WO2004071983A1

WO2004071983A1 - Method for producing photorefractive materials

Info

Publication number: WO2004071983A1
Application number: PCT/RU2003/000044
Authority: WO
Inventors: Alexandr Vasilievich Dmitryuk; Nikolai Timofeevich Timofeev; Andrei Evgenievich Korolev
Original assignee: Obschestvo S Ogranichennoi Otvetstvennostiju 'corning'
Priority date: 2003-02-12
Filing date: 2003-02-12
Publication date: 2004-08-26
Also published as: AU2003234945A1

Abstract

The invention relates to a method for producing photorefractive materials, embodied in the form of nonstoichiometric chemical compounds of a general formula [Ag3 2+] x [Ag2O] n [P2O5] m [Al2O3] k [B2O3] l [R2O] p [R'O] s [Ln2O3] t (I), wherein x=0.000005-0.01, n=0.0005-0.1, m=0.4-0.75, k=0-0.1, l=0-0.1, p=0-0.5, s=0-0.5,t=0-0.25, R=Li, Na, K, Rb, Cs; R'=Mg, Ca, Sr, Ba; Ln=La, Er, Yb, Nd, Tb, Ce. The inventive method consists in exposing a compound (II) [Ag2O] n [P2O5] m [Al2O3] k [B2O3] l [R2O] p [R'O] s [Ln2O3] t, wherein n=0.0005-0.1, m=0.4-0.75, k=0-0.1, l=0-0.1, p=0-0.5, s=0-0.5,t=0-0.25, R=Li, Na, K, Rb, Cs; R'=Mg, Ca, Sr, Ba; Ln=La, Er, Yb, Nd, Tb, Ce, to the action of a pulse UV radiation whose wavelength ranges from 150 to 300 nm, pulse length is less than 20 nanoseconds and pulse energy density is higher than 10 2 J/cm2.

Description

ΟΟΤΟΡΕΟΟ Ο Ο Ο Ο Ο Ο Ο Ο

SUMMARY OF THE INVENTION

Izοbρeτenie οτnοsiτsya κ οblasτi sοzdaniya φοτο- chuvsτviτelnyχ maτeρialοv in chasτnοsτi φοτορeφρaκτivnyχ 5 ^'lazeρnyχ maτeρialοv, κοτορye mοguτ nayτi πρimenenie in φοτοniκe for προizvοdsτva φazοvyχ diφρaκtsiοnnyχ ρesheτοκ in τοm including Bρeggοvsκiχ and τaκzhe for zaπisi gοlοgρamm and izgοτοvleniya ρazlichnyχ usτροysτv on iχ οsnοve, sοzdaniya Comprehensive lasers with integrated 10 Bragg gratings.

Β Particularly, the invention is subject to the method of receiving non-removable, non-removable, non-removable devices

15 [Αзз ²⁺ ] χ [Αд ₂ 0] _η [Ρ ₂ 0 ₅ ] ha [Αϊ ₂ ΟзЫΒ2θзЫΚ ₂ 0] ρ [Κ'0] ₃ [b ^η ₂ ΟзЬ (I ⁾ where: χ = 0,000005- 0.01 η = 0.00005-0.1, t = 0.4-0.75, 20 k = 0-0.1, 1 = 0-0.1, ρ = 0-0.5, s = 0-0.5, g = 0-0.25, • 25 Κ =, Νa, Κ, Κ b, C3, Κ '= Μ d, Ca, 5r, Βa, bη = ba, Εr, Υ b, W, ΤЬ, Се.

The known effective materials on the basic aluminum and germanium glass are known [Μ. Οοηau ou. a.,. 30 Id ννаνе Τес-αηοϊοду, νοϊ. 15, Η »8, Αи, 1997, ρρ. 1329-1342; Ν.G. Βοgggeϊϊu, сιсгοορг.1сз гесϊιηοϊοд, Сoгηιηд Ιηс, Сoгηιηд, Νем Υοгк, ρρ. 237-249], which, when irradiated, change the refractive index η by Δη ~ 10 ^{~ 4} -10 ^"'3. To increase the sensitivity to Δη ~ 10 ^{" 2} , use a saturating voltage of a hydrogen source with a pressure of 100 millimeters. The last method 5 is technologically compiled, and the sensitive material is thermally unstable and is susceptible to storage.

In the majority of cases, well-known, efficient materials do not contain impurities of the earth elements.

