WO2004102228A2 - Plasma deposited amorphous silicon nitride interlayer enabling polymer lamination to germanium - Google Patents

Plasma deposited amorphous silicon nitride interlayer enabling polymer lamination to germanium Download PDF

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Publication number
WO2004102228A2
WO2004102228A2 PCT/US2004/014828 US2004014828W WO2004102228A2 WO 2004102228 A2 WO2004102228 A2 WO 2004102228A2 US 2004014828 W US2004014828 W US 2004014828W WO 2004102228 A2 WO2004102228 A2 WO 2004102228A2
Authority
WO
WIPO (PCT)
Prior art keywords
optical component
nanometers
adhesive
polyethylene
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2004/014828
Other languages
French (fr)
Other versions
WO2004102228A3 (en
Inventor
James N. Johnson
Kevin W. Flanagan
David C. Burton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lockheed Martin Corp
Original Assignee
Lockheed Corp
Lockheed Martin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lockheed Corp, Lockheed Martin Corp filed Critical Lockheed Corp
Publication of WO2004102228A2 publication Critical patent/WO2004102228A2/en
Publication of WO2004102228A3 publication Critical patent/WO2004102228A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31667—Next to addition polymer from unsaturated monomers, or aldehyde or ketone condensation product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal
    • Y10T428/31681—Next to polyester, polyamide or polyimide [e.g., alkyd, glue, or nylon, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31786—Of polyester [e.g., alkyd, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/30—Woven fabric [i.e., woven strand or strip material]
    • Y10T442/3854—Woven fabric with a preformed polymeric film or sheet
    • Y10T442/3886—Olefin polymer or copolymer sheet or film [e.g., polypropylene, polyethylene, ethylene-butylene copolymer, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/60—Nonwoven fabric [i.e., nonwoven strand or fiber material]
    • Y10T442/674—Nonwoven fabric with a preformed polymeric film or sheet
    • Y10T442/678—Olefin polymer or copolymer sheet or film [e.g., polypropylene, polyethylene, ethylene-butylene copolymer, etc.]

