WO2004068690A1

WO2004068690A1 - Actuator

Info

Publication number: WO2004068690A1
Application number: PCT/JP2004/000999
Authority: WO
Inventors: Tetsuji Zama; Susumu Hara; Shingo Sewa
Original assignee: Eamex Coporation
Priority date: 2003-01-31
Filing date: 2004-02-02
Publication date: 2004-08-12

Abstract

An actuator comprising a working section, a counter electrode, and an electrolyte, wherein the working section is connected with a plurality of leads for applying a voltage to the working section and the counter electrode through the electrolyte and at least one lead out of the leads has a conductive shock absorber. Voltage drop can be prevented in an actuator employing a working section containing a conductive polymer such that expansion/contraction of conductive polymer is not retarded but exhibited sufficiently while preventing the plurality of leads connected with the working section from being disconnected by an external force or expansion/contraction of the working section.

Description

Actuator

Background art

Light

The present invention relates to an actuator that includes a conductive polymer in an operation part.

Fine

It is known that conductive polymers such as polypyrrole exhibit electrolytic stretching, which is a phenomenon of stretching or deforming due to electrochemical oxidation and reduction. Electrolytic expansion and contraction of this conductive polymer is expected to be used as artificial muscles, robot arms, artificial arm actuators, and the like, and has attracted attention in recent years.

As for an actuator using a conductive polymer, a configuration of an actuator having an electrolyte, a counter electrode, and a polypyrrole film in a cell was reported in 1999. A. Deli a S a n t a e t a l., "P e r f o r m a n c e a d d w o r k c a p a c i t y o f a p o l y p y r r o l e c o n d u c t i n g o l y m e r 1 i n e a r a c t u a t e n e e, e, n, e, n, e, n, e, n

When the polypyrrole film and the counter electrode are immersed in the electrolyte and a voltage is applied to the counter electrode and the polypyrrole film, the actuator has a capacity of 14.6 MPa (45 g). It describes that it expands and contracts by 1% under load. In other words, this actuator can generate a force of 14 MPa in the length direction due to electrolytic expansion and contraction.

In the above actuator, for example, in order to obtain an expansion amount of 2 cm using a 1% stretch ratio of a polypropylene film, it is necessary to use an actuator. It is necessary to increase the size of the polypyrrole film, which is the working part, to 200 cm in the length direction. In other words, in order to obtain a large amount of expansion and contraction, the size of the actuating element using the polypyrrole film must be increased.

However, in an operating section using a conductive polymer, which is a material that expands and contracts electrochemically, such as a polypyrrole film, the conductive polymer has a resistance value. When the operating part is enlarged, even if voltage is applied from one end of the operating part and voltage is applied to the entire operating part, a voltage drop occurs at the other end (tip) of the operating part. When a voltage is applied from one end of the operating unit, it is difficult to apply a predetermined voltage to the other end (tip) of the operating unit. For this reason, in the enlarged working section, the amount of expansion and contraction near the distal end becomes small, and it becomes difficult to obtain a desired amount of expansion and contraction.

Even when the size of the actuator element is small, when the voltage is applied from one end of the operating section, the conductive polymer has a resistance value. It takes time to apply voltage to. In the case where an actuating element containing a conductive polymer in its operating part is used for applications such as a switch that requires a fast response even with a small expansion / contraction ratio, it is desirable that the response be faster.

A method of applying a voltage to one end of a working part using a conductive polymer and applying a voltage that can expand and contract sufficiently near the other end is to apply a voltage to the working part. Using multiple leads, connect the leads in parallel so that they are perpendicular to the length of the working part, and apply a voltage to one end of the working part, near the middle of the working part, and near Z or the tip. There is a method. -However, if the leads are simply connected in parallel to the element so as to be perpendicular to the length direction of the working part, and a voltage is applied to the working part via the lead, the working part expands and contracts, A large tension is applied to each of the leads connected in parallel, making it easier for the leads to break. In addition, the leads connected in parallel inhibit the expansion and contraction of the actuator element. Actuator included If the conductive polymer undergoes large expansion and contraction, for example, an expansion and contraction ratio of 10% or more, a large tension is applied to the lead due to expansion and contraction, so that the lead is cut or the connection between the lead and the working part is broken. It becomes easy to generate soil. In addition, even when the operating portion vibrates greatly due to an external impact of the actuator, a large tension is applied to the lead, and the lead is likely to be cut or the connection portion between the lead and the operating portion to be broken.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a method for manufacturing a conductive polymer using an active part including a conductive polymer without disconnecting a plurality of leads connected to the active part by external force or expansion and contraction of the active part. Actuyue, which does not hinder stretching—is to provide an evening. Disclosure of the invention

The present invention is an actuating device including an operating unit, a counter electrode, and an electrolyte, wherein a plurality of leads for applying a voltage to the operating unit and the counter electrode via the electrolyte are connected to the operating unit, At least one of the leads is an actuator with a conductive buffer. By using the actuating unit, the actuating unit can be operated without disconnecting a plurality of leads connected to the operating unit. In the evening, it is possible to apply a sufficient voltage to the vicinity of the end of the working part in the evening, so that the conductive polymer can fully exhibit the expansion / contraction performance even at the end of the working part. It is. Further, in the actuating unit, the tension applied to the lead is relieved even if the operating part expands and contracts greatly, so that the lead does not break, and the expansion and contraction of the conductive polymer is not hindered. Can expand and contract.

