WO2005014240A1 - Micro-ensemble et poste d'essai pour l'application de testeur de puces et de batonnets - Google Patents

Micro-ensemble et poste d'essai pour l'application de testeur de puces et de batonnets Download PDF

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Publication number
WO2005014240A1
WO2005014240A1 PCT/CA2004/001492 CA2004001492W WO2005014240A1 WO 2005014240 A1 WO2005014240 A1 WO 2005014240A1 CA 2004001492 W CA2004001492 W CA 2004001492W WO 2005014240 A1 WO2005014240 A1 WO 2005014240A1
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WO
WIPO (PCT)
Prior art keywords
positioning
positioning member
manipulator
robot
resolution
Prior art date
Application number
PCT/CA2004/001492
Other languages
English (en)
Inventor
Jean-Bernard Dambrin
Nicolas Pelletier
Stéphane PROVOST
Original Assignee
Mindready, Solutions Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mindready, Solutions Inc. filed Critical Mindready, Solutions Inc.
Publication of WO2005014240A1 publication Critical patent/WO2005014240A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/1005—Programme-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means
    • B25J9/1015—Programme-controlled manipulators characterised by positioning means for manipulator elements comprising adjusting means using additional, e.g. microadjustment of the end effector

Definitions

  • the present invention relates to the field of robotics. More precisely but not exclusively, the present invention is concerned with the field of robotics applied to micro-assembly and test station system.
  • Micro-robots using piezoelectric elements are known to reach positioning resolution in the order of the micron. Although micro-robots are efficient to perform small-range movements, they are incapable of performing large-range movements.
  • the present invention relates to a manipulator having a positioning resolution, comprising: a first positioning member having a free end and a lower positioning resolution; and a second positioning member mounted on the free end of the first positioning member and having a higher positioning resolution.
  • the first positioning member provides for coarser positional adjustment while the second positioning member provides for finer positional adjustment so that the second positioning member mounted on the free end of the first positioning member improves the positioning resolution of the manipulator from the lower positioning resolution to the higher positioning resolution.
  • the present invention also relates to a method of improving a positioning resolution of a manipulator with a first positioning member having a free end and a first positioning resolution, comprising mounting on the free end of the first positioning member a second positioning member having a second positioning resolution higher than the first positioning resolution whereby, in operation, the first positioning member provides for coarser positional adjustment while the second positioning member provides for finer positional adjustment so that the second positioning member mounted on the free end of the first positioning member improves the positioning resolution of the manipulator from the first positioning resolution to the second positioning resolution.
  • a method for positioning an object by means of the above described manipulator comprising: performing a coarser positioning of the object using the first positioning member having a lower positioning resolution; and performing a finer positioning of the manipulator comprising: mounting a light detector on the object using the second positioning member mounted on the free end of the first positioning member and having a finer positioning resolution.
  • a method for performing a Farfield test on an optical device transmitting light along an optical axis using the above described second positioning member controlling the first and second positioning members to cause rotation of the light detector about two axes situated in a plane generally perpendicular to the optical axis; and measuring at different angular positions of the light detector about the two axes a Farfield distribution of the light transmitted along the optical axis by the optical device.
  • the present invention is still further concerned with a method for testing light output characteristics of an optical device using the above described manipulator, comprising: providing a vision system; providing an optical detector; performing a first scan by displacing the vision system through the first positioning member to determine a rough location of the optical device; moving the optical detector to the rough location using the first positioning member; and measuring the light output characteristics of the optical device through the optical detector manipulated through the second positioning member.
  • the present invention relates to a method for measuring light output characteristics of an optical device, comprising: mounting an optical detector on a micro-robot; operating the micro-robot to repeatedly execute a plurality of orbits of the optical detector in order to measure light output characteristics of the optical device; wherein operating the micro-robot comprises measuring light output characteristics of a current orbit and determining the position of a subsequent orbit using the light output characteristics of the current orbit.
  • Figure 1 is a front, perspective view of a high precision manipulator including features in accordance with the illustrative embodiment of the present invention
  • Figure 2 is a side, perspective view of the high precision manipulator of Figure 1 ;
  • Figure 3 is a perspective view of a test assembly of the high precision manipulator of Figures 1 and 2, equipped with sensors;