Definitions

  • the present invention relates to the field of optics and more specifically to a germanium lens having a polyethylene coating.
  • the long-wave infrared region is the largest continuous IR transmittance window in the Earth's atmosphere.
  • Military aircraft for example, use the IR communication window via known communication devices having IR sensors.
  • One of the components involved in IR sensors is a primary lens.
  • An IR primary lens is an IR transmissive structure.
  • An IR transmissive structure transmits LR energy of wavelengths between about 0.1 microns and 20 microns, preferably between 1 and 15 microns, and most preferably between 2 and 12 microns.
  • a lens is IR transmissive if greater than about 75% of IR transmission occurs.
  • germanium One material that exhibits these characteristics and is commonly used as an IR lens is germanium. Germanium is a favorable material because it has a singular, or binary crystalline structure that is essentially transparent in the IR spectrum.
  • the shape of the IR primary lens is typically aspheric.
  • the parabolic shape of an aspheric lens is ideal for manipulating the focal point of the IR energy waves.
  • Aspheric germanium lenses are normally manufactured by diamond point turning, a very costly and time consuming process.
  • a spherical lens In comparison with an aspheric lens, a spherical lens is less expensive to manufacture. However, a spherical lens has a comparably lesser quality image due to chromatic irregularities associated with spherical surfaces. The image quality of a spherical lens can be significantly improved when the lens is coated with a film that can be shaped to mimic the parabolic contours of an aspheric lens.
  • a material that is IR transmissive and has proven industrial coating applications is polyethylene. Unfortunately, polyethylene does not adhere to a germanium substrate.
  • An objective of the invention is to provide a spherical lens having a germanium substrate and a polyethylene coating, where the coating shape mimics an aspheric shape.
  • an optical component and method for manufacturing the comprising comprises an IR transmissive substrate.
  • the substrate is coated with an IR transmissive adhesive, comprising hydrogenated amorphous silicon nitride film (a-SiN:H).
  • the adhesive is coated with a top laminate, whereby the optical component obtains a predetermined shape.
  • the Figure is a front view of the components of the invention. Detailed Description of the Invention
  • IR lens 1 comprises wafer 2 that, for purposes of illustration, has a convex shape.
  • wafer 2 can be a converging lens, a diverging lens, or any combination thereof.
  • Wafer 2 can be any size to accommodate the appropriate IR application.
  • Wafer 2 is a germanium substrate, or core, manufactured in a method known in the art. For example, wafer 2 is melt formed and cast or slumped into most any size or shape. Wafer 2 maybe cleaned for subsequent processing via an argon etching process, known in the art.
  • Adhesive coating 4 covers wafer 2.
  • Coating 4 consists of hydrogenated amorphous silicon nitride (a-SiN:H).
  • Coating 4 is the reaction product of plasma enhanced chemical vapor deposition (PECVD), known in the art.
  • PECVD is based on the decomposition of a reagent, in this case SiH 4 , near the surface of wafer 2. As compared with other deposition processes, PECVD can successfully occur at low temperatures (see below).
  • PECVD provides the amorphous characteristic of coating 4 that is highly malleable as compared to a crystalline structure that results from other deposition processes. PECVD also requires no curing time and produces highly uniform characteristics as compared to, for example, a bath deposition process.
  • PECVD occurs within a specific low temperature range, dictated by wafer 2. Heating wafer 2 above 50 degrees Celsius is required to increase the bonding characteristics between wafer 2 and coating 4. However, heating wafer 2 beyond 100 degrees Celsius permanently increases the intrinsic stress of wafer 2.
  • PECVD occurs at 55 degrees Celsius.
  • the thickness of coating 4 is independent of the size of wafer 2.
  • the thickness of coating 4 is at least 50 nanometers to insure adhesion for subsequent processing and at most 100 nanometers to minimize stress. Preferably, the thickness of coating 4 is 50 nanometers.
  • Top layer of polyethylene 6 covers IR lens 1 and laminates adhesive coating 4.
  • the process for laminating top layer 6 to IR lens 1 known in the art, requires heating solid polyethylene above 100 degrees Celsius, past the glass transition stage, so that the polyethylene can be shaped without tearing.
  • the lamination process requires heating below 200 degrees Celsius, to prevent burning the polyethylene.
  • the lamination process occurs at 170 degrees Celsius.
  • top layer 6 is shaped, in a method known in the art, to provide an aspheric form, defined by parabolic curvature, to IR lens 1.
  • the thickness of top layer 6 is dependent on the specific application of IR lens 1, and readily configurable by one skilled in the art.
  • amorphous silicon nitride enables a consistently improved adhesion of polyethylene over a germanium substrate.
  • the adhesive benefit is appreciable when compared to non-coated germanium substrates and germanium substrates coated with other films, such as amorphous GeC:H, diamond like carbon (DLC), and amo ⁇ hous Si:H.
  • amorphous GeC:H diamond like carbon (DLC)
  • DLC diamond like carbon
  • the polyethylene laminate on a lens comprising a spherical germanium wafer enables the manufacturing of an IR lens with an aspheric shape.
  • a lens comprising a spherical germanium substrate used in place of an aspheric substrate greatly reduces the time and cost of manufacturing the lens, making IR communication systems more affordable.
  • Such a structure, as applied to an IR lens, provides high quality IR communications that are comparable with aspheric germanium lenses.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

An optical component (1) comprising an IR transmissive substrate (2) and a method for manufacturing the component (1). The substrate (2) is coated with an IR transmissive adhesive (4) comprising a hydrogenated amorphous silicon nitride film (a:SiN:H).The adhesive (4) is coated with a top laminate (6), whereby the optical component (1) obtains a predetermined shape.

