WO2004094821A2 - Actionneur a micromembrane - Google Patents

Actionneur a micromembrane Download PDF

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Publication number
WO2004094821A2
WO2004094821A2 PCT/US2004/011955 US2004011955W WO2004094821A2 WO 2004094821 A2 WO2004094821 A2 WO 2004094821A2 US 2004011955 W US2004011955 W US 2004011955W WO 2004094821 A2 WO2004094821 A2 WO 2004094821A2
Authority
WO
WIPO (PCT)
Prior art keywords
membrane
seat surface
fluid
inlet
outlet
Prior art date
Application number
PCT/US2004/011955
Other languages
English (en)
Other versions
WO2004094821A3 (fr
Inventor
Gregory P. Carman
Daniel D. Shin
Original Assignee
The Regents Of The University Of California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The Regents Of The University Of California filed Critical The Regents Of The University Of California
Priority to US10/554,316 priority Critical patent/US20060233649A1/en
Publication of WO2004094821A2 publication Critical patent/WO2004094821A2/fr
Publication of WO2004094821A3 publication Critical patent/WO2004094821A3/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2251/00—Material properties
    • F05C2251/08—Shape memory

Definitions

  • This invention relates to a compact actuator that utilizes small thin shape memory alloy (SMA) diaphragms to provide large force output at high drive frequency.
  • SMA small thin shape memory alloy
  • the actuation is based on a shape memory alloy miniature pump, which rectifies liquid to achieve stroke for the actuator.
  • a bias pressure is applied to bend the SMA membrane upward to form a cavity between the membrane and a surface in the actuator body upon which the unbiased membrane sits.
  • a pulse of charge is used as resistive heating so that membrane accomplishes a plunging stroke towards the surface when heated, thereby forcing liquid out of the cavity.
  • High drive frequency is reached by impinging the liquid on the heated membrane to achieve forced convective cooling. The heated liquid flows out via the outlet port. Adding additional membranes in parallel also increases the flow rate.
  • Thin film SMA possesses unique characteristics that are attractive for use in actuators. A foremost of those characteristics is a large strain output, which can typically strain up to 8-10%. No other active materials posses this behavior, and studies have shown that fatigue life can exceed million cycles when strains are below 2% [1]. It also has the highest work densities for smart materials, for instance 25xl0 6 joule/m 3 for NiTi compared to O.lxlO 6 joule/m 3 for piezoelectric materials [1].
  • thin film SMA A less well-known attribute is the thin film's high frequency response due to increased heat dissipation from large surface-to-volume ratio. While bulk SMA typically has frequency responses of less than 1Hz, thin film SMA can have frequency response on the order of 100Hz if power delivered to the thin film is carefully manipulated to account for heat transfer issues [2]. These attributes make thin film SMA an attractive material for micro actuation devices.
  • Typical micro devices require large deformations while exerting sufficient forces from an actuating material.
  • This work density is an inherent attribute of thin film SMA and has been used in SMA based micropumps.
  • the pumping mechanism was based on two antagonistic 3 ⁇ m thick NiTi membranes [3-6].
  • the push-pull pumping motions were generated by alternately heating the membranes.
  • the pressure head generated by this motion was 519Pa while operating at drive frequency of 1Hz.
  • the membranes were not sufficiently cooled thereby reducing the pumping motion and the flow rate.
  • the maximum flow rate was 50 ⁇ l/min. Therefore, this pump did not produce large flow rates or large force outputs due to the limitations of the system.
  • the present invention provides a thin film SMA micro pump actuator that has high work density and high frequency response.
  • the invention uses a miniature SMA pump to rectify liquid to achieve stroke.
  • the invention manipulates the fluid flow to have forced convection cooling on the SMA membrane, eliminating the insufficient cooling of prior art designs. The result is an improved design with operation at flow rates well in excess of prior art designs.
  • Past micropumps have not exploited the critical properties of thin film SMA which are high work density and high frequency response.