10 (eρby, iττeρby, neοdim, πρazeοdim, τuly and dρ.) Οbesπechivayuschiχ lazeρnye svοysτva or sοdeρzhaτ iχ in κοlichesτve nesκοlκiχ vesοvyχ προtsenτοv, chτο dοsτaτοchnο τοlκο for ποsτροeniya vοlοκοnnyχ lazeροv and nedοsτaτοchnο for sοzdaniya πlanaρnyχ lazeροv and usiliτeley.

15 It is known that the use of a degrading radiation (X-ray, electronic) allows, in principle, to alter the physical properties of the property. and indicator of location. For this reason, the effective resolution of index modulation is

20 applications are substantially higher than in the case of UV radiation, τ.κ. the wavelength of the emitting radiation is slightly shorter than that of UV radiation.

The method of receiving a glass is known through the influence of gamma radiation on silica glasses.

25 [ιΙ.Ε. Κοтаη, Κ.Α. Iiηιsk ΟρЫсз Бе11: ег5, νοϊ. 18, Ν '10, Μау 15, 1993, ρρ. 808-810]. For this reason, the maximum change in the index of partition is 2.6–10 ^{~ 5} , which is substantially less than in the case of a human-made power supply, and the result is a negative result.

30 contains impurities of the earth elements, i.e. are not laser glasses.

A number of patents were also known to the United States Ν “Ν“ 5334559, 5982973, 6160824, 6198870, 6208456, 6246711, applications ΝΟ 0045477, 00 0045481, ΕΡ 0356746, in the case of various laser glass are different components. However, these glass do not contain the silver and are not 5 photospecific.

The closest technical solution is the effective materials and methods of communication, the first ones described in the application ΡСΤ / Κϋ 01/00512 with the international delivery date 28.11. 10 The known method of receiving the general business formula (I) is concluded in the same way as the malfunctioning device

[Αд ₂ 0] _η [Ρ ₂ 0 ₅ ] _t [Α1 ₂ 0 ₃ ] _to [Β ₂ 0 ₃ ] ι [Κ ₂ 0] _ρ [Κ'0] ₃ [b ^η ₂ 0 ₃ ] _b (II) 15 where: η = 0.00005-0.1, t = 0.4-0.75, k = 0-0.1, 1 = 0-0.1, 20 ρ = 0-0.5, s = 0-0.5, 1: = 0-0.25,

Κ =,, Νa, Κ, ΚΚ, Сз, Κ '= Μд, Са, 5г, Βа, 25 ηη = аа, Εг, ΥЬ, Νά, ΤЬ, Се, prevents the emission from being emitted and emitted from radiation: radiation, electricity, high energy, and at least 100 g of absorbed dose. (10,000 ρad). 30 Source products of the general chemical formula (II) are obtained in accordance with the conventional manufacturing technology of the glass, i.e. By means of a high temperature synthesis in crucibles made from melting pots materials.

Β ρezulτaτe vοzdeysτviya iοniziρuyuschey ρadiatsii (gamma ρenτgenοvsκοe radiation eleκτροny, and προτοny τ.d.) on isχοdny προduκτ (φοsφaτnοe sτeκlο 5 aκτiviροvannοe seρebροm) therein προτeκayuτ following ποsledοvaτelnye ποsτρadiatsiοnnye ρeaκtsii. Β In the original non-irreversible glass, the silver is available in the form of a cadion Αd ⁺ . The category of the Had ⁺ unit captures the secondary elec- trons that are formed during the initialization of a solid body, and change 10 of their charge states. This process is described by reaction (1):

Αд ⁺ + е → Αд ° (1)

Ατοmaρnοe seρebρο Αd ° τeρmichesκi nesτabilnο and vsτuπaeτ in ρeaκtsiyu with κaτiοnοm seρebρa Αd ⁺ οbρazuya 15 dvuyadeρny mοleκulyaρny iοn seρebρa Αd ₂ ^+:

Αд ° + Αд ⁺ → Αд ₂ ⁺ (2)

The intermediate product Α ₂ ^{+ is} also thermally unstable at temperatures higher than 3 вс and proceeds to the following reaction: 20 _{2 2} ⁺ + Α '→ Α ₃ ²⁺ (3)

The central center ΑΑ _{3 3} ^{2+ is} thermally stable to the temperature range 400-450н and it is responsible for the non-functional properties of the ser се ous products.

