WO2004085699A3 - Contacting of an electrode with a device in vacuum - Google Patents

Contacting of an electrode with a device in vacuum Download PDF

Info

Publication number
WO2004085699A3
WO2004085699A3 PCT/EP2004/050210 EP2004050210W WO2004085699A3 WO 2004085699 A3 WO2004085699 A3 WO 2004085699A3 EP 2004050210 W EP2004050210 W EP 2004050210W WO 2004085699 A3 WO2004085699 A3 WO 2004085699A3
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum
electrode
providing
contact
substrate
Prior art date
Application number
PCT/EP2004/050210
Other languages
French (fr)
Other versions
WO2004085699A2 (en
Inventor
Anja Blondeel
Bosscher Wilmert De
Original Assignee
Bekaert Vds
Anja Blondeel
Bosscher Wilmert De
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bekaert Vds, Anja Blondeel, Bosscher Wilmert De filed Critical Bekaert Vds
Priority to EP04714796A priority Critical patent/EP1606428A2/en
Priority to US10/550,507 priority patent/US20060102465A1/en
Priority to JP2006505433A priority patent/JP2006521468A/en
Publication of WO2004085699A2 publication Critical patent/WO2004085699A2/en
Publication of WO2004085699A3 publication Critical patent/WO2004085699A3/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

A method for improving the sputter deposition process is provided. The method comprises the following steps: a) providing a vacuum; b) providing an electrode (10, 34, 34', 44, 44') in the provided vacuum ; c) providing a substrate in said vacuum, said substrate having no contact with said electrodes (10,34,34',44,44') d) providing a device (22, 22', 24, 24', 26, 26', 28, 28', 30, 36, 36', 48, 48') in the vacuum. The device is in relative motion to the electrode and is in contact with the electrode over a contact zone. The device removes solid material from the electrode or applies solid material to the electrode. The method is carried out by means of a simple mechanism. There is no need for complicated electronics or sophisticated control algorithms. The method is carried out in vacuum, i.e. there is no need to break the vacuum, so that the machine downtime is reduced.
PCT/EP2004/050210 2003-03-25 2004-02-26 Contacting of an electrode with a device in vacuum WO2004085699A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP04714796A EP1606428A2 (en) 2003-03-25 2004-02-26 Contacting of an electrode with a device in vacuum
US10/550,507 US20060102465A1 (en) 2003-03-25 2004-02-26 Contacting of an electrode with a substance in vacuum
JP2006505433A JP2006521468A (en) 2003-03-25 2004-02-26 Method of contacting electrodes with substances in vacuum

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03100768 2003-03-25
EP03100768.5 2003-03-25

Publications (2)

Publication Number Publication Date
WO2004085699A2 WO2004085699A2 (en) 2004-10-07
WO2004085699A3 true WO2004085699A3 (en) 2004-11-04

Family

ID=33041044

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2004/050210 WO2004085699A2 (en) 2003-03-25 2004-02-26 Contacting of an electrode with a device in vacuum

Country Status (6)

Country Link
US (1) US20060102465A1 (en)
EP (1) EP1606428A2 (en)
JP (1) JP2006521468A (en)
KR (1) KR20050110032A (en)
CN (1) CN100471987C (en)
WO (1) WO2004085699A2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7820296B2 (en) 2007-09-14 2010-10-26 Cardinal Cg Company Low-maintenance coating technology
US7862910B2 (en) 2006-04-11 2011-01-04 Cardinal Cg Company Photocatalytic coatings having improved low-maintenance properties
USRE43817E1 (en) 2004-07-12 2012-11-20 Cardinal Cg Company Low-maintenance coatings

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090145747A1 (en) * 2005-11-07 2009-06-11 Acrelormittal France Method and installation for the vacuum colouring of a metal strip by means of magnetron sputtering
US20080011599A1 (en) 2006-07-12 2008-01-17 Brabender Dennis M Sputtering apparatus including novel target mounting and/or control
JP5935028B2 (en) * 2012-05-11 2016-06-15 パナソニックＩｐマネジメント株式会社 Sputtering equipment
GB2534430B (en) * 2013-02-01 2017-09-27 Camvac Ltd Apparatus and methods for defining a plasma
WO2018093985A1 (en) 2016-11-17 2018-05-24 Cardinal Cg Company Static-dissipative coating technology

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6318074A (en) * 1986-07-11 1988-01-25 Teijin Ltd Thin film forming device
US20020127861A1 (en) * 2000-04-04 2002-09-12 Taiwan Semiconductor Manufacturing Company Novel sputter PM procedures with polish tool to effectively remove metal defects from target surface nodules (residue)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4418906B4 (en) * 1994-05-31 2004-03-25 Unaxis Deutschland Holding Gmbh Process for coating a substrate and coating system for carrying it out
JP3576364B2 (en) * 1997-10-13 2004-10-13 株式会社日鉱マテリアルズ Cleaning method for ITO sputtering target

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6318074A (en) * 1986-07-11 1988-01-25 Teijin Ltd Thin film forming device
US20020127861A1 (en) * 2000-04-04 2002-09-12 Taiwan Semiconductor Manufacturing Company Novel sputter PM procedures with polish tool to effectively remove metal defects from target surface nodules (residue)

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 012, no. 223 (C - 507) 24 June 1988 (1988-06-24) *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE43817E1 (en) 2004-07-12 2012-11-20 Cardinal Cg Company Low-maintenance coatings
USRE44155E1 (en) 2004-07-12 2013-04-16 Cardinal Cg Company Low-maintenance coatings
US7862910B2 (en) 2006-04-11 2011-01-04 Cardinal Cg Company Photocatalytic coatings having improved low-maintenance properties
US7820296B2 (en) 2007-09-14 2010-10-26 Cardinal Cg Company Low-maintenance coating technology
US7820309B2 (en) 2007-09-14 2010-10-26 Cardinal Cg Company Low-maintenance coatings, and methods for producing low-maintenance coatings

Also Published As

Publication number Publication date
WO2004085699A2 (en) 2004-10-07
CN100471987C (en) 2009-03-25
KR20050110032A (en) 2005-11-22
EP1606428A2 (en) 2005-12-21
JP2006521468A (en) 2006-09-21
US20060102465A1 (en) 2006-05-18
CN1780932A (en) 2006-05-31

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