WO2005107330A1 - Light-emitting element and method of manufacturing the same, and light-emitting device using the light-emitting element - Google Patents
Light-emitting element and method of manufacturing the same, and light-emitting device using the light-emitting element Download PDFInfo
- Publication number
- WO2005107330A1 WO2005107330A1 PCT/JP2005/008089 JP2005008089W WO2005107330A1 WO 2005107330 A1 WO2005107330 A1 WO 2005107330A1 JP 2005008089 W JP2005008089 W JP 2005008089W WO 2005107330 A1 WO2005107330 A1 WO 2005107330A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- light
- layer
- emitting
- charge generation
- emitting element
- Prior art date
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- 238000004544 sputter deposition Methods 0.000 claims abstract description 47
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/32—Stacked devices having two or more layers, each emitting at different wavelengths
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
- C09K11/06—Luminescent, e.g. electroluminescent, chemiluminescent materials containing organic luminescent materials
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/14—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of the electroluminescent material, or by the simultaneous addition of the electroluminescent material in or onto the light source
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/14—Carrier transporting layers
- H10K50/15—Hole transporting layers
- H10K50/155—Hole transporting layers comprising dopants
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/14—Carrier transporting layers
- H10K50/16—Electron transporting layers
- H10K50/165—Electron transporting layers comprising dopants
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/17—Carrier injection layers
- H10K50/171—Electron injection layers
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/19—Tandem OLEDs
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/649—Aromatic compounds comprising a hetero atom
- H10K85/654—Aromatic compounds comprising a hetero atom comprising only nitrogen as heteroatom
Definitions
- the present invention relates to a light-emitting element and a method of manufacturing the light-emitting element, and a light-emitting device using the light-emitting element.
- a light-emitting element using a luminescent material has features of thin shape and lightweight, high response speed, low direct-current voltage drive, and the like, and is expected to be applied to a next-generation flat panel display.
- a light-emitting device in which light-emitting elements are arranged in a matrix has superiority in wide viewing angle and high visibility as compared with conventional liquid crystal display devices.
- the light emission mechanism of a light-emitting element is as follows: An electron injected from a cathode and a hole injected from an anode are recombined in the luminescence center in an electroluminescent layer to form a molecular exciton by applying a voltage to a pair of electrodes with the electroluminescent layer interposed therebetween, and energy is released to emit light when the molecular exciton returns to the ground state.
- An excited singlet state and an excited triplet state are known as an excited state, and it is believed that light can be emitted through either state.
- a light-emitting element which has a structure in which a plurality of luminescent units are stacked to be divided by a charge generation layer between an anode and a cathode that are opposed to each other in order to realize a longer lifetime when light is emitted with high luminance (Patent Document 1 and Non-Patent Document 1).
- the charge generation layer has the function of injecting carriers and is required to include a highly light-transmitting material.
- Patent Document 1 and Non-Patent Document 1 a highly light-transmitting transparent conductive film is used as the charge generation layer.
- an electroluminescent layer is damaged (sputter damage) when a transparent conductive film typified by indium tin oxide (ITO) is formed on the electroluminescent layer by sputtering.
- ITO indium tin oxide
- transmittance and resistivity of an electrode to be formed is reduced, which is not preferable.
- a light-emitting element and a light-emitting device for which an electrode can be formed on an electroluminescent layer by sputtering without damaging the electroluminescent layer.
- a light-emitting element includes a plurality of (at least two) electroluminescent layers and one or a plurality of (at least one) charge generation layers between a first electrode and a second electrode.
- the electroluminescent layers and the charge generation layer are stacked alternately, and the each electroluminescent layer includes a layer containing a material that is not easily etched due to plasma in deposition by sputtering. Further, the electroluminescent layer and the charge generation layer are stacked so that the layer containing a material that is not easily etched in the electroluminescent layer is formed before the charge generation layer is formed.
- a material that is not easily etched due to plasma in deposition by sputtering is used. More specifically, when the first electrode is formed before the second electrode, a layer containing a benzoxazole derivative or a pyridine derivative is formed on the first electrode side of the charge generation layer so as to come in contact with the charge generation layer.
- a pair of electrodes of a light-emitting element an electrode formed first is referred to as a first electrode, and an electrode formed later is referred to as a second electrode.
- a general formula (1) shows the structure of a benzoxazole derivative that is used in the present invention. [Formula (1)]
- RI to R4 are independently hydrogen, halogen, a cyano group, an alkyl group having 1 to 10 carbon atoms, a haloalkyl group having 1 to 10 carbon atoms, or an alkoxyl group having 1 to 10 carbon atoms.
- RI to R4 are a substituted or unsubstituted aryl group, or a substituted or unsubstituted heterocyclic group
- a general formula (2) shows the structure of a pyridine derivative that is used in the present invention.
- a light-emitting element includes a first electrode, a second electrode, and a plurality of electroluminescent layers that are stacked to be divided by a charge generation layer between the first electrode and the second electrode.
- a layer containing a highly carrier (electron, hole) transporting material may be also combined to form each electroluminescent layer.
- a layer containing a highly carrier (electron, hole) transporting material may be also combined to form each electroluminescent layer.
- the material that is not easily etched is used for a hole-injecting or hole-transporting layer which is the closest to the charge generation layer, of the electroluminescent layer.
