WO2005094974A1 - Device and method for uninterruptible power supply - Google Patents

Device and method for uninterruptible power supply Download PDF

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Publication number
WO2005094974A1
WO2005094974A1 PCT/JP2005/006272 JP2005006272W WO2005094974A1 WO 2005094974 A1 WO2005094974 A1 WO 2005094974A1 JP 2005006272 W JP2005006272 W JP 2005006272W WO 2005094974 A1 WO2005094974 A1 WO 2005094974A1
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WIPO (PCT)
Prior art keywords
cylinder
return
maintenance device
vacuum
vacuum maintenance
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PCT/JP2005/006272
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French (fr)
Japanese (ja)
Inventor
Toshiro Tomishige
Hirofumi Higuchi
Yukio Nishino
Masakazu Kondo
Etsuo Sugimoto
Tadafumi Yamamura
Kinichi Shibata
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Japan Alcohol Corporation
Mitsui Engineering & Shipbuilding Co., Ltd
Wave Engineering Corporation
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Application filed by Japan Alcohol Corporation, Mitsui Engineering & Shipbuilding Co., Ltd, Wave Engineering Corporation filed Critical Japan Alcohol Corporation
Publication of WO2005094974A1 publication Critical patent/WO2005094974A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D63/00Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/06Tubular membrane modules
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2313/00Details relating to membrane modules or apparatus
    • B01D2313/04Specific sealing means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2313/00Details relating to membrane modules or apparatus
    • B01D2313/04Specific sealing means
    • B01D2313/041Gaskets or O-rings

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Gasket Seals (AREA)

Abstract

[PROBLEMS] To provide a device for uninterruptible power supply for closing both ends of the cylinder a permeable component separating cylindrical member for separably permeating, through the wall of the cylinder, specific components in a mixture on the outside of the cylinder by bringing the inside of the cylinder into a negative pressure. [MEANS FOR SOLVING PROBLEMS] This device for uninterruptible power supply comprises sealing devices fitted to both ends of the cylinder and sealing the ends of the cylinder. The sealing devices further comprise cylinder end fixed members fixed to the ends of the cylinder, threaded members axially threaded to the cylinder end fixed members, annular storage parts formed between the cylinder end fixed members and the threaded members and the inner or outer peripheral surfaces of the cylinder on the cylindrical end side, a plurality of annular seal members fitted to the annular storage parts, and an annular interposed member interposed between the annular seal members and slidable in the axial direction of the cylinder. The annular seal members are elastically deformed with a holding pressure according to the threading of the threading members into the cylinder end fixed members, and multiple stages of seal parts corresponding to the number of the annular seal members are formed along the axial direction of the cylinder.

Description

真空維持装置とその真空維持方法  Vacuum maintenance device and its vacuum maintenance method
技術分野  Technical field
[0001] 本発明は、筒外周面にゼォライト膜が施された透過性成分分離筒状部材の両筒端 を塞ぐ真空維持装置とその真空維持方法とに関するもので、筒内部を負圧として筒 外部の混合物質中の所要の成分を筒壁を透過させて分離するに当り、当該筒両端 の密封に関する。  The present invention relates to a vacuum maintenance device and a vacuum maintenance method for closing both cylindrical ends of a permeable component separating cylindrical member having a zeolite film formed on the outer peripheral surface of the cylinder and a method for maintaining the vacuum, wherein the cylinder is configured to maintain a negative pressure inside the cylinder. In separating required components in an external mixed substance through a cylinder wall, the present invention relates to sealing at both ends of the cylinder.
背景技術  Background art
[0002] ゼォライト膜を担持した透過性成分分離筒状部材 (以下、筒体とも!ヽぅ)の化学工業 への主な利用形態として、その分離性能に着目した導入 '開発が進められており、供 給原料として混合物質を用いた場合、その一又は二以上の成分が筒体 (筒壁)を透 過し、製品を多く含む成分(目的成分)と製品以外の成分(目的外成分)を多く含む 成分に分離することが可能となる。  [0002] As a main use form in the chemical industry, a permeable component separation tubular member carrying a zeolite membrane (hereinafter, also referred to as a tubular member!) Has been introduced, focusing on its separation performance. When a mixed substance is used as a raw material, one or more of the components penetrate the cylinder (cylinder wall), and the product-rich component (target component) and the non-product component (non-target component) Can be separated into components containing a large amount of.
このような例として、エタノール蒸留産業でのエタノールの脱水工程や、レンズや半 導体の洗浄に利用された IPA (イソプロピルアルコール)を主成分とする物質の脱水 再生工程が注目されている。  As such examples, attention has been focused on the dehydration process of ethanol in the ethanol distillation industry and the dehydration and regeneration process of IPA (isopropyl alcohol) -based substances used for cleaning lenses and semiconductors.
[0003] 筒体を脱水工程として利用する場合、真空発生手段と係脱自在に適宜接合された 筒体の外周面から、真空状態とされた筒体の中空部 (筒内部)へ内外圧差による駆 動力を利用して、当該中空部へ含水混合物質のうち主成分を水分とする物質(目的 外成分)を透過させることにより、含水混合物質の脱水が可能となる。  [0003] When the cylindrical body is used in the dehydration step, the outer peripheral surface of the cylindrical body, which is appropriately connected to and detachable from the vacuum generating means, moves from the outer peripheral surface to the hollow portion (inside of the cylinder) of the vacuumed cylinder due to an internal / external pressure difference. By using the driving force to permeate a substance containing water as a main component (non-target component) of the water-containing mixed substance into the hollow portion, the water-containing mixed substance can be dehydrated.
この場合、筒体の両筒端を塞ぐ密封具において、密封材として従来力ゝら榭脂ゃガラ ス等が用いられている。  In this case, in a sealing device for closing both ends of the cylindrical body, a conventional resin, glass, or the like is used as a sealing material.
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0004] 従来から使用されて!ヽる密封材としての榭脂ゃガラス等は、熱及び溶剤にぉ 、て 一定の耐久性を有するものが少なくな 、が、弾性がな 、か若しくは非常に少な 、こと 、密封材と筒体との接着に用いる接着剤成分の溶出による悪影響、密封作業に比較 的期間を要す及び Z又は一定の技術習得が必要であること等が、筒体を含む装置 全体の稼動運転の際に大きな支障となっていた。 [0004] Conventionally used resin glass or the like as a sealing material is less resistant to heat and solvents and has a certain level of durability. However, it has little or no elasticity. Less adverse effect due to elution of adhesive component used for bonding sealing material to cylinder, compared to sealing work The long period of time required and the need to acquire Z or a certain level of technical skill, etc., had been a major obstacle to the operation of the entire equipment including the cylinder.
[0005] 密封材として榭脂ゃガラス等を用いる場合、通常当該密封材は弾性を有しな!/ヽた め振動吸収機能を有さず、筒体を装置の要素として含む工程の非定常状態 (通常装 置の運転開始力 定常状態に達するまでの一定期間における不安定な状態)にお いて、いわゆるウォータハンマによる衝撃により筒体やその密封材に破損や変形を生 じることが少なくな力 た。  [0005] When resin, glass, or the like is used as the sealing material, the sealing material usually does not have elasticity! Therefore, the sealing material does not have a vibration absorbing function, and is not stationary in a process including a cylinder as an element of the device. In the normal state (operating start force of the normal equipment and unstable state for a certain period until reaching the steady state), the impact of the so-called water hammer rarely causes damage or deformation of the cylinder and its sealing material. Power.
[0006] 又、ゼォライトは 600°C前後でその骨格構造が変形して本来有する物質分離能力 を著しく失うことが認められているため、密封材としてガラスを使用する場合には、 60 0°C以下でガラスを軟ィ匕して密封する必要性があり、この場合には現状では酸ィ匕鉛を 相当含むガラスを使用せざるを得ず、このような酸化鉛を含む密封材で密封した筒 体を含む工程では、鉛成分が経口的に利用する製品へ溶出することによる人体への 悪影響、経口以外の製品への利用にお 、ても環境への悪影響が懸念された。  [0006] In addition, since it has been recognized that the skeleton structure of zeolite is deformed at around 600 ° C, and the inherent substance separation ability is remarkably lost, zeolite is used at 600 ° C when glass is used as a sealing material. In the following, it is necessary to soften and seal the glass, and in this case, at present, it is inevitable to use glass containing oxidized lead, and the glass is sealed with a sealing material containing such lead oxide. In processes involving cylinders, there were concerns about the adverse effects on the human body due to the elution of lead components into products used orally, and also on the environment when using non-oral products.
[0007] 一方、筒体の分離機能が密封材の密封機能より前に失われる場合 (例えば、外部 に存在する混合物質に微細浮遊物質が含まれる場合や、筒体の細孔に当該浮遊物 質が詰まり分離機能を著しく失わせる場合等)やウォータハンマによる衝撃により筒 体が破損した場合において、榭脂ゃガラスを密封材としたときには、筒体、密封材、 密封具を分離した後に、当該密封具を再度利用することが難しぐ従って、筒体、密 封材、密封具を一組として取り替えねばならず、結果として充分な機能を有する筒体 や密封具をも取り替えることとなって、コスト的無駄が生じて 、た。  [0007] On the other hand, when the separation function of the cylinder is lost before the sealing function of the sealing material (for example, when a fine suspended substance is contained in a mixed substance existing outside, or when the suspended substance is contained in pores of the cylinder). If the cylinder is damaged due to the impact of a water hammer, or if the glass is used as a sealing material, after separating the cylinder, sealing material, and sealing device, Since it is difficult to reuse the sealing device, it is necessary to replace the cylinder, the sealing material, and the sealing device as a set.As a result, the cylinder and the sealing device having a sufficient function are also replaced. Costly waste.
[0008] このような状況にぉ 、て、長期の耐久性を有すると共に、一定の振動吸収機能を有 し、密封材起因の有害物質の製品への溶出懸念が解消でき、更には、筒体及び当 該筒体の両端を塞ぐ密封具等を一組として取り替える必要性がない装置、即ち、筒 体の両端を密封する真空維持装置の提供が重要な課題となっている。  [0008] In such a situation, in addition to having long-term durability and having a certain vibration absorbing function, concerns about elution of harmful substances due to sealing materials into products can be eliminated. An important issue is to provide a device that does not require replacement of a sealing member or the like for closing both ends of the cylindrical body as a set, that is, a vacuum maintenance device for sealing both ends of the cylindrical body.
[0009] 特に、供給原料としてエタノールや IPA (イソプロピルアルコール)のような低級アル コールを含む混合物質の脱水分離工程の管理温度(120°C前後で他の高分子供給 原料の場合に比べ低温)においては、その管理温度における耐熱性を勘案すると密 封材として榭脂ゃガラス等を用いる必然性は少なぐこのような前提において従来技 術の榭脂ゃガラス等の使用で生じる前記諸問題を解決すること、及び密封材として 最も重要な要件である長期の耐久性を有する真空維持装置及び真空維持方法の開 発が嘱望されている。 [0009] In particular, the control temperature for the dehydration separation process of a mixed substance containing a lower alcohol such as ethanol or IPA (isopropyl alcohol) as a feedstock (around 120 ° C, lower temperature than other polymer feedstocks) Considering the heat resistance at the control temperature, it is not necessary to use grease or glass as a sealing material. It is desired to solve the above-mentioned problems caused by the use of surgical glass and the like, and to develop a vacuum maintenance device and a vacuum maintenance method having long-term durability, which is the most important requirement for a sealing material. .
課題を解決するための手段  Means for solving the problem
[0010] 本発明は、前記課題の解決を目的として成されたものである。 [0010] The present invention has been made for the purpose of solving the above problems.
即ち、請求項 1の発明は、筒内部を負圧として筒外部の混合物質中の所要の成分を 筒壁を透過させて分離する透過性成分分離筒状部材の両筒端を塞ぐ真空維持装置 において、前記真空維持装置は、両筒端に各々装着されて当該筒端を密封する密 封具を備え、  That is, the invention of claim 1 is a vacuum maintenance device that closes both cylinder ends of a permeable component separating cylindrical member that separates required components in a mixed substance outside the cylinder by passing the cylinder wall with a negative pressure inside the cylinder. In the above, the vacuum maintaining device includes a sealing device attached to both ends of the cylinder to seal the ends of the cylinder,
前記密封具は、筒端に固定される筒端固定部材と当該筒端固定部材に筒軸方向に 螺合する螺合部材と、前記筒端固定部材及び螺合部材と筒端側の筒内周面又は筒 外周面との間に形成された還状収納部と、前記還状収納部に嵌合された複数の還 状シール部材と、前記還状シール部材間に介在し筒軸方向に摺動自在な還状介在 部材とを備え、  The sealing device includes a cylinder end fixing member fixed to the cylinder end, a screw member screwed to the cylinder end fixing member in the cylinder axis direction, and the cylinder end fixing member and the screw member in the cylinder on the cylinder end side. A return housing formed between the peripheral surface or the outer peripheral surface of the cylinder, a plurality of return seals fitted to the return housing, and a cylinder axial direction interposed between the return seals. With a slidable return interposition member,
前記螺合部材の筒端固定部材へのネジ込みに応じた挟圧で前記還状シール部材 を弾性変形させ、筒軸方向にわたって前記還状シール部材の数に相応する複数段 のシール部を設けたことを特徴とする。  The return seal member is elastically deformed by a pinching pressure corresponding to the screwing of the screw member into the cylinder end fixing member, and a plurality of seal portions corresponding to the number of the return seal members are provided in the cylinder axis direction. It is characterized by having.
[0011] 又、請求項 2の発明は、筒内部を負圧として筒外部の混合物質中の所要の成分を 筒壁を透過させて分離する透過性成分分離筒状部材の両筒端を塞ぐ真空維持装置 において、前記真空維持装置は、両筒端に各々装着されて当該筒端を密封する密 封具を備え、前記密封具は、筒端に固定される筒端固定部材と当該筒端固定部材 に筒軸方向に螺合する螺合部材と、前記筒端固定部材及び螺合部材と筒端側の筒 内周面又は筒外周面との間に形成された還状収納部と、前記還状収納部に嵌合さ れた単一の還状シール部材とを備え、  [0011] Further, the invention according to claim 2 closes both ends of a permeable component separating tubular member that separates required components in a mixed substance outside the cylinder by passing the cylindrical wall with a negative pressure inside the cylinder. In the vacuum maintenance device, the vacuum maintenance device includes a hermetic seal which is attached to both ends of the cylinder and seals the end of the cylinder. The seal includes a cylinder end fixing member fixed to the end of the cylinder and the end of the cylinder. A screw member that is screwed to the fixing member in the cylinder axis direction; a return storage portion formed between the cylinder end fixing member and the screw member and the inner peripheral surface or the outer peripheral surface of the cylinder on the cylinder end side; A single return seal member fitted to the return storage section;
前記螺合部材の筒端固定部材へのネジ込みに応じた挟圧で前記還状シール部材 を弾性変形させてシール部を設けると共に、少なくとも当該環状シール部材が接する 筒内周面に不透過処理を施したことを特徴とする。  The seal is provided by elastically deforming the return seal member with a squeezing pressure corresponding to the screwing of the screw member into the cylinder end fixing member, and at least an impervious treatment is performed on the inner peripheral surface of the cylinder contacting at least the annular seal member. It is characterized by having given.
[0012] 又、請求項 3の発明は、請求項 1又は請求項 2に記載の真空維持装置において、両 筒端に各々装着された密封具の双方又は少なくとも一方は、混合物質の容器壁面 に係脱自在に固着され、且つ容器壁面に固着された密封具を貫通して容器外に透 過させた成分を取り出す流出路が形成されたことを特徴とする。 [0012] The invention of claim 3 is the vacuum maintenance device according to claim 1 or claim 2, Both or at least one of the seals attached to the end of the cylinder is fixed to the container wall surface of the mixed substance so as to be freely detachable, and penetrates through the seal member fixed to the container wall surface to pass out of the container. An outflow passage for taking out the water is formed.
