WO2005022179A1 - Dispositif et procede de detection et de mesure non invasives d’un champ electrique - Google Patents
Dispositif et procede de detection et de mesure non invasives d’un champ electrique Download PDFInfo
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- WO2005022179A1 WO2005022179A1 PCT/FR2004/002159 FR2004002159W WO2005022179A1 WO 2005022179 A1 WO2005022179 A1 WO 2005022179A1 FR 2004002159 W FR2004002159 W FR 2004002159W WO 2005022179 A1 WO2005022179 A1 WO 2005022179A1
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- 238000001514 detection method Methods 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 title claims description 44
- 230000003287 optical effect Effects 0.000 claims abstract description 29
- 238000013507 mapping Methods 0.000 claims abstract description 27
- 230000005693 optoelectronics Effects 0.000 claims abstract description 26
- 230000010363 phase shift Effects 0.000 claims abstract description 20
- 239000000523 sample Substances 0.000 claims description 52
- 230000005684 electric field Effects 0.000 claims description 42
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- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/08—Measuring electromagnetic field characteristics
- G01R29/0864—Measuring electromagnetic field characteristics characterised by constructional or functional features
- G01R29/0878—Sensors; antennas; probes; detectors
- G01R29/0885—Sensors; antennas; probes; detectors using optical probes, e.g. electro-optical, luminescent, glow discharge, or optical interferometers
Definitions
- the present invention relates to devices and methods for quantitative and non-invasive detection and mapping of an electric field or potential or their spatial and / or temporal derivatives in an optically active medium, possibly structurally known.
- optically active medium denotes a medium exhibiting electro-optical properties and more particularly a medium exhibiting a linear electro-optical effect (known as the Pockels effect), or a quadratic electro-optical effect whose manifestation threshold is however more higher than in the linear case, while remaining compatible with the use of short pulse power lasers.
- the invention relates to a device comprising: an optical source for illuminating at least one zone to be probed from the medium with a light beam whose path defines an optical axis, and means for mapping the phase shift of the light beam, induced by a field or an electrical potential, or their derivatives, in the area to be probed.
- Document US-A-5 394 098 describes an example of such a device used for testing optoelectronic components.
- the optical source is a laser and the means used for mapping the phase shift of the light beam consist of an interferometer.
- the medium having electro-optical properties consists of a layer of a suitable polymer covering at least the part of the component that is to be tested. This type of device presents.
- a non-invasive device for detecting an electric field or potential, or their derivatives, in a medium having a linear or quadratic electro-optical effect which, in addition to the characteristics already mentioned, is characterized by the fact that the means of mapping the phase shift of the light beam comprise a confocal microscope, in which the area to be probed is placed in a manner suitable for forming an image of a plane of the area to be probed. Thanks to the confocal microscope, one can obtain a three-dimensional spatial resolution. It is thus possible to probe the volume of the medium. This arrangement makes it possible to probe media, without any particular preparation if the medium is endowed with electro-optical properties.
- the medium it is also possible to dop the medium with molecules, ions, etc. having electro-optical properties or conferring _electro-optical properties in the medium, in order to exacerbate the electro-optical properties of the medium, if the latter is already equipped with it, or to reveal the presence of electric fields in a medium which does not inherently have such properties.
- the nature of the media surveyed can, thanks to the invention, be very diverse. In addition to the optoelectronic components already mentioned, it may be a local distribution, for example an interface between two separate dielectric media, possibly each devoid of any intrinsic electro-optical activity.
- the medium is amorphous. It is for example a polymer matrix containing a solid solution of electro-optical molecules dispersed randomly and which have been locally oriented according to a non-centrosymmetric statistical order (under the effect of an electric field locally induced by a suitable electrode or by optical fields according to a configuration known as all-optical orientation which acts locally at the focal point of the orienting beams).
- electro-optical properties can be designated under the suggestive names of "electro-optical surfaces" (case of two-dimensional or quasi-two-dimensional distribution of membrane type) or of "electro-optical islands” (voxels) in the case of inclusions of exogenous electro-optical structures in the ambient environment.