One well-known method of receiving the compound (I) 25 has a number of disadvantages. The ability to use local sources of degrading radiation makes it unsafe and difficult to operate. Otherwise, this method can be used to process materials that have separate sizes and sizes. This narrows the possibilities of its 30 applications.

SUMMARY OF THE INVENTION

The purpose of this invention was to create a safe means of obtaining a compound (I), the exclusive use of radiant radiation and greater availability.

Bylο οbnaρuzhenο, chτο nesτeχiοmeτρichesκοe χimichesκοe sοedinenie οbschey φορmuly (II), κοτοροe isποlzueτsya 5 izvesτnοm τeχnichesκοm ρeshenii in κachesτve isχοdnοgο (προmezhuτοchnοgο) προduκτa not προyavlyaeτ φοτορeφρaκτivnyχ svοysτv πρi vοzdeysτvii UΦ radiation ρτuτnοy lamπy with mοschnοsτyu 250 Βτ, Ηe-Ssϊ lazeρa (length vοlny radiation of 325 nm, the area of the power is 1 Β / cm ² ) or pulsed UV 10 radiation of the Ν ₂ laser (radiation wavelength is 337 nm, the energy density of the pulse is 0.1 J / cm ² , the pulse duration is 8 n). Β το same vρemya bylο naydenο, chτο nesτeχiοmeτρichesκοe χimichesκοe sοedinenie οbschey φορmuly (II) προyavlyaeτ φοτορeφρaκτivnye svοysτva and demοnsτρiρueτ 15 vysοκie values φοτοindutsiροvannοgο changes ποκazaτelya πρelοmleniya ποd deysτviem UΦ imπulsnοgο radiation vysοκοy inτensivnοsτi (πlοτnοsτ eneρgii in imπulse - bοlee 0.1 J / cm ^2, pulse duration 8-10 ns) with a wavelength of less than 300 nm. 20 Ηa οsnοve οbnaρuzhennοgο eφφeκτa πρedlagaeτsya sποsοb ποlucheniya in κachesτve φοτορeφρaκτivnοgο maτeρiala nesτeχiοmeτρichesκiχ χimichesκiχ sοedineny (I) _[3 Αd ^2+] _χ [Αd ₂ 0] _η [Ρ 0 ₅ _2] _m [Αϊ 0 ₂ _3] _to [Β ₂ 0 ₃ ] ι [Κ ₂ 0] _ρ [Κ'0] ₃ [bη ₂ 0 ₃ ] _b , where: 25 χ = 0.000005-0.01 η = 0.00005-0.1, m = 0.4- 0.75, k = 0-0.1, 1 = 0-0.1, 30 ρ = 0-0.5, s = 0-0.5, -; = 0-0.25, Κ = Ιά, Νа, Κ, ΚЬ, Сз, Κ '= Μд, Са, Зг, Βа,

Bη = ba, bg, bb, b, bb, Ce, which is concluded in connection with compound (II)

[Αд ₂ 0] _η [Ρ ₂ 0 ₅ ] _t [Αϊ ₂ 0 ₃ ] _to [Β ₂ 0 ₃ ] ι [Κ ₂ 0] _ρ [Κ'0] ₃ [Ι-ПзΟзЗс 5 where: η = 0, 00005-0.1, t = 0.4-0.75, k = 0-0.1,

1 = 0-0.1, 10 ρ = 0-0.5, s = 0-0.5,

1: = 0-0.25,

Κ = S, Νa, Κ, ΚЬ, Сз,

Κ '= Μд, Са, Зг, Βа, 15 ηη = а,, Εг, ΥЬ, Νά, ΤЬ, Се, are affected by pulsed UV radiation with a wavelength of 150-300 nm, a pulse duration of less than 20 ns and a voltage of 10 ^{~ 2} J / cm ² .

Pρedlοzhenny sποsοb οτlichaeτsya οτ izvesτnοgο 20 isποlzοvaniem UΦ imπulsnοgο radiation vysοκοy inτensivnοsτi, chτο οbesπechivaeτ uκazanny above eφφeκτ and yavlyaeτsya neοchevidnym, ποsκοlκu svοysτvο φοτο- ρeφρaκτivnοsτi in Αd-sοdeρzhaschiχ sτeκlaχ οbnaρuzhenο vπeρvye in dannοm izοbρeτenii. 25 Quick description of the drawings

For .1, a spare glass acquisition, an active unit has been provided. Concentration of the sulfur 0.5 wt.%; The thickness of the sample is 0.2 mm.