- a benzoxazole derivative for example, a layer containing any one or a plurality of materials of tetracyano-quinodimethan (hereinafter, referred to as TCQn), FeCL 3 , fullerene (hereinafter, referred to as Cgo), and tetrafluoro-tetracyano-quinodimethan (hereinafter, referred to as F 4 TCNQ) in addition to the benzoxazole derivative is formed on the first electrode side of the charge generation layer so as to come in contact with the charge generation layer.
- TCQn tetracyano-quinodimethan
- Cgo fullerene
- F 4 TCNQ tetrafluoro-tetracyano-quinodimethan
- the material that is not easily etched is used for an electron-injecting or electron transporting layer which is the closest to the charge generation layer, of the electroluminescent layer.
- a benzoxazole derivative a layer containing any one or a plurality of materials of an alkali metal, an alkaline earth metal, and a transition metal in addition to the benzoxazole derivative is formed on the first electrode side of the charge generation layer so as to come in contact with the charge generation layer.
- a light-emitting device is not limited to an active matrix type, and may be also a passive matrix type light-emitting device. Also, the present invention can be applied to a light-emitting element including only one electroluminescent layer.
- a method of manufacturing a light-emitting element can be obtained, in which damage to an electroluminescent layer can be reduced when a charge generation layer or a second electrode is formed on an electroluminescent layer by sputtering. Moreover, this method makes it possible to provide a light-emitting element and a light-emitting device, in which defects due to film formation by sputtering are suppressed. Therefore, more materials can be used for a charge generation layer formed on an electroluminescent layer.
- FIG 1 is a diagram illustrating a light-emitting element according to the present invention.
- FIG 2 is a diagram illustrating a light-emitting element according to the present invention.
- FIG 3 is a diagram illustrating a light-emitting element according to the present invention.
- FIG 4 is a diagram illustrating a light-emitting device according to the present invention for obtaining white luminescence.
- FIGS. 5 A and 5B are diagrams showing an example of a light-emitting device using a light-emitting element according to the present invention.
- FIG 6 is a diagram showing luminance-current density characteristics.
- FIG. 7 is a diagram showing current efficiency-luminance characteristics.
- FIGS. 8 is a diagram showing luminance-voltage characteristics.
- FIG. 9 is a diagram showing current-voltage characteristics.
- FIGS 10A to 10G are diagrams showing examples of electronic devices using a light-emitting device according to the present invention.
- FIGS. 11A and 11B are diagrams illustrating a light-emitting device according to the present invention for obtaining white luminescence.
- FIG 12 is an equivalent circuit illustrating a light-emitting device according to the present invention.
- FIG 13 is an equivalent circuit illustrating a light-emitting device according to the present invention.
- FIG 14 is an equivalent circuit illustrating a light-emitting device according to the present invention.
- FIG. 1 schematically shows a structure of a light-emitting element according to the present invention.
- a light-emitting element 108 is formed over a substrate 100, and includes a plurality of electroluminescent layers stacked between a first electrode 101 and a second electrode 105 with a charge generation layer 103 interposed therebetween. It is to be noted that various layers and semiconductor elements are actually provided between the substrate 100 and the light-emitting element 108.
- One of the first electrode 101 and the second electrode 105 corresponds to an anode and the other corresponds to a cathode.
- a layer 106 which is the closest layer to the charge generation layer 103 formed on the electroluminescent layer 102 includes a material that is not easily etched due to plasma in deposition by sputtering, such as a benzoxazole derivative or a pyridine derivative.
- a benzoxazole derivative or a pyridine derivative included in the first electrode
- the layer 106 which is the closest layer to the charge generation layer 103 includes any one or a plurality of materials of an alkali metal, an alkaline-earth metal and a transition metal in addition to the benzoxazole derivative so that the layer 106 has an electron injecting properties in the case of using the benzoxazole derivative.
- the layer 106 which is the closest layer to the charge generation layer 103 includes any one or a plurality of materials of TCQn, FeCl 3 , C ⁇ o and F 4 TCNQ in addition to a benzoxazole derivative so that the layer 106 has a hole injecting properties in the case of using the benzoxazole derivative.
- sputtering is used to form the second electrode 105 as in the case of the charge generation layer 103, the effect of suppressing sputter damage to the electroluminescent layer can be obtained by using the above-mentioned materials for a layer 107 which is the closest layer to the second electrode 105.
- the electroluminescent layer 102 (104) includes at least a light-emitting layer and the layer 106 (107) containing a material that is not easily etched due to plasma in deposition by sputtering.
- a hole injecting layer In addition to the light-emitting layer and the layer 106 (107), a hole injecting layer, a hole transporting layer, a hole blocking layer, an electron transporting layer, an electron injecting layer, and the like are appropriately combined to construct the electroluminescent layer 102 (104), and the layer containing the material that is not easily etched may also serve as those layers.
- the electroluminescent layer In addition to the light-emitting layer and the layer 106 (107), a hole injecting layer, a hole transporting layer, a hole blocking layer, an electron transporting layer, an electron injecting layer, and the like are appropriately combined to construct the electroluminescent layer 102 (104), and the layer containing the material that is not easily etched may also serve as those layers.
- the electroluminescent layer In addition to the light-emitting layer and the layer 106 (107), a hole injecting layer, a hole transporting layer, a hole blocking layer, an electron transporting layer, an electron injecting layer, and the like are
- a layer containing a material that is not easily etched due to plasma in deposition by sputtering includes a benzoxazole derivative represented by the following general formula (1), and is provided in contact with a charge generation layer.