  • Figure 4 is a perspective view of a control station for the high precision manipulator of Figures 1 and 2;
  • Figure 5 illustrates a Farfield test console
  • Figure 6 illustrates an infrared beam detection console
  • Figure 7 illustrates a 3D curve, real time scan of a light beam using quartz
  • Figure 8 is a Light Voltage Intensity (LVI) test console.
  • the high precision manipulator 10 comprises an industrial robot 11. Still referring to Figures 1 and 2, the industrial robot 11 comprises a stationary base 12 resting on the top face of a table or other platform 13. Table 13 can be movable both horizontally and vertically as indicated by the orthogonal axes 14.
  • the industrial robot 11 further comprises an articulated arm 112 formed by arm sections 15, 16, 17 and 117 mounted on the stationary base 12. More specifically, the horizontal arm section 15 has a proximal end pivotally mounted on top of the stationary base 12 about a vertical pivot (not shown). Arm section 16 has a proximal end pivotally mounted on the distal end of arm section 15 through a horizontal pivot 18. Arm section 17 has a proximal end pivotally mounted on the distal end of arm section 16 through a horizontal pivot 19. It should further be mentioned that the distal end of arm section 17 comprises a pair of laterally opposite, flat, parallel spaced apart brackets 20 and 21. Finally, arm section 117 is pivotally mounted between the brackets 20 and 21 of arm section 17 through a horizontal pivot 23.
  • arm sections 15, 16, 17 and 117 are motorized under the control of a computerized control station 24 (see Figure 4) in order to perform the desired task.
  • the industrial robot 11 can be a 5 or 6-axis robot commercialized under the trademark FanucTM.
  • FanucTM a 5 or 6-axis FanucTM robot is adequate to cover an area of 600x600 mm.
  • the high precision manipulator 10 comprises a micro-robot 22 pivotally mounted on the distal end of the arm 117 through a motorized vertical pivot (not shown).
  • a motorized vertical pivot not shown.
  • the micro-robot 22 is motorized to rotate about this vertical pivot under the control of the computerized control station 24 (see Figure 4) in order to perform the desired task.
  • the micro-robot 22 can be the P-611 NanoCubeTM manufactured and commercialized by the Pl-Polytec Group.
  • the P- 611 NanocubeTM is a closed-loop, multi-axis Piezo-NanoPositioning system having a 100 x 100 x 100 ⁇ m, XYZ tri-axial positioning and scanning range and coming in an extremely compact package of only 44 x 44 x 44 mm. Equipped with a zero-stiction, zero-friction guiding system, the NanoCubeTM provides motion with ultra-high resolution and settling times of only a few milliseconds.
  • the P-611 NanoPositioners are equipped with low-voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system.
  • the force exerted by the piezoelectric drives pushes a multi-flexure parallelogram via an integrated motion amplifier.
  • the flexures are FEA (finite element analysis) modeled for zero-stiction and zero-friction, ultra-high resolution and exceptional guiding precision.
  • Integrated strain gauge position feedback sensors provide nanometer-scale resolution in closed-loop operation (with PI control electronics).
  • Micro-robots are otherwise well known to those of ordinary skill in the art and, accordingly, will not be further described in the present specification.
  • the industrial robot 11 will provide for coarser positional adjustment while the micro-robot 22 will provide for finer positional adjustment. In this manner, the industrial robot 11 will ensure pick-up and positioning capability of the high precision manipulator 10 while the micro-robot 22 will improve the i positional accuracy of the overall high precision manipulator 10.
  • the high precision manipulator 10 can be used to perform very position-accurate tasks like, without limitation, alignment, measurement, test, manipulation, etc., for example, not only in the field of bar and chip testers in the optoelectronic industry but also in many other fields including the telecommunication and medical industries.
  • This type of dedicated software and adapted computerized control station 24 are well known to those of ordinary skill in the art and will not be further described in the present specification.
  • the control station 24 may comprise a computer, a FanucTM controller, a PI NanoCubeTM controller, etc.
  • the industrial robot 11 is a 5 or 6-axis robot commercialized by Fanuc*TM*, and capable of covering an area of 600x600 mm.
  • the micro-robot 22 is a P-611 NanoCubeTM manufactured and commercialized by the Pl-Polytec Group and forming a multi-axis Piezo- NanoPositioning system having a 100 x 100 x 100 ⁇ m, XYZ tri-axial positioning and scanning range.
  • This micro-robot 22 can be used to manipulate or move some very small detectors such as, without limitation, an optical fiber or a gripper.
  • the high precision manipulator 10 comprises a test assembly 25 including various sensors and elements displaced and manipulated through both the industrial robot 11 and micro-robot 22.
  • These sensors and elements may comprise, for example and without limitation, a vision system in the infrared (IR) frequency band 26, a vision system in the visible frequency band 27, an optical fiber 28, a load cell (not shown), a photodiode 29, an InGaS large area detector 30, and a pneumatic head (not shown) for picking- up, manipulating and placing small components.
  • FIG. 4 illustrates the control station 24, for controlling operation of the high precision manipulator 10.
  • the control station 24 comprises, amongst others, a National Instrument*TM* analog card, a computer, a FanucTM controller, a PI NanoCubeTM controller, a wave meter, an optical power meter, an Optical Spectrum Analyser (OSA), etc.