[0013] 又、請求項 4の発明は、請求項 1乃至請求項 3の何れかに記載の真空維持装置にお いて、筒端固定部材には筒軸方向に貫通ネジ穴を形成し、螺合部材には、筒内から 筒端外に向けて前記貫通ネジ穴にネジ込まれた当該螺合部材の筒内側の外周面に 、単一の還状シール部材又は筒端方向に向けて複数の環状シール部材力 なる還 状シール部材群、を押す段差面を有する段差部を形成すると共に、当該段差部の低 周面が前記貫通ネジ穴に嵌入可能に形成し、前記段差面と低周面と前記段差面に 相対する筒端固定部材の筒内側端面とで、凹部の開放側が筒内周面側に向いた断 面凹状の還状収納部を設けたことを特徴とする。  [0013] In a fourth aspect of the present invention, in the vacuum maintenance device according to any one of the first to third aspects, a through screw hole is formed in the cylinder end fixing member in the cylinder axis direction, and the screw is formed. The mating member has a single return seal member or a plurality of mating members extending in the direction of the cylinder end on the outer peripheral surface inside the cylinder of the screwing member screwed into the through screw hole from the inside of the cylinder toward the outside of the cylinder end. A stepped portion having a stepped surface for pressing the annular seal member force of the annular seal member is formed, and a low peripheral surface of the stepped portion is formed so as to be able to be fitted into the through screw hole. A concave recessed storage portion is provided in which the open side of the concave portion is directed toward the inner circumferential surface of the cylinder between the surface and the inner end surface of the cylindrical end fixing member facing the step surface.
[0014] 又、請求項 5の発明は、請求項 4に記載の真空維持装置において、還状収納部の低 周面に、単一の還状シール部材、又は、複数の還状シール部材及び還状介在部材 力もなる環状シール部材群を設けたことを特徴とする。  [0014] Further, the invention of claim 5 is the vacuum maintenance device according to claim 4, wherein a single return seal member or a plurality of return seal members and Ring-shaped interposition member An annular seal member group that also provides a force is provided.
[0015] 又、請求項 6の発明は、請求項 1乃至請求項 5の何れかに記載の真空維持装置にお いて、螺合部材の筒端側端面には、筒端外側カゝら当該螺合部材をネジ回す回し手 段が係合する係合手段を設けたことを特徴とする。  [0015] Further, according to the invention of claim 6, in the vacuum maintenance device according to any one of claims 1 to 5, the cylinder end side end face of the screwing member is provided with a cylinder end outer cover. It is characterized in that an engaging means is provided for engaging a turning means for turning the screwing member.
[0016] 又、請求項 7の発明は、請求項 6に記載の真空維持装置において、係合手段は回し 手段の差込側先端部と係脱自在な構成であることを特徴とする。  [0016] The invention of claim 7 is characterized in that, in the vacuum maintenance device according to claim 6, the engagement means is configured to be detachable from the insertion-side tip of the turning means.
[0017] 又、請求項 8の発明は、請求項 2乃至請求項 7の何れかに記載の真空維持装置にお いて、筒端から単一の還状シール部材が接するまでの筒内周面に、不透過処理を 施したことを特徴とする。  [0017] The invention of claim 8 is the vacuum maintenance device according to any one of claims 2 to 7, wherein the inner peripheral surface of the cylinder from the cylinder end to the contact of the single return seal member. In addition, it is characterized by being subjected to opacity treatment.
[0018] 又、請求項 9の発明は、請求項 2乃至請求項 7の何れかに記載の真空維持装置にお いて、筒端面及び当該筒端面に連続して単一の還状シール部材が接するまでの筒 内周面に、不透過処理を施したことを特徴とする。  [0018] Further, the invention of claim 9 is the vacuum maintenance device according to any one of claims 2 to 7, wherein a single return seal member is continuously provided on the cylinder end face and the cylinder end face. It is characterized in that the inner peripheral surface of the cylinder up to the contact is subjected to opacity treatment.
[0019] 又、請求項 10の発明は、請求項 2乃至請求項 7の何れかに記載の真空維持装置 において、筒端力 単一の還状シール部材に対応するまでの筒外周面に、不透過 処理を施したことを特徴とする。 [0020] 又、請求項 11の発明は、請求項 2乃至請求項 7の何れかに記載の真空維持装置に おいて、筒端面に連続して単一の還状シール部材に対応するまでの筒外周面に、 不透過処理を施したことを特徴とする。 [0019] Further, the invention of claim 10 is the vacuum maintenance device according to any one of claims 2 to 7, wherein a cylinder end force corresponds to a single return seal member on the outer peripheral surface of the cylinder. It is characterized by a opaque treatment. [0020] Further, the invention of claim 11 is the vacuum maintenance device according to any one of claims 2 to 7, wherein the vacuum maintenance device corresponds to a single return seal member that is continuous with the cylinder end face. It is characterized in that an opaque treatment is applied to the outer peripheral surface of the cylinder.
[0021] 又、請求項 12の発明は、請求項 1、請求項 3乃至請求項 7の何れかに記載の真空維 持装置において、筒端から、少なくとも複数段の、筒奥に向けて設けられた還状シー ル部材が接するまでの筒内周面に、不透過処理を施したことを特徴とする。  According to a twelfth aspect of the present invention, in the vacuum maintenance device according to any one of the first, third, and seventh aspects, at least a plurality of stages are provided from the end of the cylinder toward the back of the cylinder. An impermeability treatment is applied to the inner circumferential surface of the cylinder until the return seal member comes into contact with the seal.
[0022] 又、請求項 13の発明は、請求項 1、請求項 3乃至請求項 7の何れかに記載の真空維 持装置において、筒端面及び当該筒端面に連続して、少なくとも複数段の、筒奥に 向けて設けられた還状シール部材が接するまでの筒内周面に、不透過処理を施した ことを特徴とする。  [0022] Further, the invention of claim 13 is the vacuum maintenance device according to any one of claims 1, 3 to 7, wherein at least a plurality of stages are provided continuously with the cylinder end face and the cylinder end face. An impermeability treatment is applied to the inner circumferential surface of the cylinder until the return seal member provided toward the inner side of the cylinder comes into contact.
[0023] 又、請求項 14の発明は、請求項 1、請求項 3乃至請求項 7の何れかに記載の真空維 持装置において、筒端力 最奥に設けられた還状シール部材が接するまでの筒内 周面に、不透過処理を施したことを特徴とする。  According to a fourteenth aspect of the present invention, in the vacuum maintenance device according to any one of the first to third aspects, the return seal member provided at the innermost end of the cylinder is in contact with the vacuum maintenance device. The inner peripheral surface of the cylinder is subjected to opacity treatment.
[0024] 又、請求項 15の発明は、請求項 1、請求項 3乃至請求項 7の何れかに記載の真空維 持装置において、筒端面及び当該筒端面に連続して最奥に設けられた還状シール 部材が接するまでの筒内周面に、不透過処理を施したことを特徴とする。  [0024] Further, the invention of claim 15 is the vacuum maintenance device according to any one of claims 1, 3 to 7, wherein the vacuum maintenance device is provided at the innermost end continuously to the cylinder end face and the cylinder end face. The inner peripheral surface of the cylinder up to the contact of the return seal member is subjected to an impermeability treatment.
[0025] 又、請求項 16の発明は、請求項 12乃至請求項 15の何れかに記載の真空維持装 置において、筒端から、筒内に設けられた少なくとも最も筒端側の還状シール部材に 対応するまでの筒外周面に、不透過処理を施したことを特徴とする。  [0025] Further, the invention of claim 16 is the vacuum maintenance device according to any of claims 12 to 15, wherein at least the most returnable seal provided in the cylinder from the cylinder end. It is characterized in that an opaque treatment is applied to the outer peripheral surface of the cylinder until it corresponds to the member.
[0026] 又、請求項 17の発明は、請求項 12乃至請求項 15の何れかに記載の真空維持装置 において、筒端面に連続して、筒内に設けられた少なくとも最も筒端側の還状シール 部材に対応するまでの筒外周面に、不透過処理を施したことを特徴とする。  According to a seventeenth aspect of the present invention, there is provided the vacuum maintenance device according to any one of the twelfth to fifteenth aspects, wherein at least the most end of the cylinder end provided in the cylinder is provided continuously with the cylinder end face. The outer peripheral surface of the cylinder up to the portion corresponding to the seal member is subjected to an impermeability treatment.
[0027] 又、請求項 18の発明は、請求項 12乃至請求項 15の何れかに記載の真空維持装 置において、筒端から、筒内に設けられた最奥の還状シール部材に対応するまでの 筒外周面に、不透過処理を施したことを特徴とする。  [0027] The invention of claim 18 is the vacuum maintenance device according to any one of claims 12 to 15, wherein the vacuum maintenance device corresponds to the innermost return seal member provided inside the cylinder from the cylinder end. The outer peripheral surface of the cylinder is subjected to an impermeability treatment before the operation.
[0028] 又、請求項 19の発明は、請求項 12乃至請求項 15の何れかに記載の真空維持装置 において、筒端面に連続して、筒内に設けられた最奥の還状シール部材に対応する までの筒外周面に、不透過処理を施したことを特徴とする。 [0029] 又、請求項 20の発明は、請求項 2乃至請求項 19の何れかに記載の真空維持装置 にお 、て、不透過処理は釉薬シール処理であることを特徴とする。 [0028] Further, the invention of claim 19 is the vacuum maintenance device according to any of claims 12 to 15, wherein the innermost return seal member provided in the cylinder is provided continuously with the cylinder end face. It is characterized in that an opaque treatment has been applied to the outer peripheral surface of the cylinder until it corresponds to. [0029] The invention of claim 20 is the vacuum maintenance device according to any one of claims 2 to 19, wherein the opaque treatment is a glaze sealing treatment.
[0030] 又、請求項 21の発明は、請求項 20に記載の真空維持装置において、釉薬シール 処理は、釉薬と水との混合スラリーを筒体の所要部分に施した後、所定温度で溶融 処理することを特徴とする。  [0030] Further, the invention of claim 21 is the vacuum maintenance device according to claim 20, wherein the glaze sealing treatment is performed by applying a mixed slurry of glaze and water to a required portion of the cylindrical body, and then melting at a predetermined temperature. It is characterized by processing.
[0031] 又、請求項 22の発明は、請求項 20又は請求項 21に記載の真空維持装置において 、釉薬は、アルカリ性の媒溶剤と、溶け過ぎを抑制する珪酸と、素地への密着性を高 めるカオリンとを含むことを特徴とする。  [0031] Further, the invention of claim 22 is the vacuum maintenance device according to claim 20 or claim 21, wherein the glaze comprises an alkaline medium solvent, a silicic acid for suppressing over-dissolution, and an adhesion to the substrate. It is characterized by containing kaolin to be enhanced.
[0032] 又、請求項 23の発明は、請求項 1乃至請求項 3の何れかに記載の真空維持装置に おいて、筒端固定部材には筒端側の筒外周面を覆う筒外周覆い部と当該筒外周覆 V、部と連続して筒端側を覆う冠状部とを形成し、螺合部材には筒端が嵌入する貫通 穴を形成すると共に、当該貫通穴を介して筒中央側に嵌挿された螺合部材が前記 筒外周覆い部の内周面と螺合しつつ当該筒外周覆い部と筒外周面との還状間隙に 進退自在に形成して、前記筒端固定部材の筒外周覆!、部及び冠状部と螺合部材の 進入側端面とで、凹部の開放側が筒外周面側に向いた断面凹状の還状収納部を設 けたことを特徴とする。  [0032] Further, the invention of claim 23 is the vacuum maintenance device according to any one of claims 1 to 3, wherein the cylinder end fixing member covers the cylinder outer peripheral surface on the cylinder end side. And a crown-shaped portion that covers the end of the cylinder continuously with the part, a through-hole in which the end of the cylinder fits is formed in the screwing member, and the center of the cylinder is inserted through the through-hole. A threaded member fitted on the side is screwed with the inner peripheral surface of the outer peripheral covering portion of the cylinder, and is formed in a return-shaped gap between the outer peripheral covering portion of the cylinder and the outer peripheral surface of the cylinder so as to be able to advance and retreat. In the present invention, a return-shaped storage section having a concave cross-section in which the open side of the concave portion is directed toward the outer peripheral surface of the cylinder is provided between the outer peripheral cover of the member, the crown portion, and the entry end face of the screwing member.
[0033] 又、請求項 24の発明は、請求項 23に記載の真空維持装置において、還状収納部 の筒外周面に、還状シール部材及び還状介在部材からなる環状シール部材群を設 けたことを特徴とする。  [0033] In the invention of claim 24, in the vacuum maintenance device according to claim 23, an annular seal member group comprising a return seal member and a return intermediate member is provided on the outer peripheral surface of the cylinder of the return housing portion. It is characterized by
[0034] 又、請求項 25の発明は、請求項 23又は請求項 24に記載の真空維持装置において [0034] Further, the invention of claim 25 is the vacuum maintenance device according to claim 23 or claim 24.
、螺合部材の筒中央側端部外周面には、筒外力 当該螺合部材をネジ回す回し手 段が係合する係合手段を設けたことを特徴とする。 On the outer peripheral surface of the end portion of the screw member on the center side of the tube, an external force is provided with an engagement means with which a turning means for screwing the screw member is engaged.
[0035] 又、請求項 26の発明は、請求項 25に記載の真空維持装置において、係合手段は、 回し手段の少なくとも一部が係合するナット形状であることを特徴とする。 [0035] The invention of claim 26 is the vacuum maintenance device of claim 25, wherein the engaging means is a nut shape with which at least a part of the turning means is engaged.
[0036] 又、請求項 27の発明は、請求項 1乃至請求項 26の何れかに記載の真空維持装置に ぉ ヽて、透過性成分分離筒状部材は多孔質素材で形成されたことを特徴とする。 [0036] The invention of claim 27 is the vacuum maintenance device according to any one of claims 1 to 26, wherein the permeable component separation tubular member is formed of a porous material. Features.
[0037] 又、請求項 28の発明は、請求項 1乃至請求項 27の何れかに記載の真空維持装置に ぉ 、て、透過性成分分離筒状部材は筒外周面にゼォライト膜が施されたことを特徴 とする。 [0037] The invention of claim 28 is the vacuum maintenance device according to any one of claims 1 to 27, wherein the permeable component separation tubular member has a zeolite film formed on the outer peripheral surface of the tube. Features And
[0038] 又、請求項 29の発明は、請求項 1、請求項 3乃至請求項 7、請求項 12乃至請求項 2 8の何れかに記載の真空維持装置にお 、て、還状シール部材と還状介在部材とは、 環状シール部材が少なくとも両端に位置するよう交互に配設されたことを特徴とする  [0038] Further, the invention of claim 29 is the vacuum maintenance device according to any one of claims 1, 3 to 7, and 12 to 28, wherein the return seal member is provided. And the intervening member are arranged alternately so that the annular seal members are located at least at both ends.
[0039] 又、請求項 30の発明は、請求項 1乃至請求項 29の何れかに記載の真空維持装置に ぉ 、て、環状シール部材は Oリング又はその他の還状に形成された変形復元自在な 有弾性部材であることを特徴とする。 [0039] Further, the invention of claim 30 is the vacuum maintenance device according to any one of claims 1 to 29, wherein the annular seal member is an O-ring or other deformed restoration formed. It is a flexible elastic member.
[0040] 又、請求項 31の発明は、請求項 1、請求項 3乃至請求項 7、請求項 12乃至請求項 3 0の何れかに記載の真空維持装置にお ヽて、還状介在部材は還状に形成された金 属部材又はその他の変形し難い硬質部材であることを特徴とする。  [0040] Further, the invention of claim 31 is a vacuum maintenance device according to any one of claims 1, 3 to 7, 12 to 30, and a return interposition member. Is a metal member or other hard member which is hardly deformed.