Description

PLASMA DEPOSITED AMORPHOUS SILICON NITRIDE INTERLAYER ENABLING POLYMER LAMINATION TO GERMANIUM
Field of the Invention
The present invention relates to the field of optics and more specifically to a germanium lens having a polyethylene coating.
Background
The long-wave infrared region is the largest continuous IR transmittance window in the Earth's atmosphere. Military aircraft, for example, use the IR communication window via known communication devices having IR sensors. One of the components involved in IR sensors is a primary lens.
An IR primary lens is an IR transmissive structure. An IR transmissive structure transmits LR energy of wavelengths between about 0.1 microns and 20 microns, preferably between 1 and 15 microns, and most preferably between 2 and 12 microns. A lens is IR transmissive if greater than about 75% of IR transmission occurs. One material that exhibits these characteristics and is commonly used as an IR lens is germanium. Germanium is a favorable material because it has a singular, or binary crystalline structure that is essentially transparent in the IR spectrum.
The shape of the IR primary lens is typically aspheric. The parabolic shape of an aspheric lens is ideal for manipulating the focal point of the IR energy waves. Aspheric germanium lenses are normally manufactured by diamond point turning, a very costly and time consuming process.
In comparison with an aspheric lens, a spherical lens is less expensive to manufacture. However, a spherical lens has a comparably lesser quality image due to chromatic irregularities associated with spherical surfaces. The image quality of a spherical lens can be significantly improved when the lens is coated with a film that can be shaped to mimic the parabolic contours of an aspheric lens. A material that is IR transmissive and has proven industrial coating applications is polyethylene. Unfortunately, polyethylene does not adhere to a germanium substrate.
Summary
An objective of the invention is to provide a spherical lens having a germanium substrate and a polyethylene coating, where the coating shape mimics an aspheric shape. According to this objective, an optical component and method for manufacturing the comprising is disclosed that comprises an IR transmissive substrate. The substrate is coated with an IR transmissive adhesive, comprising hydrogenated amorphous silicon nitride film (a-SiN:H). The adhesive is coated with a top laminate, whereby the optical component obtains a predetermined shape.
Brief Description of the Drawing
In order that the manner in which the above-recited and other advantages of the invention are obtained, a more particular description of the invention briefly described above will-be rendered by reference -to specific -embodiments thereof which are illustrated in the appended drawing. Understanding that this drawing depicts only a typical embodiment of the invention and is not therefore to be considered to be limiting of its scope, the invention will be described and explained with additional specificity and detail through the use of the accompanying drawing in which:
The Figure is a front view of the components of the invention. Detailed Description of the Invention
Reference will now be made to the drawing. It is to be understood that the drawing is a diagrammatic representation of the embodiment of the present invention and is not drawn to scale.
Turning to the figure, there is illustrated IR lens 1. IR lens 1 comprises wafer 2 that, for purposes of illustration, has a convex shape. One skilled in the art would understand that a lens within the scope of the invention is not limited by thickness, can be a converging lens, a diverging lens, or any combination thereof. Wafer 2 can be any size to accommodate the appropriate IR application.