  • OSA Optical Spectrum Analyser
  • test assembly 25 and control station 24 comprises the following off-the-shell elements that, those of ordinary skill in the art, will know how to assemble and how to operate:
  • PZT servo controller PI controller LVPZT Amplifier PI NanoCube ⁇ I M v ⁇ : P61135 Vision Camera by Watec.
  • I R Camera by Laser Physics Area detector Heason Robot SN 15099 Heason Technologies controller Mod: 881012 SN: 01 012 013 Computer monitor SN: MH73J1005852 National Instrument Chassis PXI-1000B National instrument Card Analog output Number: 6711 National instrument Card Multifunction Number: 6040E National instrument Card motion controller Number: 7344 National instrument Computer Number 8776.
  • a mechanical Heidenhain probe has been used in order to define the resolution of the linear movement of the high precision manipulator 10.
  • a corresponding control card (not shown) has also been used to obtain the data coming from the mechanical probe.
  • An interferometer has also been used in order to quantify potential vibrations originating from the industrial robot 11. As the measurement is based on the phase shift reflected from a laser beam, no mechanical perturbation could be attributed to a contact point during the measurement.
  • a 20 nm resolution for the piezoelectric micro-robot 22 has been measured using an interferometer, whereby a 50 nm resolution can be achieved for the overall high precision manipulator 10.
  • the high precision manipulator 10 can be used to perform the Farfield test which is a classical test in the optoelectronic industry.
  • the test consists of measuring the power of the light at various angles about the axis of the light or laser beam.
  • a multimeter and a photodiode (for example photodiode 29 of Figure 3) are used in order to perform the Farfield test.
  • a rotation of the photodiode 29 is therefore performed around the two main axis X and Y which are perpendicular to the optical axis Z of the optical chip to test to determine the Farfield distribution of the light transmitted along the optical axis Z (see for example the graph of Figure 5). Time and money are therefore saved when performing the test using the high precision manipulator 10.
  • the optical fiber 28 of Figure 3 for example a 8-micron optical fiber, needs to be aligned with the light or laser beam coming out from the optical chip.
  • the vision system in the IR band 26 ( Figure 3), for example an IR camera is operated through the industrial robot 11 and has a field of view large enough to cover all potential areas where the light or laser beam to locate could be.
  • a first scan of the vision system through the industrial robot 11 will determine a rough location of the optical chip, including the light or laser beam.
  • the IR camera 26 will detect the light of the beam with an accuracy of 30 microns. With this information and knowing the offset between the position of the fiber 28 and the middle of the camera image, it is just needed to bring the optical fiber 28 automatically to the rough location of the optical chip through the industrial robot 11. However, at this point, the fiber 28 is not yet aligned but the power peak is close.
  • a 100X100 micron scan is performed using the micro-robot 22 in order to localize the power peak.
  • Improvements comprise the scanning capability and the use of the IR camera, which reduce by 10 the time required for the alignment. More precisely, instead of requiring the conventional alignment time of 60 to 120 seconds, the alignment can be done within 6 seconds.
  • the accuracy of detection within the IR vision system 26 can reach 30 microns.
  • Figure 6 shows the detection of the light or laser beam by the IR vision system 26.
  • Figure 7 shows the auto scan concept.
  • an analog signal controls the quartz oscillation of the piezoelectric elements of the micro- robot 22 and the National Instrument*TM card synchronizes the overall movement with the input signal.
  • the National Instrument*TM card synchronizes the overall movement with the input signal.
  • a classical test in the optoelectronic industry is to check the characteristics of a laser chip. More precisely, current must be controlled within the chip to be tested and the measurement is typically performed very quickly.
  • a raster scan option will enable a very quick scan of an area of 100X100 microns.
  • the Z-axis may be controlled too. Also some scan in different planes within a cube may be performed.
  • some spiral or orbit may be performed by applying a sinusoidal signal to the X and Y axes of the piezoelectric quartz elements.
  • a circular oscillation of the quartz can have a frequency much higher than any conventional robot; this property, which can be used to produce circular movement, is due to the fact that the piezoelectric micro-robot 22 has a low mechanical inertia.
  • Such capability is very useful in order to track in real time a beam of light moving in space, because each orbit performed by the fiber 28 will be associated to a signal power; then after each current orbit it is just needed, to determine the location of the subsequent orbit, to define the direction of the gradient of light to which is in fact the direction which has to be followed in order to find the power peak.
  • the time for aligning a fiber using the IR camera and the real time scanning system is 3 seconds instead of the conventional 1 to 4 minutes depending on the configuration.
  • the software used to control the overall station is preferably based on an event-driven concept. This means that an operator is able to interact with the system and to take the control whenever he wants. A complex recovery procedure has further been implemented due to this event driven concept.