[0041] 又、請求項 32の発明は、筒内部を負圧として筒外部の混合物質中の所要の成分 を筒壁を透過させて分離する透過性成分分離筒状部材の両筒端を塞ぐ真空維持装 置の真空維持方法において、前記真空維持装置は、前記両筒端に各々装着されて 当該筒端を密封する密封具を備え、前記密封具は、筒端に固定される筒端固定部 材と当該筒端固定部材に筒軸方向に螺合する螺合部材と、前記筒端固定部材及び 螺合部材と筒端側の筒内周面又は筒外周面との間に形成された還状収納部と、前 記還状収納部に嵌合された複数の還状シール部材と、前記還状シール部材間に介 在し筒軸方向に摺動自在な還状介在部材とを備え、  [0041] Further, the invention of claim 32 closes both cylinder ends of a permeable component separating tubular member that separates required components in a mixed substance outside the cylinder by passing the cylinder wall by setting the inside of the cylinder to a negative pressure. In the vacuum maintaining method of the vacuum maintaining device, the vacuum maintaining device includes a sealing member attached to each of the two cylinder ends to seal the cylinder ends, and the sealing member is fixed to the cylinder end. A screw member which is screwed to the member and the cylinder end fixing member in the cylinder axis direction, and is formed between the cylinder end fixing member and the screw member and the inner peripheral surface or the outer peripheral surface of the cylinder on the cylinder end side. A return letter storage part, a plurality of return letter seal members fitted to the return letter storage part, and a return letter intervening member interposed between the return letter seal members and slidable in the cylinder axis direction. ,
前記螺合部材の筒端固定部材へのネジ込みに応じた挟圧で前記還状シール部材 を弾性変形させ、筒軸方向にわたって前記還状シール部材の数に相応する複数段 のシール部を設けて、  The return seal member is elastically deformed by a pinching pressure corresponding to the screwing of the screw member into the cylinder end fixing member, and a plurality of seal portions corresponding to the number of the return seal members are provided in the cylinder axis direction. hand,
何れか一段或いは数段のシール部がシール機能不全になっても残る少なくとも一段 のシール部によってシール機能を維持させ、或いは、更なるネジ込みにより、残る少 なくとも一段のシール部によってシール機能を維持させることを特徴とする。  Even if one or several stages of the seals fail, the seal function is maintained by the remaining at least one stage of seals, or the sealing function is further enhanced by the remaining at least one stage of seals. It is characterized by being maintained.
[0042] 又、請求項 33の発明は、筒内部を負圧として筒外部の混合物質中の所要の成分 を筒壁を透過させて分離する透過性成分分離筒状部材の両筒端を塞ぐ真空維持装 置の真空維持方法において、前記真空維持装置は、前記両筒端に各々装着されて 当該筒端を密封する密封具を備え、前記密封具は、筒端に固定される筒端固定部 材と当該筒端固定部材に筒軸方向に螺合する螺合部材と、前記筒端固定部材及び 螺合部材と筒端側の筒内周面又は筒外周面との間に形成された還状収納部と、前 記還状収納部に嵌合された単一の還状シール部材とを備え、 [0042] Further, the invention of claim 33 closes both cylinder ends of a permeable component separating cylindrical member that separates required components in a mixed substance outside the cylinder by passing the cylinder wall by setting the inside of the cylinder to a negative pressure. In the vacuum maintaining method of the vacuum maintaining device, the vacuum maintaining device is attached to each of the two cylinder ends. A sealing member that seals the cylinder end; the sealing member includes a cylinder end fixing member fixed to the cylinder end, a screwing member screwed to the cylinder end fixing member in the cylinder axis direction, and the cylinder end fixing member; A return housing formed between the member and the screw member and the inner circumferential surface or the outer circumferential surface of the tube at the end of the tube, and a single return seal fitted to the return housing. With
前記螺合部材の筒端固定部材へのネジ込みに応じた挟圧で前記還状シール部材 を弾性変形させてシール部を設けると共に、少なくとも当該環状シール部材が接する 筒内周面に不透過処理を施し、一段のシール部によってシール機能を維持させるこ とを特徴とする。  The seal is provided by elastically deforming the return seal member with a squeezing pressure corresponding to the screwing of the screw member into the cylinder end fixing member, and at least an impervious treatment is performed on the inner peripheral surface of the cylinder contacting at least the annular seal member. The seal function is maintained by a single-stage seal portion.
発明の効果  The invention's effect
[0043] 請求項 1及び請求項 33の各発明によれば、何れも、弾性を有する還状シール部材 を用いることによって、従来の真空維持手段に比較し、振動吸収機能が向上し、ゥォ ータハンマによる衝撃により筒体と密封具との接合部や密封材としての還状シール 部材に破損や変形を生じる可能性を極めて少なくすることができと共に、筒体と密封 具を一組として取り替える必要性がなぐ耐久性を勘案して、例えば筒体や還状シー ル部材ごとの更新が可能となり、結果的に費用及び労力の無駄を大きく省くことがで きる。  [0043] According to the first and third aspects of the invention, the use of an elastic return seal member improves the vibration absorption function as compared with the conventional vacuum maintaining means. The possibility of breakage or deformation of the joint between the cylinder and the seal and the return seal member as a sealant due to the impact of the data hammer can be extremely reduced, and it is necessary to replace the cylinder and the seal as a set Taking into account the durability that can be improved, for example, it is possible to renew each cylinder or return seal member, and as a result, waste of cost and labor can be largely reduced.
[0044] 又、混合物質に対して最適の耐熱及び耐薬剤性を有する還状シール部材を選択的 にシール部材として採用することができ、既存の筒体や還状シール部材を除く真空 維持装置をそのまま継続して使用することができる。  [0044] Further, a return seal member having optimal heat and chemical resistance to the mixed substance can be selectively adopted as the seal member, and the vacuum maintenance device excluding the existing cylindrical body and the return seal member. Can be used as it is.
[0045] 又、従来用いられてきた接着剤を用いる必要がないので、接着剤起因の有害物質 の製品への溶出懸念を解消することができる。  [0045] Further, since there is no need to use a conventionally used adhesive, concerns about elution of harmful substances due to the adhesive into the product can be eliminated.
[0046] 請求項 1、請求項 3乃至請求項 7、請求項 12乃至請求項 32の各発明によれば、何 れも、筒体 (透過性成分分離筒状部材)の両端の何れにおいても、二以上の還状シ 一ル部材が筒軸方向に配設されて!/ヽるので、混合物質に直接接触する一次還状シ 一ル部材から直接には接触し難い二次力 最終次の還状シール部材に至るまで順 次、前次の還状シール部材の腐食等によるシール機能不全によって後次の還状シ 一ル部材が接触して 、くこととなって、後次の還状シール部材が前次の還状シール 部材のノ ックアップ機能を有することとなり、極めて長期間の耐久性をその構造上維 持することが可能となる。 [0046] According to the first, third to seventh and twelfth to thirty-second aspects of the invention, any one of the two ends of the cylindrical body (permeable component separating cylindrical member) Since two or more return seal members are arranged in the cylinder axis direction! / !, secondary force that is difficult to directly contact from the primary return seal member that directly contacts the mixed substance The next return seal member comes into contact with the next return seal member due to failure of the seal function due to corrosion of the previous and next return seal members until the next return seal member reaches the next return seal member. Seal member has a knock-up function of the next return seal member, and its structural durability maintains extremely long-term durability. Can be held.
[0047] 又、外部力 の簡単な「ネジ締め」により、複数の還状シール部材を各々個別に圧縮 することができるので、筒体周面と密封具との還状隙間を適正に密封するために、予 め「ネジ締め」のトルク(回転力)による真空維持状態を確認して、密封耐久性のあるト ルクを決定 (以下「決定トルク」と言う。)しておくことにより、その後において決定トルク の「ネジ締め」を行えば適正な密封を、従来に較べて容易且つ迅速に行うことができ る。  [0047] Further, since a plurality of return seal members can be individually compressed by simple "screw tightening" of an external force, the return gap between the cylindrical peripheral surface and the sealing member is properly sealed. For this purpose, confirm the vacuum maintenance state by the torque (rotational force) of “screw tightening” and determine the torque with sealing durability (hereinafter referred to as “determined torque”). If the "torque tightening" of the determined torque is carried out, proper sealing can be performed easily and quickly as compared with the conventional method.
[0048] 請求項 2、請求項 5乃至請求項 11、請求項 33の各発明によれば、何れも、  [0048] According to the inventions of claim 2, claim 5 to claim 11, and claim 33,
環状シール部材が接する筒内周面に不透過処理を施すことによって、単一の環状シ 一ル部材を用いた一段のシール部であっても、多段の場合と同様に、従来に較べて 、長期の耐久性を有すると共に、一定の振動吸収機能を有し、密封材起因の有害物 質の製品への溶出懸念が解消でき、更には、筒体及び当該筒体の両端を塞ぐ密封 具等を一組として取り替える必要性がない真空維持装置を提供することができる。 発明を実施するための最良の形態  By performing impermeability treatment on the inner peripheral surface of the cylinder in contact with the annular seal member, even in the case of a single-stage seal portion using a single annular seal member, similar to the case of multiple stages, compared with the conventional case, It has long-term durability, has a certain vibration absorption function, and can eliminate concerns about elution of harmful substances caused by sealing materials into products.Furthermore, a cylindrical body and a sealing device for closing both ends of the cylindrical body It is possible to provide a vacuum maintenance device that does not need to be replaced as a set. BEST MODE FOR CARRYING OUT THE INVENTION
[0049] 以下、本発明を、エタノール蒸留産業の含水エタノールの脱水に適用した形態を 例にして説明する。 [0049] Hereinafter, the present invention will be described by way of an example in which the present invention is applied to the dehydration of aqueous ethanol in the ethanol distillation industry.
この含水エタノールはエタノール、水を必須成分とし、その他のメチルアルコール、プ 口ピルアルコール、ブチルアルコール、ァセトアルデヒド等を任意成分とする混合物 質である。  The aqueous ethanol is a mixture containing ethanol and water as essential components, and other optional components such as methyl alcohol, propyl alcohol, butyl alcohol, and acetoaldehyde.
[0050] 実施例は次の 5例である。 [0050] The following are five examples.
実施例 1は還状シール部材として二つの Oリングを筒体 (透過性成分分離筒状部材) の筒内周面側に配設した内側密封方式、即ち栓型の真空維持装置、実施例 2は三 つの Oリングによる内側密封方式、即ち栓型の真空維持装置、実施例 3は二つの Oリ ングを筒体の筒外周面側に配設した外側密封方式、即ち蓋型の真空維持装置、実 施例 4は三つの Oリングによる外側密封方式、即ち蓋型の真空維持装置である。 実施例 5は、ゼォライト膜が施されていない筒体の筒端面や筒内周面や筒外周面の 所要部分等に、透過性成分の透過を防ぐ不透過処理を施すことによって、本発明の 真空維持装置の実効性を高めた例である。 実施例 1 Embodiment 1 Embodiment 2 is an inner sealing system in which two O-rings are disposed on the inner peripheral surface side of a cylindrical body (permeable component separating cylindrical member) as a return seal member, that is, a plug-type vacuum maintenance device. Example 3 is an inner sealing method using three O-rings, that is, a plug-type vacuum maintaining device, and Example 3 is an outer sealing method in which two O-rings are disposed on the outer peripheral surface side of a cylindrical body, that is, a lid-type vacuum maintaining device. Example 4 is an outer sealing method using three O-rings, that is, a lid-type vacuum maintenance device. Embodiment 5 is directed to the present invention by performing an impermeability treatment for preventing transmission of a permeable component on a required portion of a cylindrical end surface, a cylindrical inner peripheral surface, and a cylindrical outer peripheral surface of a cylindrical body not provided with a zeolite membrane. This is an example in which the effectiveness of the vacuum maintenance device is enhanced. Example 1
[0051] 以下、実施例 1の、還状シール部材として二つの Oリングを筒体の筒内周面側に配 設した内側密封方式 (栓型)の真空維持装置を、図 1乃至図 4に基づいて説明する。 図 1は筒体に装着された真空維持装置の縦断側面図、図 2は真空維持装置を分解 した状態の縦断側面図、図 3は真空維持装置を構成する一方の密封具の縦断側面 図、図 4は真空維持装置を構成する他方の密封具の縦断側面図である。  Hereinafter, the inside-sealing-type (plug-type) vacuum maintenance device of Example 1 in which two O-rings are provided on the inner peripheral surface side of the cylindrical body as return seal members will be described with reference to FIGS. 1 to 4. It will be described based on. Fig. 1 is a vertical side view of a vacuum maintenance device mounted on a cylinder, Fig. 2 is a vertical side view of the vacuum maintenance device in an exploded state, Fig. 3 is a vertical side view of one of the seals constituting the vacuum maintenance device, FIG. 4 is a vertical sectional side view of the other sealing device constituting the vacuum maintenance device.
[0052] 実施例 1の真空維持装置は、当該真空維持装置の密封具の一方である筒端固定部 材に筒軸方向の貫通ネジ穴を設けた構成とし、密封具の他方である螺合部材に、筒 内から筒端外に向けて前記貫通ネジ穴にネジ込まれて当該螺合部材の筒内側の外 周面に筒端方向に向けて複数の環状シール部材力 なる還状シール部材群を押す 段差面を有する段差部を設けた構成とすると共に、当該段差部の低周面が前記貫 通ネジ穴に嵌入可能に形成し、前記段差面と低周面と前記段差面に相対する筒端 固定部材の筒内側端面とで、凹部の開放側が筒内周面側に向いた断面凹状の還状 収納部を設けた構成としたものである。以下、これを詳述する。  [0052] The vacuum maintenance device of Example 1 has a configuration in which a through-hole in the cylinder axis direction is provided in a cylinder end fixing member, which is one of the sealing devices of the vacuum maintenance device, and is screwed, which is the other of the sealing devices. A return seal member which is screwed into the through screw hole from the inside of the tube to the outside of the tube end of the member and has a plurality of annular sealing members on the outer peripheral surface inside the tube of the screw member toward the tube end. The group is provided with a step having a step surface, and a low peripheral surface of the step is formed so as to be able to fit into the through screw hole, and the step surface, the low peripheral surface and the step surface are relatively opposed to each other. In this configuration, a return-shaped storage section having a concave cross-section with the open side of the recess facing the inner circumferential surface side of the cylinder is provided between the inner end surface of the cylindrical member and the fixing member. Hereinafter, this will be described in detail.
[0053] 図 1において、符号 1は透過性成分分離筒状部材 (筒体)、 2は混合物質の容器壁 面、 3は当該容器の外部に設置された真空発生手段、 10は真空維持装置である。 筒体 1は、真空発生手段 3によって中空部の筒内部 4が負圧とされると、筒外部の混 合物質 (図示せず)中の所要の成分即ち目的成分を筒壁を透過させて分離する機能 を備えている。このような筒体 1としては、例えば、筒外周表面にゼォライト膜が施され た多孔質素材を用いる。尚、ゼォライト膜が施された筒体については後述する。  In FIG. 1, reference numeral 1 denotes a permeable component separating tubular member (tubular body), 2 denotes a container wall surface of the mixed substance, 3 denotes vacuum generating means installed outside the container, and 10 denotes a vacuum maintaining device. It is. When a negative pressure is applied to the inside 4 of the hollow cylinder by the vacuum generating means 3, a desired component in a mixed substance (not shown) outside the cylinder, that is, a target component, is transmitted through the cylinder wall. It has a function to separate. As such a cylindrical body 1, for example, a porous material having a zeolite film applied to the outer peripheral surface of the cylindrical body is used. The cylinder provided with the zeolite film will be described later.
[0054] 真空維持装置 10は、筒内部 4の真空を維持させるため両筒端を密封する一対の 密封具 20、 30を備えており、これ等の密封具 20、 30は両筒端に各々着脱自在に装 着されている。  [0054] The vacuum maintaining device 10 is provided with a pair of seals 20, 30 for sealing both ends of the cylinder in order to maintain the vacuum inside the cylinder 4, and these seals 20, 30 are respectively provided at both ends of the cylinder. It is detachably mounted.