- RI to R4 are independently hydrogen, halogen, a cyano group, an alkyl group having 1 to 10 carbon atoms, a haloalkyl group having 1 to 10 carbon atoms, or an alkoxyl group having 1 to 10 carbon atoms.
- RI to R4 are a substituted or unsubstituted aryl group, or a substituted or unsubstituted heterocyclic group
- materials represented by structural formulas (3) to (5) can be given.
- a layer containing a material that is not easily etched due to plasma in deposition by sputtering includes a pyridine derivative represented by the following general formula (2), and is provided in contact with a charge generation layer.
- RI to R8 are independently hydrogen, halogen, a cyano group, an alkyl group having 1 to 10 carbon atoms, a haloalkyl group having 1 to 10 carbon atoms, or an alkoxyl group having 1 to 10 carbon atoms.
- RI to R8 are a substituted or unsubstituted aryl group, or substituted or unsubstituted heterocyclic group.
- both electrodes are formed by using a transparent conductive film.
- Known materials can be used for the electroluminescent layers 102 and 104, and any low molecular weight materials and high molecular weight materials can be also used.
- a material forming the electroluminescent layers 102 and 104 may include only an organic compound material, or include partially an inorganic compound material in addition to an organic compound.
- a hole injecting layer As a hole injecting material forming a hole injecting layer, a porphyrin compound is effective among organic compounds, and phthalocyanine (hereinafter, referred to as H 2 -Pc), copper phthalocyanine (hereinafter, referred to as Cu-Pc), and the like can be used.
- H 2 -Pc phthalocyanine
- Cu-Pc copper phthalocyanine
- PEDOT polyethylene dioxythiophene
- PEDOT polystyrene sulfonate
- PSS PSS
- a material containing a benzoxazole derivative and any one or a plurality of materials of TCQn, FeCl 3 , C 6 o and F 4 TCNQ may be also used.
- a hole transporting material forming a hole transporting layer an aromatic amine compound (namely, a compound having a bond of benzene ring-nitrogen) is suitable.
- TPD N,N' -bis(3-methylphenyl)-N,N' -diphenyl- [1,1' -biphenyl]-4,4 ' -diamine
- ⁇ -NPD 4,4'-bis[N-(l-naphthyl)-N-phenyl-amino]-biphenyl
- TCTA 4,4',4"-tris(N-carbazolyl)-triphenylamine
- TDATA 4,4',4"-tris(N,N-diphenyl-amino)-triphenylamine
- MTDATA 4,4',4"-tris[N-(3-methylphenyl)-N-phenyl-amino]-triphenylamine
- metal complexes such as tris(8-quinolinolato)aluminum (hereinafter, referred to as Alq 3 ), tris(4-methyl-8-quinolinolato)aluminum (hereinafter, referred to as Almq 3 ), bis(10-hydroxybenzo[h]-quinolinato) beryllium (hereinafter, referred to as BeBq 2 ), bis(2-methyl-8-quinolinolato)-(4-hydroxy-biphenyl)-aluminum (hereinafter, referred to as BAlq), bis[2-(2-hydroxyphenyl)-benzoxazolate]zinc (hereinafter, referred to as Zn(BOX) 2 ), bis[2-(2-hydroxyphenyl)-benzothiazorato]zinc (hereinafter, referred to as Zn(BTZ) 2 ), and various fluorescent pigments are effective.
- Alq 3 tris(8-quinolinolato)aluminum
- a light-emitting layer is formed by combining with a guest material
- quinacridone diethyl quinacridone (hereinafter, referred to as DEQD), dimethyl quinacridone (hereinafter, referred to as DMQD), rubre ⁇ e, perylene, coumarin, coumarin545T (hereinafter, referred to as C545T), DPT, Co-6, PMDFB, BTX, ABTX, DCM, DCJT, and triplet luminescent materials (phosphorescent materials) such as tris(2-phenylpyridine)iridium (hereinafter, referred to as Ir(ppy) 3 ), 2,3,7,8,12,13,17,18-octaethyl-21H,23H-porphyrin-platinum (hereinafter, referred to as PtOEP) can be used as the guest material.
- PtOEP triplet luminescent materials
- a metal complex having a quinoline skeleton or benzoquinoline skeleton such as Alq 3 , Al q 3 and BeBq 2 described above, and BAlq that is a mixed ligand complex is suitable.
- a metal complex having an oxazole ligand such as Zn(BOX) , or a thiazole ligand such as Zn(BTZ) 2 can be also used.
- oxadiazole derivatives such as 2-(4-biphenyl)-5-(4-tert-butylphenyl)-l,3,4-oxadiazole (hereinafter, referred to as PBD), and l,3-bis[5-(p-tert-butylphenyl)-l,3,4-oxadiazol-2-yl]benzene (hereinafter, referred to as OXD-7), or triazole derivatives such as 3-(4-tert-butylphenyl)-4-phenyl-5-(4-biphenylil)-l,2,4-triazole (hereinafter, referred to as TAZ), and 3-(4-tert-butylphenyl)-4-(4-ethylphenyl)-5-(4-biphenylil)-l,2,4-triazole (hereinafter, referred to as p-EtTAZ) can be also used.
