WO2005099972A3 - Split assembly robotic arm - Google Patents
Split assembly robotic arm Download PDFInfo
- Publication number
- WO2005099972A3 WO2005099972A3 PCT/US2005/012145 US2005012145W WO2005099972A3 WO 2005099972 A3 WO2005099972 A3 WO 2005099972A3 US 2005012145 W US2005012145 W US 2005012145W WO 2005099972 A3 WO2005099972 A3 WO 2005099972A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- robotic arm
- split assembly
- assembly robotic
- arm segment
- arm
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0019—End effectors other than grippers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J17/00—Joints
- B25J17/02—Wrist joints
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
- B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
- B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/30—End effector
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US56040604P | 2004-04-08 | 2004-04-08 | |
US60/560,406 | 2004-04-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005099972A2 WO2005099972A2 (en) | 2005-10-27 |
WO2005099972A3 true WO2005099972A3 (en) | 2007-02-08 |
Family
ID=35150519
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/012145 WO2005099972A2 (en) | 2004-04-08 | 2005-04-08 | Split assembly robotic arm |
Country Status (4)
Country | Link |
---|---|
KR (1) | KR20070015166A (en) |
CN (1) | CN101124070A (en) |
TW (1) | TWI262120B (en) |
WO (1) | WO2005099972A2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8459140B2 (en) * | 2007-04-18 | 2013-06-11 | Fabworx Solutions, Inc. | Adjustable wrist design for robotic arm |
TWI498202B (en) * | 2013-01-29 | 2015-09-01 | Compal Electronics Inc | Robot with connection member |
CN115182927B (en) * | 2022-08-03 | 2023-07-07 | 郑州机械研究所有限公司 | Self-adaptive working condition sliding bearing, gearbox and selection method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4555217A (en) * | 1983-01-06 | 1985-11-26 | Intelledex Incorporated | Robot arm with split wrist motion |
US20020166404A1 (en) * | 2000-05-26 | 2002-11-14 | Ross-Hime Designs, Incorporated | Robotic manipulator |
-
2005
- 2005-04-07 TW TW094110989A patent/TWI262120B/en active
- 2005-04-08 WO PCT/US2005/012145 patent/WO2005099972A2/en active Application Filing
- 2005-04-08 CN CNA2005800098583A patent/CN101124070A/en active Pending
- 2005-04-08 KR KR1020067020561A patent/KR20070015166A/en not_active Application Discontinuation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4555217A (en) * | 1983-01-06 | 1985-11-26 | Intelledex Incorporated | Robot arm with split wrist motion |
US20020166404A1 (en) * | 2000-05-26 | 2002-11-14 | Ross-Hime Designs, Incorporated | Robotic manipulator |
Also Published As
Publication number | Publication date |
---|---|
WO2005099972A2 (en) | 2005-10-27 |
CN101124070A (en) | 2008-02-13 |
KR20070015166A (en) | 2007-02-01 |
TW200602169A (en) | 2006-01-16 |
TWI262120B (en) | 2006-09-21 |
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