この実施例 1では、図示のように、両筒端に各々装着された密封具 20、 30のうちの 一方の密封具 20が、混合物質の容器壁面 2に係脱自在に固着され、且つ容器壁面 2に固着された密封具 20を貫通して容器外へと、筒内部 4に透過した目的成分を容 器の外部に取り出すための流出路 5が形成されて 、る。  In the first embodiment, as shown in the drawing, one of the seals 20, 30 attached to both ends of the cylinder is fixed to the container wall surface 2 of the mixed substance in a detachable manner, and An outflow passage 5 is formed through the sealing device 20 fixed to the wall surface 2 and out of the container to take out the target component permeated into the inside 4 of the cylinder to the outside of the container.
[0055] 尚、これらの密封具 20、 30や後述の金属リング 41aの材質は耐薬剤性や耐熱性を 勘案するとステンレス鋼が好適である。 [0055] The materials of the seals 20, 30 and a metal ring 41a described later have chemical resistance and heat resistance. Taking into account, stainless steel is preferred.
又、図示はしていないが、双方の密封具 20、 30を各々容器壁面に固着して各々に 同様の流出路を形成してもよい。この場合には、図 1における符号 30で示された密封 具が符号 20の密封具となる。  Although not shown, both of the sealing members 20 and 30 may be fixed to the wall surface of the container, respectively, to form the same outflow path for each. In this case, the seal indicated by reference numeral 30 in FIG.
[0056] 実施例 1に示す密封具 20、 30は、各々、筒端に固定される筒端固定部材 21、 31と 、当該筒端固定部材 21、 31に対して筒軸方向に螺合する螺合部材 22、 32とを備え ており、螺合部材 22、 32は、筒端固定部材 21、 31に形成された筒軸方向の貫通ネ ジ穴に対して筒内から筒端外に向けて、進退自在にネジ込まれている。 The sealing tools 20 and 30 shown in the first embodiment are screwed in the cylinder axis direction with the cylinder end fixing members 21 and 31 fixed to the cylinder end, respectively. Screw members 22 and 32 are provided. The screw members 22 and 32 extend from the inside of the cylinder to the outside of the cylinder end with respect to the through-holes formed in the cylinder end fixing members 21 and 31 in the cylinder axis direction. It is screwed back and forth freely.
尚、螺合部材 22、 23の筒端側端面には、筒端外側から当該螺合部材 22、 32をネジ 回すことができる回し手段として、例えばマイナスドライバー(図示せず)が係脱自在 に係合する係合手段 23、 33が設けられている。  In addition, a screwdriver (not shown), for example, a screwdriver (not shown) is detachably attached to the end surface of the screw member 22, 23 on the cylinder end side as a turning means capable of turning the screw member 22, 32 from the outside of the cylinder end. Engaging means 23, 33 for engaging are provided.
この係合手段 23、 33は、マイナスドライバ一様のもので無ければ図示のような凹部に 限らず凸部であってもよぐ要は、回し手段の差込側先端部と係脱自在に係合する 相補形状を持つ構成であればょ 、。  The engaging means 23, 33 are not limited to the concave parts as shown in the figure unless they are uniform with a flathead screwdriver, and may be convex parts. If it is a configuration with complementary shape to engage,
[0057] 螺合部材 22、 32には、ネジ込み方向後端側に筒体 1の内径に相応する大径部とし ての頭部 24、 34が形成され、当該頭部 24、 34のネジ込み方向先端側に段差 (以下 、段差部ともいう)を以つて形成された小径部としての低周面 25、 35が筒端固定部材 21、 31の貫通ネジ穴に嵌入可能に形成されている。 [0057] Heads 24, 34 as large diameter portions corresponding to the inner diameter of the cylinder 1 are formed on the screwing members 22, 32 at the rear end side in the screwing direction. A low-peripheral surface 25, 35 as a small-diameter portion formed with a step (hereinafter, also referred to as a step portion) at the front end side in the insertion direction is formed so as to be able to fit into the through screw holes of the cylinder end fixing members 21, 31. .
こうして、前記段差部の段差面 26、 36と低周面 25、 35と前記段差面 26、 36に相対 する筒端固定部材 21、 31の筒内側端面 28、 38とで、螺合部材 22、 32の外周面に 、換言すれば、筒端固定部材 21、 31及び螺合部材 22、 32と筒端側の筒内周面との 間に、断面凹状の凹部(当該凹部の底が低周面 25、 35)の開放側が筒内周面側に 向いた還状収納部 29、 39が設けられている。  In this way, the stepped surfaces 26 and 36 of the stepped portion, the low peripheral surfaces 25 and 35, and the tube inner end surfaces 28 and 38 of the tube end fixing members 21 and 31 opposed to the stepped surfaces 26 and 36 form the screwing member 22, 32, in other words, between the cylinder end fixing members 21 and 31 and the screwing members 22 and 32 and the cylinder inner peripheral surface on the cylinder end side, the concave portion having a concave cross section (the bottom of the concave portion has a low peripheral portion). Return-shaped storage portions 29 and 39 are provided with the open sides of the surfaces 25 and 35) facing the inner circumferential surface side of the cylinder.
[0058] この還状収納部 29、 39には、弾性を有する還状シール部材 40としての Oリングが二 つ(40a、 40b)と、この二つの Oリング 40a、 40b間に介在させた還状介在部材 41と しての金属リング 41aが低周面 25、 35に嵌合され、そのうち少なくとも金属リング 41 は筒軸方向に容易に摺動自在に嵌合されて 、る。 [0058] The return-shaped storage portions 29, 39 have two O-rings (40a, 40b) as return-shaped seal members 40 having elasticity, and a return-type seal interposed between the two O-rings 40a, 40b. A metal ring 41a as the intervening member 41 is fitted to the low peripheral surfaces 25 and 35, and at least the metal ring 41 is fitted so as to be easily slidable in the cylinder axis direction.
従って、螺合部材 22、 32の筒端固定部材 21、 31へのネジ込みに応じた挟圧で、筒 端方向に向けて、間に還状介在部材 41を介在させた複数の環状シール部材 40 (O リング 40a、 40b)からなる還状シール部材群を筒軸方向の両側力 押すことで、複 数の還状シール部材 40 (40a、 40b)を各々弾性変形させることができ、筒軸方向に わたって還状シール部材 40としての Oリング 40a、 40bの数に相応する複数段のシ 一ル部を設けることができる。 Therefore, the cylinder is pressed by the pinching pressure corresponding to the screwing of the screwing members 22 and 32 into the cylinder end fixing members 21 and 31. Toward the end direction, a plurality of annular seal members 40 (O-rings 40a, 40b) having an annular intervening member 41 interposed between the annular seal members 40 are pushed in both directions in the axial direction of the cylinder. Of the return seal member 40 (40a, 40b) can be elastically deformed, and a plurality of seal portions corresponding to the number of the O-rings 40a, 40b as the return seal member 40 in the axial direction of the cylinder. Can be provided.
[0059] 即ち、螺合部材 22、 32を筒端固定部材 21、 31〖こネジ込むと、二つの Oリング 40a、 40b及びその二つの Oリング 40a、 40bの間に介在する金属リング 41aが筒軸方向に スライドして、二つの Oリング 40a、 40b〖こより、筒内周面と螺合部材 22、 32の外周面 (具体的には低周面)との間の還状間隙が、筒中央側力も左右の筒端側に向力つて 2箇所で、順次的に密封されることになる (真空維持機能)。  That is, when the screw members 22 and 32 are screwed into the cylinder end fixing members 21 and 31, the two O-rings 40 a and 40 b and the metal ring 41 a interposed between the two O-rings 40 a and 40 b are formed. Sliding in the cylinder axis direction, the two O-rings 40a and 40b extend to form a return gap between the cylinder inner peripheral surface and the outer peripheral surfaces of the screw members 22 and 32 (specifically, the lower peripheral surface). The cylinder center side force is also directed to the left and right cylinder end sides, and the two parts are sequentially sealed (vacuum maintenance function).
[0060] この真空維持機能を、筒体 1の外部に存在する混合物質としての含水エタノールの 一又は二以上の水を主成分とする何れかの成分を、筒体 1の外部から内部に透過さ せる工程を継続して行う過程を維持する場合を例にして、次に説明する。  [0060] This vacuum maintaining function is performed by transmitting any one or more components of water-containing ethanol as a mixed substance existing outside the cylinder 1 from outside to inside the cylinder 1. The following is an example of a case where the process of continuously performing the step of performing the process is maintained.
[0061] 先ず、本過程の最初において、初めに含水アルコールと接触するのは筒中央側に 位置する Oリング 40a、 40a (以下、一次 Oリング或いは一次還状シール部材ともいう 。)である。  First, at the beginning of this process, the O-rings 40a, 40a (hereinafter, also referred to as primary O-rings or primary return-shaped sealing members) located at the center of the cylinder first come into contact with the hydrous alcohol.
筒体 1の両端の何れか一方又は双方において、この一次 Oリング 40a、 40aが本過程 の経過により例えば腐蝕してシール機能不全に陥ると、残る一つの、即ち筒端側に ある Oリング 40b、 40b (以下、二次 Oリングともいう)が含水エタノールに接触してこれ をシールし、引き続き本過程の真空状態を維持する。  If the primary O-rings 40a, 40a are corroded, for example, and become defective in the sealing function in the course of this process at one or both ends of the cylinder 1, the remaining one, that is, the O-ring 40b on the cylinder end side , 40b (hereinafter also referred to as secondary O-ring) comes into contact with and seals the hydrous ethanol, and subsequently maintains the vacuum state in this process.
このように、二次 Oリング 40b、 40bは一次 Oリング 40a、 40aのいわゆるバックアップ 機能を果たすことになるので、結果的に本過程における真空状態中断させることなく 長期にわたつて維持させることができる。  In this way, the secondary O-rings 40b, 40b perform the so-called backup function of the primary O-rings 40a, 40a, and as a result, can be maintained for a long time without interrupting the vacuum state in this process. .
[0062] Oリング 40a、 40bの圧縮密封は、筒端固定部材 21、 31と可動部材である螺合部 材 22、 32との組合せによる当該螺合部材 22、 32の移動即ちネジ込み量に応じた還 状収納部 29、 39の軸方向長さ間隔幅の調整で加減できる。 [0062] The compression sealing of the O-rings 40a, 40b depends on the movement of the screw members 22, 32 due to the combination of the tube end fixing members 21, 31 and the screw members 22, 32, which are movable members, that is, the amount of screwing. It can be adjusted by adjusting the axial length of the return groove storage sections 29 and 39 according to the adjustment.
具体的には、螺合部材 22、 32の係合部 23、 33に回し手段としてのマイナスドライバ 一(図示せず)を挿入し、「ネジ締め」の原理により嵌合収納部 29、 39の軸方向長さ 間隔幅を狭くすることにより、金属リング 41aを中にして左右の Oリング (40a、 40b及 び 40a、 40b)が圧縮され、変形する。 Specifically, a flathead screwdriver (not shown) as a turning means is inserted into the engaging portions 23, 33 of the screw members 22, 32, and the fitting storage portions 29, 39 are formed by the principle of "screw tightening". Axial length By narrowing the interval width, the left and right O-rings (40a, 40b and 40a, 40b) are compressed and deformed with the metal ring 41a inside.
[0063] 従って、筒内周面と螺合部材 (の低周面)との還状間隙を適正に密封するためには 、予め「ネジ締め」のトルク(回転力)による真空維持状態を確認して、密封耐久性の あるトルクを決定 (以下「決定トルク」と言う。)しておけば、その後において決定トルク の「ネジ締め」を行うことにより、容易且つ迅速に適正な密封が可能となる。 Therefore, in order to properly seal the return gap between the inner circumferential surface of the cylinder and the (lower circumferential surface of) the screwing member, the vacuum maintenance state by the torque (rotational force) of “screw tightening” is checked in advance. Then, if the torque with sealing durability is determined (hereinafter referred to as “determined torque”), appropriate torque can be easily and quickly sealed by tightening the determined torque. Become.
実施例 2  Example 2
[0064] 次に、実施例 2の、還状シール部材として三つの Oリングを筒体の筒内周面側に配 設した内側密封方式 (栓型)の真空維持装置を、図 5乃至図 8に基づいて説明する。 図 5は筒体に装着された真空維持装置の縦断側面図、図 6は真空維持装置を分解 した状態の縦断側面図、図 7は真空維持装置を構成する一方の密封具の縦断側面 図、図 8は真空維持装置を構成する他方の密封具の縦断側面図である。  Next, the inside-sealing-type (plug-type) vacuum maintenance device according to the second embodiment, in which three O-rings are provided on the inner peripheral surface side of the cylinder as return seal members, is shown in FIGS. Explanation will be made based on 8. FIG. 5 is a vertical side view of the vacuum maintenance device mounted on the cylinder, FIG. 6 is a vertical side view of the vacuum maintenance device in an exploded state, FIG. 7 is a vertical side view of one of the seals constituting the vacuum maintenance device, FIG. 8 is a vertical sectional side view of the other sealing device constituting the vacuum maintenance device.
尚、図において、上記実施例 1及び図 1乃至図 4に用いた符号と同じ符号は実質的 に同内容であるので説明を省略する。  In the drawings, the same reference numerals as those used in the first embodiment and FIGS. 1 to 4 have substantially the same contents, and thus description thereof will be omitted.
[0065] 実施例 2の構成は、実施例 1における還状収納部 29、 39の軸方向長さ間隔幅を長 くして、この還状収納部 29、 39に二つの Oリング即ち一次 Oリング 40a、二次 Oリング 40b〖こカロえ、更に三次 Oリング 40cを金属リング 41bを介して配設した構成としたもの あり、その他の構成及び作用は実施例 1と実質的に同様である。  The configuration of the second embodiment is different from the first embodiment in that the axial length of the return-shaped storage portions 29 and 39 in the first embodiment is increased, and two O-rings, ie, primary O-rings, are provided in the return-shaped storage portions 29 and 39. 40a, a secondary O-ring 40b, and a tertiary O-ring 40c disposed via a metal ring 41b. Other configurations and operations are substantially the same as those of the first embodiment.
[0066] 即ち、上記実施例 1において説明した本過程において、この実施例 2でも、初めに含 水アルコールと接触するのは筒中央側に位置する一次 Oリング 40a、 40aであり、筒 体 1の両端の何れか一方又は双方において、この一次 Oリング 40a、 40aが本過程の 経過により例えば腐蝕してシール機能不全に陥ると、次に位置する二次 Oリング 40b 、 40bが含水エタノールに接触してこれをシールして引き続き本過程の真空状態を 維持し、更に、この二次 Oリング 40b、 40bが腐蝕してシール機能不全に陥ると、最後 に位置する三次 Oリング 40c、 40cが含水エタノールに接触してこれをシールして引 き続き本過程の真空状態を維持する。  That is, in the process described in the first embodiment, also in the second embodiment, the primary O-rings 40a and 40a located at the center of the cylinder first come into contact with the hydroalcoholic, and the first cylinder 1 If the primary O-rings 40a, 40a are corroded, for example, due to the seal failure due to the course of this process, at one or both ends of the both ends, the secondary O-rings 40b, 40b located next contact the aqueous ethanol. The secondary O-rings 40b, 40b are corroded and fail to seal, and the last tertiary O-rings 40c, 40c are wetted. It comes in contact with ethanol, seals it, and continues to maintain the vacuum state in this process.
[0067] このように、二次 Oリング 40b、 40bは一次 Oリング 40a、 40aの、三次リング 40c、 40c は二次 Oリング 40b、 40bのいわゆるバックアップ機能を順次的に果たすことになるの で、結果的に上記実施例 1に較べて本過程における真空状態を中断させることなく 更に長期にわたって維持させることができる。 As described above, the secondary O-rings 40b, 40b sequentially perform the so-called backup function of the primary O-rings 40a, 40a, and the tertiary rings 40c, 40c perform the secondary O-rings 40b, 40b. As a result, the vacuum state in this process can be maintained for a longer period of time without interruption as compared with the first embodiment.