- PBD 2-(4-bi
- an electron injecting material forming an electron injecting layer specifically, an insulating thin film, for example, an alkali metal halide such as LiF or CsF, an alkaline earth halide such as CaF , or an alkali metal oxide such as Li 2 O is often used. Further, alkali metal complexes such as lithium acetyl acetonate (abbreviation: Li(acac)), and 8-quinolinolato-lithium (abbreviation: Liq) are also effective. A material containing a benzoxazole derivative and any one or a plurality of materials of an alkali metal, an alkaline earth metal and a transition metal may be also used.
- an alkali metal halide such as LiF or CsF
- an alkaline earth halide such as CaF
- an alkali metal oxide such as Li 2 O
- alkali metal complexes such as lithium acetyl acetonate (abbreviation: Li(acac
- FIG 1 shows a structure including two electroluminescent layers; however, the structure is not limited thereto and a structure including three or more layers may be also used. It is not necessary that stacked electroluminescent layers have the same structure, and electroluminescent layers constituted by different materials may be also stacked.
- a first electrode 201 for a light-emitting element is formed over a substrate 200. It is to be noted that the first electrode 201 serves as an anode in the present embodiment.
- ITO that is a transparent conductive film is used as a material to form the first electrode 201 with a film thickness of 110 nm by sputtering.
- an electroluminescent layer 202 is formed on the first electrode 201 which serves as an anode.
- the electroluminescent layer 202 in the present embodiment has a stacked structure of a hole injecting layer 211, a hole transporting layer 212, a light-emitting layer 213, an electron transporting layer 214, and an electron injecting layer 215.
- the substrate with the first electrode 201 formed thereover is fixed in a substrate holder of a commercially available vacuum evaporation system with the surface with the first electrode 201 downside.
- copper phthalocyanine hereinafter, referred to as Cu-Pc
- Cu-Pc copper phthalocyanine
- Known hole injecting materials can be used as a material forming the hole injecting layer 211.
- the hole transporting layer 212 is formed by using a highly hole-transporting material.
- Known hole transporting materials can be used for a material forming the hole transporting layer 212. In the present embodiment,
- cc-NPD 4,4'-bis[N-(l-naphthyl)-N-phenyl-amino]-biphenyl
- the light-emitting layer 213 tris(8-quinolinolato)aluminurn (hereinafter, referred to as Alq 3 ) which is a host material and dimethylquinacridone (hereinafter, referred to as DMQD) which is a guest material are used, and the light-emitting layer 213 with a film thickness of 40 nm is formed by co-evaporation so that DMQD is contained at 1 weight %.
- the electron transporting layer 214 is then formed.
- Known electron transporting materials can be used for a material forming the electron transporting layer 214.
- Alq 3 is used to form the electron transporting layer 214 with a film thickness of 20 nm by evaporation.
- the electron injecting layer 215 is formed.
- the electron injecting layer 215 is formed by using a benzoxazole derivative represented by the general formula (1). This step makes it possible to promote electron injection from a charge generation layer or an electrode into an electroluminescent layer, and suppress damage to an electroluminescent layer from formation of a charge generation layer or an electrode.
- a layer containing the benzoxazole derivative and any one of an alkali metal, an alkaline earth metal, and a transition metal is formed in order to improve the electron injecting properties.
- the electron injecting layer 215 is formed to have a film thickness of 20 nm by co-evaporation with the use of 4,4'-Bis(5-methyl benzoxazol-2-yl)stilbene represented by the following structural formula (3) and Li which is an alkali metal so that Li is contained at 1 weight %.
- 4,4'-Bis(5-methyl benzoxazol-2-yl)stilbene represented by the following structural formula (3) and Li which is an alkali metal so that Li is contained at 1 weight %.
- a charge generation layer 203 is formed by sputtering. It is preferable that the charge generation layer 203 includes a light-transmitting material, and in the present embodiment, ITO (10 nm) is formed on the electroluminescent layer 202 by sputtering to obtain the charge generation layer 203.
- An electroluminescent layer 204 is formed on the charge generation layer 203.
- the electroluminescent layer 204 may be formed in the same way as the electroluminescent layer 202 described above.
- ITO with a film thickness of 110 nm is formed by sputtering as a second electrode 205 which serves as a cathode.
- the closest layer to the charge generation layer is formed so as to contain a material that is not easily etched due to plasma in deposition by sputtering. Therefore, damage to the electroluminescent layer in deposition by sputtering can be reduced. It is to be noted that the same advantage can be obtained in the case of using a pyridine derivative in addition to the case of using a benzoxazole derivative.
- an electron injecting layer is formed by using Li which is an alkali metal and 4,4'-Bis(5-methyl benzoxazol-2-yl)stilbene (20 nm) represented by the stuructural formula (3) so that Li is contained at 1 weight %.
- ITO 110 nm
- An element manufactured in this experiment is referred to as an element 1.
- Comparative Example 1 As Comparative Example 1, an element is manufactured, in which a material that is not easily etched due to plasma in deposition by sputtering is not used for, of an electroluminescent layer, the closest layer to a transparent conductive film formed by sputtering.
- ITO which is a first electrode
- Comparative Example 2 As Comparative Example 2, an element is manufactured, in which a material that is not easily etched due to plasma in deposition by sputtering is not used for, of an electroluminescent layer, the closest layer to a transparent conductive film formed by sputtering.
- the element manufactured in the present comparative example is formed in the same way as the element manufactured in Comparative Example 1 until ⁇ -NPD is formed, and Cu-Pc is formed to have a film thickness of 40 nm as a hole injecting layer. Thereafter, ITO (110 nm) is formed by sputtering.
- An element manufactured in the present comparative example is referred to as an element 3.
