CFJRGWXELQQLSA-UHFFFAOYSA-N 0.000 claims description 2
- UBHZUDXTHNMNLD-UHFFFAOYSA-N dimethylsilane Chemical compound C[SiH2]C UBHZUDXTHNMNLD-UHFFFAOYSA-N 0.000 claims description 2
- KCWYOFZQRFCIIE-UHFFFAOYSA-N ethylsilane Chemical compound CC[SiH3] KCWYOFZQRFCIIE-UHFFFAOYSA-N 0.000 claims description 2
- 150000002466 imines Chemical class 0.000 claims description 2
- 230000005012 migration Effects 0.000 claims description 2
- 238000013508 migration Methods 0.000 claims description 2
- PARWUHTVGZSQPD-UHFFFAOYSA-N phenylsilane Chemical compound [SiH3]C1=CC=CC=C1 PARWUHTVGZSQPD-UHFFFAOYSA-N 0.000 claims description 2
- 229960005235 piperonyl butoxide Drugs 0.000 claims description 2
- 150000003217 pyrazoles Chemical class 0.000 claims description 2
- 150000004756 silanes Chemical class 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- HWEYZGSCHQNNEH-UHFFFAOYSA-N silicon tantalum Chemical compound [Si].[Ta] HWEYZGSCHQNNEH-UHFFFAOYSA-N 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 125000006724 (C1-C5) alkyl ester group Chemical group 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 abstract description 7
- 239000007787 solid Substances 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 19
- 230000008021 deposition Effects 0.000 description 17
- 239000003153 chemical reaction reagent Substances 0.000 description 11
- 239000002243 precursor Substances 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000010410 layer Substances 0.000 description 8
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 6
- 238000006722 reduction reaction Methods 0.000 description 6
- 230000009467 reduction Effects 0.000 description 5
- 238000005137 deposition process Methods 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 230000003213 activating effect Effects 0.000 description 3
- 150000004696 coordination complex Chemical class 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910001431 copper ion Inorganic materials 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- GUHKMHMGKKRFDT-UHFFFAOYSA-N 1785-64-4 Chemical compound C1CC(=C(F)C=2F)C(F)=C(F)C=2CCC2=C(F)C(F)=C1C(F)=C2F GUHKMHMGKKRFDT-UHFFFAOYSA-N 0.000 description 1
- HUVAAOZUPLEYBH-UHFFFAOYSA-N 3,4,5-trimethyl-1h-pyrazole Chemical compound CC1=NNC(C)=C1C HUVAAOZUPLEYBH-UHFFFAOYSA-N 0.000 description 1
- VMQMZMRVKUZKQL-UHFFFAOYSA-N Cu+ Chemical compound [Cu+] VMQMZMRVKUZKQL-UHFFFAOYSA-N 0.000 description 1
- 229910020169 SiOa Inorganic materials 0.000 description 1
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000004964 aerogel Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000005588 protonation Effects 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
- C23C16/45534—Use of auxiliary reactants other than used for contributing to the composition of the main film, e.g. catalysts, activators or scavengers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45553—Atomic layer deposition [ALD] characterized by the use of precursors specially adapted for ALD
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
- H01L21/28562—Selective deposition
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
Definitions
- the present invention relates to a novel atomic layer deposition process for the formation of copper films on substrates or in or on porous solids in an atomic layer deposition process.
- Atomic layer deposition (ALD) processes are useful for the creation of thin films, as described by M. Ritala and M. Leskela in "Atomic Layer Deposition” in Handbook of Thin Film Materials, H. S. Nalwa, Editor, Academic Press, San Diego, 2001 , Volume 1 , Chapter 2.
- Such films are critical components in the manufacture of electronic circuits and devices.
- a copper precursor and a reducing agent are alternatively introduced into a reaction chamber. After the copper precursor is introduced into the reaction chamber and allowed to adsorb onto a substrate, the excess (unadsorbed) precursor vapor is pumped or purged from the chamber. This process is followed by introduction of a reducing agent that reacts with the copper precursor on the substrate surface to form copper metal and a free form of the ligand. This cycle can be repeated if needed to achieve the desired film thickness.
- the ligands coordinated to the metal complex used in the ALD processes must be stable with respect to decomposition and be able to desorb from the complex in a metal-free form. Following reduction of the copper, the ligand is liberated and must be removed from the surface to prevent its incorporation into the metal layer being formed.