[0068] 本発明に係る上記実施例 1及び 2の内側密封方式の栓型の真空維持装置によれば 、還状収納部 29、 39の軸方向長さ間隔幅を更に長く形成して、この還状収納部 29、 39に、四つ以上の Oリングを金属リング (41aや 41b)を介して交互に配設した構成と することによって、更に長々期にわたって本過程の真空状態を中断することなく維持 させることがでさる。 [0068] According to the plug-type vacuum maintenance device of the inside sealing type of the first and second embodiments according to the present invention, the return-length storage portions 29 and 39 are formed so that the axial length interval width is further increased. The vacuum state of this process is interrupted for a longer period by using a structure in which four or more O-rings are alternately arranged via metal rings (41a and 41b) in the return letter storage sections 29 and 39. It can be maintained without any problems.
実施例 3  Example 3
[0069] 次に、実施例 3の、還状シール部材として二つの Oリングを筒体の外周面側に配設 した外側密封方式 (蓋型)の真空維持装置を、図 9乃至図 12に基づいて説明する。 図 9は筒体に装着された真空維持装置の縦断側面図、図 10は真空維持装置を分解 した状態の縦断側面図、図 11は真空維持装置を構成する一方の密封具の縦断側 面図、図 12は真空維持装置を構成する他方の密封具の縦断側面図である。  Next, an outer sealing type (lid type) vacuum maintenance device in which two O-rings are provided as return seal members on the outer peripheral surface side of the cylindrical body according to the third embodiment is shown in FIGS. 9 to 12. It will be described based on the following. Fig. 9 is a vertical side view of the vacuum maintenance device mounted on the cylinder, Fig. 10 is a vertical side view of the vacuum maintenance device in an exploded state, and Fig. 11 is a vertical side view of one of the seals constituting the vacuum maintenance device. FIG. 12 is a vertical sectional side view of the other sealing device constituting the vacuum maintenance device.
[0070] 実施例 3の真空維持装置は、当該真空維持装置を構成する一方の密封具である 筒端固定部材を、筒端側の筒外周面を覆う筒外周覆い部と当該筒外周覆い部と連 続して筒端側を覆う冠状部とを備えた構成とし、他方の密封具である螺合部材に設 けられた貫通穴に筒端が嵌入する構成として、貫通穴を介して筒中央側に嵌挿され た螺合部材を筒外周覆!ヽ部の内周面と螺合させつつ、当該筒外周覆!ヽ部と筒外周 面との還状間隙に進退自在にネジ込み可能にすると共に、前記筒端固定部材の筒 外周覆い部及び冠状部と螺合部材の進入側端面とで、凹部の開放側が筒外周面側 に向いた断面凹状の還状収納部を設けた構成としたものである。以下、これを詳述 する。  [0070] In the vacuum maintenance device of the third embodiment, a cylinder end fixing member, which is one of the seals constituting the vacuum maintenance device, is provided with a cylindrical outer peripheral covering portion that covers the outer peripheral surface of the cylindrical end and a cylindrical outer peripheral covering portion. And a crown-shaped portion that covers the cylinder end side in a continuous manner, and the cylinder end is fitted into a through-hole provided in a screwing member that is the other sealing member. The screwing member inserted at the center is covered with the outer periphery of the cylinder! While screwing with the inner peripheral surface of the ヽ part, the outer peripheral cover of the cylinder is covered! In addition to allowing the screw to freely advance and retreat into the return gap between the ヽ portion and the outer peripheral surface of the cylinder, the open side of the concave portion is formed between the outer peripheral covering portion and the crown portion of the cylindrical end fixing member and the entry side end surface of the screwing member. It has a configuration in which a return-shaped storage section having a concave cross section facing the outer peripheral surface side of the cylinder is provided. Hereinafter, this will be described in detail.
尚、上記実施例 1乃至 2及び図 1乃至図 8に用いた符号と同じ符号は実質的に同内 容であるので説明を省略する。  Note that the same reference numerals as those used in the first and second embodiments and FIGS. 1 to 8 have substantially the same contents, and a description thereof will be omitted.
[0071] 図 9において、真空維持装置 100は、筒内部 4の真空を維持させるため両筒端を密 封する一対の密封具 200、 300を備え、これ等の密封具 200、 300は両筒端に各々 着脱自在に装着されている。 In FIG. 9, the vacuum maintaining device 100 includes a pair of seals 200 and 300 that seal both ends of the cylinder in order to maintain a vacuum inside the cylinder 4. Each is detachably attached to the end.
この実施例 2では、図示のように、両筒端に各々装着された密封具 200、 300のうち の一方の密封具 200は、混合物質の容器壁面 2に係脱自在に固着され、且つ容器 壁面 2に固着された密封具 200を貫通して容器外へと、透過成分即ち筒壁を透過し た目的成分を取り出す流出路 5が形成されて ヽる。 In the second embodiment, as shown in FIG. One of the seals 200 is detachably fixed to the container wall 2 of the mixed substance, and penetrates through the seal 200 fixed to the container wall 2 to the outside of the container to pass through the permeated component, that is, the cylindrical wall. An outflow channel 5 for extracting the target component is formed.
しかし、上記実施例 1及び 2と同様に、これに限らず、図示はしていないが、双方の密 封具 200、 300を各々容器壁面 2に固着して同様の流出路(図示せず)を各々に形 成してちょい。  However, similarly to Embodiments 1 and 2, the present invention is not limited to this, and although not shown, both sealing tools 200 and 300 are fixed to the container wall 2 respectively, and a similar outflow path (not shown) To each of them.
[0072] 実施例 3に示す密封具 200、 300は、両筒端に固定される筒端固定部材 210、 310 と当該筒端固定部材 210、 310に対して筒軸方向に螺合する螺合部材 220、 320と を、上記実施例 1及び 2と同様に備えているが、具体的構成において、筒端固定部材 210、 310では、筒端側の筒外周面を覆う筒外周覆い部 211、 311と当該筒外周覆 い部 211、 311と連続して筒端側を覆う冠状部 212、 312とを備えた構成としたことが 異なる。  [0072] Sealing tools 200 and 300 shown in Embodiment 3 are cylinder end fixing members 210 and 310 fixed to both cylinder ends, and screw engagement with the cylinder end fixing members 210 and 310 in the cylinder axis direction. The members 220 and 320 are provided in the same manner as in the first and second embodiments, but in a specific configuration, in the cylinder end fixing members 210 and 310, the cylinder outer peripheral covering portion 211 that covers the cylinder outer peripheral surface on the cylinder end side, The difference is that a configuration is provided that includes a crown portion 212 and 312 that continuously covers the cylinder end side with the cylinder outer peripheral covering portions 211 and 311.
[0073] 又、螺合部材 220、 320では、筒端が嵌入する貫通穴 221、 321を備えた筒型の構 成とし、当該貫通穴 221、 321を介して、螺合部材 220、 320を筒中央側に嵌挿した 状態力も筒端側に向けて、筒外周覆い部 211、 311の内周面と螺合部材 220、 320 の外周面とを螺合させつつ、当該筒外周覆い部 211、 311と筒外周面との還状間隙 に、螺合部材 220、 320の筒端側を進退自在にネジ込み可能にした構成が異なる。  Further, the screwing members 220 and 320 are formed in a cylindrical configuration having through holes 221 and 321 into which the ends of the cylinders are fitted, and the screwing members 220 and 320 are inserted through the through holes 221 and 321. The state force inserted into the center of the cylinder is also directed toward the end of the cylinder, and the inner peripheral surfaces of the outer peripheral covering portions 211 and 311 and the outer peripheral surfaces of the threaded members 220 and 320 are screwed together while the outer peripheral covering portion 211 The configuration is different in that the cylinder ends of the screw members 220 and 320 can be screwed forward and backward freely into the return gap between the cylinder and 311 and the outer peripheral surface of the cylinder.
[0074] そして更に、還状収納部 290、 390力 筒端固定部材 210、 310の筒外周覆い部 21 1、 311及び冠状部 212、 312と螺合部材 220、 320のネジ込み側先端面とで、凹部 の開放側が筒外周面側に向いた断面凹状にされた構成で異なる。  [0074] Further, the return letter storage portions 290, 390 force and the outer peripheral cover portions 211, 311 and the crown portions 212, 312 of the tube end fixing members 210, 310 and the screw-side end surfaces of the screwing members 220, 320 Therefore, the difference is in the configuration in which the open side of the concave portion is concave in cross section facing the outer peripheral surface of the cylinder.
即ち、この還状収納部 290、 390は、螺合部材 220、 320のネジ込み先端側端面と 当該ネジ込み先端側端面に相対する筒端固定部材 210、 310の冠状部 212、 312 の内面と筒端固定部材 210、 310の筒端覆い部 211、 311の内面とで構成されてい る。  That is, the return-shaped housing portions 290 and 390 are formed by screwing tip end surfaces of the screwing members 220 and 320 and inner surfaces of the crown portions 212 and 312 of the cylinder end fixing members 210 and 310 facing the screwing tip end surfaces. It is constituted by the inner surfaces of the tube end covering portions 211 and 311 of the tube end fixing members 210 and 310.
[0075] この還状収納部 290、 390には、上記実施例 1と同様に、還状シール部材 40として の Oリングが二つ(40a、 40b)と、この二つの Oリング 40a、 40b間に介在させた還状 介在部材 41としての金属リング 41aが、筒外周面に嵌合され (嵌合が筒外周面であ ることは上記実施例 1及び 2とことなる)、そのうち少なくとも金属リング 41aは筒軸方向 に容易に摺動自在に嵌合されて!/、る。 [0075] As in the first embodiment, two return rings (40a, 40b) as return return seal members 40 are provided in the return return storage portions 290, 390, and between the two O-rings 40a, 40b. A metal ring 41a as a return interposition member 41 interposed between the cylinders is fitted to the outer peripheral surface of the cylinder (the fitting is the outer peripheral surface of the cylinder as in Examples 1 and 2). 41a is the cylinder axis direction Easily and slidably fitted! /
[0076] 従って、上記実施例 1及び 2と同様に、螺合部材 220、 320の筒端固定部材 210、 3 10へのネジ込みに応じた挟圧で、筒端方向に向けて、間に還状介在部材 41 (金属 リング 41a)を介在させた複数の環状シール部材 40 (Oリング 40a、 40b)力 なる還 状シール部材群を押すことで、各還状シール部材 40を弾性変形させることができ、 筒軸方向にわたって還状シール部材としての Oリング 40a、 40bの数に相応する複数 段のシール部を設けることができる。  Accordingly, similarly to the above-described first and second embodiments, the pinching force according to the screwing of the screwing members 220 and 320 into the cylinder end fixing members 210 and 310 causes the gap between the screw members 220 and 320 toward the cylinder end. The plurality of annular seal members 40 (O-rings 40a, 40b) having the return-shaped intervening members 41 (metal rings 41a) interposed therebetween are used to press the return-shaped seal members that have a large force to elastically deform each of the return-shaped seal members 40. A plurality of seal portions corresponding to the number of O-rings 40a and 40b as return seal members can be provided in the cylinder axis direction.
[0077] 尚、螺合部材 220、 230の筒端固定部材 210、 310へのネジ込みは、  [0077] The screwing of the screw members 220, 230 into the tube end fixing members 210, 310 is performed as follows.
ネジ込み方向後端側の螺合部材 220、 230の筒中央側端部外周面に、筒外から当 該螺合部材 220、 230をネジ回す回し手段(図示せず)が係合する係合手段として、 回し手段の少なくとも一部が係合する、例えばナット形状等(図示せず)としておけば よい。この係合手段も実施例 1及び 2とは異なる。  Engagement in which screwing means (not shown) for screwing the screwing members 220 and 230 from outside the cylinder is engaged with the outer peripheral surface of the screwing members 220 and 230 on the rear end side in the screwing direction from the outside of the cylinder. As the means, at least a part of the turning means may be engaged, for example, a nut shape or the like (not shown). This engaging means is also different from the first and second embodiments.
[0078] 上記実施例 1にお!/、て説明した本過程を例にして説明すれば、この実施例 3にお ヽ ても、先ず、本過程の最初において、初めに含水アルコールと接触するのは筒中央 側に位置する Oリング 40a、 40a (以下、一次 Oリングともいう。)であり、筒体 1の両端 の何れか一方又は双方において、この一次 Oリング 40a、 40aが本過程の経過により 例えば腐蝕してシール機能不全に陥ると、残る一つの Oリング 40b、 40b (以下、二次 Oリングともいう)が含水エタノールに接触してこれをシールし、引き続き本過程の真 空状態を維持する。  [0078] If the present process described in Example 1 above is described as an example, in Example 3, first, at the beginning of the process, first, the aqueous alcohol is contacted. These are O-rings 40a, 40a (hereinafter also referred to as primary O-rings) located at the center of the cylinder, and at one or both ends of the cylinder 1, the primary O-rings 40a, 40a are used in this process. If, for example, corrosion occurs and the sealing function fails due to the process, the remaining one O-ring 40b, 40b (hereinafter, also referred to as “secondary O-ring”) comes into contact with the water-containing ethanol to seal it, and then the vacuum state of this process continues To maintain.
このように、二次 Oリング 40b、 40bは一次 Oリング 40a、 40aのいわゆるバックアップ 機能を果たすことになるので、結果的に本過程における真空状態中断させることなく 長期にわたつて維持させることができる。  In this way, the secondary O-rings 40b, 40b perform the so-called backup function of the primary O-rings 40a, 40a, and as a result, can be maintained for a long time without interrupting the vacuum state in this process. .
[0079] Oリング 40a、 40bの圧縮密封は、上記実施例 1及び 2と同様に、筒端固定部材 21 0、 310と可動部材である螺合部材 220、 320との組合せによる当該螺合部材 220、 320の移動即ちネジ込み量に応じた還状収納部 290、 390の軸方向長さ間隔幅の 調整で加減できる。 [0079] The compression sealing of the O-rings 40a and 40b is performed by a combination of the cylinder end fixing members 210 and 310 and the screw members 220 and 320 that are movable members, as in the first and second embodiments. It can be adjusted by adjusting the distance between the 220 and 320, that is, the axial length of the return groove storage sections 290 and 390 according to the screwing amount.
従って、具体的には、螺合部材 220、 320の係合部 23、 33に回し手段としてのマイ ナスドライバー(図示せず)を挿入し、「ネジ締め」の原理により嵌合収納部 29、 39の 軸方向長さ間隔幅を狭くすることにより、金属リング 41aを中にして左右の Oリング (4 0a、墨及び 40a、 40b)力圧縮され、変形する。 Therefore, specifically, a minus screwdriver (not shown) as a turning means is inserted into the engaging portions 23 and 33 of the screwing members 220 and 320, and the fitting storage portion 29 and 39 of By reducing the axial length interval width, the right and left O-rings (40a, black and 40a, 40b) are compressed by the metal ring 41a and deformed.
[0080] 従って、又、上記実施例 1及び 2と同様に、筒内周面と螺合部材 (の低周面)との還 状間隙を適正に密封するために、予め「ネジ締め」のトルク(回転力)による真空維持 状態を確認して、密封耐久性のあるトルクを決定 (以下「決定トルク」と言う。 )しておけ ば、その後において決定トルクの「ネジ締め」を行うことにより、容易且つ迅速に適正 な密封が可能となる。 [0080] Therefore, in the same manner as in Examples 1 and 2, in order to properly seal the return gap between the inner peripheral surface of the cylinder and the (lower peripheral surface of) the screwing member, "screw-tightening" is performed in advance. After confirming the state of vacuum maintenance by torque (rotational force), determine the torque with sealing durability (hereinafter referred to as “determined torque”), and then “tighten” the determined torque. In addition, appropriate sealing can be easily and quickly performed.
実施例 4  Example 4
[0081] 次に、実施例 4の、還状シール部材として三つの Oリングを筒体の筒外周面側に配 設した外側密封方式 (蓋型)の真空維持装置を、図 13乃至図 16に基づいて説明す る。  Next, an outer sealing type (lid type) vacuum maintenance device of Example 4 in which three O-rings are provided on the outer peripheral surface side of the cylindrical body as return seal members is shown in FIGS. It will be explained based on.