In Fig. 2, the delivery processes are provided.

30 radiation processing centers in active glass, activated silver, where 1 is for irradiation; 2 - after

Γ radiation (266 nm, pulsed е-laser ρ); 3 - after x-ray exposure. 7

In Fig. 3, the induced optical density has been introduced, as is the function of the laser pulse energy and the excitation radiation exposure.

Β in the case of a quadratic process of darkness: 5 Induced optical density ~ Ε-Ν, where Ε is the energy of the laser pulse, Ν is the number of the pulse.

DETAILED DESCRIPTION OF THE INVENTION

The essence of the invention is as follows. In the original irreversible glass, the silver is available in the form

10 cathode Α d ^{+ to} get to the concentration of the last 5-10 ²⁰ cm ^{~ 3} .

Αд ⁺ - the center is responsible for the absorption band of 195-210 nm

(Φig. 1). The intensity of this absorption band increases with the growth of the concentration of the active (silver) in the glass. When pulsed UV radiation is high

15 intensities are crashed and have a distinctive absorption spectrum with a maximum absorption at a maximum wavelength of 320 nm (Fig. 2). The absorption spectrum of the absorption is identical to that of the radiation exposure centers induced by the X-ray radiation.

20 (Φig. 2). On the basis of this result, a conclusion was made that the centers of the process induced by the pulsed ultraviolet radiation and the vascular radiation are

25 Ρanee bylο ποκazanο, chτο if iοniziρuyuschegο radiation (gamma radiation ρenτgenοvsκοe) ροl tsenτροv οκρasκi in φοsφaτnyχ sτeκlaχ, aκτiviροvannyχ seρebροm, igρayuτ tsenτρy Αd ²⁺ [Α.ν. ϋtϋguyk, Z.Ε. Ρagatζιηа, Α.З. Ρegtϊηον, Ν.B. Зοϊον'еνа, Ν.Τ. Τιтο -: herν, "ЬЬе ιη-: 1еηсе

30 ο-ϋ ϊ ρ ρ ρ ρ т т ο ο т ζ ζ ζ ег ег ег ег ег ез ез ез ез ез ез ез ез ез се се. ρ з з аг аг ϊ з з з з ез ез ез """,,, SG. 8

The Centers of 3+ ₃ ^{2+ are} obtained as a result of investigative processes (1) - (3). The primary radiochemistry (1) takes place during the capture of primary elec- trons of the serum. 5 Home elec- trons are produced by the initialization of chemical elements included in the glass due to the effect of radiation.

In the case of UV radiation with a wavelength of 266 nm (the fourth harmonic of an inimitable laser) is the energy

10 Ε = 4.66 Β is not enough for direct initialization of a glass matrix. Please be aware that the generation of electrical components will occur as a result of a large glass matrix initialization. The large multi-unitization depends on the intensity of the electromagnet

15 radiation. Κ Experiments of the invention The peak intensity of the laser pulse reached 10 ⁷ Βτ / cm ² . Under these conditions, deterioration in inactive glass was not observed. Eτοτ ρezulτaτ ^{'ποzvοlyaeτ} πρenebρech προtsessami mnοgοφοτοnnοy iοnizatsii sτeκlyannοy

20 matrices. Βmesτe with τem, sτeκla, aκτiviροvannye seρebροm, demοnsτρiρuyuτ silnοe ποglοschenie a length vοlny lazeρnοgο emission 266 nm (Φig.2) chτο mοzheτ byτ πρichinοy προτeκaniya προtsessοv nelineynοgο φοτο- indutsiροvannοgο οκρashivaniya with vysοκοy eφφeκτivnοsτyu.

25 Actually, in this invention, it was found that the magnitude of the absorbance absorbed at a wavelength of 320 nm is squarely dependent on the power loss of the laser. The value of absorbed absorption increases with increasing concentration.

30 active - silver. This results in the conclusion that the active glass is damaged, the active system is damaged and the result is a result of a poor result. radiation silver. The development of industrial facilities in the case of glass is subject to change in the indicator of distribution in accordance with the process of dispersion. The value of the change in the indicator of the settlement can be calculated with the help of the ratio of the rate-based calculation on the basis of the value of the induced payment.

The proposed method for the production of productive materials is carried out as follows.

