WO2006001921A3 - Electrical contacts in microelectromechanical devices with multiple substrates - Google Patents
Electrical contacts in microelectromechanical devices with multiple substrates Download PDFInfo
- Publication number
- WO2006001921A3 WO2006001921A3 PCT/US2005/016732 US2005016732W WO2006001921A3 WO 2006001921 A3 WO2006001921 A3 WO 2006001921A3 US 2005016732 W US2005016732 W US 2005016732W WO 2006001921 A3 WO2006001921 A3 WO 2006001921A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electrical contacts
- multiple substrates
- microelectromechanical devices
- substrates
- microelectromechanical
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N9/00—Details of colour television systems
- H04N9/12—Picture reproducers
- H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
- H04N9/3102—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators
- H04N9/3111—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators for displaying the colours sequentially, e.g. by using sequentially activated light sources
- H04N9/3114—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators for displaying the colours sequentially, e.g. by using sequentially activated light sources by using a sequential colour filter producing one colour at a time
Abstract
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/869,539 US7787170B2 (en) | 2004-06-15 | 2004-06-15 | Micromirror array assembly with in-array pillars |
US10/869,539 | 2004-06-15 | ||
US11/102,082 | 2005-04-08 | ||
US11/102,082 US7110160B2 (en) | 2004-06-15 | 2005-04-08 | Electrical contacts in microelectromechanical devices with multiple substrates |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006001921A2 WO2006001921A2 (en) | 2006-01-05 |
WO2006001921A3 true WO2006001921A3 (en) | 2006-05-11 |
Family
ID=35782224
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/016732 WO2006001921A2 (en) | 2004-06-15 | 2005-05-12 | Electrical contacts in microelectromechanical devices with multiple substrates |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2006001921A2 (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4935086A (en) * | 1986-01-13 | 1990-06-19 | Raytheon Company | Process of bonding an electrical device package to a mounting surface |
US5999306A (en) * | 1995-12-01 | 1999-12-07 | Seiko Epson Corporation | Method of manufacturing spatial light modulator and electronic device employing it |
US6731420B2 (en) * | 1998-06-05 | 2004-05-04 | Texas Instruments Incorporated | Optical switching apparatus |
US20040145089A1 (en) * | 2001-06-19 | 2004-07-29 | Kenneth Burrows | Uv-curable inks for ptf laminates (including flexible circuitry) |
US20050231792A1 (en) * | 2004-04-14 | 2005-10-20 | Christine Alain | Light modulating microdevice |
-
2005
- 2005-05-12 WO PCT/US2005/016732 patent/WO2006001921A2/en active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4935086A (en) * | 1986-01-13 | 1990-06-19 | Raytheon Company | Process of bonding an electrical device package to a mounting surface |
US5999306A (en) * | 1995-12-01 | 1999-12-07 | Seiko Epson Corporation | Method of manufacturing spatial light modulator and electronic device employing it |
US6731420B2 (en) * | 1998-06-05 | 2004-05-04 | Texas Instruments Incorporated | Optical switching apparatus |
US20040145089A1 (en) * | 2001-06-19 | 2004-07-29 | Kenneth Burrows | Uv-curable inks for ptf laminates (including flexible circuitry) |
US20050231792A1 (en) * | 2004-04-14 | 2005-10-20 | Christine Alain | Light modulating microdevice |
Also Published As
Publication number | Publication date |
---|---|
WO2006001921A2 (en) | 2006-01-05 |
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