- electro-optical surfaces case of two-dimensional or quasi-two-dimensional distribution of membrane type
- electro-optical islands voxels
- these are inclusions of electro-optical structures in a film of amorphous polymer type devoid of intrinsic electrooptical properties (these inclusions having dimensions on nanometric or micron scales; these are for example nanocrystals having nonlinear quadratic properties).
- the invention is in particular of interest in two symmetrical situations. On the one hand, it allows, when the distribution of the electrooptical properties is unknown, to reveal the spatial mapping of this distribution a priori unknown by electric field setting with a set of simple electrodes allowing to control as well as possible the distribution of the field within the sample.
- the invention makes it possible to determine the mapping of the internal or external field within the distribution, the latter depending both on this a priori known distribution of the electro-optical properties, but also on the geometry of the electrodes through which an external electric field is applied.
- knowledge both of the distribution of the electric field and of the electro-optical properties of the structures, turns out to be limited.
- the invention then makes it possible to carry out with certainty, upstream of this double unknown, a mapping of the optical phase shift felt by the incident wave which comes to probe the medium.
- the means for mapping the phase shift of the light beam comprise an interferometer for dividing the light beam into a reference beam and a probe beam and measure the phase shift between the reference beam and the probe beam after crossing the area to be probed, in this interferometer, the servo of the respective lengths of the reference beam and the probe beam is active until 'at a cutoff frequency fc and these mapping means having a signal sampling frequency fa greater than the cutoff frequency fc; the temporal resolution of the detection of electric fields is limited only by that of the electronics and of the opto-electronic sensors of the means for mapping the phase shift of the light beam; - It includes means for moving the medium, according to the three dimensions of the space, under the probe beam; it includes scanning means suitable for scanning, with the light beam, the area to be probed and a reference area, with an acquisition frequency f of images recorded by the means for measuring variations in the phase of the light beam,
- the scanning means comprise four acousto-optical deflectors, two - for deflecting the light beam, upstream of the confocal microscope, each respectively in one of the first and second directions of space and two for straightening the light beam each respectively in one of the first and second directions of space, downstream of the confocal microscope; in fact, these first and second directions of space
- the invention relates to a method of implementing the device according to the invention. It is in particular a non-invasive method for detecting an electric field or potential, or their derivatives, in a medium presenting a linear or quadratic electro-optical effect, in which: one illuminates with an optical source at least one zone to be probed of the medium with a light beam whose path defines an optical axis, one carries out a mapping of the phase shift of the light beam, induced by an electric field or potential, or their derivatives, in the area to be probed, characterized in that the area to be probed is placed in a confocal microscope, itself interposed in means of mapping the phase shift of the light beam, so as to form an image of a plane of the area to be probed.
- FIG. 1 is a block diagram of an exemplary embodiment of a device according to the present invention
- - Figures 2a to 2f schematically represent some examples of applications of the method according to the invention
- FIG. 3 schematically represents a variant of the device of Figure 1;
- FIG. 4 schematically represents the scanning carried out with the scanning means of the variant of FIG. 3; and - Figure 5 schematically shows a variant of the devices of Figures 1 and 3.
- this device 1 is a microscope. It comprises an optical source 3 and an interferometer 5 constituting means for mapping the phase shift of the light beam 7.
- the optical source 3 is for example a laser.
- the wavelength, power and nature (pulsed or continuous) of this laser are, of course, to be adapted to the medium to be probed and more particularly to the optically active species (molecules, ions, electronic material, etc.) revealing the electric field prevailing in this medium.
- the interferometer 5 comprises separating means 9, for example made up of a half-wave plate and a polarizer, controlled mirrors 11, a • sample holder 13, a confocal microscope 15 and optical elements 17. According to the 'example of embodiment of the microscope presented in Figure 1, the detection of electric fields is performed in transmission. Of course, it is within the reach of the skilled person to transpose this teaching. to perform this detection in reflection.
- the inter erometer 5 is mounted in homodyne detection.