Further, according to a second aspect of the present invention, there is provided an actuary comprising an operating portion, a counter electrode and an electrolyte, wherein the lead for applying a voltage to the operating portion and the counter electrode via the electrolyte is provided. A plurality of actuators are connected to the operating unit, and the leads are connected in series to the operating unit. By using the above-mentioned actuary, the leads connected to the operating part are disconnected. There is no refusal. Since the voltage can be sufficiently applied also to the vicinity of the end of the working part during the above-mentioned practice, it is possible to sufficiently exhibit the stretchability of the conductive polymer even at the end of the working part. It is possible, and even if the working part expands and contracts greatly, the tension applied to the lead is relieved, so that the lead does not break, the expansion and contraction of the conductive polymer is not hindered, and the operating part expands and contracts. Can be. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a longitudinal sectional view of the first embodiment of the present invention of the first invention.

FIG. 2 is a vertical cross-sectional view of the second embodiment of Actuyue Ichiyu, which is the first invention.

FIG. 3 is a longitudinal sectional view of one embodiment of Actuyue, which is the second invention. BEST MODE FOR CARRYING OUT THE INVENTION

The present invention will be described below with reference to the drawings, but the present invention is not limited thereto.

(First invention)

The present invention relates to an actuating device including an operating part, a counter electrode and an electrolyte, wherein a plurality of leads for applying a voltage to the operating part and the counter electrode via the electrolyte are connected to the operating part, At least one of the leads is an actuator with a conductive buffer. Hereinafter, the present invention will be referred to as a first invention. FIG. 1 is a vertical cross-sectional view of the first embodiment of Actuyue Ituyu, which is the first invention. In FIG. 1, a column-shaped actuator 1 includes a film-shaped operating portion 2 and a plate-shaped counter electrode 3 inside a housing 4. Actuator 2 has leads 51, 52, 53 connected to connections 61, 62, Connected via 6 3. The leads 52 and 53 are connected to conductive buffers 71 and 72, respectively, and are connected to an external power supply 8 via the leads. The counter electrode 3 is also connected to the power supply 8 via a lead. The electrolyte 9 is filled so that a voltage can be applied through the electrolyte 9 when a voltage is applied to the working part 2 and the counter electrode 3.

The shape of the actuary of the first invention is not particularly limited as long as it can include an operating portion, a counter electrode, and an electrolyte inside, and it may be cylindrical, rectangular, or polygonal. Shape.

The material of the housing of the case is not particularly limited, and may be a hard material such as hard plastic, metal, glass, ceramics, or a flexible material such as urethane rubber or silicon rubber. When the upper part 41 and the bottom part 42 of the housing 4 in FIG. 1 move in accordance with the expansion and contraction of the operating part, the side wall surface 43 is preferably flexible. The constituent material is preferably a material having flexibility. Further, in applications where impact resistance is required for the actuator, the material constituting the wall surface of the housing of the actuator is preferably a hard material.

The operating part in the first invention is not particularly limited as long as the operating part contains a conductive polymer and the operating part expands and contracts by electrolytic expansion and contraction of the conductive polymer. A desired shape such as a pillar shape or a prism shape can be obtained. As the conductive polymer, polypyrrole, polythiophene, polyaniline, polyphenylene and the like can be used.A conductive polymer containing pyrrole and Z or a pyrrole derivative in a molecular chain is produced. This is preferable because it is easy to perform and is not only stable as a conductive polymer, but also has excellent electrolytic expansion and contraction performance. In addition, since the physical strength of the conductive polymer film is high in the operating portion, the conductive polymer film obtained by the electrolytic polymerization method or the laminate of the conductive polymer film obtained by the electrolytic polymerization method is used. It is preferably a body. The operating portion may be a conductive polymer film obtained by an electrolytic polymerization method including a conductive metal substrate inside or on the surface, or It is preferred to be a laminate of

The operating portion may include a conventional conductive polymer such as a conductive polymer containing sodium P-toluenesulfonate as a dopant.

Further, when the actuary of the first invention is used for an application that requires a large expansion and contraction, the operating section may be configured such that the conductive polymer contained in the operating section is a conductive polymer formed by an electrolytic polymerization method. In the production method, it is possible to use an operating part which is a conductive polymer obtained by the production method using the electrolytic solution containing an organic compound as a solvent in the electrolytic polymerization method. The organic compound may be (1) a chemical bond selected from at least one of a chemical bond group consisting of an ether bond, an ester bond, a carbon-halogen bond and a carbonate bond, and / or (2) a hydroxyl group, a nitro group, Preferably, the molecule contains at least one functional group selected from the group consisting of a functional group consisting of a group, a sulfone group and a nitrile group. Further, the electrolyte may contain a known dopant, and a trifluoromethanesulfonic acid ion and / or a fluorine atom bonded to a central atom in order to obtain a larger elongation ratio per one oxidation-reduction cycle. It is preferable to include an anion containing a plurality of. Further, in order to make the obtained conductive polymer have an expansion / contraction rate of 16% or more per oxidation-reduction cycle, the above-mentioned trifluoromethanesulfonate ion and the fluorine atom with respect to the central atom or the trifluoromethanesulfonic acid ion are used as the electrolytic solution. Chemical formula (1)

(C _n F _{(2 n + 1)} S 0 ₂ ) (C _m F _{(2m + 1)} S 0 ₂ ) N- (1)

(Where n and m are arbitrary integers.)