- FIG 6 shows luminance-current density characteristics of the elements 1, 2 and 3
- FIG 7 shows current efficiency-luminance characteristics thereof
- FIG. 8 shows luminance-voltage characteristics thereof
- FIG. 9 shows current-voltage characteristics thereof.
- the element 1 has favorable element characteristics compared with the elements 2 and 3.
- the structure of the light-emitting element manufactured in Embodiment 1 includes the structure of the element 1. It is confirmed that the light-emitting element manufactured in Embodiment 1 also has the advantage that sputter damage to the electroluminescent layer is prevented by using a material that is not easily etched due to plasma in deposition by sputtering.
- a first electrode 301 for a light-emitting element is formed over a substrate 300. It is to be noted that the first electrode 301 serves as a cathode in the present embodiment. ITO that is a transparent conductive film is used as a material, and the first electrode 301 with a film thickness of 110 nm is formed by sputtering. Next, an electroluminescent layer 302 is formed on the first electrode 301 to serve as a cathode.
- the electroluminescent layer 302 in the present embodiment has a stacked structure of an electron injecting layer 311, an electron transporting layer 312, a light-emitting layer 313, a hole transporting layer 314, and a hole injecting layer 315.
- the electron injecting layer 311 is formed by using a highly electron-injecting material.
- Known electron injecting materials can be used as a material forming the electron injecting layer 311.
- a benzoxazole derivative and Li which is an alkali metal are used, and the electron injecting layer 311 with a film thickness of 20 nm is formed by co-evaporation so that Li is contained at 1 weight %. Then, the electron transporting layer 312 is formed.
- Known electron transporting materials can be used for a material forming the electron transporting layer 312.
- Alq 3 is used, and the electron transporting layer 312 with a thickness of 20 nm is formed by evaporation. The light-emitting layer 313 is then formed. Luminescence is generated by recombination of a hole and an electron in the light-emitting layer 313.
- Alq 3 which is a host material and DMQD which is a guest material among materials forming the light-emitting layer 313 are used, and the light-emitting layer 313 with a film thickness of 40 nm is formed by co-evaporation so that DMQD is contained at 10 weight %.
- the hole transporting layer 314 is formed by using a highly hole transporting material.
- Known hole transporting materials can be used as a material forming the hole transporting layer 314.
- ⁇ -NPD with a film thickness of 40 nm is formed by evaporation.
- the hole injecting layer 315 is formed.
- the hole injecting layer 315 is formed by using a benzoxazole derivative represented by the general formula (1). This step makes it possible to promote hole injection from a charge generation layer or an electrode into an electroluminescent layer, and suppress damage to an electroluminescent layer from formation of a charge generation layer or an electrode.
- a layer containing the benzoxazole derivative and any one or a plurality of TCQn, FeCl 3 , C 6 o, and F TCNQ is formed in order to improve the hole injecting properties.
- a layer containing 4,4'-Bis(5-methyl benzoxazol-2-yl)stilbene represented by the following stuructural formula (3) and TCQn with a film thickness of 20 nm is formed by co-evaporation.
- a charge generation layer 303 is formed by sputtering. It is preferable that the charge generation layer 303 includes a light-transmitting material, and in the present embodiment, ITO (10 nm) is formed on the electroluminescent layer 302 by sputtering to obtain the charge generation layer 303.
- ITO (10 nm) is formed on the electroluminescent layer 302 by sputtering to obtain the charge generation layer 303.
- An electroluminescent layer 304 is formed on the charge generation layer 303. The electroluminescent layer 304 is formed in the same way as the electroluminescent layer 302 described above.
- ITO with a film thickness of 110 nm is formed by sputtering as a second electrode 305 which serves as an anode.
- the closest layer to the charge generation layer is formed so as to contain a material that is not easily etched due to plasma in deposition by sputtering. Therefore, damage to the electroluminescent layer in film formation by sputtering can be reduced. It is to be noted that the same advantage can be obtained in the case of using a pyridine derivative in addition to the case of using a benzoxazole derivative.
- Embodiment 3 the structure of a light-emitting device using light-emitting elements manufactured in Embodiments 1 and 2 will be described with reference to FIG 4 and FIGS. HAto 14.
- a light-emitting device using a light-emitting element in which a plurality of electroluminescent layers are stacked for example, when white luminescence is intended to be obtained, an electroluminescent layer for a first color (e.g. an electroluminescent layer for emitting red light), an electroluminescent layer for a second color (e.g. an electroluminescent layer for emitting green light), and an electroluminescent layer for a third color (e.g.
- an electroluminescent layer for emitting blue light are stacked in the same sequence in each light-emitting element conventionally.
- change in characteristics with time is different depending on each luminescent material, and therefore, luminescence is not white any more after a certain period of time and luminescence of a certain color sometimes stands out.
- each light-emitting element As shown in FIG 4 and FIGllA, three light-emitting elements (501, 502 and 503) are formed over a substrate, and these three light-emitting elements form one pixel.
- electroluminescent layers are stacked over a first electrode 551 with a charge generation layer 552 interposed therebetween, and a second electrode 553 is formed as the top layer.
- an electroluminescent layer 521 for the second color, an electroluminescent layer 522 for the third color, and an electroluminescent layer 523 for the first color are staked in this order in the light-emitting element 502; and an electroluminescent layer 531 for the third color, an electroluminescent layer 532 for the first color, and an electroluminescent layer 533 for the second color are stacked in this order in the light-emitting element 503.