Wafer 2 is a germanium substrate, or core, manufactured in a method known in the art. For example, wafer 2 is melt formed and cast or slumped into most any size or shape. Wafer 2 maybe cleaned for subsequent processing via an argon etching process, known in the art.
Adhesive coating 4 covers wafer 2. Coating 4 consists of hydrogenated amorphous silicon nitride (a-SiN:H). Coating 4 is the reaction product of plasma enhanced chemical vapor deposition (PECVD), known in the art. PECVD is based on the decomposition of a reagent, in this case SiH4, near the surface of wafer 2. As compared with other deposition processes, PECVD can successfully occur at low temperatures (see below). PECVD provides the amorphous characteristic of coating 4 that is highly malleable as compared to a crystalline structure that results from other deposition processes. PECVD also requires no curing time and produces highly uniform characteristics as compared to, for example, a bath deposition process.
According to the invention, PECVD occurs within a specific low temperature range, dictated by wafer 2. Heating wafer 2 above 50 degrees Celsius is required to increase the bonding characteristics between wafer 2 and coating 4. However, heating wafer 2 beyond 100 degrees Celsius permanently increases the intrinsic stress of wafer 2.
Preferably, PECVD occurs at 55 degrees Celsius.
The thickness of coating 4 is independent of the size of wafer 2. The thickness of coating 4 is at least 50 nanometers to insure adhesion for subsequent processing and at most 100 nanometers to minimize stress. Preferably, the thickness of coating 4 is 50 nanometers.
Top layer of polyethylene 6 covers IR lens 1 and laminates adhesive coating 4. The process for laminating top layer 6 to IR lens 1 , known in the art, requires heating solid polyethylene above 100 degrees Celsius, past the glass transition stage, so that the polyethylene can be shaped without tearing. On the other hand, the lamination process requires heating below 200 degrees Celsius, to prevent burning the polyethylene. Preferably the lamination process occurs at 170 degrees Celsius.
During the lamination process, top layer 6 is shaped, in a method known in the art, to provide an aspheric form, defined by parabolic curvature, to IR lens 1. The thickness of top layer 6 is dependent on the specific application of IR lens 1, and readily configurable by one skilled in the art.
Depositing an interlayer of amorphous silicon nitride enables a consistently improved adhesion of polyethylene over a germanium substrate. The adhesive benefit is appreciable when compared to non-coated germanium substrates and germanium substrates coated with other films, such as amorphous GeC:H, diamond like carbon (DLC), and amoφhous Si:H. Although amoφhous Si:H produces marginally improved adhesion over bare germanium, the addition of Nitrogen in the process produces far superior adhesion.
The polyethylene laminate on a lens comprising a spherical germanium wafer enables the manufacturing of an IR lens with an aspheric shape. A lens comprising a spherical germanium substrate used in place of an aspheric substrate greatly reduces the time and cost of manufacturing the lens, making IR communication systems more affordable. Such a structure, as applied to an IR lens, provides high quality IR communications that are comparable with aspheric germanium lenses.
The present invention may be embodied in other specific forms without departing from its spirit or essential characteristics. The described embodiments are to be considered in all respects only as illustrated and not restrictive. The scope of the invention is, therefore, indicated by the appended claims and their combination in whole or in part rather than by the foregoing description. All changes that come within the meaning and range of equivalency of the claims are to be embraced within their scope.