It is preferable to use an electrolytic solution containing a perfluoroalkylsulfonyl imido ion represented by the following formula as an anion. When the operating part is an operating part containing the conductive polymer manufactured by the manufacturing method, the expansion and contraction rate of the operating part per oxidation-reduction cycle can be easily increased to 3% or more. One night can be used for applications requiring a large expansion and contraction rate such as artificial muscles. Examples of the organic compound include 1,2-dimethoxyethane, 1,2-jetoxetane, tetrahydrofuran, 2-methyltetrahydrofuran, 1,4-dioxane (the above organic compounds containing an ether bond), γ-butyrolactone, acetic acid Ethyl, _η- butyl acetate, -butyl acetate, 1,2-diacetoxetane, 3-methyl-2-oxazolidinone, methyl benzoate, ethyl benzoate, butyl benzoate, getyl phthalate (including ester bond) Organic compounds), propylene glycol, ethylene carbonate, dimethyl carbonate, dimethyl carbonate, methyl ethyl carbonate (more than organic compounds containing carbonate bonds), ethylene glycol, 1-butyl alcohol, Xanol, cyclohexanol, 1-year-old kutano 1, 1-decanol, 1-dodecanol, 1-octadecanol (above, organic compounds containing hydroxyl groups), nitromethane, nitrobenzene (above, organic compounds containing nitro groups), sulfolane, dimethyl sulfone (above, Organic compounds containing), and acetate nitrile, ptyronitrile, and benzonitrile (the organic compounds containing a nitrile group). The organic compound containing a hydroxyl group is not particularly limited, but is preferably a polyhydric alcohol or a monohydric alcohol having 4 or more carbon atoms because of its good elasticity. In addition to the above-described examples, the organic compound may have any two or more bonds or functional groups selected from ether bonds, ester bonds, carbonate bonds, hydroxyl groups, nitro groups, sulfone groups, and nitrile groups in the molecule. Organic compounds may be included in combination. The organic compound may be a mixture of two or more of the organic compounds.

In the above-mentioned production method, the halogenated hydrocarbon contained as a solvent in the electrolytic solution is one in which at least one hydrogen in the hydrocarbon is replaced by a halogen atom, and is present as a liquid stably under electrolytic polymerization conditions. There is no particular limitation as long as it is possible.

Examples of the halogenated hydrocarbon include dichloromethane and dichloroethane. The halogenated hydrocarbon is one kind of Can be used as a solvent in the electrolytic solution, but two or more of them can be used in combination. The halogenated hydrocarbon may be used as a mixture with the above organic compound, and a mixed solvent with the organic solvent may be used as a solvent in the electrolytic solution.

The electrolytic solution used in the electrolytic polymerization method contains an organic compound to be electrolytically polymerized (for example, pyrrole) and a trifluoromethanesulfonic acid ion and / or an anion containing a plurality of fluorine atoms with respect to a central atom. By performing electrolytic polymerization using this electrolytic solution, it is possible to obtain a conductive polymer having an excellent expansion / contraction rate per one oxidation-reduction cycle and / or displacement rate per specific time in electrolytic expansion / contraction. By the above-described electrolytic polymerization, trifluoromethanesulfonic acid ions and / or anions containing a plurality of fluorine atoms with respect to the central atom are incorporated into the conductive polymer.

The content of the anion containing a plurality of fluorine atoms with respect to the trifluoromethanesulfonic acid ion and / or the central atom is not particularly limited in the electrolytic solution, but is 0.1 to 30% by weight in the electrolytic solution. %, More preferably 1 to 15% by weight.

Trifluoromethanesulfonate ion is a compound represented by the chemical formula CF 3 S〇 ₃ —. An anion containing a plurality of fluorine atoms with respect to the central atom has a structure in which a plurality of fluorine atoms are bonded to a central atom such as boron, phosphorus, antimony, and arsenic. The Anion containing a plurality of fluorine atoms with respect to the central atom, but are not particularly limited, Tetorafu Ruorohou acid ion (BF ₄ -), the Kisafuruororin acid ion (PF ₆ I), the hexa full O b antimonate can be exemplified ions (_ S b F _6), and to Kisafuruoro arsenate ion (a s F ₆ _). Among _{_{them, CF 3 S 0 3 -,}} BF 4 and PF ₆ - When considering the safety to human body rather preferable, CF ₃ S_〇 ₃ and BF ₄ - is preferable. As the anion containing a plurality of fluorine atoms with respect to the central atom, one kind of anion may be used, a plurality of kinds of anions may be used at the same time, and further, trifluoromethanesulfonic acid ion and a plurality of kinds of central atoms may be used. In contrast, contains multiple fluorine atoms An anion may be used at the same time.

