WO2005001593A3 - 基準パターン抽出方法とその装置、パターンマッチング方法とその装置、位置検出方法とその装置及び露光方法とその装置 - Google Patents

基準パターン抽出方法とその装置、パターンマッチング方法とその装置、位置検出方法とその装置及び露光方法とその装置 Download PDF

Info

Publication number
WO2005001593A3
WO2005001593A3 PCT/JP2004/008982 JP2004008982W WO2005001593A3 WO 2005001593 A3 WO2005001593 A3 WO 2005001593A3 JP 2004008982 W JP2004008982 W JP 2004008982W WO 2005001593 A3 WO2005001593 A3 WO 2005001593A3
Authority
WO
WIPO (PCT)
Prior art keywords
view
unique
lowbar
area
reference pattern
Prior art date
Application number
PCT/JP2004/008982
Other languages
English (en)
French (fr)
Other versions
WO2005001593A2 (ja
WO2005001593A1 (ja
Inventor
Yuji Kokumai
Shinichi Nakajima
Original Assignee
Nippon Kogaku Kk
Yuji Kokumai
Shinichi Nakajima
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku Kk, Yuji Kokumai, Shinichi Nakajima filed Critical Nippon Kogaku Kk
Priority to JP2005511046A priority Critical patent/JP4389871B2/ja
Publication of WO2005001593A2 publication Critical patent/WO2005001593A2/ja
Publication of WO2005001593A1 publication Critical patent/WO2005001593A1/ja
Publication of WO2005001593A3 publication Critical patent/WO2005001593A3/ja

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7092—Signal processing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Analysis (AREA)
  • Image Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
PCT/JP2004/008982 2003-06-27 2004-06-25 基準パターン抽出方法とその装置、パターンマッチング方法とその装置、位置検出方法とその装置及び露光方法とその装置 WO2005001593A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005511046A JP4389871B2 (ja) 2003-06-27 2004-06-25 基準パターン抽出方法とその装置、パターンマッチング方法とその装置、位置検出方法とその装置及び露光方法とその装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2003-185392 2003-06-27
JP2003185392 2003-06-27
JP2004-150499 2004-05-20
JP2004150499 2004-05-20

Publications (3)

Publication Number Publication Date
WO2005001593A2 WO2005001593A2 (ja) 2005-01-06
WO2005001593A1 WO2005001593A1 (ja) 2005-01-06
WO2005001593A3 true WO2005001593A3 (ja) 2005-05-19

Family

ID=

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8908074B2 (en) 2012-12-27 2014-12-09 Panasonic Intellectual Property Corporation Of America Information communication method
US8965216B2 (en) 2012-12-27 2015-02-24 Panasonic Intellectual Property Corporation Of America Information communication method
US8988574B2 (en) 2012-12-27 2015-03-24 Panasonic Intellectual Property Corporation Of America Information communication method for obtaining information using bright line image
US8994841B2 (en) 2012-05-24 2015-03-31 Panasonic Intellectual Property Corporation Of America Information communication method for obtaining information specified by stripe pattern of bright lines
US8994865B2 (en) 2012-12-27 2015-03-31 Panasonic Intellectual Property Corporation Of America Information communication method
US9088360B2 (en) 2012-12-27 2015-07-21 Panasonic Intellectual Property Corporation Of America Information communication method
US9087349B2 (en) 2012-12-27 2015-07-21 Panasonic Intellectual Property Corporation Of America Information communication method
US9085927B2 (en) 2012-12-27 2015-07-21 Panasonic Intellectual Property Corporation Of America Information communication method
US9094120B2 (en) 2012-12-27 2015-07-28 Panasonic Intellectual Property Corporaton Of America Information communication method
US9247180B2 (en) 2012-12-27 2016-01-26 Panasonic Intellectual Property Corporation Of America Video display method using visible light communication image including stripe patterns having different pitches
US9262954B2 (en) 2012-12-27 2016-02-16 Panasonic Intellectual Property Corporation Of America Visible light communication signal display method and apparatus

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06232240A (ja) * 1993-02-02 1994-08-19 Hitachi Techno Eng Co Ltd 画像認識位置合わせ装置
JPH06309434A (ja) * 1993-04-27 1994-11-04 Nikon Corp 画像処理方法及び装置
JPH10326739A (ja) * 1997-05-23 1998-12-08 Nikon Corp 位置合わせ方法及び露光方法
WO2000042640A1 (fr) * 1999-01-18 2000-07-20 Nikon Corporation Procede et dispositif d'appariement de formes, procede et dispositif de determination de position, procede et dispositif d'alignement de position, procede et dispositif d'exposition, et dispositif et son procede de production
JP2002062112A (ja) * 2000-08-21 2002-02-28 Sony Corp 位置決め装置及び位置決め方法
WO2002029870A1 (fr) * 2000-10-05 2002-04-11 Nikon Corporation Procede de determination des conditions d'exposition, procede d'exposition, dispositif de realisation dudit procede et support d'enregistrement