  • the actuators of the present invention are able to achieve high output force at large velocities by exploiting both high frequency response and work density properties of thin film NiTi SMA membranes.
  • the actuator uses a miniature SMA pump to rectify liquid to achieve stroke, which past micropumps did not consider.
  • the insufficient cooling associated with past micropumps is also eliminated. This is achieved by manipulating the fluid flow to have forced convection cooling on the SMA membrane. By doing so, the flow rate for the current actuator increases to three times the order of magnitude higher than the past micropumps.
  • FIG. 1 is an illustration showing assemblage of a single membrane pump actuator with SMA membrane and a retaining lid.
  • FIG. 2 is a cross-sectional view taken along the planes 1 A — 1A and 2A — 2A shown in FIG 1.
  • FIG. 3 is a cross-sectional view of a deformed SMA membrane under bias pressure.
  • FIG. 4 is a front view of a pumping chamber.
  • FIG. 5 is perspective view of the four-membrane pump actuator formed accordance with present invention.
  • FIG. 6 is a perspective view of a SMA membrane that is suitable for use in pump actuators in accordance with the present invention.
  • a pump-based compact actuator is provided in accordance with the present invention that is capable of producing a large force output and a large volume flow rate.
  • the actuators of the present invention utilize at least one thin shape memory alloy membrane for means of actuation. Multiple membranes may be used to increase volume flow rate.
  • the force output of the pump can be controlled by varying the properties of the membrane, such as the thickness of the membrane.
  • the actuator includes an actuator body that includes surfaces that define one or more actuation chambers that hold SMA membranes over a membrane seat surface that includes a liquid inlet port and multiple outlet ports. These ports are located relative to each other so that cool liquid impinges on the hot membrane for faster heat transfer through forced convection cooling. The heated liquid then flows out through an outlet port in the actuator or pump body.
  • the SMA membrane is heated by electrical resistive means by passing a pulse of charge through the SMA membrane. Each current pulse heats the SMA membrane thereby causing the membrane to accomplish plunging stroke, which pushes the liquid out of the chamber.
  • the flow rate is dictated by repetition of current pulses.
  • FIG. 1 A perspective view of an embodiment of the present invention is illustrated in FIG. 1.
  • the actuator comprises a pumping chamber or actuator body 2a, 0-ring 4 that is preferably made from TEFLON®, inlet porthole 5, outlet portholes 6, inlet 7, and retaining lid 1 with SMA membrane 3.
  • the actuator body includes surfaces that define and actuation chamber in which the membrane is located.
  • the bottom surface of the actuation chamber is a membrane seat surface as shown at 25.
  • the 0-ring 4 provides a seal between the lid 1 and the actuator body 2a.
  • the retaining lid 1 is pressed on to the actuator body 2a such that junctions between the TEFLON® 0-ring 4 and pump chamber 2a and TEFLON® 0-ring 4 and SMA membrane 3 are watertight.
  • a small cavity 9 is formed between the membrane seat surface 25 and the SMA membrane 3.
  • the retaining lid 1 and pump chamber 2a are electrically insulated.
  • the membrane seat surface 25 is preferably dome-shaped and has the inlet 5 located in at the top of the dome and the outlets 6 located equidistantly around the outer perimeter of the domed surface.
  • the inlet 7 in the actuator body is joined to inlet 5 to provide fluid flow into the actuation chamber.
  • the fluid introduced through inlet 5 is at a temperature that is below the martensite-austenite transition temperature of the given membrane material and it is introduced at a bias force or pressure that is sufficient to move the membrane from its undistorted form (adjacent to the domed seat) to a distorted form where the membrane is displaced away from the domed-seat 25.
  • the membrane Upon heating to a temperature above its martensite-austenite transition temperature, the membrane seeks to return to its original undistorted shape. This exerts the necessary force or pressure to move the fluid in the cavity between the membrane 3 and the domed-seat 25 out of the actuation chamber through outlets 6.