- the stacking sequence of the electroluminescent layers of each light-emitting element is made different so that white luminescence can be obtained as a whole pixel even when white luminescence cannot be obtained in each light-emitting element.
- the first color is strongly emitted in the light-emitting element 501
- the second color is strongly emitted in the light-emitting element 502
- the third color is strongly emitted in the light-emitting element 503. Since each light-emitting element can be driven independently in the case of an active matrix type, it becomes possible to deal with change in characteristics of each luminescent material with time so that white light can be emitted for a longer time.
- a current flowing to the first light-emitting element from which the first color is strongly emitted is reduced by a first controller 561
- a current flowing to the second light-emitting element from which the second luminescent color is strongly emitted is increased by a second controller 562
- a current flowing to the third light-emitting element from which the third luminescent color is strongly emitted is increased by a third controller 563 in order to keep white luminescence as a whole.
- the controller is used to change the amount of the current flowing to each light-emitting element so that the luminescent color as a whole pixel can be controlled.
- FIG 4 shows a case where the second electrode is an anode; however, a structure in which the second electrode is a cathode may be also used.
- the present embodiment shows a case of white luminescence, but the present invention can be also applied when light of a desired color is intended to be emitted.
- the present embodiment shows an example in which three electroluminescent layers are stacked, the structure is not limited thereto, and the same advantage can be obtained when two or more layers are stacked.
- three light-emitting elements in each of which three electroluminescent layers are stacked may form one pixel as in the present embodiment, two light-emitting elements in each of which two electroluminescent layers are stacked may form one pixel, or a light-emitting element in which three or more electroluminescent layers are stacked may form one pixel.
- two light-emitting elements in each of which three electroluminescent layers are stacked may form one pixel, or four light-emitting elements in each of which three electroluminescent layers are stacked may form one pixel.
- the film thickness of the electroluminescent layer may be different in each light-emitting element.
- the film thickness of each of the light-emitting layers 511, 523 and 532 for the first color may be different.
- characteristics of the luminescent color are different in each light-emitting element so that a color can be brought to a desired luminescent color.
- a method to change electric potential of a power supplying line, or a method to supply the same electric potential of a power supplying line and change a signal from a source line driving circuit can be used.
- FIG 12 shows an equivalent circuit of a light-emitting device, in which power supplying lines electrically connected to each light-emitting element in the same pixel are independent and electric potential applied to each light-emitting element can be changed.
- three light-emitting elements are provided in each of pixels 1101R,
- each pixel is connected to a source line driving circuit 1104 and a gate line driving circuit 1105, and controlled by a signal from the source line driving circuit 1104 and the gate line driving circuit 1105.
- Change in luminescent color due to change of each light-emitting element with time is calculated by using a light-emitting element for a monitor, or a result of a lighting time of a light-emitting element and deterioration characteristics of a light-emitting element that have been measured in advance.
- the level of change with time that is calculated by a monitor circuit 1108 is inputted into the power supply circuit 1106 so that electric potential supplied to each light-emitting element is determined.
- a controller 1107 is used to control the source line driving circuit 1104, the gate line driving circuit 1105, and the power supply circuit 1106.
- the power supply circuit 1106 may be used to supply a plurality of electric potential, and the controller 1107 may be used to control the source line driving circuit 1104 and the gate line driving circuit 1105.
- luminance of the three light-emitting elements in one pixel can be controlled independently.
- a red color filter is provided for a pixel 1101R
- a green color filter is provided for a pixel 1101G
- a blue color filter is provided for a pixel 1101B respectively so that the light-emitting device can be also used as a display.
- FIG 13 shows an equivalent circuit of a light-emitting device in which the same electric potential of a power supplying line is supplied and a video signal supplied from a source line driving circuit 1204 to a pixel is changed.
- each pixel is connected to a source line driving circuit 1204 and a gate line driving circuit 1205, and controlled by a signal from the source line driving circuit 1204 and the gate line driving circuit 1205.
- luminance of each light-emitting element is controlled by a video signal supplied from the source line driving circuit 1204.
- a voltage which is applied to a gate of a second TFT 1212 when a first TFT 1211 is turned on by a signal from the gate line driving circuit 1205, is changed so that the amount of a current supplied from the power supplying line to the light-emitting elements is changed.
- Change in luminescent color due to change of each light-emitting element with time is calculated by using a light-emitting element for a monitor, or a result of a lighting time of a light-emitting element and deterioration characteristics of a light-emitting element that have been measured in advance.
- the level of change with time that is calculated by a monitor circuit 1208 is inputted into the power supply circuit
- a controller 1207 is used to control the source line driving circuit 1204, the gate line driving circuit 1205, and the power supply circuit 1206. It is to be noted that only the power supply circuit 1206 may be used to supply a plurality of electric potential, and the controller 1207 may be used to control the source line driving circuit
- luminance of the three light-emitting elements in one pixel can be controlled independently.
- a red color filter is provided for a pixel 1201R
- a green color filter is provided for a pixel 1201G
- a blue color filter is provided for a pixel 1201B respectively so that the light-emitting device can be also used as a display.
- FIG 14 shows an equivalent circuit in which the present invention is applied to a passive matrix type light-emitting device.
- each of pixels 1301R, 1301G and 1301B includes three light-emitting elements. Each light-emitting element is controlled based on a signal inputted from a source line driving circuit 1304 and a gate line driving circuit 1305.