図 13は筒体に装着された真空維持装置の縦断側面図、図 14は真空維持装置を分 解した状態の縦断側面図、図 15は真空維持装置を構成する一方の密封具の縦断 側面図、図 16は真空維持装置を構成する他方の密封具の縦断側面図である。 尚、図において、上記実施例 1乃至 3及び図 1乃至図 12に用いた符号と同じ符号は 実質的に同内容であるので説明を省略する。  Fig. 13 is a vertical side view of the vacuum maintenance device mounted on the cylinder, Fig. 14 is a vertical side view of the vacuum maintenance device in a disassembled state, and Fig. 15 is a vertical side view of one of the seals constituting the vacuum maintenance device. FIG. 16 is a vertical sectional side view of the other sealing device constituting the vacuum maintenance device. In the drawings, the same reference numerals as those used in the first to third embodiments and FIGS. 1 to 12 have substantially the same contents, and thus description thereof will be omitted.
[0082] 実施例 4の構成は、実施例 3における還状収納部 290、 390の軸方向長さ間隔幅 を長く形成して、この還状収納部 290、 390に二つの Oリング即ち一次 Oリング 40a、 二次 Oリング 40bにカ卩え、更に三次 Oリング 40cを金属リング 41bを介して配設した構 成としたものある。 The configuration of the fourth embodiment is different from the third embodiment in that the axial lengths of the return-shaped storage portions 290 and 390 in the third embodiment are formed to be longer, and two O-rings, that is, primary O-rings are provided in the return-shaped storage portions 290 and 390. There is a configuration in which a ring 40a and a secondary O-ring 40b are put together, and a tertiary O-ring 40c is further provided via a metal ring 41b.
その他の構成及び作用は実施例 1乃至 3と実質的に同様である。  Other configurations and operations are substantially the same as those of the first to third embodiments.
[0083] 上記実施例 1にお!/、て説明した本過程を例にして説明すれば、この実施例 4にお ヽ ても、初めに含水アルコールと接触するのは筒中央側に位置する一次 Oリング 40a、 40aであり、筒体 1の両端の何れか一方又は双方において、この一次 Oリング 40a、 4 Oaが本過程の経過により例えば腐蝕してシール機能不全に陥ると、次に位置する二 次 Oリング 40b、 40bが含水エタノールに接触してこれをシールして弓 Iき続き本過程 の真空状態を維持し、この二次 Oリング 40b、 40bが腐蝕してシール機能不全に陥る と、最後に位置する三次 Oリング 40c、 40cが含水エタノールに接触してこれをシール して弓 Iき続き本過程の真空状態を維持する。 [0083] If the process described in Example 1 above is described as an example, also in Example 4, the first contact with the hydrous alcohol is located at the center of the cylinder. The primary O-rings 40a, 40a are located at one or both ends of the cylindrical body 1.If the primary O-rings 40a, 4Oa are corroded due to the course of this process, for example, and a seal failure occurs, the next position is determined. The secondary O-rings 40b, 40b come into contact with the aqueous ethanol to seal it and maintain the vacuum in the process by bow I, and the secondary O-rings 40b, 40b are corroded and cause a sealing failure. And the tertiary O-ring 40c, 40c located at the end contacts the aqueous ethanol and seals it. Then, maintain the vacuum in this process.
[0084] このように、上記実施 f列 3と同様に、二次 Oリング 40b、 40bは一次 Oリング 40a、 40a の、三次リング 40c、 40cは二次 Oリング 40b、 40bのいわゆるバックアップ機能を順 次果たすことになるので、結果的に上記実施例 3に較べて本過程における真空状態 を中断させることなく更に長期にわたって維持させることができる。  As described above, similarly to the above-mentioned embodiment f row 3, the secondary O-rings 40b, 40b have the so-called backup function of the primary O-rings 40a, 40a, and the tertiary rings 40c, 40c have the so-called backup function of the secondary O-rings 40b, 40b. As a result, the vacuum state in this process can be maintained for a longer period of time without interruption as compared with the third embodiment.
[0085] 上記実施例 1乃至 4の真空維持装置によれば、筒体 1の両端の何れにおいても、二 以上の環状シール部材即ち複数の Oリングが一次 Oリング力 最終次 Oリングに至る まで順次、前次 Oリングの腐食により後次 Oリングが外部に存在する物質と接触する こととなり、後次 Oリングが前次 Oリングのバックアップ機能を有することなり、極めて長 期間の耐久性をその構造上維持することが可能となる。  [0085] According to the vacuum maintaining devices of Examples 1 to 4, at both ends of the cylindrical body 1, two or more annular seal members, that is, a plurality of O-rings are used until the primary O-ring force reaches the final O-ring. Sequentially, the corrosion of the primary O-ring causes the secondary O-ring to come into contact with substances existing outside, and the secondary O-ring has a backup function of the primary O-ring, thus ensuring extremely long-term durability. It is possible to maintain the structure.
尚、二以上の Oリングとは、実際の利用においては具体的に三つの Oリングや四つの Oリングを用いて構成することも可能であり、この場合、二つの Oリングを用いて構成 した場合に比較して、当然のことながら長期の耐久性を有することなる。  It should be noted that two or more O-rings can be specifically configured using three O-rings or four O-rings in actual use.In this case, two or more O-rings are used. As a matter of course, it has long-term durability as compared with the case.
[0086] 又、ガラス及び樹脂に比較して、 Oリングが一定の弾性を有するため振動吸収機能 が向上し、ウォータハンマによる衝撃により筒体や密封具の筒端固定部材ゃ螺合部 材ゃ Oリング等に破損や変形を生じる可能性を極めて少なくすることができると共に、 筒体と真空維持装置とを一組として取り替えを行う必要性を要しな 、ため、耐久性を 勘案し、例えば Oリングや筒体ごとの更新が可能となり、結果的に費用又は労力の無 駄を大きく省くことができる。  [0086] Also, compared to glass and resin, the O-ring has a certain elasticity, so that the vibration absorbing function is improved, and the cylinder end fixing member of the cylinder or the sealing member {the threaded member} due to the impact of the water hammer. The possibility of causing breakage or deformation of the O-ring etc. can be extremely reduced, and it is not necessary to replace the cylinder and the vacuum maintenance device as a set, so in consideration of durability, for example, Renewal of each O-ring and cylinder is possible, and as a result, waste of cost or labor can be largely saved.
[0087] 又、耐熱及び耐薬剤性を有する Oリングを環状シール部材として本発明の真空維 持装置に使用することにより、シール部材 (密封材)起因の有害物質の製品への溶 出懸念が解消することとなる。  [0087] In addition, by using an O-ring having heat resistance and chemical resistance as an annular seal member in the vacuum maintenance device of the present invention, there is a concern that harmful substances caused by the seal member (sealing material) may be dissolved into the product. Will be resolved.
実施例 5  Example 5
[0088] 実施例 5は、上記実施例 1及び 2において、栓型の真空維持装置 10が装着される筒 体 (透過性成分分離部材) 1の改良に関するもので、ゼォライト膜が施されていない 筒体の部分、例えば、筒端面及び当該筒端面に連続して少なくとも複数段の筒奥に 向けて設けられた還状シール部材群のうち最奥に設けられた環状シール部材が接 するまでの筒内周面側或いは最奥に位置する環状シール部材に対応する筒外周面 側に、透過性成分の透過を防ぐ不透過処理を施すことによって、本発明の真空維持 装置の実効性を高めたものである。 Example 5 relates to the improvement of the cylinder (permeable component separation member) 1 to which the plug-type vacuum maintenance device 10 is attached in the above-described Examples 1 and 2, and the zeolite membrane is not applied. A portion of the cylindrical body, for example, the end face of the cylinder and a ring-shaped seal member provided at the innermost end of a group of return-shaped seal members provided at least in a plurality of stages continuously toward the inner end of the cylinder until they come into contact with each other. The outer peripheral surface of the cylinder corresponding to the annular seal member located on the inner peripheral surface side or at the innermost position By applying an impermeability treatment on the side to prevent the permeation of the permeable component, the effectiveness of the vacuum maintenance device of the present invention is enhanced.
[0089] 以下、図 17乃至図 19に基づいてこれを説明する。 Hereinafter, this will be described with reference to FIGS. 17 to 19.
図 17は筒外周面にのみゼォライト膜が施された構成の説明図、図 18は筒外周面か ら筒端面を経て筒内部側にまでゼォライト膜が施された構成の説明図、図 19は不透 過処理が施された構成の説明図である。  FIG. 17 is an explanatory view of a configuration in which the zeolite film is applied only to the outer peripheral surface of the cylinder, FIG. 18 is an explanatory view of a configuration in which the zeolite film is applied from the outer peripheral surface of the cylinder to the inner side of the cylinder through the end surface of the cylinder, and FIG. FIG. 3 is an explanatory diagram of a configuration that has been subjected to opacity processing.
尚、図 17乃至図 19においては、何れも作図の都合上、一つの環状シール部材 (一 次 Oリング 40a)と一つの還状介在部材 (金属リング 41a)を示し、他の環状シール部 材即ち二次 Oリング 40b)以下を省略している。  17 to 19, one annular seal member (primary O-ring 40a) and one return interposition member (metal ring 41a) are shown for convenience of drawing, and the other annular seal members are shown. That is, the secondary O-ring 40b) and the subsequent steps are omitted.
[0090] 図 17において、図中の矢印で示すように、ゼォライト膜 6が筒の外周面 (筒外周面) に施されただけの筒体 1では、ゼォライト膜 1を透過しない成分即ち分離目的成分で はない混合物質中の成分 (以下、目的外成分ともいう)が、ゼォライト膜 6が施されて いない筒端面やエッジ部(図中の丸印で示す)から筒壁内に浸透し、筒壁内を通つ て(還状シール部材 40としての Oリング 40aを超えて)、筒内部 4に浸透する虞があり 、ゼオライト膜 6を経ない目的外成分の浸透 (リーク)は、当然のことながら、目的成分 の精製度の低下を招き、製品品質を劣化させる、という問題がある。  In FIG. 17, as shown by the arrow in the figure, in the cylindrical body 1 in which the zeolite membrane 6 is merely provided on the outer peripheral surface of the cylinder (the outer peripheral surface of the cylinder), the component that does not pass through the zeolite membrane 1, ie, the separation purpose Components in the mixed substance that are not components (hereinafter, also referred to as unintended components) penetrate into the cylinder wall from the cylinder end face or edge portion (shown by a circle in the figure) where the zeolite membrane 6 is not applied, There is a risk of passing through the inside of the cylinder wall (beyond the O-ring 40a as the return seal member 40) and penetrating into the inside 4 of the cylinder, and the permeation (leakage) of unintended components that do not pass through the zeolite membrane 6 naturally occurs. However, there is a problem that the degree of purification of the target component is reduced and the product quality is deteriorated.
[0091] 図 18は、前記問題を解消するための一手段として、筒外周面から筒端面を経て、 筒端側の筒内部側にまでゼォライト膜 6を一連に施した構成としたものである。  FIG. 18 shows, as one means for solving the above problem, a structure in which the zeolite film 6 is applied in a series from the outer peripheral surface of the cylinder to the inner side of the cylinder at the end of the cylinder through the end surface of the cylinder. .
筒内部側に施されるゼォライト膜 6は、筒端側から最奥に位置する最終次 Oリング(図 示せず)を越えて製膜することが好ましい。この場合、筒壁の筒端側を予め曲面化、 例えば図示のように筒壁の端を断面 U字状に曲面化しておく方が製膜し易い。  It is preferable that the zeolite film 6 applied on the inner side of the cylinder be formed beyond the final next O-ring (not shown) located at the innermost position from the end of the cylinder. In this case, it is easier to form a film if the end of the cylinder wall is curved in advance, for example, the end of the cylinder wall is curved into a U-shaped cross section as shown in the figure.
このように製膜することにより、ゼォライト膜 6を経ない目的外成分の浸透 (リーク)を 防ぐことができる。  By forming the film in this manner, permeation (leakage) of unintended components that do not pass through the zeolite membrane 6 can be prevented.
しかし、このような製膜は、技術的には可能であるが、加工の手間が掛カる上に歩 留まりが悪いため、現状の製膜設備での工業ィ匕では経済的でなぐ問題がある。  However, such film formation is technically feasible, but requires a lot of processing time and a low yield. is there.
[0092] 図 19は、更にこの問題を解消するため、目的外成分が浸透する虞のある筒端面及 び筒端側の筒内周面或いは更に筒外周面にわたって、目的及び目的外を問わず、 不透過処理を施した構成としたものである。 図示の例では、筒外周面から筒端面を経て筒内部側の最奥に位置する還状リング 部材としての oリング (最終次 oリング)が接している部位に対応するまでの筒内周面 に不透過処理 7を一連に施した構成としてある。 [0092] FIG. 19 shows, in order to further solve this problem, regardless of the purpose and non-purpose, over the cylinder end surface where the unintended components may penetrate and the inner peripheral surface of the cylinder end or the outer peripheral surface of the cylinder. It is configured to have an opaque treatment. In the illustrated example, the inner peripheral surface of the cylinder from the outer peripheral surface of the cylinder to the portion where the o-ring (final next o-ring) as the return ring member located at the innermost position on the inner side of the cylinder through the cylinder end surface is in contact. And a series of opacity treatments 7.
しかし、この例に限らず、必ずしも筒端側の筒外周面側力 の必要はなぐ例えば図 示されて 、な 、が、ゼォライト膜が筒外周面の筒端にまで施されて 、る場合には筒 端面及筒端面から連続的に筒内部側即ち所要の筒内周面にかけて不透過処理 7を 施せばよいし、混合物質の成分如何によつては、単に、筒端から筒内周面、或いは、 少なくとも、環状シール部材としての Oリングが接する筒内周面の部分に適宜不透過 処理 7を施すだけでもよ ヽ。  However, the present invention is not limited to this example. For example, it is not always necessary to apply the force on the outer peripheral surface of the cylinder at the end of the cylinder. May be subjected to impermeability treatment 7 continuously from the end face of the cylinder and the end face of the cylinder to the inner side of the cylinder, that is, the required inner peripheral surface of the cylinder. Alternatively, it is only necessary to appropriately perform the impermeability treatment 7 on at least the portion of the inner peripheral surface of the cylinder that is in contact with the O-ring as the annular sealing member.
[0093] 又、筒端側の筒外周面に対する不透過処理は、目的外成分の浸透防止の目的に応 じて、例えば、筒端面力も図示のように連続して、或いは理想的には筒端力も筒内に 設けられた最奥の還状シール部材(図示せず)に対応するまでの筒外周面に、不透 過処理 7を施すとよい。  [0093] In addition, the impermeability treatment for the outer peripheral surface of the cylinder at the cylinder end may be performed, for example, by continuously changing the cylinder end face force as shown in the drawing, or ideally, in accordance with the purpose of preventing penetration of unintended components. The impermeability treatment 7 may be applied to the outer peripheral surface of the cylinder until the end force corresponds to the innermost return seal member (not shown) provided in the cylinder.
尚、図 18で説明したように、この場合、筒壁の筒端側を予め曲面化しておく方が好 ましいが、図 19の丸印に示すように、この曲面化処理は必ずしも必要ではない。  In this case, as described with reference to FIG. 18, in this case, it is preferable that the cylinder end side of the cylinder wall is curved in advance, but as shown by a circle in FIG. 19, this curved processing is not always necessary. Absent.
[0094] 不透過処理剤 7としては、筒体 1の多孔質表面を無孔化し得る素材であればよぐ 例えば、溶融硝子或!ゝは耐溶剤榭脂類等を釉薬としてシール処理する。  [0094] The impermeable treatment agent 7 may be any material that can make the porous surface of the cylindrical body 1 non-porous. For example, molten glass or glass is sealed with a solvent-resistant resin or the like as a glaze.