Claims

Claims:
1) An optical component comprising: an IR transmissive substrate; an IR transmissive adhesive coating the substrate, the adhesive comprising hydrogenated amoφhous silicon nitride film (a-SiN:H); and a polymer top laminate, on the adhesive.
2) The optical component of claim 1, wherein the substrate is germanium.
3) The optical component of claim 2, wherein the substrate is spherical.
4) The optical component of claim 2, wherein the thickness of the adhesive coating is between 50 nanometers and 100 nanometers.
5) The optical component of claim 4, wherein the thickness of the adhesive coating is 50 nanometers.
6) The optical component of claim 5, wherein the top laminate is polyethylene having a parabolic surface contour.
7) The optical component of claim 3, wherein the thickness of the adhesive coating is between 50 nanometers and 100 nanometers.
8) The optical component of claim 7, wherein the thickness of the adhesive coating is 50 nanometers. 9) The optical component of claim 8, wherein the top laminate is polyethylene having a parabolic surface contour.
10) A method of making an optical component comprising: providing an IR transmissive substrate; depositing an IR transmissive adhesive onto the IR substrate, the adhesive comprising hydrogenated amoφhous silicon nitride (a-SiN:H); depositing a polymer top laminate on the adhesive.
1 1 ) The method of claim 10, wherein the step of providing the IR transmissive substrate comprises melt forming, casting or slumping germanium into a predefined shape.
12) The method of claim 11 , wherein the step of depositing the adhesive coating comprises plasma enhanced chemical vapor deposition (PECVD), wherein the deposition temperature is between 50 and 100 degrees Celsius.
13) The method of claim 12, wherein the PECVD temperature is 55 degrees Celsius.
14) The method of claim 13, wherein the PECVD process includes depositing the a-SiN:H so that the a-SiN:H has a thickness of between 50 and 100 nanometers.
15) The method of claim 14, wherein the PECVD process includes depositing the a-SiN:H so that the a-SiN:H has a thickness of 50 nanometers.
16) The method of claim 15, wherein the step of depositing the top laminate includes heating polyethylene to between 100 and 200 degrees Celsius and depositing the polyethylene onto the adhesive layer. 17) The method of claim 16, wherein the temperature for heating the polyethylene is 170 degrees Celsius.
18) The method of claim 17, including shaping the polyethylene so that the surface of the polyethylene has a parabolic contour.
19) An article of manufacture comprising: a germanium core; an adhesive coating the core, the adhesive comprising hydrogenated amoφhous silicon nitride film (a-SiN:H); and a polymer top laminate, on the adhesive.
20) The optical component of claim 19, wherein the core is spherical.
21) The optical component of claim 19, wherein the thickness of the adhesive coating is between 50 nanometers and 100 nanometers.
22) The optical component of claim 21 , wherein the thickness of the adhesive coating is 50 nanometers.
23) The optical component of claim 22 wherein the top laminate is polyethylene having a parabolic surface contour.
24) The optical component of claim 20, wherein the thickness of the adhesive coating is between 50 nanometers and 100 nanometers.
25) The optical component of claim 24, wherein the thickness of the adhesive coating is 50 nanometers. 26) The optical component of claim 25, wherein the top laminate is polyethylene having a parabolic surface contour.
27) A method of making an optical component comprising: providing a germanium core; depositing an adhesive onto the IR core, said adhesive comprising hydrogenated amoφhous silicon nitride (a-SiN:H); depositing a polymer top laminate on the adhesive.
28) The method of claim 27, wherein the step of providing the core comprises melt forming, casting or slumping germanium into a predefined shape.
29) The method of claim 28, wherein the step of depositing the adhesive coating comprises plasma enhanced chemical vapor deposition (PECVD), wherein the deposition temperature is between 50 and 100 degrees Celsius.
30) The method of claim 29, wherein the PECVD temperature is 55 degrees Celsius.
31) The method of claim 30, wherein the PECVD process includes depositing the a-SiN:H so that the a-SiN:H has a thickness of between 50 and 100 nanometers.
32) The method of claim 31 , wherein the PECVD process includes depositing the a-SiN:H so that the a-SiN:H has a thickness of 50 nanometers.
33) The method of claim 32, wherein the step of depositing the top coating includes heating polyethylene to between 100 and 200 degrees Celsius and depositing the polyethylene onto the adhesive layer. 34) The method of claim 33, wherein the temperature for heating the polyethylene is 170 degrees Celsius.
35) The method of claim 34, including shaping the polyethylene so that the surface of the polyethylene has a parabolic contour.
PCT/US2004/014828 2003-05-12 2004-05-12 Plasma deposited amorphous silicon nitride interlayer enabling polymer lamination to germanium Ceased WO2004102228A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/436,302 US20040229539A1 (en) 2003-05-12 2003-05-12 Plasma deposited amorphous silicon nitride interlayer enabling polymer lamination to germanium
US10/436,302 2003-05-12

Publications (2)

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WO2004102228A2 true WO2004102228A2 (en) 2004-11-25
WO2004102228A3 WO2004102228A3 (en) 2005-06-23

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US7181109B2 (en) * 2004-03-01 2007-02-20 Sernoff Corporation Photonic device and method for making same

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JPS5248010B2 (en) * 1973-12-05 1977-12-07
BR9206133A (en) * 1991-06-13 1994-11-29 Minnesota Mining & Mfg Retro-reflective polarizer and optics
US5422756A (en) * 1992-05-18 1995-06-06 Minnesota Mining And Manufacturing Company Backlighting system using a retroreflecting polarizer
EP0596531B1 (en) * 1992-11-06 1997-07-09 Kabushiki Kaisha Toshiba Antireflection film and display apparatus comprising the same
JP3268929B2 (en) * 1993-04-19 2002-03-25 オリンパス光学工業株式会社 Optical element manufacturing method
JP2002372763A (en) * 2001-04-10 2002-12-26 Mitsubishi Electric Corp Optical window for infrared camera, infrared camera using the same, and method of manufacturing optical window for infrared camera

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WO2004102228A3 (en) 2005-06-23

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