WO2005002979A3 - Canister guard - Google Patents

Canister guard Download PDF

Info

Publication number
WO2005002979A3
WO2005002979A3 PCT/US2004/019900 US2004019900W WO2005002979A3 WO 2005002979 A3 WO2005002979 A3 WO 2005002979A3 US 2004019900 W US2004019900 W US 2004019900W WO 2005002979 A3 WO2005002979 A3 WO 2005002979A3
Authority
WO
WIPO (PCT)
Prior art keywords
canister
guard
canister guard
liquid
oulet
Prior art date
Application number
PCT/US2004/019900
Other languages
French (fr)
Other versions
WO2005002979A2 (en
Inventor
John N Gregg
Donn Naito
Original Assignee
Advanced Tech Materials
John N Gregg
Donn Naito
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Tech Materials, John N Gregg, Donn Naito filed Critical Advanced Tech Materials
Priority to GB0600004A priority Critical patent/GB2419934B/en
Publication of WO2005002979A2 publication Critical patent/WO2005002979A2/en
Publication of WO2005002979A3 publication Critical patent/WO2005002979A3/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4402—Reduction of impurities in the source gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B1/00—Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
    • B65B1/04—Methods of, or means for, filling the material into the containers or receptacles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B3/00—Packaging plastic material, semiliquids, liquids or mixed solids and liquids, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
    • B65B3/04—Methods of, or means for, filling the material into the containers or receptacles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561—Gas plumbing upstream of the reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)
  • Dental Tools And Instruments Or Auxiliary Dental Instruments (AREA)

Abstract

A canister guard for preventing liquid contamination of an oulet to a canister containing liquid. The canister guard may include baffles extending from a sidewall. Additionally, the canister guard may be configured to be replacable or for retrofitting to conventional liquid chemical containing canisters.
PCT/US2004/019900 2003-06-26 2004-06-22 Canister guard WO2005002979A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0600004A GB2419934B (en) 2003-06-26 2004-06-22 Canister guard

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/606,520 2003-06-26
US10/606,520 US6880592B2 (en) 2003-06-26 2003-06-26 Canister guard

Publications (2)

Publication Number Publication Date
WO2005002979A2 WO2005002979A2 (en) 2005-01-13
WO2005002979A3 true WO2005002979A3 (en) 2005-09-15

Family

ID=33540087

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/019900 WO2005002979A2 (en) 2003-06-26 2004-06-22 Canister guard

Country Status (3)

Country Link
US (1) US6880592B2 (en)
GB (1) GB2419934B (en)
WO (1) WO2005002979A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006013942A1 (en) * 2006-03-17 2007-09-20 M+W Zander Holding Ag gas cabinet
US9034105B2 (en) * 2008-01-10 2015-05-19 American Air Liquide, Inc. Solid precursor sublimator
US8758515B2 (en) 2010-08-09 2014-06-24 Rohm And Haas Electronic Materials Llc Delivery device and method of use thereof
US8997775B2 (en) 2011-05-24 2015-04-07 Rohm And Haas Electronic Materials Llc Vapor delivery device, methods of manufacture and methods of use thereof
US8776821B2 (en) 2011-05-24 2014-07-15 Rohm And Haas Electronic Materials Llc Vapor delivery device, methods of manufacture and methods of use thereof
US9243325B2 (en) 2012-07-18 2016-01-26 Rohm And Haas Electronic Materials Llc Vapor delivery device, methods of manufacture and methods of use thereof
KR20230040279A (en) * 2021-09-15 2023-03-22 에이에스엠 아이피 홀딩 비.브이. Method and apparatus for controlling a liquid

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4628689A (en) * 1983-08-18 1986-12-16 Charles Jourdan Internal combustion engine exhaust system
US5500116A (en) * 1993-07-19 1996-03-19 Jgc Corporation Liquid-liquid contactor
US6431229B1 (en) * 2001-08-24 2002-08-13 Air Products And Chemicals, Inc. Solventless purgeable diaphragm valved manifold for low vapor pressure chemicals
US6520218B1 (en) * 1998-09-03 2003-02-18 Advanced Technology Materials, Inc. Container chemical guard

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5607002A (en) * 1993-04-28 1997-03-04 Advanced Delivery & Chemical Systems, Inc. Chemical refill system for high purity chemicals
US6916398B2 (en) * 2001-10-26 2005-07-12 Applied Materials, Inc. Gas delivery apparatus and method for atomic layer deposition

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4628689A (en) * 1983-08-18 1986-12-16 Charles Jourdan Internal combustion engine exhaust system
US5500116A (en) * 1993-07-19 1996-03-19 Jgc Corporation Liquid-liquid contactor
US6520218B1 (en) * 1998-09-03 2003-02-18 Advanced Technology Materials, Inc. Container chemical guard
US6431229B1 (en) * 2001-08-24 2002-08-13 Air Products And Chemicals, Inc. Solventless purgeable diaphragm valved manifold for low vapor pressure chemicals

Also Published As

Publication number Publication date
US20040261896A1 (en) 2004-12-30
US6880592B2 (en) 2005-04-19
GB0600004D0 (en) 2006-02-08
GB2419934B (en) 2007-03-07
WO2005002979A2 (en) 2005-01-13
GB2419934A (en) 2006-05-10

Similar Documents

Publication Publication Date Title
WO2007038363A3 (en) Utilizing ionic liquids for hydrofluorocarbon separation
AU2002323318A1 (en) System and method for withdrawing permeate through a filter and for cleaning the filter in situ
MXPA03008292A (en) Chronotherapeutic dosage forms containing glucocorticosteroid.
SG116599A1 (en) Process for the working-up of waste waters containing aromatic nitro compounds.
PL1616848T3 (en) Process for the preparation of tert.-butanol from isobutene containing hydrocarbon mixtures
GB0602942D0 (en) Chemical vapor deposition reactor
WO2004091746A3 (en) Material removal and dispensing devices, systems, and methods
MXPA03007570A (en) Process for making mild moisturizing liquids containing large oil droplet.
WO2005002979A3 (en) Canister guard
WO2006031311A3 (en) Multi-well container processing systems, system components, and related methods
WO2006135938A3 (en) Fluorometric method for monitoring a clean-in-place system
EP1616872A3 (en) Purification method for organometallic compounds and organometallic compounds obtained therefrom
WO2005054159A3 (en) Process for the preparation of xylene by the catalytic dehydrocyclization of diisobutylene
AU2003282380A1 (en) A method for the separation of the letrozole precursor 4-1-(1,2,4-triazolyl) methyl benzonitrile from its 1,3,4-triazolyl isomer
MXPA03004142A (en) Baffle system for separating liquid from a gas stream.
AUPP242898A0 (en) Method of water purification
ITAN20020043A1 (en) VALVE FOR SAFETY CAP FOR CONTAINING TANKS
WO2003039719A3 (en) Method for separating substances from solutions containing ionic liquids by means of a membrane
PL354299A1 (en) Gas tank, particularly for liquid propane-butane gas
WO2007038289A3 (en) Package closure
CA2514779A1 (en) Method for the determination of the caco3 content of a scrubbing liquid
WO2005113446A3 (en) Fluid clarification system
ZA200100359B (en) Process for the removal of dissolved oxygen from phenol.
AU2003302736A1 (en) Process for removing metals from liquids
WO2005054370A3 (en) Antifoaming agent

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
DPEN Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed from 20040101)
WWE Wipo information: entry into national phase

Ref document number: 0600004.6

Country of ref document: GB

Ref document number: 0600004

Country of ref document: GB

122 Ep: pct application non-entry in european phase