釉薬は、例えば、媒溶剤、珪酸、カオリン等の市販材料と水とで調合する。媒溶剤と しては、珪砂ゃ石英等の珪酸を溶融させる長石や鉛、硼酸、石灰、灰類等のアルカリ を媒溶剤 (アルカリ媒溶剤)として用いる。珪酸は過溶融を適度に抑制する機能も果 たす。カオリンは素地に密着させる働きをし、粘土類である。  The glaze is prepared, for example, by mixing a commercially available material such as a solvent, silicic acid, and kaolin with water. As the solvent, an alkali such as feldspar or lead, boric acid, lime, ash or the like which melts silicic acid such as silica sand or quartz is used as the solvent (alkaline solvent). Silicic acid also functions to moderately suppress overmelting. Kaolin is a clay that functions to adhere to the substrate.
[0095] 不透過処理 7としての釉薬シール処理は、このように調整した釉薬を同量の水に混合 させた混合スラリー溶液中に、筒体の処理すべき所要の面を浸漬させる。浸漬処理 は溶融処理後十分シールさせるために何回でもすることができる。尚、浸漬に限らず 、筆、刷毛或いはその他の道具を用いて混合スラリーを筒体の所要部分 (面)に塗布 しておこなってもよ!/、。  [0095] In the glaze sealing treatment as the impermeability treatment 7, the required surface of the cylindrical body to be treated is immersed in a mixed slurry solution obtained by mixing the glaze thus adjusted with the same amount of water. The immersion treatment can be performed any number of times after the melting treatment in order to sufficiently seal. It should be noted that the mixed slurry may be applied to a required portion (surface) of the cylindrical body using a brush, a brush, or other tools, not limited to immersion.
こうして、釉薬を施した後、所定温度例えば 1200〜1300°Cで溶融することによって、 筒体の両端面側の所要部分が不透化処理 7される。 [0096] 以上、不透過処理 7として釉薬シール処理を、多段的に設けられた複数の環状シー ル部材 40 (Oリング 40a〜図示されて!ヽな ヽ Oリング 40b, 40c)の例で説明してきた 力 混合物質の成分如何によつては、 1個の環状シール部材 40即ち単一の環状シ 一ル部材 40 (1個の Oリング 40a)のみで一段のシール部を設ける構成(図 19)として ちょい。 After the glaze is applied in this way, by melting at a predetermined temperature, for example, 1200 to 1300 ° C., a required portion on both end surfaces of the cylindrical body is subjected to an impermeability treatment 7. [0096] As described above, the glaze sealing processing as the opaque processing 7 is described using an example of a plurality of annular sealing members 40 (O-rings 40a to O-rings 40b and 40c shown in the drawing) provided in multiple stages. Depending on the composition of the force-mixed material, a single annular seal member 40, that is, a single annular seal member 40 (one O-ring 40a) may be used to provide a single-stage seal portion (FIG. 19). )
又、この場合においても、不透過処理 7として釉薬シール処理を施す領域 (範囲は) は上述した複数の環状シール部材 40に対する不透過処理 7と同様であり、少なくとも 、当該単一の環状シール部材 40が接する筒内周面の部分には不透過処理 7を施す 必要がある。  Also in this case, the region (range) in which the glaze sealing process is performed as the opaque process 7 is the same as the opaque process 7 for the plurality of annular seal members 40 described above. It is necessary to perform the impermeability treatment 7 on the portion of the inner peripheral surface of the cylinder where 40 contacts.
産業上の利用可能性  Industrial applicability
[0097] 本発明は、含水エタノールや特定用途洗浄使用後の IPA含有水溶液等のような含 水有機溶剤の脱水工程として用いるゼォライト担持体の透過性成分分離筒状部材( 筒体)の真空維持装置として、一定の振動吸収機能を有し、密封材起因の有害物質 の製品への溶出懸念が解消でき、筒体と真空維持装置を一組として取り替えを行う 必要性を要せず、更には一定の耐久性を有するため、広く適用することができる。 図面の簡単な説明 [0097] The present invention provides a method for maintaining a vacuum on a permeable component separation tubular member (tube) of a zeolite carrier used in a dehydration step of a water-containing organic solvent such as aqueous ethanol or an IPA-containing aqueous solution after cleaning for specific use. As a device, it has a certain vibration absorption function, can eliminate the concern that harmful substances caused by the sealing material may elute into the product, does not require the need to replace the cylinder and vacuum maintenance device as a set, and furthermore, Since it has a certain durability, it can be widely applied. Brief Description of Drawings
[0098] [図 1]筒体に装着された真空維持装置の縦断側面図である (実施例 1)。 FIG. 1 is a longitudinal sectional side view of a vacuum maintenance device mounted on a cylindrical body (Example 1).
[図 2]真空維持装置を分解した状態の縦断側面図である (実施例 1)。  FIG. 2 is a longitudinal sectional side view of a state where the vacuum maintenance device is disassembled (Example 1).
[図 3]真空維持装置を構成する一方の密封具の縦断側面図である (実施例 1)。  FIG. 3 is a longitudinal side view of one sealing device constituting the vacuum maintenance device (Example 1).
[図 4]真空維持装置を構成する他方の密封具の縦断側面図である (実施例 1)。  FIG. 4 is a longitudinal sectional side view of the other sealing device constituting the vacuum maintenance device (Example 1).
[図 5]筒体に装着された真空維持装置の縦断側面図である (実施例 2)。  FIG. 5 is a longitudinal sectional side view of a vacuum maintenance device mounted on a cylindrical body (Example 2).
[図 6]真空維持装置を分解した状態の縦断側面図である (実施例 2)。  FIG. 6 is a longitudinal sectional side view of a state where a vacuum maintenance device is disassembled (Example 2).
[図 7]真空維持装置を構成する一方の密封具の縦断側面図である (実施例 2)。  FIG. 7 is a longitudinal sectional side view of one of the seals constituting the vacuum maintenance device (Example 2).
[図 8]真空維持装置を構成する他方の密封具の縦断側面図である (実施例 12。  FIG. 8 is a longitudinal sectional side view of the other sealing device constituting the vacuum maintenance device (Example 12).
[図 9]筒体に装着された真空維持装置の縦断側面図である (実施例 3)。  FIG. 9 is a longitudinal sectional side view of a vacuum maintenance device mounted on a cylinder (Example 3).
[図 10]真空維持装置を分解した状態の縦断側面図である (実施例 3)。  FIG. 10 is a longitudinal sectional side view of a state where a vacuum maintenance device is disassembled (Example 3).
[図 11]真空維持装置を構成する一方の密封具の縦断側面図である (実施例 3)。  FIG. 11 is a longitudinal sectional side view of one of the seals constituting the vacuum maintenance device (Example 3).
[図 12]真空維持装置を構成する他方の密封具の縦断側面図である (実施例 3)。 [図 13]筒体に装着された真空維持装置の縦断側面図である (実施例 4)。 FIG. 12 is a longitudinal sectional side view of the other sealing device constituting the vacuum maintenance device (Example 3). FIG. 13 is a longitudinal sectional side view of a vacuum maintenance device mounted on a cylindrical body (Example 4).
[図 14]真空維持装置を分解した状態の縦断側面図である (実施例 4)。  FIG. 14 is a longitudinal sectional side view of a state where the vacuum maintenance device is disassembled (Example 4).
[図 15]真空維持装置を構成する一方の密封具の縦断側面図である (実施例 4)。  FIG. 15 is a longitudinal sectional side view of one of the seals constituting the vacuum maintenance device (Example 4).
[図 16]真空維持装置を構成する他方の密封具の縦断側面図である (実施例 4)。  FIG. 16 is a vertical sectional side view of the other sealing device constituting the vacuum maintenance device (Example 4).
[図 17]筒外周面にのみゼォライト膜が施された構成の説明図である(実施例 5)。  FIG. 17 is an explanatory view of a configuration in which a zeolite film is applied only to the outer peripheral surface of a cylinder (Example 5).
[図 18]筒外周面力 筒端面を経て筒内部側にまでゼォライト膜が施された構成の説 明図である(実施例 5)。  FIG. 18 is an explanatory view of a configuration in which a zeolite film is applied to the inner side of the cylinder via the cylinder end face through the cylinder end face (Example 5).
[図 19]不透過処理が施された構成の説明図である(実施例 5)。  FIG. 19 is an explanatory diagram of a configuration that has undergone opacity processing (Example 5).
符号の説明 Explanation of symbols
1、 100 筒体  1, 100 cylinder
2 容器壁面  2 Container wall
4 筒内部  4 Inside the cylinder
6 ゼォライト膜  6 Zeolite membrane
7 不透過処理 (釉薬シール)  7 Impermeable treatment (glaze seal)
10 真空維持装置  10 Vacuum maintenance device
20、 30、 200、 300 密封具  20, 30, 200, 300 Seals
21、 31、 210、 310 筒端固定部材 (密封具)  21, 31, 210, 310 Tube end fixing member (sealing device)
22、 32、 220、 320 螺合部材 (密封具)  22, 32, 220, 320 Screw member (sealing device)
23、 33 係合手段  23, 33 Engagement means
25、 35 低周面 (螺合部材)  25, 35 Low peripheral surface (screw member)
26、 36 段差面 (螺合部材)  26, 36 Step surface (screw member)
28、 38 筒内側端面 (筒端固定部材)  28, 38 Tube inner end surface (Cylinder end fixing member)
29、 39、 290、 390 還状収納部  29, 39, 290, 390 Return letter storage
40 環状シール部材 (環状シール部材群)  40 Annular seal member (annular seal member group)
40a, 40b, 40c Oリング (環状シール部材)  40a, 40b, 40c O-ring (annular sealing member)
41 還状介在部材  41 Intervening members
41a, 41b 金属リング (還状介在部材)  41a, 41b Metal ring (return member)
211、 311 筒外周覆い部(実施例 3及び 4の筒端固定部材) 212、 312 冠状部(実施例 3及び 4の筒端固定部材) 221、 311 貫通孔 (実施例 3及び 4の筒端固定部材) 211, 311 Cylinder outer peripheral cover (cylinder end fixing member of Examples 3 and 4) 212, 312 Coronal part (cylinder end fixing member of Examples 3 and 4) 221, 311 Through hole (cylinder end fixing member of Examples 3 and 4)

Claims

請求の範囲 The scope of the claims
筒内部を負圧として筒外部の混合物質中の所要の成分を筒壁を透過させて分離 する透過性成分分離筒状部材の両筒端を塞ぐ真空維持装置において、  In a vacuum maintaining device that closes both cylinder ends of a permeable component separation tubular member that separates required components in a mixed substance outside the cylinder by permeating through the cylinder wall with a negative pressure inside the cylinder,
前記真空維持装置は、両筒端に各々装着されて当該筒端を密封する密封具を備え 前記密封具は、筒端に固定される筒端固定部材と当該筒端固定部材に筒軸方向に 螺合する螺合部材と、 The vacuum maintenance device is provided with a sealing member mounted on each of the two cylinder ends to seal the cylinder ends, wherein the sealing member is attached to the cylinder end fixing member fixed to the cylinder end and the cylinder end fixing member in the cylinder axis direction. A screw member to be screwed,
前記筒端固定部材及び螺合部材と筒端側の筒内周面又は筒外周面との間に形成 された還状収納部と、前記還状収納部に嵌合された複数の還状シール部材と、前記 還状シール部材間に介在し筒軸方向に摺動自在な還状介在部材とを備え、 前記螺合部材の筒端固定部材へのネジ込みに応じた挟圧で前記還状シール部材 を弾性変形させ、筒軸方向にわたって前記還状シール部材の数に相応する複数段 のシール部を設けたことを特徴とする真空維持装置。 A return-shaped storage portion formed between the cylinder-end fixing member and the threaded member and the inner circumferential surface or outer circumferential surface of the cylindrical end, and a plurality of return-shaped seals fitted to the return-shaped storage portion; A return member interposed between the return seal member and being slidable in the axial direction of the cylinder, wherein the return member is squeezed according to the screwing of the screw member into the cylinder end fixing member. A vacuum maintaining device, wherein a plurality of seal portions corresponding to the number of the return seal members are provided in a cylindrical axial direction by elastically deforming a seal member.
筒内部を負圧として筒外部の混合物質中の所要の成分を筒壁を透過させて分離 する透過性成分分離筒状部材の両筒端を塞ぐ真空維持装置において、  In a vacuum maintaining device that closes both cylinder ends of a permeable component separation tubular member that separates required components in a mixed substance outside the cylinder by permeating through the cylinder wall with a negative pressure inside the cylinder,
前記真空維持装置は、両筒端に各々装着されて当該筒端を密封する密封具を備え 前記密封具は、筒端に固定される筒端固定部材と当該筒端固定部材に筒軸方向に 螺合する螺合部材と、 The vacuum maintenance device is provided with a sealing member mounted on each of the two cylinder ends to seal the cylinder ends, wherein the sealing member is attached to the cylinder end fixing member fixed to the cylinder end and the cylinder end fixing member in the cylinder axis direction. A screw member to be screwed,
前記筒端固定部材及び螺合部材と筒端側の筒内周面又は筒外周面との間に形成 された還状収納部と、前記還状収納部に嵌合された単一の還状シール部材とを備え 前記螺合部材の筒端固定部材へのネジ込みに応じた挟圧で前記還状シール部材 を弾性変形させてシール部を設けると共に、少なくとも当該環状シール部材が接する 筒内周面に不透過処理を施したことを特徴とする真空維持装置。 A return-shaped storage portion formed between the cylinder-end fixing member and the threaded member and the inner or outer circumferential surface of the cylinder at the end of the cylinder; and a single return shape fitted to the return-shaped storage portion. A seal member provided with a seal portion by elastically deforming the return seal member with a squeezing pressure corresponding to the screwing of the screw member into the cylinder end fixing member, and at least the annular seal member being in contact with the inner periphery of the cylinder. A vacuum maintenance device characterized in that a surface has been subjected to an opacity treatment.
両筒端に各々装着された密封具の双方又は少なくとも一方は、混合物質の容器壁 面に係脱自在に固着され、且つ容器壁面に固着された密封具を貫通して容器外に 透過させた成分を取り出す流出路が形成されたことを特徴とする請求項 1又は請求 項 2に記載の真空維持装置。 Both or at least one of the seals respectively attached to the ends of the two cylinders is fixed to the container wall surface of the mixed substance so as to be freely detachable, and penetrated through the seal member fixed to the container wall surface to the outside of the container. 2. An outflow passage for removing components is formed, wherein the outflow passage is formed. Item 3. The vacuum maintenance device according to Item 2.
[4] 筒端固定部材には筒軸方向に貫通ネジ穴を形成し、  [4] The cylinder end fixing member is formed with a through screw hole in the cylinder axis direction,
螺合部材には、筒内から筒端外に向けて前記貫通ネジ穴にネジ込まれた当該螺合 部材の筒内側の外周面に、単一の還状シール部材又は筒端方向に向けて複数の 環状シール部材からなる還状シール部材群、を押す段差面を有する段差部を形成 すると共に、当該段差部の低周面が前記貫通ネジ穴に嵌入可能に形成し、 前記段差面と低周面と前記段差面に相対する筒端固定部材の筒内側端面とで、凹 部の開放側が筒内周面側に向いた断面凹状の還状収納部を設けたことを特徴とす る請求項 1乃至請求項 3の何れかに記載の真空維持装置。  The screwing member is provided with a single return seal member or in the direction of the tube end on the outer peripheral surface on the inner side of the tube of the screwing member screwed into the through screw hole from the inside of the tube to the outside of the tube end. A stepped portion having a stepped surface for pressing a return seal member group formed of a plurality of annular seal members is formed, and a low peripheral surface of the stepped portion is formed so as to be able to fit into the through screw hole. A return-shaped storage section having a concave cross section in which the open side of the concave portion faces the inner peripheral surface side of the cylinder is provided between the peripheral surface and the inner end surface of the cylinder end fixing member facing the step surface. The vacuum maintenance device according to any one of claims 1 to 3.
[5] 還状収納部の低周面に、単一の還状シール部材、又は、複数の還状シール部材及 び還状介在部材からなる環状シール部材群を設けたことを特徴とする請求項 4に記 載の真空維持装置。  [5] A single return seal member or an annular seal member group including a plurality of return seal members and a return return intermediate member is provided on a low peripheral surface of the return return storage portion. The vacuum maintenance device described in Item 4.