The electrolytic solution used in the electrolytic polymerization method includes a solution of the organic compound solvent and the trifluoromethanesulfonate ion and anion containing a plurality of fluorine atoms with respect to Z or a central atom. And further known additives such as polyethylene glycol and polyacrylamide.

In the electrolytic polymerization method, a known electrolytic polymerization method can be used as the electrolytic polymerization of the conductive polymer monomer, and any of the constant potential method, the constant current method, and the electric sweep method can be used. Can be. For example, the electrolytic polymerization, the current density 0 0 l~2 0 m A / c m2, the reaction temperature - 7 0~ 8 0 ° C, preferably current density 0:..! ~ 2 m A / cm 2, the reaction The reaction is preferably performed at a temperature of −40 to 40, and more preferably at a reaction temperature of −20 to 3O :.

In the first aspect of the invention, the operating portion includes a conductive material such as a metal wire and a conductive oxide in order to lower the resistance value as the working electrode in addition to including the conductive polymer and the dopant. Can be included as appropriate. The shape of the counter electrode in the first embodiment of the invention is not particularly limited as long as the counter electrode is formed of a conductive material that can be used as an electrode, and may be a rod, a line, a film, or a plate. It may be in a shape. The material of the counter electrode is not particularly limited, and may be a metal containing a noble metal such as gold or platinum as a type, or may be a conductive non-metal such as a conductive resin or ITO glass. . The material of the counter electrode is preferably a noble metal because it is hardly corroded and easy to process, and more preferably platinum or gold. The counter electrode according to the present invention has a gap between the counter electrode and the working part such that when a voltage is applied to the counter electrode and the working part, a current flows between the counter electrode and the working part through the electrolyte and a short circuit does not occur. Is preferred. This is because having the above-mentioned interval does not require a separator such as a nonwoven fabric, and the configuration of the actuator is simple.

The buffer of the first invention is connected to the operating part. It is provided on the lead and has conductivity. The cushioning member can reduce the tension applied to the lead due to the expansion and contraction of the operating portion and the tension applied to the lead due to the vibration of the operating portion due to an external impact. And the structure is not particularly limited. For example, a metal mesh, conductive fiber, conductive rubber, metal panel, or carbon spring can be used as the buffer. In addition, the buffer can be used in a shape suitable for the structure of the factory, such as a band, a line, and a plate. The number of the buffers may be at least one attached to the lead connected to the operating part, and may be attached to each of a plurality of leads connected to the operating part. When the operating part is fixed to the housing or the like at one end, it is required that the operating part is attached to all the leads except for the lead connected to the fixed part of the operating part. It is preferable because expansion and contraction are not hindered and large expansion and contraction can be obtained with a small number of buffers.

The buffer is preferably an elastic body because of its simple structure and easy connection with a lead. The elastic body is preferably a metal spring because it can be kept elastic without being affected by swelling due to organic components contained in the electrolyte when it comes into contact with the electrolyte. In particular, the buffer is preferably a coil-shaped metal panel because it can easily follow bending and expansion and contraction from all directions. Metals such as Ag, Ni, Ti, Au, Pt, Ta, and W, alloys thereof, and alloys such as SUS can be used as the material of the coil-type metal panel. Among them, the material is preferably Pt or Au because of its good corrosion resistance. The buffer may be a buffer that does not inhibit the expansion and contraction of the conductive polymer.

In the first invention, in FIG. 1, the lead is connected to the operating portion at the connecting portion, but the buffer may be connected to the connecting portion without the intermediary of the lead. It is preferable that the buffer is connected to the connecting portion via a lead, because the buffer does not contact the operating portion and does not damage the operating portion. Said The connection between the shock absorber and the lead can maintain conduction between the lead and the shock absorber. The tension between the lead and the shock absorber due to the expansion and contraction of the operating portion, and the tension between the lead and the shock absorber due to external vibration. As long as the lead and the buffer do not separate from each other, there is no particular limitation. As a material for a connection portion between the buffer and the lead, a solder stop or a conductive adhesive can be used as a material. Further, the connection portion may be formed by a method of forming a composite during polymerization.

In the first invention, a voltage is applied from a power supply via a connection portion formed in the operation portion. In FIG. 1, three connecting portions 51, 52, and 53 are formed, and a voltage is applied to the operating portion from three places. In FIG. 1, the connection portion is formed with a connection portion 61 so as to cover one end surface of the connection portion 2, and connection portions 62 and 63 are formed partially on the side surfaces of the operation portion 2, respectively. ing. The connecting portion of the first invention is not particularly limited as long as the lead or the buffer is fixed on the operating portion so that a voltage can be applied from the lead to the operating portion. The shape of the connection portion is not limited as long as a voltage is applied to the operation portion and the operation portion expands and contracts electrolytically. When the connecting portion is formed at one end of the operating portion, it may be formed so as to cover one surface of one end or may be formed partially. Further, when the operating portion is formed on the side surface of the operating portion, it may be formed on a part of the side surface, or may be formed so as to go around the outer periphery of the side surface. The connection portion may use a conductive adhesive, a conductive tape, a metal clip, or a metal plate. In addition, the connection portion may form a composite of a conductive polymer and a lead or a buffer during polymerization. The number of the connection parts is not particularly limited as long as it is plural, and may be appropriately arranged at an appropriate place according to the type of the conductive polymer contained in the operation part and the length of the operation part. Can be. Further, when the operating portion contains polypyrrole as a conductive polymer, the distance between adjacent connecting portions is preferably 5 cm or less in the length direction, so that a large stretch can be obtained as a whole. This is preferable because it is easy. The lead 54 is an electric path for applying a voltage from a power supply to each connection portion via a conductive buffer and a lead. It is preferable that the electric path is fixed or held on the inner surface of the housing so that the lead does not vibrate and be cut by an impact on the actuator.