- reactivity In the deposition of metal films by the typical, two-step ALD process, reactivity must be designed into the precursor to enable self- limiting adsorption to the substrate surface. Because a metal surface has no functional groups, this reactivity must be built into the precursor.
- the initial deposition requires a transformation, such as loss of a ligand, that is induced thermally. The requirement is the source of the conflicting requirements for a metal precursor.
- the compound must be stable enough to be transferred into the deposition chamber, but reactive enough to undergo a transformation at the substrate surface to form a monolayer of a nonvolatile complex on the substrate ready for the transformation into a pure, conformal metal film.
- One aspect of the present invention is a process for depositing copper films on a surface, comprising: a. exposing a substrate to a surface-activating agent to form a deposit of a surface-activating group on the substrate; b. exposing the deposit of the surface-activating group on the substrate to a copper precursor to form a deposit of a copper complex on the substrate; and c. reacting the deposited copper complex with a reducing agent to form a deposit of copper metal on the substrate.
- ALD atomic layer deposition
- This process comprises the sequential introduction of three reagents into the deposition chamber, a surface-activating agent, a copper precursor, and a reducing agent.
- the surface-activating agent is an organic molecule that chemisorbs to the substrate to form monolayer coverage of a surface-activating group.
- This group is a weak acid that donates a proton to the copper complex in a subsequent step to cause the copper ion to chemisorb to the surface.
- This process uses copper complexes in either the +1 or +2 oxidation state that are volatile and thermally stable.
- the ligands are chosen to form copper complexes that are volatile in an appropriate temperature range but do not decompose in this temperature range; rather, the complexes react with the chemisorbed surface-activating group on contract and are then reduced to metal on addition of a suitable reducing agent.
- the ligands are chosen to react with the chemisorbed surface-activating group at a temperature below the thermal decomposition temperature of the copper complex. In the process of this invention, there is no adsorption of the copper precursor to the substrate surface in the absence of the surface-activating group.
- the ligands and surface-activating groups are further chosen so that they will desorb without decomposition upon exposure of the copper complex to a reducing agent. The reduction of these copper complexes to copper metal by readily available reducing agents has been demonstrated to proceed cleanly at moderate temperatures.
- the process described herein involves introduction of three reagents into the deposition chamber: a surface-activating agent, a copper precursor, and a reducing agent.
- the introduction of each reagent can be followed by a purge step to remove any reagent that is not adsorbed to the substrate surface.
- the next reagent is then added. Selection of process conditions such as temperature, pressure, length of pulse of reagent and purge time will depend on individual chamber and system design, and the desired process rate.
- a monolayer of the surface-activating group is formed on the substrate surface prior to introduction of the copper precursor.
- the surface-activating agent desirably chemisorbs to the substrate and has a proton available that is acidic enough to protonate the copper precursor on contact.
- the surface-activating agent will show self-limiting adsorption to the substrate surface to form a monolayer on the substrate.
- the amount of reagent that adsorbs can be controlled by the amount of reagent introduced into the chamber. The addition of this surface-activating agent allows the use of a more stable metal precursor and/or lower reaction temperatures than are used in typical ALD processes. Thermal degradation of the copper precursor to induce chemisorption is not needed and should be avoided.
- the choice of surface-activating agent will depend on the substrate onto which copper is deposited and the copper precursor itself.
- the surface-activating agent is chosen to be able to protonate a ligand on the copper.
- basic ligands with pK a values 12 or greater, are used on the copper precursor. This choice permits the use of weak acids as surface-activating groups.
- aromatic nitrogen heterocycles such as pyrazole and substituted pyrazoles such as 3,4,5- trimethylpyrazole have the desired properties of volatility, affinity for metal surfaces, and acidity.