[6] 螺合部材の筒端側端面には、筒端外側力 当該螺合部材をネジ回す回し手段が係 合する係合手段を設けたことを特徴とする請求項 1乃至請求項 5の何れかに記載の 真空維持装置。  [6] The cylinder end side surface of the screwing member is provided with an engagement means with which a turning means for screwing the screwing member is engaged with the cylinder end outside force. The vacuum maintenance device according to any one of the above.
[7] 係合手段は、回し手段の差込側先端部と係脱自在な構成であることを特徴とする請 求項 6に記載の真空維持装置。  [7] The vacuum maintenance device according to claim 6, wherein the engagement means is configured to be able to be disengaged from the insertion-side tip of the turning means.
[8] 筒端力 単一の還状シール部材が接するまでの筒内周面に、不透過処理を施した ことを特徴とする請求項 2乃至請求項 7の何れかに記載の真空維持装置。 [8] The vacuum maintenance device according to any one of claims 2 to 7, wherein an impermeability treatment is applied to an inner peripheral surface of the cylinder until a single return seal member comes into contact with the cylinder end force. .
[9] 筒端面及び当該筒端面に連続して単一の還状シール部材が接するまでの筒内周 面に、不透過処理を施したことを特徴とする請求項 2乃至請求項 7の何れかに記載 の真空維持装置。 [9] Any one of claims 2 to 7, wherein an impermeability treatment is applied to the end surface of the cylinder and the inner peripheral surface of the cylinder until a single return seal member continuously contacts the end surface of the cylinder. The vacuum maintenance device according to any one of the above.
[10] 筒端力 単一の還状シール部材に対応するまでの筒外周面に、不透過処理を施し たことを特徴とする請求項 2乃至請求項 7の何れかに記載の真空維持装置。  [10] The vacuum maintenance device according to any one of claims 2 to 7, wherein an impermeability treatment is applied to an outer peripheral surface of the cylinder until it corresponds to a single return seal member. .
[11] 筒端面に連続して単一の還状シール部材に対応するまでの筒外周面に、不透過 処理を施したことを特徴とする請求項 2乃至請求項 7の何れかに記載の真空維持装 置。  [11] The non-permeation treatment is applied to the outer peripheral surface of the cylinder until it corresponds to a single return seal member continuously to the cylinder end face, according to any one of claims 2 to 7, Vacuum maintenance device.
[12] 筒端から、少なくとも複数段の、筒奥に向けて設けられた還状シール部材が接する までの筒内周面に、不透過処理を施したことを特徴とする請求項 1、請求項 3乃至請 求項 7の何れかに記載の真空維持装置。 [12] At least a plurality of stages of return seal members provided toward the inner side of the cylinder from the cylinder end come into contact with each other. 8. The vacuum maintenance device according to claim 1, wherein an impermeability treatment has been applied to the inner peripheral surface of the cylinder up to.
[13] 筒端面及び当該筒端面に連続して、少なくとも複数段の、筒奥に向けて設けられた 還状シール部材が接するまでの筒内周面に、不透過処理を施したことを特徴とする 請求項 1、請求項 3乃至請求項 7の何れかに記載の真空維持装置。 [13] An impermeability treatment is applied to the cylinder end surface and at least a plurality of stages of the inner circumferential surface of the cylinder until at least a plurality of stages of the return-shaped seal member provided toward the back of the cylinder come into contact with the cylinder end surface. The vacuum maintenance device according to any one of claims 1, 3, and 7.
[14] 筒端力 最奥に設けられた還状シール部材が接するまでの筒内周面に、不透過処 理を施したことを特徴とする請求項 1、請求項 3乃至請求項 7の何れかに記載の真空 維持装置。 [14] The cylinder end force, wherein an impermeability treatment is applied to the inner peripheral surface of the cylinder until the return seal member provided at the innermost position comes into contact therewith. The vacuum maintenance device according to any one of the above.
[15] 筒端面及び当該筒端面に連続して最奥に設けられた還状シール部材が接するま での筒内周面に、不透過処理を施したことを特徴とする請求項 1、請求項 3乃至請求 項 7の何れかに記載の真空維持装置。  [15] The cylinder according to claim 1, wherein an impermeability treatment is applied to the cylinder end surface and an inner peripheral surface of the cylinder until the return-shaped seal member provided at the innermost portion is continuous with the cylinder end surface. The vacuum maintenance device according to any one of claims 3 to 7.
[16] 筒端から、筒内に設けられた少なくとも最も筒端側の還状シール部材に対応するま での筒外周面に、不透過処理を施したことを特徴とする請求項 12乃至請求項 15の 何れかに記載の真空維持装置。 [16] The opaque treatment is performed on the outer peripheral surface of the cylinder from the cylinder end to at least the portion corresponding to the return seal member provided on the inside of the cylinder at the most end of the cylinder. Item 16. A vacuum maintenance device according to any one of Items 15.
[17] 筒端面に連続して、筒内に設けられた少なくとも最も筒端側の還状シール部材に 対応するまでの筒外周面に、不透過処理を施したことを特徴とする請求項 12乃至請 求項 15の何れかに記載の真空維持装置。 [17] The non-permeation treatment is performed on at least the outer peripheral surface of the cylinder, which is continuous with the cylinder end surface and at least corresponds to the return seal member on the cylinder end side provided in the cylinder. 16. The vacuum maintenance device according to any one of claims 15 to 15.
[18] 筒端から、筒内に設けられた最奥の還状シール部材に対応するまでの筒外周面に[18] On the outer peripheral surface of the cylinder from the cylinder end to the innermost return seal member provided in the cylinder
、不透過処理を施したことを特徴とする請求項 12乃至請求項 15の何れかに記載の 真空維持装置。 The vacuum maintenance device according to any one of claims 12 to 15, wherein the vacuum maintenance device is subjected to an opacity treatment.
[19] 筒端面に連続して、筒内に設けられた最奥の還状シール部材に対応するまでの筒 外周面に、不透過処理を施したことを特徴とする請求項 12乃至請求項 15の何れか に記載の真空維持装置。  [19] The opaque treatment is performed on the outer peripheral surface of the cylinder, which is continuous with the end surface of the cylinder and corresponds to the innermost return seal member provided in the cylinder. 16. The vacuum maintenance device according to any one of 15.
[20] 不透過処理は釉薬シール処理であることを特徴とする請求項 2乃至請求項 19の何 れかに記載の真空維持装置。  20. The vacuum maintenance device according to claim 2, wherein the opaque treatment is a glaze sealing treatment.
[21] 釉薬シール処理は、釉薬と水との混合スラリーを筒体の所要部分に施した後、所定 温度で溶融処理することを特徴とする請求項 20に記載の真空維持装置。 21. The vacuum maintenance device according to claim 20, wherein the glaze sealing process is performed by applying a mixed slurry of glaze and water to a required portion of the cylindrical body and then performing a melting process at a predetermined temperature.
[22] 釉薬は、アルカリ性の媒溶剤と、溶け過ぎを抑制する珪酸と、素地への密着性を高め るカオリンとを含むことを特徴とする請求項 20又は請求項 21に記載の真空維持装置 [22] The glaze enhances the adhesion to the substrate with alkaline medium solvent, silicic acid to suppress over-dissolution 22. The vacuum maintenance device according to claim 20, wherein the vacuum maintenance device comprises
[23] 筒端固定部材には筒端側の筒外周面を覆う筒外周覆い部と当該筒外周覆い部と連 続して筒端側を覆う冠状部とを形成し、 [23] The cylinder end fixing member is provided with a cylinder outer periphery covering portion covering the cylinder outer peripheral surface on the cylinder end side, and a crown-shaped portion connected to the cylinder outer peripheral covering portion and covering the cylinder end side,
螺合部材には筒端が嵌入する貫通穴を形成すると共に、当該貫通穴を介して筒中 央側に嵌挿された螺合部材が前記筒外周覆い部の内周面と螺合しつつ当該筒外周 覆い部と筒外周面との還状間隙に進退自在に形成して、  The screw member has a through hole into which the cylinder end is fitted, and the screw member inserted through the through hole into the center of the cylinder is screwed into the inner peripheral surface of the outer peripheral covering portion of the cylinder. The outer periphery of the cylinder is formed so as to be able to advance and retreat in the return gap between the covering part and the outer periphery of the cylinder.
前記筒端固定部材の筒外周覆!、部及び冠状部と螺合部材の進入側端面とで、凹部 の開放側が筒外周面側に向いた断面凹状の還状収納部を設けたことを特徴とする 請求項 1乃至請求項 3の何れかに記載の真空維持装置。  The cylindrical outer peripheral cover of the cylindrical end fixing member, a crown-shaped portion, and the entry side end surface of the screwing member are provided with a return-shaped storage section having a concave cross section with the open side of the concave portion facing the cylindrical outer peripheral surface side. The vacuum maintenance device according to any one of claims 1 to 3.
[24] 還状収納部の筒外周面に、還状シール部材及び還状介在部材からなる環状シール 部材群を設けたことを特徴とする請求項 23に記載の真空維持装置。 24. The vacuum maintenance device according to claim 23, wherein an annular seal member group including a return seal member and a return intermediate member is provided on an outer peripheral surface of the cylinder of the return housing portion.
[25] 螺合部材の筒中央側端部外周面には、筒外から当該螺合部材をネジ回す回し手段 が係合する係合手段を設けたことを特徴とする請求項 23又は請求項 24に記載の真 空維持装置。 [25] An engaging means for engaging a turning means for screwing the screwing member from outside the tube is provided on an outer peripheral surface of the end portion of the screwing member at the center of the tube. 24. The vacuum maintenance device according to 24.
[26] 係合手段は、回し手段の少なくとも一部が係合するナット形状であることを特徴とする 請求項 25に記載の真空維持装置。  26. The vacuum maintenance device according to claim 25, wherein the engagement means has a nut shape with which at least a part of the turning means is engaged.
[27] 透過性成分分離筒状部材は多孔質素材で形成されたことを特徴とする請求項 1乃至 請求項 26の何れかに記載の真空維持装置。 27. The vacuum maintenance device according to claim 1, wherein the permeable component separation tubular member is formed of a porous material.
[28] 透過性成分分離筒状部材は筒外周面にゼォライト膜が施されたことを特徴とする請 求項 1乃至請求項 27の何れかに記載の真空維持装置。 [28] The vacuum maintenance device according to any one of claims 1 to 27, wherein the permeable component separating tubular member is provided with a zeolite film on an outer peripheral surface of the tubular member.
[29] 還状シール部材と還状介在部材とは、環状シール部材が少なくとも両端に位置する よう交互に配設されたことを特徴とする請求項 1、請求項 3乃至請求項 7、請求項 12 乃至請求項 28の何れかに記載の真空維持装置。 [29] The return seal member and the return interposition member are arranged alternately so that the annular seal members are located at least at both ends. The vacuum maintenance device according to any one of claims 12 to 28.
[30] 環状シール部材は Oリング又はその他の還状に形成された変形復元自在な有弾性 部材であることを特徴とする請求項 1乃至請求項 29の何れかに記載の真空維持装置 [30] The vacuum maintenance device according to any one of claims 1 to 29, wherein the annular seal member is an O-ring or another elastic member formed in a return shape and capable of restoring deformation.
[31] 還状介在部材は還状に形成された金属部材又はその他の変形し難!、硬質部材であ ることを特徴とする請求項 1、請求項 3乃至請求項 7、請求項 12乃至請求項 30の何 れかに記載の真空維持装置。 [31] The return interposition member is a metal member or other hard-to-deform! Hard member formed in a return shape. 31. The vacuum maintenance device according to any one of claims 1, 3, 3, and 12, and 12 to 30.
[32] 筒内部を負圧として筒外部の混合物質中の所要の成分を筒壁を透過させて分離 する透過性成分分離筒状部材の両筒端を塞ぐ真空維持装置の真空維持方法にお いて、 [32] A method for maintaining a vacuum in a vacuum maintaining device that closes both cylindrical ends of a permeable component separating cylindrical member that separates required components in a mixed substance outside the cylinder through a cylindrical wall with a negative pressure inside the cylinder. And
前記真空維持装置は、前記両筒端に各々装着されて当該筒端を密封する密封具を 備え、  The vacuum maintaining device includes a sealing member attached to each of the two cylinder ends to seal the cylinder ends,
前記密封具は、筒端に固定される筒端固定部材と当該筒端固定部材に筒軸方向に 螺合する螺合部材と、  A sealing member fixed to the cylinder end, a screwing member screwed to the cylinder end fixing member in the cylinder axis direction,
前記筒端固定部材及び螺合部材と筒端側の筒内周面又は筒外周面との間に形成 された還状収納部と、前記還状収納部に嵌合された複数の還状シール部材と、前記 還状シール部材間に介在し筒軸方向に摺動自在な還状介在部材とを備え、 前記螺合部材の筒端固定部材へのネジ込みに応じた挟圧で前記還状シール部材 を弾性変形させ、筒軸方向にわたって前記還状シール部材の数に相応する複数段 のシール部を設けて、  A return-shaped storage portion formed between the cylinder-end fixing member and the threaded member and the inner circumferential surface or outer circumferential surface of the cylindrical end, and a plurality of return-shaped seals fitted to the return-shaped storage portion; A return member interposed between the return seal member and being slidable in the axial direction of the cylinder, wherein the return member is squeezed according to the screwing of the screw member into the cylinder end fixing member. The seal member is elastically deformed, and a plurality of seal portions corresponding to the number of the return seal members are provided in the cylinder axis direction,
何れか一段或いは数段のシール部がシール機能不全になっても残る少なくとも一段 のシール部によってシール機能を維持させ、或いは、更なるネジ込みにより、残る少 なくとも一段のシール部によってシール機能を維持させることを特徴とする真空維持 方法。  Even if one or several stages of the seals fail, the seal function is maintained by the remaining at least one stage of seals, or the sealing function is further enhanced by the remaining at least one stage of seals. A vacuum maintaining method characterized by maintaining the vacuum.
[33] 筒内部を負圧として筒外部の混合物質中の所要の成分を筒壁を透過させて分離 する透過性成分分離筒状部材の両筒端を塞ぐ真空維持装置の真空維持方法にお いて、  [33] The vacuum maintaining method of a vacuum maintaining device for closing both cylindrical ends of a permeable component separating cylindrical member that separates required components in a mixed substance outside the cylinder through a cylindrical wall with a negative pressure inside the cylinder. And
前記真空維持装置は、前記両筒端に各々装着されて当該筒端を密封する密封具を 備え、  The vacuum maintaining device includes a sealing member attached to each of the two cylinder ends to seal the cylinder ends,
前記密封具は、筒端に固定される筒端固定部材と当該筒端固定部材に筒軸方向に 螺合する螺合部材と、  A sealing member fixed to the cylinder end, a screwing member screwed to the cylinder end fixing member in the cylinder axis direction,
前記筒端固定部材及び螺合部材と筒端側の筒内周面又は筒外周面との間に形成 された還状収納部と、前記還状収納部に嵌合された単一の還状シール部材とを備え 前記螺合部材の筒端固定部材へのネジ込みに応じた挟圧で前記還状シール部材 を弾性変形させてシール部を設けると共に、少なくとも当該環状シール部材が接する 筒内周面に不透過処理を施し、一段のシール部によってシール機能を維持させるこ とを特徴とする真空維持方法。 A return-shaped storage portion formed between the cylinder-end fixing member and the threaded member and the inner or outer circumferential surface of the cylinder at the end of the cylinder; and a single return shape fitted to the return-shaped storage portion. With a sealing member The seal is provided by elastically deforming the return seal member with a squeezing pressure corresponding to the screwing of the screw member into the cylinder end fixing member, and at least an impervious treatment is performed on the inner peripheral surface of the cylinder contacting at least the annular seal member. And maintaining the sealing function by a single-stage sealing portion.
PCT/JP2005/006272 2004-03-31 2005-03-31 Device and method for uninterruptible power supply WO2005094974A1 (en)

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