The electrolyte contained in the factories of the first invention is not particularly limited, and may be a liquid or a solid electrolyte. When the electrolyte is in a liquid state, it may be an aqueous solvent or an organic solvent, but is easy to handle due to its low toxicity and a relatively slow volatilization rate, and it has a large expansion and contraction. Preferably, the solvent is an aqueous solvent. When the electrolyte is a solid electrolyte, it may be a gel polymer electrolyte or a completely solid polymer electrolyte, but a gel polymer electrolyte is preferred because of its high ionic conductivity in the electrolyte. As the gel used for the gel polymer electrolyte, it is preferable to use polyacrylamide, polyethylene glycol, agar, or the like, since the gel polymer electrolyte can be easily prepared by complexing with the aqueous solution electrolyte. The electrolyte may be an electrolyte containing at least one compound selected from the group consisting of trifluoromethanesulfonate ion, anion containing a plurality of fluorine atoms with respect to a central atom, and a sulfonate having 3 or less carbon atoms. However, it is preferable because the actuate can cause a larger expansion and contraction per one oxidation-reduction cycle. Further, the electrolyte is

(C _n F _{(2 n + 1)} S 0 ₂ ) (C _m F _{(2m + 1)} S 0 ₂ ) N

(Where n and m are any integers.) Actuating part is chemical formula as single punt

(C _n F _{(2 n + 1)} S 0 ₂ ) (C _m F _{(2m + 1)} S〇 ₂ ) N

(Where n and m are arbitrary integers.)

When containing a perfluoroalkylsulfonyl imido ion represented by

_{_{(C n F (2 n +}} 1) S 0 2) (C m F (2m + 1) S 0 2) N- ( wherein, n and m are arbitrary integers.) Of the present invention using the electrolyte containing It is preferred that the actuate is electrolytically stretched. The working part of the actuator is a perfluoroalkyl having a larger ionic radius than the conventional dopant. The doping and dedoping of rusulfonylimide results in a better stretch ratio per oxidation-reduction cycle and a better per-specified time compared to the use of electrolytes containing trifluoromethanesulfonic acid ions. The displacement rate can be shown.

In FIG. 1, a shaft is provided at an end (tip) of the operating portion 2 opposite to the connecting portion 61. When a voltage is applied to the operating portion 2 and the counter electrode 3 via the electrolyte, the operating portion expands and contracts electrolytically, and the shaft also moves up and down. By the movement of the shaft, the force generated by the expansion and contraction of the operating portion 2 can be transmitted to the outside of the actuator. When the electrolyte is an electrolytic solution, it is preferable to cap the tip of the actuator.

According to the first aspect of the invention, the means for transmitting the force generated by the expansion and contraction of the operating portion 2 to the outside of the operating portion is not limited to the method of forming the shaft in the operating portion. The housing may be formed of a flexible material, and the entire actuator may expand and contract. In the case where the entirety of the actuary elongates and contracts, the flexible material forming the housing is not particularly limited, and can be appropriately selected according to the elongation rate of the actiyue. It is preferable to use a synthetic resin of 5% or more, and it is more preferable to use a synthetic resin having an elongation of 20% or more. As the flexible material, for example, silicon-based resin, urethane-based resin, silicon-based rubber, urethane-based rubber, or the like can be used. Further, since the flexible material also has a function of preventing the electrolyte from leaking to the outside of the actuator, it is preferable that the flexible material has solvent resistance. Silicon-based resin, urethane-based resin, silicone A system rubber or a urethane rubber can be suitably used. In the case of the actuary, if the operating part has a structure that is sealed by a housing, a means for transmitting a force such as a rod-like body penetrates the housing and is used for a longer time than the structure. Since there is no electrolyte leakage due to this, it is excellent for use as mechanical parts such as artificial muscles. FIG. 2 is a longitudinal sectional view of a second embodiment of the actuator of the first invention. In FIG. 2, a column-shaped actuator 11 includes a film-shaped operating portion 12 and a plate-shaped counter electrode 13 inside a housing 14. Leads 151, 152, 153, 154, 155 are connected to working part 12 via connections 161, 162, 163 on the working part surface, respectively. Have been. The leads 15 2 and 15 3 are conductive buffers 17 1 and the leads 15 4 and

1 5 5 is connected to the buffer 1 7 2. Connections on the working surface 1 6 1,

Electric power is supplied to 16 2 and 16 3 in series from an external power supply 18 via a lead and a buffer. The counter electrode 13 is also connected to the power supply 18 via a lead. The electrolyte 19 is filled so that a voltage can be applied through the electrolyte 19 when a voltage is applied to the operating part 12 and the counter electrode 13.