  • the membrane 3 may be viewed as having an active side that is adjacent to the domed-seat 25 and an inactive side.
  • the membrane 3 divides the actuation chamber into a pump chamber 9 (see FIG. 2) located between the membrane 3 and the domed-seat surface 25 and an idle chamber located between the inactive side of the membrane 3 and the lid 1.
  • the volume of the pump chamber increases (and the volume of the idle chamber decreases) when the membrane is moved from it undistorted form to its distorted form upon application of bias pressure when the membrane is below its martensite-austenite transition temperature. Upon heating of the distorted membrane, the membrane moves back to its undistorted form with sufficient force to overcome the bias force and move liquid out of the pump chamber.
  • Relatively cool liquid (at least below the martensite-austenite transition temperature for the membrane) is again introduced under bias pressure to cool the membrane so that it can be distorted again once the membrane falls below its martensite-austenite transition temperature.
  • the flow of fluid provided by the inlet- outlet configuration in the domed seat surface provides for effective convective cooling of the membrane to allow more rapid pumping cycles.
  • a flow control mechanism such as a check valve (not shown) is provided insure one-way fluid flow at that inlet port 5 into the pump chamber.
  • An outlet port 10 (FIG.
  • outlet port 10 is connected to the outlets 6 by an appropriate manifold to provide removal the fluid from the pump chamber and actuator body 2a.
  • the outlet port 10 also includes some type of flow control mechanism to insure that fluid does not flow back into the pump chamber when the membrane is under the lower bias pressure or force.
  • Exemplary outlet flow control mechanisms may include a check valve (not shown) to prevent reverse fluid flow from the outlet back into the pump chamber.
  • the heated liquid exits the pump chamber 9 through exit portholes 6 and exits the actuator body 2a through an outlet 10 (see FIG. 4).
  • the outlet 10 is connected to a check valve such that the liquid flows in a single direction out of the actuator body 2a.
  • This fluid flow configuration over the membrane provides effective convective cooling of the membrane to a temperature below the martensite-austenite transition temperature at which point the bias pressure is again used to move the membrane from its undistorted form to a distorted form.
  • FIG. 5 illustrates an embodiment with multiple membranes used in parallel to increase the volume flow rate of the system.
  • the present invention contemplates any number of membranes from 1 to six to be used with the present invention.
  • FIG. 5 illustrates a four-membrane configuration. Charge is applied to the membranes to heat them simultaneously or alternately to multiply the pumping capacity of the device.
  • four SMA membranes 3 are assembled at each domed membrane seat face of the actuator body 2b to allow parallel pumping of liquid.
  • a check valve adjoins inlet 7 such that liquid flows in a single direction into the actuator body 2b.
  • Cool liquid enters the actuator body 2b through inlet 7 and simultaneously enters four pump chambers 9 through four inlet portholes 5 such that liquid impinges on hot the four SMA membranes 3. Heated liquid leaves the individual pump chambers 9 through outlet portholes 6. Liquid leaves the actuator body 2b through outlet 10 which is connected to the portholes 6 by way of an appropriate outlet manifold configuration (not shown). A check valve adjoins outlet 10 such that liquid flows in a single direction out of the actuator body 2b.
  • FIG. 6 is a perspective view of a membrane for use in one embodiment of the invention.
  • the membrane has a thickness of 5 micrometers and dimensions of 17 mm wide and 17 mm long.
  • the membrane need not be square but may be any suitable shape without departing from the scope of the invention.
  • the diameter of the circular area where the bias load is applied to the membrane is approximately 11 mm.
  • a current load of approximately 21 amps is used to heat the membrane.
  • Any of the known SMA materials may be used as the membrane material. NiTi alloys are preferred.
  • the composition of the membrane is approximately 53% Titanium and approximately 47% Nickel.