- the separating means 9 divide the light beam 19 emitted by the source 3 into a reference beam 21 and a probe beam 23.
- the squaring between the reference beam 21 and the probe beam 23 is slaved to ⁇ / 2 in order to have access relative variation of optical path.
- An example of servo-control of mirrors 11 is given in the doctoral thesis of PF Cohadon (Kastler-Brossel Laboratory, Paris VI University, January 2000).
- the probe beam 23 is focused, in a region of a sample 25 mounted in the sample holder 13, by means of a first optic 27 of the confocal microscope 15.
- a second optic 28 of the confocal microscope 15 collects the light beam transmitted by the sample 25 at the level of this region.
- the reflection may possibly take place after the second optic 28.
- This light beam is then filtered by the optical elements 17 comprising a diaphragm which intercepts any signal not passing through the focal point of the second optic 28.
- the sample 25 is moved under the probe beam 23 by means of a piezoelectric block which moves the sample holder 13, in the three directions of space. Sample 25 is thus probed in volume. Thanks to the piezoelectric block, it is possible to perform a three-dimensional mapping of the electric fields in the sample 25.
- the probe beam 23 is detected and recorded by the means for mapping the phase shift of the light beam 7. More precisely, these means include detectors 29 and processing and control electronics 31.
- Detectors 29 are ultra-fast photodiodes with high sensitivity such as those described in the aforementioned dissertation of the doctoral thesis of PF Cohadon. These detectors 29 serve as well for the control of the relative length of the optical paths of the reference beam 21 and the probe beam 23, as for the recording of the signal transmitted by the sample 25.
- the electronics for processing and servo 31 is high frequency electronics known to those skilled in the art.
- the device 1 as described above can be used to detect electric fields, the variations of which occur at a frequency greater than the cut-off frequency fc of the control of the relative length of the reference beam 21 and the probe beam 23. Thus, it can be used for the detection of periodic high frequency and reproducible signals.
- the medium is excited at a frequency fe and the variation of the phase of the probe beam relative to that of the reference beam is measured, at this same frequency fe. It is possibly also possible to record possible responses to other frequencies which can provide information on noise, possible artefacts or other non-linear phenomena. It is thus possible to map the electrical response to an excitation signal at the frequency fe, endogenous or exogenous, at any frequency greater than the cut-off frequency fc.
- the device described above can be implemented in numerous applications. By way of example, this device can be implemented in a method, in accordance with the invention, for testing opto-electronic components.
- opto-component electronics, an electronic component, microelectronics, optronics, or even a circuit comprising components of at least one of these types.
- these opto-electronic components have an electro-optical effect, at least in part of the area to be studied and / or to be mapped. More particularly, in this type of process, a periodic and reproducible excitation potential is created between two electrodes.
- the area to be probed 34 comprises at least part of an opto-electronic component to which this potential is applied. This type of process can be used for studying segmented media (see Figure 2a).
- This type of method can also be implemented for the study of multipolar fields (see FIG. 2c).
- the potential is applied via at least one electrode with multipolar symmetry.
- Multipolar symmetry electrode configurations provide access to multipole field structures. Such structures of multipolar fields allow access, for example, to the understanding of the orientation distribution of molecules under the influence of these multipolar fields.
- the propagation of pulses in a conductor is studied. This conductor is then placed in an optically active medium.
- fractal aggregates and in particular percolation in these aggregates are studied.
- the latter further comprises scanning means 33 of the probe beam 23 on the sample 25.
- These scanning means 33 are illustrated in FIG. 3. They comprise four acoustical deflectors optics 35. Two of these deflectors 35 are placed upstream of the confocal microscope 15 to deflect the probe beam 23.
- These two deflectors 35 upstream of the confocal microscope are adjusted so as to keep only the order 1 of the beam parallel to the optical axis.
- One of these two deflectors generates a scan of the sample 25, with the probe beam 23, in a first direction of space, at a frequency fx, which is also the acquisition frequency.
- the other of these two deflectors generates a scan of the sample 25, with the probe beam 23, in a second direction of space, at a frequency fy (see FIG. 4).
