WO2005103604A3 - Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing spm probes - Google Patents

Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing spm probes Download PDF

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Publication number
WO2005103604A3
WO2005103604A3 PCT/US2005/013101 US2005013101W WO2005103604A3 WO 2005103604 A3 WO2005103604 A3 WO 2005103604A3 US 2005013101 W US2005013101 W US 2005013101W WO 2005103604 A3 WO2005103604 A3 WO 2005103604A3
Authority
WO
WIPO (PCT)
Prior art keywords
self
micromechanical
thin film
application
metallic thin
Prior art date
Application number
PCT/US2005/013101
Other languages
French (fr)
Other versions
WO2005103604A2 (en
Inventor
Hongxing Tang
Mo Li
Michael L Roukes
Original Assignee
California Inst Of Techn
Hongxing Tang
Mo Li
Michael L Roukes
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/826,007 external-priority patent/US7302856B2/en
Application filed by California Inst Of Techn, Hongxing Tang, Mo Li, Michael L Roukes filed Critical California Inst Of Techn
Priority to JP2007508618A priority Critical patent/JP2007532923A/en
Priority to EP05736813A priority patent/EP1749185A2/en
Publication of WO2005103604A2 publication Critical patent/WO2005103604A2/en
Publication of WO2005103604A3 publication Critical patent/WO2005103604A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Micromachines (AREA)

Abstract

Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.
PCT/US2005/013101 2004-04-15 2005-04-15 Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing spm probes WO2005103604A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007508618A JP2007532923A (en) 2004-04-15 2005-04-15 Application of micromechanical and nanomechanical devices to metal thin film piezoresistance conversion and self-sensing SPM probes
EP05736813A EP1749185A2 (en) 2004-04-15 2005-04-15 Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing spm probes

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US56265204P 2004-04-15 2004-04-15
US60/562,652 2004-04-15
US10/826,007 US7302856B2 (en) 2003-05-07 2004-04-16 Strain sensors based on nanowire piezoresistor wires and arrays
US10/826,007 2004-04-16

Publications (2)

Publication Number Publication Date
WO2005103604A2 WO2005103604A2 (en) 2005-11-03
WO2005103604A3 true WO2005103604A3 (en) 2007-03-15

Family

ID=37575013

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/013101 WO2005103604A2 (en) 2004-04-15 2005-04-15 Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing spm probes

Country Status (4)

Country Link
EP (1) EP1749185A2 (en)
JP (1) JP2007532923A (en)
KR (1) KR20070011433A (en)
WO (1) WO2005103604A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7055378B2 (en) 2003-08-11 2006-06-06 Veeco Instruments, Inc. System for wide frequency dynamic nanomechanical analysis
EP2754176A4 (en) * 2011-09-08 2015-04-15 Univ California Sensor for law force-noise detection in liquids
CN104808017B (en) * 2014-01-26 2018-08-24 中国科学院苏州纳米技术与纳米仿生研究所 Probe and preparation method thereof for near-field optical microscope

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5366801A (en) * 1992-05-29 1994-11-22 Triangle Research And Development Corporation Fabric with reversible enhanced thermal properties
US6185991B1 (en) * 1998-02-17 2001-02-13 Psia Corporation Method and apparatus for measuring mechanical and electrical characteristics of a surface using electrostatic force modulation microscopy which operates in contact mode
US20050109925A1 (en) * 2003-11-26 2005-05-26 El Rifai Osamah M. Height calibration of scanning probe microscope actuators
US6945099B1 (en) * 2002-07-02 2005-09-20 Veeco Instruments Inc. Torsional resonance mode probe-based instrument and method

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08262039A (en) * 1995-03-23 1996-10-11 Shimadzu Corp Scanning probe microscope
JPH09304409A (en) * 1996-05-14 1997-11-28 Seiko Instr Inc Cantilever with force displacement sensor
JPH10282129A (en) * 1997-04-10 1998-10-23 Seiko Instr Inc Semiconductor strain sensor and scanning probe microscope using it
JPH11352136A (en) * 1998-06-08 1999-12-24 Nikon Corp Probe and microscope using same
JP2001337025A (en) * 2000-03-24 2001-12-07 Seiko Instruments Inc Scanning probe apparatus and scanning probe thereof
JP2001272325A (en) * 2000-03-24 2001-10-05 Seiko Instruments Inc Detection circuit for self-detection type probe and scanning probe device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5366801A (en) * 1992-05-29 1994-11-22 Triangle Research And Development Corporation Fabric with reversible enhanced thermal properties
US6185991B1 (en) * 1998-02-17 2001-02-13 Psia Corporation Method and apparatus for measuring mechanical and electrical characteristics of a surface using electrostatic force modulation microscopy which operates in contact mode
US6945099B1 (en) * 2002-07-02 2005-09-20 Veeco Instruments Inc. Torsional resonance mode probe-based instrument and method
US20050109925A1 (en) * 2003-11-26 2005-05-26 El Rifai Osamah M. Height calibration of scanning probe microscope actuators

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
LI ET AL.: "Thin Gold Film Strain Gauges", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, vol. 12, no. 3, June 1994 (1994-06-01), WOODBURY, NY, US, pages 813 - 819, XP000442873 *
TORTONESE ET AL.: "Atomic Resolution With an Atomic Force Microscope Using Piezoresistive Detection", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, vol. 62, 22 February 1993 (1993-02-22), pages 834 - 836, XP000338616 *

Also Published As

Publication number Publication date
KR20070011433A (en) 2007-01-24
WO2005103604A2 (en) 2005-11-03
JP2007532923A (en) 2007-11-15
EP1749185A2 (en) 2007-02-07

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