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06232240A (ja) * 1993-02-02 1994-08-19 Hitachi Techno Eng Co Ltd 画像認識位置合わせ装置
JPH06309434A (ja) * 1993-04-27 1994-11-04 Nikon Corp 画像処理方法及び装置
JPH10326739A (ja) * 1997-05-23 1998-12-08 Nikon Corp 位置合わせ方法及び露光方法
WO2000042640A1 (fr) * 1999-01-18 2000-07-20 Nikon Corporation Procede et dispositif d'appariement de formes, procede et dispositif de determination de position, procede et dispositif d'alignement de position, procede et dispositif d'exposition, et dispositif et son procede de production
JP2002062112A (ja) * 2000-08-21 2002-02-28 Sony Corp 位置決め装置及び位置決め方法
WO2002029870A1 (fr) * 2000-10-05 2002-04-11 Nikon Corporation Procede de determination des conditions d'exposition, procede d'exposition, dispositif de realisation dudit procede et support d'enregistrement

Cited By (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9083543B2 (en) 2012-05-24 2015-07-14 Panasonic Intellectual Property Corporation Of America Information communication method of obtaining information from a subject by demodulating data specified by a pattern of a bright line included in an obtained image
US9456109B2 (en) 2012-05-24 2016-09-27 Panasonic Intellectual Property Corporation Of America Information communication method of obtaining information from a subject by demodulating data specified by a pattern of a bright line included in an obtained image
US9300845B2 (en) 2012-05-24 2016-03-29 Panasonic Intellectual Property Corporation Of America Information communication device for obtaining information from a subject by demodulating a bright line pattern included in an obtained image
US8994841B2 (en) 2012-05-24 2015-03-31 Panasonic Intellectual Property Corporation Of America Information communication method for obtaining information specified by stripe pattern of bright lines
US9166810B2 (en) 2012-05-24 2015-10-20 Panasonic Intellectual Property Corporation Of America Information communication device of obtaining information by demodulating a bright line pattern included in an image
US9143339B2 (en) 2012-05-24 2015-09-22 Panasonic Intellectual Property Corporation Of America Information communication device for obtaining information from image data by demodulating a bright line pattern appearing in the image data
US9083544B2 (en) 2012-05-24 2015-07-14 Panasonic Intellectual Property Corporation Of America Information communication method of obtaining information from a subject by demodulating data specified by a pattern of a bright line included in an obtained image
US9203515B2 (en) 2012-12-27 2015-12-01 Panasonic Intellectual Property Corporation Of America Information communication method
US9262954B2 (en) 2012-12-27 2016-02-16 Panasonic Intellectual Property Corporation Of America Visible light communication signal display method and apparatus
US9088360B2 (en) 2012-12-27 2015-07-21 Panasonic Intellectual Property Corporation Of America Information communication method
US9087349B2 (en) 2012-12-27 2015-07-21 Panasonic Intellectual Property Corporation Of America Information communication method
US9085927B2 (en) 2012-12-27 2015-07-21 Panasonic Intellectual Property Corporation Of America Information communication method
US9088363B2 (en) 2012-12-27 2015-07-21 Panasonic Intellectual Property Corporation Of America Information communication method
US9088362B2 (en) 2012-12-27 2015-07-21 Panasonic Intellectual Property Corporation Of America Information communication method for obtaining information by demodulating bright line pattern included in an image
US9094120B2 (en) 2012-12-27 2015-07-28 Panasonic Intellectual Property Corporaton Of America Information communication method
US9019412B2 (en) 2012-12-27 2015-04-28 Panasonic Intellectual Property Corporation Of America Information communication method for selecting between visible light communication mode and normal imaging mode
US8994865B2 (en) 2012-12-27 2015-03-31 Panasonic Intellectual Property Corporation Of America Information communication method
US9184838B2 (en) 2012-12-27 2015-11-10 Panasonic Intellectual Property Corporation Of America Information communication method for obtaining information using ID list and bright line image
US8908074B2 (en) 2012-12-27 2014-12-09 Panasonic Intellectual Property Corporation Of America Information communication method
US9247180B2 (en) 2012-12-27 2016-01-26 Panasonic Intellectual Property Corporation Of America Video display method using visible light communication image including stripe patterns having different pitches
US9252878B2 (en) 2012-12-27 2016-02-02 Panasonic Intellectual Property Corporation Of America Information communication method
US9258058B2 (en) 2012-12-27 2016-02-09 Panasonic Intellectual Property Corporation Of America Signal transmitting apparatus for transmitting information by bright line pattern in image
US9030585B2 (en) 2012-12-27 2015-05-12 Panasonic Intellectual Property Corporation Of America Information communication method for obtaining information by demodulating bright line pattern included in image
US9281895B2 (en) 2012-12-27 2016-03-08 Panasonic Intellectual Property Corporation Of America Information communication method
US8988574B2 (en) 2012-12-27 2015-03-24 Panasonic Intellectual Property Corporation Of America Information communication method for obtaining information using bright line image
US9331779B2 (en) 2012-12-27 2016-05-03 Panasonic Intellectual Property Corporation Of America Information communication method for obtaining information using ID list and bright line image
US9341014B2 (en) 2012-12-27 2016-05-17 Panasonic Intellectual Property Corporation Of America Information communication method using change in luminance
US9380227B2 (en) 2012-12-27 2016-06-28 Panasonic Intellectual Property Corporation Of America Information communication method for obtaining information using bright line image
US9407368B2 (en) 2012-12-27 2016-08-02 Panasonic Intellectual Property Corporation Of America Information communication method
US9450672B2 (en) 2012-12-27 2016-09-20 Panasonic Intellectual Property Corporation Of America Information communication method of transmitting a signal using change in luminance
US8965216B2 (en) 2012-12-27 2015-02-24 Panasonic Intellectual Property Corporation Of America Information communication method
US9462173B2 (en) 2012-12-27 2016-10-04 Panasonic Intellectual Property Corporation Of America Information communication method
US9467225B2 (en) 2012-12-27 2016-10-11 Panasonic Intellectual Property Corporation Of America Information communication method
US9515731B2 (en) 2012-12-27 2016-12-06 Panasonic Intellectual Property Corporation Of America Information communication method
US9560284B2 (en) 2012-12-27 2017-01-31 Panasonic Intellectual Property Corporation Of America Information communication method for obtaining information specified by striped pattern of bright lines
US9564970B2 (en) 2012-12-27 2017-02-07 Panasonic Intellectual Property Corporation Of America Information communication method for obtaining information using ID list and bright line image
US9571191B2 (en) 2012-12-27 2017-02-14 Panasonic Intellectual Property Corporation Of America Information communication method
US9591232B2 (en) 2012-12-27 2017-03-07 Panasonic Intellectual Property Corporation Of America Information communication method