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)

Abstract

Des manipulateurs destinés à être utilisés dans le domaine de la robotique sont actuellement limités dans leur amplitude de mouvements. L'invention a trait à un manipulateur (10) permettant une plus grande amplitude de mouvements comportant un premier organe de positionnement (11) présentant une extrémité libre (117) et une résolution de positionnement inférieure, et un deuxième organe de positionnement (22) monté sur l'extrémité libre du premier organe de positionnement et présentant une résolution de positionnement supérieure. En fonctionnement, le premier organe de positionnement réalise un ajustement de position plus grossier tandis que le deuxième organe de positionnement assure un ajustement de position plus affiné de sorte que le deuxième organe de positionnement monté sur l'extrémité libre du premier organe de positionnement améliore la résolution de positionnement du manipulateur de la résolution de positionnement inférieure à la résolution de positionnement supérieure. L'invention a également trait à un procédé correspondant d'amélioration d'une résolution de position d'un manipulateur avec un premier organe de positionnement (11) présentant une extrémité libre (117) et une première résolution de positionnement, comprenant le montage sur l'extrémité libre du premier organe de positionnement d'un deuxième organe de positionnement (22) présentant une résolution de positionnement supérieure à la première résolution de positionnement.
PCT/CA2004/001492 2003-08-11 2004-08-11 Micro-ensemble et poste d'essai pour l'application de testeur de puces et de batonnets WO2005014240A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US49379403P 2003-08-11 2003-08-11
US60/493,794 2003-08-11

