WO2006001921A3 - Electrical contacts in microelectromechanical devices with multiple substrates - Google Patents

Electrical contacts in microelectromechanical devices with multiple substrates Download PDF

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Publication number
WO2006001921A3
WO2006001921A3 PCT/US2005/016732 US2005016732W WO2006001921A3 WO 2006001921 A3 WO2006001921 A3 WO 2006001921A3 US 2005016732 W US2005016732 W US 2005016732W WO 2006001921 A3 WO2006001921 A3 WO 2006001921A3
Authority
WO
Grant status
Application
Patent type
Prior art keywords
electrical contacts
multiple substrates
microelectromechanical devices
substrates
gap
Prior art date
Application number
PCT/US2005/016732
Other languages
French (fr)
Other versions
WO2006001921A2 (en )
Inventor
Jonathan Doan
Satyadev Patel
Peter Richards
Terry Tarn
Original Assignee
Jonathan Doan
Satyadev Patel
Reflectivity Inc
Peter Richards
Terry Tarn
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00Details of colour television systems
    • H04N9/12Picture reproducers
    • H04N9/31Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3102Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators
    • H04N9/3111Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators for displaying the colours sequentially, e.g. by using sequentially activated light sources
    • H04N9/3114Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators for displaying the colours sequentially, e.g. by using sequentially activated light sources by using a sequential colour filter producing one colour at a time

Abstract

Disclosed herein a microelectromechanical device having first and second substrates (120 and 122) that are bonded together with a gap formed therebetween. A plurality of functional members is disposed within the gap. The two substrates are bonded with a bonding agent (136) that comprises an electrically conductive adhesive material.
PCT/US2005/016732 2004-06-15 2005-05-12 Electrical contacts in microelectromechanical devices with multiple substrates WO2006001921A3 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US10/869,539 2004-06-15
US10869539 US7787170B2 (en) 2004-06-15 2004-06-15 Micromirror array assembly with in-array pillars
US11/102,082 2005-04-08
US11102082 US7110160B2 (en) 2004-06-15 2005-04-08 Electrical contacts in microelectromechanical devices with multiple substrates

Publications (2)

Publication Number Publication Date
WO2006001921A2 true WO2006001921A2 (en) 2006-01-05
WO2006001921A3 true true WO2006001921A3 (en) 2006-05-11

Family

ID=35782224

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/016732 WO2006001921A3 (en) 2004-06-15 2005-05-12 Electrical contacts in microelectromechanical devices with multiple substrates

Country Status (1)

Country Link
WO (1) WO2006001921A3 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4935086A (en) * 1986-01-13 1990-06-19 Raytheon Company Process of bonding an electrical device package to a mounting surface
US5999306A (en) * 1995-12-01 1999-12-07 Seiko Epson Corporation Method of manufacturing spatial light modulator and electronic device employing it
US6731420B2 (en) * 1998-06-05 2004-05-04 Texas Instruments Incorporated Optical switching apparatus
US20040145089A1 (en) * 2001-06-19 2004-07-29 Kenneth Burrows Uv-curable inks for ptf laminates (including flexible circuitry)
US20050231792A1 (en) * 2004-04-14 2005-10-20 Christine Alain Light modulating microdevice

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4935086A (en) * 1986-01-13 1990-06-19 Raytheon Company Process of bonding an electrical device package to a mounting surface
US5999306A (en) * 1995-12-01 1999-12-07 Seiko Epson Corporation Method of manufacturing spatial light modulator and electronic device employing it
US6731420B2 (en) * 1998-06-05 2004-05-04 Texas Instruments Incorporated Optical switching apparatus
US20040145089A1 (en) * 2001-06-19 2004-07-29 Kenneth Burrows Uv-curable inks for ptf laminates (including flexible circuitry)
US20050231792A1 (en) * 2004-04-14 2005-10-20 Christine Alain Light modulating microdevice

Also Published As

Publication number Publication date Type
WO2006001921A2 (en) 2006-01-05 application

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