Natural chemical compounds (II)

10 is made in accordance with the usual technology for the manufacture of glass, i.e. By means of a high temperature synthesis in the crucibles made from refractory materials.

TYPICAL SYSTEMS FOR THE INVENTION ARE SUBJECT TO

15 table 1.

Table 1

COMPOSITIONS OF THE STUDYED GLASSES (mol.%)

20 Glasses were synthesized in the amount of 100-400 g. They are characterized by a low temperature range of 1200-1250 ° C, high technological stability and process.

The synthesis was carried out in crucibles from the smelter 10

A starter with a volume of 200 cm ³ in a laboratory electric press without a compact atomizer. Β κachesτve syρevyχ maτeρialοv isποlzοvalis κοmmeρchesκie ρeaκτivy: ΑdΝ0 ₃ YΝ0 ₃ ΝaΝ0 _3, ΚΝ0 ₃ ΜdS0 ₃ SaS0 ₃ ΒaS0 _3, Η ₃ Ρ0 _4, La ₂ 0 _3, 5 Υ ₂ 0 _3, Εg ₂ 0 _3, Νά ₂ 0 ₃ , ΤЬ ₂ 0 ₃ qualifications ΧЧ or ΟЧЧ '.

The loading of the mixture into the crucible was carried out at a temperature of 1150-1200 ° С, while the temperature was 30 minutes for 100 g of glass and up to 4 hours for 400 g of glass. Де In a number of cases for the prevention of the restoration of the silver and the removal of с-10 of the glass from the glass, the melting of the dried-up liquid was carried out.

After lighting the glass, the molten glass was refined into the heated group. The glass was placed in a muffle furnace, where 15 a coarse glass was fired at a temperature of 380-400 ° C for 2 hours, with subsequent cooling.

The burnt glass was cut into pieces, from the prepared samples were prepared (0, 2-4) χ15χ20 mm ³ 20 for specific measurements.

All in all, on the other hand, in the form of a rare-earth acid, it was used oxide of lanthanum, colorless, and is characterized by a high light output of 300 mm. This result 25 prevents the absence of a large-scale cultivation of the silver in the studied glass for an interest of 10%. Αd ₂ 0.

The original product (glass, activated by the silver) does not alter its specific and physical chemistry.

30 properties when exposed to optical radiation with a long wavelength exceeding 337 nm (wavelength of a Ν ₂ laser).

In other words, they are not effective.

When exposed to pulsed radiation with a long eleven

The wavelengths are 193 nm, 248 nm, 266 nm and the energy density in the pulse is 0.1 J / cm ² , the pulse duration is 8–10 ns, the compound of the formula (II) exhibits good properties. 5 EXAMPLES

Original glass composition: Ο2Ο5 (57.5% mol.), Νа ₂ 0

(29% mol.), CaΟ (5% mol.), Α1 ₂ 0 ₃ (7.5% mol.), Αd ₂ 0 (1% mol.) In the form of processed samples with dimensions of 15x20x1 mm were received at the following pulsed radiation with

10 parameters: the radiation wavelength is 266 nm, the energy density in the pulse is 0.1 J / cm ² , the pulse duration is

8 ns, the frequency of pulses - 20 Hz, the number of pulses - 300. As a source of UV radiation, we used a commercially available reliable C: Νά laser

15 Nov. (Fourth Harmonica).

У The result of the UF pulsed irradiation in the glass is the result of the optic processing centers, the absorption circuit of the transformer is shown in Fig. 2. You are also provided with the absorption scheme after the X-ray of 20 irradiation. The position of the maximum induced absorption band and the spectrometer are identical in the case of UV and X-ray emissions. This results in the conclusion that the pulsed radiation is coupled with a ²⁺ -center, i.e. Conclusion 25 compound of formula (I).

Other πρ examples πρ are given in τ table χ 1, 2.

The division of the value of the induced change in the index of the conversion was carried out as follows. Previously indicated (application Ν * ΡСΤ / Κϋ 01/00512 with a date of 30 international delivery on 11/28/2001.), That in the case of radiative emission of gamma or radiative radiation increased the following: 12

Δη = 4.3-10 ^{~ 6} cm-α (4) where Δη is the change in the refractive index at a wavelength of 633 nm, α ^ cm ^"1 ) is the absorption coefficient at a wavelength of 320 nm (maximum ² - ₃ 5) Comparison (4) gives the possibility to make a separate change in the index of the accommodation from the given data.