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WO2005014240A1 true WO2005014240A1 (fr) 2005-02-17

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2244865A1 (fr) * 2007-08-28 2010-11-03 Goldwing Nominees Pty Ltd. Système et procédé de commande précise en temps réel de position et d'orientation d'outillage
CN103273495A (zh) * 2013-06-09 2013-09-04 中国科学院自动化研究所 一种基于OpenGL的微装配实时演示和碰撞检测系统
US10635758B2 (en) 2016-07-15 2020-04-28 Fastbrick Ip Pty Ltd Brick/block laying machine incorporated in a vehicle
US10865578B2 (en) 2016-07-15 2020-12-15 Fastbrick Ip Pty Ltd Boom for material transport
US11401115B2 (en) 2017-10-11 2022-08-02 Fastbrick Ip Pty Ltd Machine for conveying objects and multi-bay carousel for use therewith
US11441899B2 (en) 2017-07-05 2022-09-13 Fastbrick Ip Pty Ltd Real time position and orientation tracker
US11958193B2 (en) 2017-08-17 2024-04-16 Fastbrick Ip Pty Ltd Communication system for an interaction system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5351676A (en) * 1991-08-05 1994-10-04 Putman John M Endoscope stabilizer
WO2001089774A2 (fr) * 2000-05-25 2001-11-29 Burleigh Automation, Inc. Tete de manipulateur/terminal d'ensemble robotique

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5351676A (en) * 1991-08-05 1994-10-04 Putman John M Endoscope stabilizer
WO2001089774A2 (fr) * 2000-05-25 2001-11-29 Burleigh Automation, Inc. Tete de manipulateur/terminal d'ensemble robotique

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2244865A1 (fr) * 2007-08-28 2010-11-03 Goldwing Nominees Pty Ltd. Système et procédé de commande précise en temps réel de position et d'orientation d'outillage
EP2244865A4 (fr) * 2007-08-28 2013-08-28 Goldwing Nominees Pty Ltd Système et procédé de commande précise en temps réel de position et d'orientation d'outillage
CN103273495A (zh) * 2013-06-09 2013-09-04 中国科学院自动化研究所 一种基于OpenGL的微装配实时演示和碰撞检测系统
US11106836B2 (en) 2016-07-15 2021-08-31 Fastbrick Ip Pty Ltd Brick/block laying machine incorporated in a vehicle
US10865578B2 (en) 2016-07-15 2020-12-15 Fastbrick Ip Pty Ltd Boom for material transport
US10876308B2 (en) 2016-07-15 2020-12-29 Fastbrick Ip Pty Ltd Boom for material transport
US10635758B2 (en) 2016-07-15 2020-04-28 Fastbrick Ip Pty Ltd Brick/block laying machine incorporated in a vehicle
US11299894B2 (en) 2016-07-15 2022-04-12 Fastbrick Ip Pty Ltd Boom for material transport
US11687686B2 (en) 2016-07-15 2023-06-27 Fastbrick Ip Pty Ltd Brick/block laying machine incorporated in a vehicle
US11842124B2 (en) 2016-07-15 2023-12-12 Fastbrick Ip Pty Ltd Dynamic compensation of a robot arm mounted on a flexible arm
US12001761B2 (en) 2016-07-15 2024-06-04 Fastbrick Ip Pty Ltd Computer aided design for brick and block constructions and control software to control a machine to construct a building
US11441899B2 (en) 2017-07-05 2022-09-13 Fastbrick Ip Pty Ltd Real time position and orientation tracker
US11958193B2 (en) 2017-08-17 2024-04-16 Fastbrick Ip Pty Ltd Communication system for an interaction system
US11401115B2 (en) 2017-10-11 2022-08-02 Fastbrick Ip Pty Ltd Machine for conveying objects and multi-bay carousel for use therewith

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