- the copper precursor is selected from a group consisting of bis(aminoethanolate)copper(ll), copper(l) dialkyamides, bis(dimethylaminopropanolate)copper(ll), (bis(trimethylsily)amido)-copper(l), copper(l) f-butoxide, and copper complexes represented by structures (I) - (V):
- R 1 and R 4 are independently selected from a group consisting of H, CrC 5 alkyl, and dimethylamino;
- R 2 and R 3 are independently selected from a group consisting of H, CrC 5 alkyl, phenyl, benzyl, and 4-pyridinyl, with the proviso that the total number of carbons in R 1 -R 4 of a given ligand is 4 -12;
- R 6 and R 7 are independently selected from a group consisting of H,
- R 5 and R 8 are independently selected from a group consisting of H,
- R 6 and R 7 are selected from a group consisting of H, CrC 5 alkyl, phenyl, benzyl, and 4-pyridinyl, with the proviso that either R 6 or R 7 is 4-pyridinyl, and with the proviso that the total number of carbons in R 5 - R 8 of a given ligand is 4 -14;
- R 1 , R 2 and R 3 are independently selected from a group consisting of hydrogen, methyl, ethyl, propyl, isopropyl, isobutyl, and neopentyl;
- R 4 is -(CH 2 ) n -. where n is 3, 4, or 5;
- L is selected from a group consisting of C 2 - Ci 5 olefins, C 2 - C- 15 alkynes, nitriles, aromatic heterocycles, and phosphines;
- R 1 and R 4 are independently selected from a group consisting of hydrogen, methyl, ethyl, propyl, isopropyl, isobutyl, and neopentyl;
- R 2 , R 3 and R 5 are independently selected from a group consisting of hydrogen, fluorine, trifluoromethyl, phenyl and Ci-C 10 alkyl groups; and
- L is selected from a group consisting of C 2 - C 15 olefins, C 2 - C 15 alkynes, nitriles, aromatic heterocycles, and phosphines;
- R 1 and R 4 are independently selected from a group consisting of hydrogen, methyl, ethyl, propyl, isopropyl, isobutyl, neopentyl and C 3 -C 5 alkylene;
- R 2 , R 3 and R 5 are independently selected from a group consisting of hydrogen, fluorine, trifluoromethyl, phenyl, C 1 -C 10 alkyl and C 3 -C 5 alkylene; with the proviso that at least one of (R 1 , R 2 ) and (R 3 , R 4 ) taken together is -(CR 6 R 7 ) n - where R 6 and R 7 are independently selected from a group consisting of hydrogen, fluorine, trifluoromethyl, C 1 -C 5 alkyl
- 9-BBN 9-borabicyclo[3.3.1]nonane
- diborane boranes of the form BR
- Suitable reducing agents for the copper deposition process of this invention include 9-BBN, borane, diborane, dihydrobenzofuran, pyrazoline, germanes, diethylsilane, dimethylsilane, ethylsilane, phenylsilane, silane and disilane. Diethylsilane and silane are preferred.
- the deposition process of this invention improves upon the processes described in the art by allowing the use of lower temperatures and producing higher quality, more uniform films.
- the process of this invention also provides a more direct route to a copper film, avoiding the formation of an intermediate oxide film.
- the copper can be deposited on the surface, or in or on porosity, of the substrate.
- Suitable substrates include conducting, semiconducting and insulating substrates, including substrates that are typically used in the electronics industry to manufacture ultra large scale integrated circuits.
- Suitable substrates typically comprise copper, silicon, silicon dioxide, low k substrates, or low k substrates coated with a barrier layer to prevent the migration of copper.
- Suitable barrier layers include tantalum, tantalum nitride, titanium, titanium nitride, tantalum silicon nitride, titanium silicon nitride, tantalum carbon nitride, tungsten carbonitride, and niobium nitride.
- "Low k" substrates have a dielectric constant ("k") less than about 4.
- Suitable low k substrates include doped oxides (e.g., FSG, HSQ, MSQ, HOSP), organics (e.g.,
- SiLK, BCB, FLARE, PAE highly fluorinated materials
- highly fluorinated materials e.g., parylene-F, a- CF, and PTFE
- porous materials e.g., aerogel and xerogel.
- the deposition of the copper complex is typically conducted at 0 0 C to 200 0 C.
- the reduction of the copper complex is typically carried out at similar temperatures, 0 0 C to 200 0 C.
- it is initially a copper complex that is deposited on the surface-activated substrate, although the deposited copper complex may be the product of the reaction of the surface- activating group and the copper precursor, rather than the copper precursor itself.
- the formation of a metallic copper film does not occur until the copper complex is exposed to the reducing agent.
- Aggressive reducing agents are preferred to reduce the copper complex rapidly and completely. Desirable reducing agents are volatile and do not decompose on heating. It is also desirable that the reducing agents be of sufficient reducing power to react rapidly on contact with the copper complex deposited on the substrate surface.