The absorption coefficient α is divided by the formula α = Δϋ / 1 (5)

10 where

Δϋ = ϋ-Eο (For 0 - the optical density of the sample before and after the irradiation is relevant);

1 - the thickness of the glass layer.

Β In case of equal recovery, the thickness of this

15th layer is equal to the thickness of the sample. For glasses, activated silver, therefore, as a rule, is not observed due to the high absorption coefficient at a length of 266 nm.

Therefore, in order to calculate the coefficient of absorption, you should evaluate the thickness of the term

20 1> It may be determined on the basis of the following expression:

where k (ζ), ko is the amplitude and value of the natural

25 The coefficient of absorption in the sale of goods on the part of the market and on the most suitable part of the sample is relevant.

In the case of a loss of account, it is possible that the distribution function of the distribution centers is limited to the extent that the price is reduced to the same.

30,266 nm deep into the sample. When, in the case of double absorption of UF radiation, 266 nm, the effective thickness thirteen

The preferred word may be divided on the basis of the following expression:

where to ₂ bb (cm ^-1 ) is the natural absorption coefficient at a wavelength of 266 nm.

Using expressions (4), (5), and (7), you can receive the following agreement to change the indicator of measurement:

Δη> 8.6-10 ^{~ 6} -Δθ-k ₂ 66 (8)

10 The values of Δθ and ₂ bb were obtained from the absorption spectra and are shown in table 2. The corresponding changes in the index of measurements were also included in this table.

EXPERIMENTAL CONDITIONS: 4th HARDWARE

15 laser (266 nm); laser power density of 0.1 J / cm ² ; pulse duration 8 ns; the number of pulses is 300.

Table 2 Schematic parameters and a change in the index

20 Applications of the studied glass

From table 2 it is seen that Δη reaches values up to 5-10 ^-4 , which allows you to use the connection (II) 25 in the quality of the material.

Claims

14ΦΟΡΜULΑ IZBΟIA

1. The method of obtaining a proprietary material that is a non-intrinsic non-integrated chemical compound 5 of the general formula (I)

[Αд ₃ ²⁺ ] _χ [Αд ₂ 0] _η [Ρ ₂ 0 ₅ ] _t [Α1 ₂ 0 ₃ ] _to [Β ₂ 0 ₃ ] ι [Κ ₂ 0] _ρ [Κ'0] ₃ [Ι-η ₂ 0 ₃ b, where: χ = 0.000005-0.01 η = 0.00005-0.1, 10 t = 0.4-0.75, k = 0-0.1,

1 = 0-0.1, ρ = 0-0.5, s = 0-0.5, 15 = 0-0.25,

Κ = S, Νa, Κ, ΚЬ, Сз,

Κ '= Μд, Са, Зг, Βа,

Bη = ba, bg, bb, b, bb, ce, by exposure to radiation at a non-continuous 20 compound of formula (II)

[Αд ₂ 0] _η [Ρ ₂ 0 ₅ ] _t [Α1 ₂ 0 ₃ ] _k [Β ₂ 0 ₃ ] ι [Κ ₂ 0] _ρ [Κ'0] ₃ [b ^η ₂ 0 ₃ k, where: η = 0.00005-0.1, t = 0.4-0.75, 25 k = 0-0.1,

1 = 0-0.1, ρ = 0-0.5, s = 0-0.5,

30 Κ = S, Νa, Κ, ΚЬ, Сз,

Κ '= Μд, Са, Зг, Βа,

Bη = ba, bg, bb, b, bb, Ce, a similar-matching shema, especially in terms of radiation fifteen

They use pulsed UV radiation with a wavelength of 150-300 nm, a pulse duration of 1 ns to 100 ns, and an energy density of 10 ^{~ 2} J / cm ² to 10 J / cm ² . 5 2. The method is π.1, which is different from the fact that radiation is emitted by a wavelength of 266 nm, the energy density in the pulse is 5-10 ^{~ 2} to 5-U ^"1 J / cm ² pulses.

3. The method is π 1, which is different from the fact that 10 irradiation is emitted by radiation with a wavelength of 248 nm, the energy density in the pulse is 5-10 ^{~ 2} to 5-10 ^-1 J / cm ² , the duration is

4. The method is π.1, which is different from the fact that radiation from radiation with a wavelength of - 193

15 nm, the energy density in the pulse is from 5-10 ^{~ 2} to 5 ^"1 J / cm ² , the pulse duration is 20 ns.