- An image of n pixels is thus formed in the first direction and m pixels in the second direction.
- the other two of the four deflectors 35 are placed downstream of the confocal microscope 15 and make it possible to straighten the probe beam 23, each respectively in one of the first and second directions in space.
- the scanning means 33 make it possible to modulate, at the frequency fx greater than the cut-off frequency fc, the signal coming from any detected electric fields. As illustrated in FIG. 4, the signal transmitted by the sample 25 during the scanning is recorded in the first and second directions. This scanning passes through a zone to be probed 34 and a reference zone 36.
- This reference zone 36 can be an area of the sample 25 itself in which the electric fields do not vary.
- a reference image that is to say an image of the phase without potential or with a reference or quiescent potential.
- the image of the signal originating from any detected variations in the electric fields is thus brought back to a black background.
- Synchronous detection was therefore carried out by which the relatively low frequency noise is eliminated.
- Demodulation of the signal from any detected electric fields is carried out at the processing and servo electronics 31, in a conventional manner.
- the variant described above of the device according to the invention can be used to detect electric fields whose variations occur at a frequency lower than the cut-off frequency fc of the control of the relative length of the reference beam 21 and the beam probe 23.
- the area to be probed 34 comprises at least part of a natural or artificial biological environment.
- the area to be probed 34 comprises at least part of a natural or artificial biological membrane.
- biomimetic systems are studied and for example the diffusion of molecular species through artificial membranes. Modifications of these membranes due to various types of phenomena (chemical, biochemical, electrical, electromagnetic radiation, etc.) can be detected using the device according to the invention.
- This type of application can be extended to the study of microfluidic systems, capsules, vesicles, etc.
- the area to be probed 34 comprises at least part of a neuron or of a network of neurons and the device according to the invention gives access to the propagation of neural electrical signals and / or interneuronal, the origin of these signals, etc.
- the device according to the invention in this case advantageously replaces the so-called "patch-clamp" techniques for which, for example for an observation field of 10 ⁇ 10 ⁇ m 2 , it would have required tens of thousands of electrodes, or more, for obtain equivalent mapping. Thanks to the device according to the invention, it also overcomes problems of contact, steric bulk, etc.
- the device according to the invention also allows the study of disturbed or pathological, sclerotic neurons, degenerate, etc. Thanks to the device according to the invention, it is also possible to observe electrical phenomena on small scales, such as overvoltage phenomena or those occurring in chemical oxidation-reduction reactions, in chemical reactors on nanometric scales or not, at the level of micelles, clay-humic complexes, etc.
- the area to be probed 34 then constitutes at least part of a chemical medium.
- this comprises means for controlling the polarization 37 of the probe beam 23.
- polarization control means 37 allow the polarization state of the probe beam 23 incident on the sample to be varied in a controlled manner.
- polarization control means 37 adapted to obtain a linear polarization of the probe beam 23 whose angle p of polarization in the plane transverse to the optical axis, is variable over 360 °.
- Such polarization control means 37 can consist of any device known to those skilled in the art, for preparing and rotating a state of linear polarization in the plane transverse to the optical axis. In particular, they can comprise a half-wave plate and / or a polarizer.
- Such polarization control means 37 are arranged upstream of the first optic 27 and scanning means 33.
- the medium must be doped with electro-optical molecules or ions, in order to exacerbate the electro-optical properties of the medium and / or make it possible to observe electric fields in media lacking such properties.
- electro-optical molecules the following molecules are cited: the molecule "DR1" (Dispersed Red One) is well known to those skilled in the art.
- the molecule "Crystal Violet” is also well known to those skilled in the art. It is an example of an octupole. It is sensitive to successive gradients of the electric field and not to the electric field itself. It is in fact not limited in the detection of electric fields according to the method according to the present invention, to non-linearities of order 2, non-linearities of higher order can be used; molecules derived from phthalocyanine by peripheral substitution with electron donor and acceptor groups in non-centrosymmetric geometry are also known to those skilled in the art. They can be used for the study of biological systems. Many other molecules can be used.