Abstract

L'invention concerne une micropompe en alliage à mémoire de forme (SMA) se présentant sous la forme d'un mince film. Cette micropompe a une haute densité de travail et une réponse haute fréquence. On utilise une pompe miniature SMA pour rectifier le liquide et accomplir une décharge. L'écoulement de fluide contrôlé engendre un refroidissement par convection forcée sur la membrane SMA qui permet à la micropompe de fonctionner à des fréquences élevées et à une densité de travail élevée.
PCT/US2004/011955 2003-04-22 2004-04-15 Actionneur a micromembrane WO2004094821A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/554,316 US20060233649A1 (en) 2003-04-22 2004-04-15 Micromembrane actuator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US46458203P 2003-04-22 2003-04-22
US60/464,582 2003-04-22

Publications (2)

Publication Number Publication Date
WO2004094821A2 true WO2004094821A2 (fr) 2004-11-04
WO2004094821A3 WO2004094821A3 (fr) 2005-12-15

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/011955 WO2004094821A2 (fr) 2003-04-22 2004-04-15 Actionneur a micromembrane

Country Status (2)

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US (1) US20060233649A1 (fr)
WO (1) WO2004094821A2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101255859B (zh) * 2007-03-02 2012-06-27 黑龙江大学 采用钛镍铜合金膜驱动的弦锥结构微驱动器及制备方法
WO2020104994A1 (fr) * 2018-11-23 2020-05-28 Hnp Mikrosysteme Gmbh Structure d'étanchéité pour un dispositif de transport avec alliage à mémoire de forme

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3606592A (en) * 1970-05-20 1971-09-20 Bendix Corp Fluid pump
US4472113A (en) * 1982-01-22 1984-09-18 Rogen Neil E Pumping by martensitic transformation utilization
US4636149A (en) * 1985-05-13 1987-01-13 Cordis Corporation Differential thermal expansion driven pump
US5759015A (en) * 1993-12-28 1998-06-02 Westonbridge International Limited Piezoelectric micropump having actuation electrodes and stopper members
US6059546A (en) * 1998-01-26 2000-05-09 Massachusetts Institute Of Technology Contractile actuated bellows pump

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5507314A (en) * 1991-06-11 1996-04-16 Masco Corporation Mixer valve having a ball valve element
US5435152A (en) * 1994-02-18 1995-07-25 Microcool Corporation Air treating device having a bellows compressor actuable by memory-shaped metal alloy elements
US6668971B2 (en) * 1998-01-13 2003-12-30 Robert E. Sterling Pneumatic hand tool exhaust muffler having inner and outer tubes
US5984258A (en) * 1998-09-28 1999-11-16 General Motors Corporation Method and apparatus for control of a shape memory alloy actuator for a fuel injector
US6691977B2 (en) * 2001-03-16 2004-02-17 Delphi Technologies, Inc. Shape memory alloy fuel injector
US6729856B2 (en) * 2001-10-09 2004-05-04 Honeywell International Inc. Electrostatically actuated pump with elastic restoring forces
EP1403519A1 (fr) * 2002-09-27 2004-03-31 Novo Nordisk A/S Pompe à membrane avec membrane extensible

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3606592A (en) * 1970-05-20 1971-09-20 Bendix Corp Fluid pump
US4472113A (en) * 1982-01-22 1984-09-18 Rogen Neil E Pumping by martensitic transformation utilization
US4636149A (en) * 1985-05-13 1987-01-13 Cordis Corporation Differential thermal expansion driven pump
US5759015A (en) * 1993-12-28 1998-06-02 Westonbridge International Limited Piezoelectric micropump having actuation electrodes and stopper members
US6059546A (en) * 1998-01-26 2000-05-09 Massachusetts Institute Of Technology Contractile actuated bellows pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101255859B (zh) * 2007-03-02 2012-06-27 黑龙江大学 采用钛镍铜合金膜驱动的弦锥结构微驱动器及制备方法
WO2020104994A1 (fr) * 2018-11-23 2020-05-28 Hnp Mikrosysteme Gmbh Structure d'étanchéité pour un dispositif de transport avec alliage à mémoire de forme

Also Published As

Publication number Publication date
US20060233649A1 (en) 2006-10-19
WO2004094821A3 (fr) 2005-12-15

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