Also Published As

Publication number Publication date
JPWO2005001593A1 (ja) 2007-09-20
JP4389871B2 (ja) 2009-12-24
WO2005001593A2 (ja) 2005-01-06

Similar Documents

Publication Publication Date Title
DE60220284D1 (de) Fingerabdrucknarbenerkennungsverfahren und -vorrichtung
WO2004061752A3 (en) Fingerprint security systems in handheld electronic devices and methods therefor
FR2864290B1 (fr) Procede et dispositif de reconnaissance d'iris
WO2007025258A3 (en) Methods and systems for biometric identification
WO2005055155A3 (en) Authenticating an authentic article using spectral imaging and analysis
WO2003073359A3 (en) Method and apparatus for recognizing objects
WO2006086051A3 (en) Method and apparatus for tracking a movable object
EP1477925A3 (en) Method and system for multiple biometric template screening
EP0924639A3 (en) Character string extraction apparatus and pattern extraction apparatus
EP1462997A3 (en) Image processing device
EP1574987A3 (en) Character recognition method
WO2005106773A3 (en) Spatial-temporal lesion detection, segmentation, and diagnostic information extraction system and method
DE60323208D1 (de) Fingerabdruck-workstation und verfahren
EP1909228A4 (en) FACIAL DETECTION DEVICE, FACE DETECTION METHOD AND FACE DETECTION PROGRAM
EP1445731A3 (en) Image processing method, image processing apparatus and image processing program
EP1134691A3 (en) Image processing apparatus and method for extracting feature of object
WO2009139999A3 (en) Fingerprint representation using gradient histograms
EP1796039A3 (en) Determining photographing position or object position from plural images
EP1868158A8 (en) Face authentication apparatus, face authentication method, and entrance and exit management apparatus
WO2006074407A3 (en) Biometric recognition/verification using multispectral imaging
WO2007072447A3 (en) Biometric information detection using sweep-type imager
DE602006021349D1 (de) Echtzeit-gesichtsverfolgung in einer digitalen bildbeschaffungseinrichtung
EP2299386A3 (en) Image processing apparatus, image processing system, and image processing method
EP1380993A3 (en) System and method for template matching of candidates within a two-dimensional image
WO2005020030A3 (en) Multi-modal face recognition

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2005511046

Country of ref document: JP

122 Ep: pct application non-entry in european phase