- Rectangular scanning The scanning is carried out over an area of interest, including the area to be probed and the reference area, smaller than the area actually accessible. This type of scanning is particularly interesting if the area to be probed is reduced, we can then take the opportunity to scan at higher frequency with the same resolution or increase the resolution by tightening the pixels or any intermediate solution.
- Scanning of several rectangles The scanning is carried out over an area corresponding to a set of rectangles such as those described in the previous paragraph.
- the area of the reference may be unique while different areas correspond to different sound rectangles.
- Scanning on surfaces of various shapes Scanning is performed on circular, elliptical, triangular, etc. surfaces, or on a composition of these surfaces.
- Scanning on complex surfaces Scanning is performed on surfaces with complex shapes, as the application requires, for example for the study of all or part of an optoelectronic component or of a biological system (neuron , membrane, artificial membrane, for example of the Langmuir-Blodgett layer type, ).
- n and m are substantially the numbers of pixels corresponding to an acquisition period respectively according to the x and y coordinates.
- This type of scanning allows you to get as close as possible to the limits of the acousto-optical modulators. Of course, we can also keep this setting only on one of the two coordinates. Note that the realization of the control system for these different types of scanning are known to those skilled in the art.
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Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006523654A JP5089982B2 (ja) | 2003-08-22 | 2004-08-18 | 非侵襲的電界検出ならびに測定デバイスおよび方法 |
EP04786325.3A EP1656566B1 (fr) | 2003-08-22 | 2004-08-18 | Dispositif et procede de detection et de mesure non invasives d'un champ electrique |
US10/568,859 US7450237B2 (en) | 2003-08-22 | 2004-08-18 | Non-invasive electric-filed-detection device and method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0310115 | 2003-08-22 | ||
FR0310115A FR2859024B1 (fr) | 2003-08-22 | 2003-08-22 | Dispositif et procede de detection et de mesure non invasives d'un champ electrique |
Publications (1)
Publication Number | Publication Date |
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WO2005022179A1 true WO2005022179A1 (fr) | 2005-03-10 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/FR2004/002159 WO2005022179A1 (fr) | 2003-08-22 | 2004-08-18 | Dispositif et procede de detection et de mesure non invasives d’un champ electrique |
Country Status (5)
Country | Link |
---|---|
US (1) | US7450237B2 (fr) |
EP (1) | EP1656566B1 (fr) |
JP (1) | JP5089982B2 (fr) |
FR (1) | FR2859024B1 (fr) |
WO (1) | WO2005022179A1 (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2859020B1 (fr) * | 2003-08-22 | 2005-11-04 | Centre Nat Rech Scient | Dispositif et procede de detection et de mesure non invasives des proprietes d'un milieu |
US8915395B2 (en) * | 2003-09-23 | 2014-12-23 | Gerry Gersovitz | Multi-compartment container |
RU2463552C1 (ru) * | 2011-04-29 | 2012-10-10 | Осипов Павел Альбертович | Способ определения фазы объектного пучка на пикселе фотоприемника и способ получения фазового портрета объекта |
CN105008895B (zh) | 2012-10-15 | 2019-02-15 | 纳诺赛莱克特生物医药股份有限公司 | 颗粒分选的系统、设备和方法 |
CN103148949B (zh) * | 2013-03-08 | 2015-07-01 | 深圳奥比中光科技有限公司 | 动态相位获取装置 |
EP3159728A1 (fr) | 2015-10-21 | 2017-04-26 | FEI Company | Microscope interférométrique à ondes stationnaires |
Citations (1)
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WO2001035325A1 (fr) * | 1999-11-10 | 2001-05-17 | Lucid, Inc. | Systeme de coupe optique et de cartographie d'un tissu excise par intervention chirurgicale |