In the actuator 11 of FIG. 2, which is the second embodiment, a voltage is applied to the connecting portions 161, 162, and 163 in order to apply a voltage to the operating portion. The first electrical path for supplying voltage to connection 16 1 is the path that includes lead 15 1. The second electric path for applying a voltage to the connection section 16 2 is a path including the lead 15 2, the buffer 17 1, and the lead 15 3. A third electric path for applying a voltage to the connection portion 163 is a path including the lead 154, the buffer 17, and the lead 155. On the other hand, in FIG. 1, the electric path for applying a voltage to the connecting portions 61, 62, and 63 to apply a voltage to the operating portion is a first path for applying a voltage to the connecting portion 61. The electric path is a path including the lead 51, the second electric path for applying a voltage to the connection section 62 is a path including the lead 52 and the buffer 71, and the connection section 6 3 A third electric path for applying a voltage to the coil is a path including the lead 53 and the buffer 72.

In FIG. 1 which is the first embodiment of the first invention of the present application, as an electric path for applying a voltage to the operating portion, a first electric path, a second electric path, and a third electric path are arranged in parallel. Is set to In FIG. 2, which is the second embodiment of the first invention, an electric path for applying a voltage to One electric path, a second electric path, and a third electric path are connected in series. That is, in the first invention of the present application, the connection form of the electric path for applying the voltage to the operating section may be such that a plurality of electric paths connected to the operating section may be connected in parallel, or may be connected in series. Is also good. As the connection format, a suitable format can be selected according to the purpose. In order to reduce the overall size of the factory and save space, it is preferable that a plurality of electric paths connected to the operating unit be connected in series. If there is a risk of disconnection at the connection part due to large expansion or contraction of the operation part, it is preferable that a plurality of electric paths connected to the operation part be connected in parallel.

In FIG. 2, similarly to the first embodiment of FIG. 1, a shaft is provided at the end (tip portion) on the opposite side of the connection portion 15 of the operation portion 12, and the operation is performed by the up and down movement of the shaft. The power generated by the expansion and contraction of part 2 can be transmitted to outside the factory. When the electrolyte is an electrolytic solution, it is preferable to cap the tip of the actuator.

(Second invention)

The present invention relates to an actuating device comprising an operating part, a counter electrode and an electrolyte, wherein a plurality of leads for applying a voltage to the operating part and the counter electrode via the electrolyte are connected to the operating part, This is a case where the leads are connected in series to the operating part. Hereinafter, the present invention is referred to as a second invention.

(One aspect of the second invention)

FIG. 3 is a vertical cross-sectional view of an example of an embodiment of the invention of the second invention. In FIG. 3, a cylindrical actuator 21 includes a film-shaped operating part 22 and a plate-shaped counter electrode 23 inside a housing 24. To the working part 22, a lead 25 1 is connected at a connecting part 26 1 on the surface of the working part, and a lead 25 2 is connected to the adjacent connecting part 26 1 and the connecting part 26 2. The node 253 is connected to the adjacent connection part 262 and connection part 263. The leads 251, 252, 253 are connected in series and Connected to source 28. The counter electrode 23 is also connected to the power supply 28 via a lead. The electrolyte 29 is filled so that a voltage can be applied through the electrolyte 29 when a voltage is applied to the operating part 22 and the counter electrode 23.

In the actuator of the second invention, a plurality of leads are connected to the operating section, and the leads are connected in series to the operating section. When strong vibration is applied to the actuator, in a structure where the leads are connected in parallel as shown in Fig. 1, the leads 54 are attached to the inner surface of the housing to prevent the leads from being cut. Although it is necessary to fix or hold the lead, as shown in Fig. 3, in a structure in which a plurality of leads are connected to the working part and the leads are connected in series to the working part, leads 25 2 and 2 53 does not need to be fixed or held on the inner surface of the housing, and the structure is simple.

In the actuator according to the second aspect of the present invention, the length of a lead serving as an electric path between adjacent connecting portions is applied so that the lead is not cut when the operating portion is extended to the maximum. It is preferable that the distance between the connecting parts is equal to or longer than the distance between the connecting parts when the operating part is fully extended.

The shape of the actuator of the second invention is not particularly limited as long as the actuator can include the operating portion, the counter electrode, and the electrolyte inside similarly to the first invention described above.

In the actuator according to the second invention, as in the first invention described above, the material of the housing of the actuator is not particularly limited, and a hard material such as a hard plastic, metal, glass, or ceramic is used. Alternatively, a flexible material such as urethane rubber or silicon rubber may be used. It is preferable that the material forming the wall surface of the housing of the actuator is a flexible material. Further, in applications where impact resistance is required for the actuator, it is preferable that the material constituting the wall surface of the housing of the actuator is a hard material. · The actuator according to the second aspect of the present invention is the same as the first aspect described above, wherein the operating part includes a conductive polymer, and the operating part expands and contracts due to electrolytic expansion and contraction of the conductive polymer. There is no particular limitation as long as it does. As the conductive polymer, polypyrrol, polythiophene, polyaniline, polyphenylene, and the like can be used, and a conductive polymer containing a pyrrole and / or a pyrrole derivative in a molecular chain is preferable. .