- luminance of each light-emitting element is determined by value of a current supplied from the source line driving circuit 1304.
- the value of the current supplied from the source line driving circuit 1304 is controlled by a power supply circuit 1306 and a controller 1307.
- the power supply circuit 1306 is used to determine the amount of a current applied to the light-emitting elements depending on the level of change of the light-emitting elements with time, which is calculated by a monitor circuit 1308.
- luminance of the three light-emitting elements in one pixel can be controlled independently.
- a red color filter is provided for a pixel 1301R
- a green color filter is provided for a pixel 1301G
- a blue color filter is provided for a pixel 1301B respectively so that the light-emitting device can be also used as a display.
- FIG 5A is a top view showing the light-emitting device and FIG 5B is a cross-sectional view of FIG. 5A along with A-A'.
- Reference numeral 801 indicated by a dotted line denotes a driving circuit portion (source side driving circuit), 802 denotes a pixel portion, and 803 denotes a driving circuit portion (gate side driving circuit).
- reference numeral 804 denotes a sealing substrate
- 805 denotes a sealing material
- the inner side surrounded by the sealing material 805 is a space 807.
- Reference numeral 808 denotes a wiring for transmitting signals to be inputted into the source side driving circuit 801 and the gate side driving circuit 803, and the wiring 808 receives a video signal, a clock signal, a start signal, a reset signal and the like from an FPC 809 (flexible print circuit) which serves as an external input terminal. Only the FPC is shown herein; however, a printed wiring board (PWB) may be connected to the FPC.
- PWB printed wiring board
- a light-emitting device in the specification includes not only a light-emitting device body itself but also a light-emitting device to which an FPC or a PWB is attached. Next, the cross-sectional structure will be described with reference to FIG 5B.
- a driving circuit portion and a pixel portion are formed over an element substrate 810, and the source side driving circuit 801 which is a driving circuit portion and the pixel portion 802 are shown here.
- the source side driving circuit 801 is formed by a CMOS circuit in which an n-channel type TFT 823 and a p-channel type TFT 824 are combined. TFTs forming the driving circuit may be formed by a known CMOS circuit, PMOS circuit or NMOS circuit.
- the present embodiment shows a driver integrated type in which a driving circuit is formed over a substrate, but an integrated type is not necessarily provided, and a driving circuit can be provided outside a substrate, not over a substrate.
- the pixel portion 802 is formed by a plurality of pixels each including a switching TFT 811, a current control TFT 812 and a first electrode 813 electrically connected to a drain of the current control TFT 812. It is to be noted that an insulating layer 814 is formed to cover an edge portion of the first electrode 813.
- the insulating layer 814 is formed by using a positive photosensitive acrylic resin film here. In order to improve coverage, an upper edge portion or a lower edge portion of the insulating layer 814 is formed to have a curved surface formed with a curvature.
- a positive photosensitive acryl when used as a material for the insulating layer 814, it is preferable that only an upper edge portion of the insulating layer 814 has a curved surface with a curvature radius (0.2 to 3 ⁇ m).
- a negative type which becomes insoluble in an etchant by light irradiation and a positive type which becomes soluble in an etchant by light irradiation can be used.
- a first electroluminescent layer 815, a charge generation layer 816, a second electroluminescent layer 817 and a second electrode 818 are formed on the first electrode 813.
- the first electroluminescent layer 815 and the second electroluminescent layer 817 are formed by evaporation using an evaporation mask or ink-jet.
- the charge generation layer 816 is formed by sputtering and the second electrode 818 is formed by using a transparent conductive film.
- the structure of a light-emitting element 819 may have the same structure, for example, as the electroluminescent layer shown in Embodiment 1 or 2.
- the sealing substrate 804 is attached to the element substrate 810 with the sealing material 805 to provide a structure in which the light-emitting element 819 is provided in a space surrounded by the element substrate 810, the sealing substrate 804 and the sealing material 805.
- the space 807 is filled with a filler, and may be filled with an inert gas (such as nitrogen or argon) or a sealing material. It is preferable to use an epoxy based resin for the sealing material 805, and it is desired that these materials do not allow permeation of moisture or oxygen as far as possible.
- a plastic substrate including FRP (Fiberglass-Reinforced Plastics), PVF (polyvinyl fluoride), mylar, polyester, acryl or the like can be used in addition to a glass substrate and a quartz substrate.
- FRP Fiberberglass-Reinforced Plastics
- PVF polyvinyl fluoride
- mylar polyester
- polyester acryl or the like
- FIGS. 10A to 10G show specific examples of these electronic devices.
- FIG 10A is a display device, which includes a frame body 2001, a support
- FIG 10B is a personal computer, which includes a main body 2201, a frame body 2202, a display portion 2203, a keyboard 2204, an external connection port 2205, a pointing mouse 2206 and the like.
- the personal computer is manufactured by using a light-emitting device according to the present invention for the display portion 2203.
- FIG 10C is a mobile computer, which includes a main body 2301, a display portion 2302, a switch 2303, an operation key 2304, an infrared port 2305 and the like.
- the mobile computer is manufactured by using a light-emitting device according to the present invention for the display portion 2302.
- FIG 10D is a portable image reproduction device equipped with a recording medium (specifically, a DVD reproduction device), which includes a main body 2401, a frame body 2402, a display portion A 2403, a display portion B 2404, a recording medium (such as DVD) reading portion 2405, an operation key 2406, a speaker portion 2407 and the like.