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US5272434A (en) | 1987-06-20 | 1993-12-21 | Schlumberger Technologies, Inc. | Method and apparatus for electro-optically testing circuits |
EP0480205A3 (en) | 1990-10-09 | 1993-03-03 | Siemens Aktiengesellschaft | Method for measuring electrical potentials in a semiconductor device |
JPH04330751A (ja) * | 1991-03-01 | 1992-11-18 | Hitachi Ltd | 電位評価方法および装置 |
JPH05107479A (ja) * | 1991-10-15 | 1993-04-30 | Olympus Optical Co Ltd | 走査型光学顕微鏡 |
US5624845A (en) * | 1995-03-16 | 1997-04-29 | International Business Machines Corporation | Assembly and a method suitable for identifying a code |
US5872360A (en) | 1996-12-12 | 1999-02-16 | Intel Corporation | Method and apparatus using an infrared laser based optical probe for measuring electric fields directly from active regions in an integrated circuit |
US5905577A (en) * | 1997-03-15 | 1999-05-18 | Schlumberger Technologies, Inc. | Dual-laser voltage probing of IC's |
US5946102A (en) * | 1997-07-28 | 1999-08-31 | Mmr Technologies, Inc. | Method and apparatus for parameter difference imaging of a sample surface |
US6072179A (en) | 1998-08-07 | 2000-06-06 | Intel Corporation | Method and apparatus using an infrared laser based optical probe for measuring voltages directly from active regions in an integrated circuit |
EP1121602B1 (fr) | 1998-10-14 | 2004-04-07 | The Johns Hopkins University | Amelioration de la testabilite d'un boitier multipuce au moyen de dielectriques intercouches a base de polymere polarise |
JP4151159B2 (ja) * | 1999-06-17 | 2008-09-17 | 松下電器産業株式会社 | 媒質の測定装置 |
US6512385B1 (en) * | 1999-07-26 | 2003-01-28 | Paul Pfaff | Method for testing a device under test including the interference of two beams |
US6587258B1 (en) | 2000-03-24 | 2003-07-01 | Southwest Sciences Incorporated | Electro-optic electric field probe |
US7206078B2 (en) * | 2002-05-03 | 2007-04-17 | Attofemto, Inc. | Non-destructive testing system using a laser beam |
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2003
- 2003-08-22 FR FR0310115A patent/FR2859024B1/fr not_active Expired - Fee Related
-
2004
- 2004-08-18 WO PCT/FR2004/002159 patent/WO2005022179A1/fr active Application Filing
- 2004-08-18 EP EP04786325.3A patent/EP1656566B1/fr not_active Expired - Lifetime
- 2004-08-18 US US10/568,859 patent/US7450237B2/en not_active Expired - Fee Related
- 2004-08-18 JP JP2006523654A patent/JP5089982B2/ja not_active Expired - Fee Related
Patent Citations (1)
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WO2001035325A1 (fr) * | 1999-11-10 | 2001-05-17 | Lucid, Inc. | Systeme de coupe optique et de cartographie d'un tissu excise par intervention chirurgicale |
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CHIMELIK R ET AL: "Surface profilometry by a holographic confocal microscopy", OPTICA APPLICATA, 2003, TECH. UNIV. WROCLAW, POLAND, vol. 33, no. 2-3, 2003, pages 381 - 389, XP008030404, ISSN: 0078-5466 * |
CHMELIK R.: "Holographic Confocal Microscopy", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, vol. 4356, 12 September 2000 (2000-09-12), pages 118 - 123 |
CHMELIK R: "HOLOGRAPHIC CONFOCAL MICROSCOPY", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, vol. 4356, 12 September 2000 (2000-09-12), pages 118 - 123, XP008000246, ISSN: 0277-786X * |
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Also Published As
Publication number | Publication date |
---|---|
JP5089982B2 (ja) | 2012-12-05 |
US7450237B2 (en) | 2008-11-11 |
US20080007248A1 (en) | 2008-01-10 |
EP1656566B1 (fr) | 2017-03-22 |
JP2007503575A (ja) | 2007-02-22 |
FR2859024B1 (fr) | 2005-12-09 |
FR2859024A1 (fr) | 2005-02-25 |
EP1656566A1 (fr) | 2006-05-17 |
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