The operating section may include a conventional conductive polymer such as a conductive polymer containing sodium P-toluenesulfonate as a dopant, as in the first aspect of the present invention. The operating part may be a method for producing a conductive polymer by an electrolytic polymerization method, wherein the conductive polymer contained in the operating part is an organic compound, as in the first aspect of the invention. And a conductive polymer obtained by the method for producing a conductive polymer containing trifluoromethanesulfonic acid ion and / or anion containing a plurality of fluorine atoms with respect to the central atom. Functional polymers can be used. The organic compound may include (1) a chemical bond selected from at least one of a chemical bond group consisting of a ether bond, an ester bond, a carbon-18 bond, and a carbonate bond, and / or (2) a hydroxyl group. Preferably, the molecule contains at least one functional group selected from the group consisting of a nitro group, a sulfone group and a nitrile group. The electrolytic solution contains, as a solvent, an organic compound containing in the molecule one or more selected from the group consisting of the chemical bond species and Z or a functional group, and a trifluoromethanesulfonate ion and a fluorine atom with respect to the central atom. The use of a conductive polymer produced by a method for producing a conductive polymer using an electrolytic solution containing anion containing a plurality of dioxins for the working part can provide a large expansion and contraction rate in one oxidation-reduction cycle. preferable. Further, the obtained conductive polymer

In order to make the expansion rate per oxidation-reduction cycle 16% or more, instead of the above-mentioned trifluoromethanesulfonate ion and anion containing a plurality of fluorine atoms with respect to Z or the central atom, a chemical formula (1)

_{_{(C n F (2n + 1}} ) S0 2) (C m F (2m + 1) S0 2) N- (1) ( where, n and m are arbitrary integers.)

Perfluoroalkylsulfonylimid ion represented by Is preferably used.

In addition, similarly to the first invention, the operating portion includes a conductive polymer and a dopant, and also includes a metal wire, a conductive oxide, or the like in order to reduce a resistance value as an operating electrode. A conductive material can be included as appropriate. In addition, since the operating portion has a high physical strength of the conductive polymer film, the conductive polymer film obtained by the electrolytic polymerization method or the conductive polymer film obtained by the electrolytic polymerization method is laminated. It is preferably a body. Further, it is preferable that the operating section is a conductive polymer film obtained by an electrolytic polymerization method including a conductive metal substrate inside or on a surface thereof, or a laminate thereof.

The counter electrode of the second embodiment of the present invention is not particularly limited in shape as long as it is formed of a conductive material that can be used as an electrode, as in the first invention. The material is not particularly limited, and is preferably a noble metal, and more preferably platinum or gold, because it is hardly corroded and easy to process.

In the second invention, a voltage is applied from a power source to the connection portion formed in the operating portion, as in the first invention. In FIG. 3, the connection portion is formed with a connection portion 261 so as to cover one end surface of the connection portion 2, and the connection portions 262 and 263 are formed on a part of a side surface of the operation portion 22. Each is formed. The shape of the connection portion is not limited as long as the voltage is applied to the operation portion and the operation portion expands and contracts electrolytically. As in the first aspect, when the connecting portion is formed at one end of the operating portion, the connecting portion may be formed so as to cover one surface of the one end or may be formed partially. When the operating portion is formed on the side surface of the operating portion, the operating portion may be formed on a part of the side surface, or may be formed so as to go around the outer periphery of the side surface.

As in the first invention, a conductive adhesive, a conductive tape, a metal clip, a metal plate, or a method of compounding at the time of polymerization can be used for the connection portion. The number of the connection parts is not particularly limited as long as it is plural, and may be appropriately arranged at an appropriate place according to the type of the conductive polymer contained in the operation part and the length of the operation part. it can. Further, the operating part is made of a conductive polymer. When polypyrrole is contained, the distance between adjacent connecting portions is preferably 5 cm or less in the longitudinal direction, because it is easy to obtain large extensibility as a whole.

The electrolyte contained in the factories of the second invention is not particularly limited, as in the first invention, and may be a liquid or a solid electrolyte. When the electrolyte is in a liquid state, it may be a water solvent or an organic solvent, but since it has low toxicity and a relatively slow volatilization rate, it is easy to handle. Preferably it is a solvent. When the electrolytic solution is a solid electrolyte, a gel polymer electrolyte is preferable because of high ionic conductivity in the electrolyte. As the polymer electrolyte, it is preferable to use polyacrylamide, polyethylene glycol, agar, or the like as the gel used in the above, because the gel polymer electrolyte can be easily prepared by compounding with the aqueous solution electrolyte. The electrolyte may be trifluoromethanesulfonic acid ion, an electrolyte containing at least one compound selected from the group consisting of an anion containing a plurality of fluorine atoms with respect to a central atom and a sulfonate having 3 or less carbon atoms, It is preferable that the actuate is capable of producing a larger expansion and contraction per oxidation-reduction cycle.