- One feature of these reducing agents is the presence of a proton donor.
- the reducing reagent should be able to transfer electrons to reduce the copper ion of the complex and also transfer protons to protonate the ligand.
- the oxidized reducing agent and the protonated ligand should be able to be easily removed from the surface of the newly formed copper deposit.
- the surface- activating agents and copper complexes are added to a reactor so as to attain a suitable fluence of complex to the surface of the substrate. After at least a portion of these reagents has been deposited on the substrate
- the undeposited material in the gas phase is pumped or purged from the chamber and then the reducing agent is introduced into the chamber at a pressure of approximately 50 to 760 mtorr to reduce the adsorbed copper complex.
- the substrate is held at a temperature between approximately 0 0 C to 200 0 C during reduction. With suitable combinations of copper complex and reducing agent, this reduction is typically at least 90% complete within 20 minutes. Reducing agent exposure times can be from less than a second to several minutes.
- the surface activating group, the ligands on the copper precursor and the reducing agent are chosen so that the products from this reduction reaction are readily removed from the surface of the substrate under the reducing conditions.
- the copper precursor (vinyltrimethylsilyl)(N,N'-diethyl-2,4- pentanediketiminato)copper(I) was prepared according to a literature procedure (PCT7US2004/011734, filed April 16, 2004).
- Gold film was prepared by evaporation of gold onto a Ti/SiOa/Si wafer. Wafer was cut into 0.6 cm x 0.6 cm pieces. The gold layer was 750 A thick. Prior to use, the piece was sputter etched at 10 "9 torr to a clean gold surface and transported to a Vacuum Atmospheres dry box with a continuous boil-off nitrogen purge in an evacuated transfer vessel; the wafer was not exposed to the ambient atmosphere. The wafer was heated at 250 0 C for two hours prior to deposition reactions.
- the following procedure was used to deposit a copper film.
- the wafer was contacted with a 10 ⁇ M solution of 2,2,4,4-tetramethyl- pentanone imine in hexane. This soak was typically overnight, but was as short as 0.75 hours or as long as several days.
- the sample was removed from the hexane solution and allowed to dry in the dry box atmosphere.
- the wafer and a ceramic boat containing -0.050 g of the copper(l) precursor were loaded into the deposition chamber. Both pieces were heated to 60 0 C at 100-200 mtorr pressure. Helium gas was used as a carrier gas to maintain this pressure; the gas flowed over the ceramic boat and then the wafer. This flow was maintained for approximately two hours.
- the boat containing the remaining precursor was cooled to room temperature.
- Diethylsilane was then introduced into the deposition chamber from a glass bubbler with the helium flow passing through the diethylsilane before introduction to the deposition chamber.
- a volume of 1- 2 ml_ diethylsilane was introduced to the deposition chamber in this manner.
- the chamber was then evacuated to remove excess diethylsilane.
- the wafer was transferred to the dry box. The process was repeated 22 times. A faint copper color developed.
- ESCA analysis confirms the deposition of a thin, copper metal film.