- a recording medium specifically, a DVD reproduction device
- the display portion A 2403 is used for mainly displaying image information while the display portion B 2404 is used for mainly displaying character information.
- the portable image reproduction device is manufactured by using a light-emitting device according to the present invention for the display portion A 2403 and the display portion B 2404.
- the image reproduction device equipped with the recording medium also includes a home game machine and the like.
- FIG 10E is a goggle-type display, which includes a main body 2501, a display portion 2502 and an arm portion 2503.
- the goggle-type display is manufactured by using a light-emitting device according to the present invention for the display portion 2502.
- FIG 10F is a video camera, which includes a main body 2601, a display portion 2602, a frame body 2603, an external connection port 2604, a remote control receiving portion 2605, an image receiving portion 2606, a battery 2607, a sound input portion 2608, an operation key 2609, an eye piece 2610 and the like.
- the video camera is manufactured by using a light-emitting device according to the present invention for the display portion 2602.
- FIG 10G is a cellular phone, which includes a main body 2701, a frame body 2702, a display portion 2703, a sound input portion 2704, a sound output portion 2705, an operation key 2706, an external connection port 2707, an antenna 2708 and the like.
- the cellular phone is manufactured by using a light-emitting device according to the present invention for the display portion 2703.
- the use of a light-emitting element according to the present invention can provide a light-emitting element and a light-emitting device in which a longer lifetime is realized when light is emitted with high luminance and there are fewer defects due to sputter damage.
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Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05736926A EP1749423A4 (en) | 2004-04-28 | 2005-04-21 | Light-emitting element and method of manufacturing the same, and light-emitting device using the light-emitting element |
US11/578,086 US7772596B2 (en) | 2004-04-28 | 2005-04-21 | Light-emitting element and method of manufacturing the same, and light-emitting device using the light-emitting element |
KR1020067023991A KR101197688B1 (en) | 2004-04-28 | 2005-04-21 | Light-emitting element and method of manufacturing the same, and light-emitting device using the light-emitting element |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2004-134915 | 2004-04-28 | ||
JP2004134915 | 2004-04-28 |
Publications (1)
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WO2005107330A1 true WO2005107330A1 (en) | 2005-11-10 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2005/008089 WO2005107330A1 (en) | 2004-04-28 | 2005-04-21 | Light-emitting element and method of manufacturing the same, and light-emitting device using the light-emitting element |
Country Status (6)
Country | Link |
---|---|
US (1) | US7772596B2 (en) |
EP (1) | EP1749423A4 (en) |
KR (1) | KR101197688B1 (en) |
CN (2) | CN100544535C (en) |
TW (1) | TWI390758B (en) |
WO (1) | WO2005107330A1 (en) |
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US9006965B2 (en) | 2008-07-10 | 2015-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and electronic device using the same |
US9608222B2 (en) | 2006-06-02 | 2017-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting element having electron-trapping layer |
US9685623B2 (en) | 2007-09-27 | 2017-06-20 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting element, lighting device, light-emitting device, and electronic device |
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CN102163697B (en) * | 2005-07-25 | 2015-09-16 | 株式会社半导体能源研究所 | Light-emitting component, luminescent device, and electronic equipment |
US7863612B2 (en) | 2006-07-21 | 2011-01-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device and semiconductor device |
DE102006051745B4 (en) * | 2006-09-28 | 2024-02-08 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | LED semiconductor body and use of an LED semiconductor body |
CN101414661B (en) * | 2007-10-17 | 2011-11-16 | 中国科学院理化技术研究所 | Organic electron transport and/or hole blocking material, and synthesis method and application thereof |
KR100901887B1 (en) * | 2008-03-14 | 2009-06-09 | (주)그라쎌 | Novel organic electroluminescent compounds and organic electroluminescent device using the same |
EP2345096B1 (en) * | 2008-10-28 | 2018-10-17 | The Regents of the University of Michigan | Stacked white oled having separate red, green and blue sub-elements |
JP2010287484A (en) * | 2009-06-12 | 2010-12-24 | Sony Corp | Organic light-emitting element, and display device and lighting system equipped therewith |
US8476624B1 (en) * | 2012-06-01 | 2013-07-02 | Au Optronics Corporation | Organic light emitting diode (OLED) device |
CN115249776A (en) * | 2021-04-27 | 2022-10-28 | Tcl科技集团股份有限公司 | Display panel and preparation method thereof |
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- 2005-04-21 US US11/578,086 patent/US7772596B2/en not_active Expired - Fee Related
- 2005-04-21 CN CNB2005800126583A patent/CN100544535C/en not_active Expired - Fee Related
- 2005-04-21 CN CN2009101638358A patent/CN101673807B/en not_active Expired - Fee Related
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Also Published As
Publication number | Publication date |
---|---|
EP1749423A1 (en) | 2007-02-07 |
CN100544535C (en) | 2009-09-23 |
TW200605405A (en) | 2006-02-01 |
KR101197688B1 (en) | 2012-11-05 |
US7772596B2 (en) | 2010-08-10 |
TWI390758B (en) | 2013-03-21 |
CN101673807B (en) | 2012-07-18 |
US20070221933A1 (en) | 2007-09-27 |
KR20070004974A (en) | 2007-01-09 |
CN101673807A (en) | 2010-03-17 |
EP1749423A4 (en) | 2010-09-22 |
CN1947466A (en) | 2007-04-11 |
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