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Abstract
Description
Claims
Priority Applications (3)
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JP2007528021A JP4943333B2 (en) | 2004-08-16 | 2005-08-16 | Atomic layer deposition of copper using surface activators. |
EP05813286A EP1791988A2 (en) | 2004-08-16 | 2005-08-16 | Atomic layer deposition of copper using surface-activating agents |
IL181362A IL181362A0 (en) | 2004-08-16 | 2007-02-15 | Atomic layer deposition of copper using surface-activating agents |
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US60178604P | 2004-08-16 | 2004-08-16 | |
US60/601,786 | 2004-08-16 |
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WO2006033731A2 true WO2006033731A2 (en) | 2006-03-30 |
WO2006033731A3 WO2006033731A3 (en) | 2006-05-11 |
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PCT/US2005/029439 WO2006033731A2 (en) | 2004-08-16 | 2005-08-16 | Atomic layer deposition of copper using surface-activating agents |
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US (1) | US7604840B2 (en) |
EP (1) | EP1791988A2 (en) |
JP (1) | JP4943333B2 (en) |
KR (1) | KR20070051331A (en) |
IL (1) | IL181362A0 (en) |
TW (1) | TW200611990A (en) |
WO (1) | WO2006033731A2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008018861A1 (en) * | 2006-08-07 | 2008-02-14 | E. I. Du Pont De Nemours And Company | Copper(i) complexes and processes for deposition of copper films by atomic layer deposition |
US7488435B2 (en) | 2006-08-07 | 2009-02-10 | E. I. Du Pont De Nemours And Company | Copper(I) complexes and processes for deposition of copper films by atomic layer deposition |
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US20090130466A1 (en) * | 2007-11-16 | 2009-05-21 | Air Products And Chemicals, Inc. | Deposition Of Metal Films On Diffusion Layers By Atomic Layer Deposition And Organometallic Precursor Complexes Therefor |
JP2010209410A (en) * | 2009-03-10 | 2010-09-24 | Tokyo Electron Ltd | METHOD FOR DEPOSITING Cu FILM, AND STORAGE MEDIUM |
WO2010132871A1 (en) | 2009-05-15 | 2010-11-18 | Wayne State University | Thermally stable volatile film precursors |
US9822446B2 (en) | 2010-08-24 | 2017-11-21 | Wayne State University | Thermally stable volatile precursors |
US9255327B2 (en) | 2010-08-24 | 2016-02-09 | Wayne State University | Thermally stable volatile precursors |
US20130330473A1 (en) * | 2012-06-11 | 2013-12-12 | Wayne State University | Atomic Layer Deposition of Transition Metal Thin Films Using Boranes as the Reducing Agent |
US8907115B2 (en) | 2012-12-10 | 2014-12-09 | Wayne State University | Synthesis and characterization of first row transition metal complexes containing α-keto hydrazonate ligands as potential precursors for use in metal film deposition |
US9758866B2 (en) | 2013-02-13 | 2017-09-12 | Wayne State University | Synthesis and characterization of first row transition metal complexes containing α-imino alkoxides as precursors for deposition of metal films |
US9157149B2 (en) | 2013-06-28 | 2015-10-13 | Wayne State University | Bis(trimethylsilyl) six-membered ring systems and related compounds as reducing agents for forming layers on a substrate |
US9249505B2 (en) | 2013-06-28 | 2016-02-02 | Wayne State University | Bis(trimethylsilyl) six-membered ring systems and related compounds as reducing agents for forming layers on a substrate |
KR20150075049A (en) | 2013-12-24 | 2015-07-02 | 주식회사 유피케미칼 | Copper metal film and producing method of the same, and method of forming copper interconnect using the same for semiconductor device |
LU92795B1 (en) * | 2015-08-10 | 2017-02-14 | Luxembourg Inst Science & Tech List | SIO2 thin film produced by atomic layer deposition at room temperature |
US10061368B2 (en) * | 2016-05-26 | 2018-08-28 | International Business Machines Corporation | Enhancing performance of one or more slower partitions of an integrated circuit to improve performance of the integrated circuit |
CN109844172A (en) * | 2016-10-13 | 2019-06-04 | 巴斯夫欧洲公司 | The method containing metal film of production |
CN112384639B (en) * | 2018-07-12 | 2023-09-26 | 巴斯夫欧洲公司 | Method for producing metal-containing or semi-metal films |
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- 2005-08-16 JP JP2007528021A patent/JP4943333B2/en not_active Expired - Fee Related
- 2005-08-16 KR KR1020077006008A patent/KR20070051331A/en not_active Application Discontinuation
- 2005-08-16 US US11/204,823 patent/US7604840B2/en not_active Expired - Fee Related
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WO2008018861A1 (en) * | 2006-08-07 | 2008-02-14 | E. I. Du Pont De Nemours And Company | Copper(i) complexes and processes for deposition of copper films by atomic layer deposition |
US7488435B2 (en) | 2006-08-07 | 2009-02-10 | E. I. Du Pont De Nemours And Company | Copper(I) complexes and processes for deposition of copper films by atomic layer deposition |
Also Published As
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US7604840B2 (en) | 2009-10-20 |
JP4943333B2 (en) | 2012-05-30 |
TW200611990A (en) | 2006-04-16 |
US20060134331A1 (en) | 2006-06-22 |
IL181362A0 (en) | 2007-07-04 |
WO2006033731A3 (en) | 2006-05-11 |
KR20070051331A (en) | 2007-05-17 |
JP2008510076A (en) | 2008-04-03 |
EP1791988A2 (en) | 2007-06-06 |
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