In FIG. 3, a shaft is provided at the end (tip) of the operating portion 22 opposite to the connecting portion 25 1. When a voltage is applied to the operating part 22 and the counter electrode 23 through the electrolyte, the operating part expands and contracts electrolytically, and the shaft also moves up and down. Due to the movement of the shaft, the power generated by the expansion and contraction of the operating part 22 can be transmitted to the outside of the factory. In the case where the electrolyte is an electrolyte, it is preferable to cap the tip of the actuator.

In the second aspect of the invention, as in the first aspect, the casing of the first actuator may be formed of a flexible material, and the entire first actuator may extend and contract. In the case where the entirety of the actuary expands and contracts, the flexible material forming the housing is not particularly limited, and can be appropriately selected according to the elongation rate of the actuary. 5% rate It is preferable to use the above synthetic resin, and it is more preferable to use a synthetic resin having an elongation of 20% or more. As the flexible material, for example, silicon-based resin, urethane-based resin, silicon-based rubber, urethane-based rubber, or the like can be used. In addition, since the flexible material also has a function of preventing the electrolyte from leaking to the outside, it is preferable that the flexible material has solvent resistance. Silicon-based resin, urethane-based resin, silicon-based resin Rubber or urethane rubber can be suitably used. Incidentally, in the case of Actu Yue, when the operating part has a structure that is sealed by a housing, a means for transmitting a force such as a rod-like body penetrates the housing, compared to the structure. Since there is no electrolyte leakage due to long-term use, it is excellent for use as mechanical parts such as artificial muscles.

According to the second aspect of the present invention, the lead, which is an electric path between the adjacent connecting portions, is in a slack state when the operating portion is contracted, and when the slack portion is too long. In this case, a short circuit is likely to occur due to contact with the counter electrode, and the leads are likely to be entangled. When the operating part expands and contracts by 3% or more, it is possible to use the actuator of the second invention of the present application, but using the actuator of the first invention makes contact with the counter electrode. This is preferable because a short circuit is less likely to occur and the leads are less likely to be entangled. According to the first and second aspects of the invention, since it is easy to obtain a larger expansion ratio, the actuators can be used even if the displacement is small. It can also be used suitably as artificial muscle meat, which is an application with large displacement. In other words, the actuary of the present invention can expand the use of an actuate containing a conductive polymer, which could only be used for applications with small displacements, to applications with large displacements such as artificial muscles. . In the first invention and the second invention, a lead having a buffer function may be used. The above-mentioned actuary can be used as a linear actuator, for example, as shown in FIG. 1 to FIG. By connecting the power transmission target member to a shaft attached to the tip of the operating portion of the cutlery, the shaft can be used as a drive device, and the shaft is pressed against the control target. Thus, it can be used as a pressing device. When the expansion ratio per oxidation reduction cycle of the operating part is 3% or more in the above-mentioned actuary, the shaft expands and contracts by 3% or more, and the expansion and contraction of 3% or more as an actuary can be obtained. It can be suitably used for applications where the displacement of artificial muscles or the like is large. The actuator of the present invention is an actuator in which a conductive polymer is driven by electricity, and is silent as it is driven. Therefore, the actuator is suitable as a driving unit or a pressing unit in an indoor use device. In addition, the actuator is lighter than the conventional linear actuator because it has fewer metal parts. Therefore, the positioning device, the attitude control device, the elevating device, the transport device, the moving device, the adjusting device, the adjusting device, and the guiding device are provided. It can be suitably used as a drive unit of a device and a joint device.

According to the first and second aspects of the present invention, in order to use it as an artificial muscle, the expansion and contraction rate of the operating portion can obtain a large expansion and contraction as an actuator. It is preferably at least 3%, more preferably at least 5% per oxidation-reduction cycle.

(Application)

The first invention and the second invention of the second invention of the present application can be suitably used for artificial muscles, robot arms and artificial hands. In addition, medical equipment such as tweezers, scissors, forceps, snares, laser scalpels, spatulas, clips, and other sensors for microsurgery technology, various sensors for inspection and repair, or repair tools, health equipment, hygrometers, hygrometer control equipment Equipment used in the water, such as equipment, soft manipures, underwater valves, soft transport equipment, and other industrial equipment; underwater vehicles such as goldfish; or hobby equipment such as moving fishing baits and propulsion fins. Also, the actuary of the present invention can be suitably used.

Also, the first invention and the second invention of the present invention are described below. A driving unit that generates a linear driving force or a driving unit that generates a driving force to move a track-type orbit formed by a circular arc, or a pressing unit that performs a linear operation or a curved operation. OA equipment, antennas, equipment for placing people such as beds and chairs, medical equipment, engines, optical equipment, fixtures, side trimmers, vehicles, lifting equipment, food processing equipment, cleaning equipment , Measurement equipment, inspection equipment, control equipment, machine tools, processing machines, electronic equipment, electron microscopes, electric razors, electric toothbrushes, manipulators, masts, play equipment, amusement equipment, riding simulation equipment, vehicle occupant restraint Equipment and equipment extension equipment for aircraft.

For example, the actuator is used in a valve, a brake, and a lock device used in a general machine including the above-mentioned devices such as an OA device and a measuring device, and a truck including a drive portion or an arc portion that generates a linear drive force. It can be used as a driving unit that generates a driving force for moving the mold orbit, or as a pressing unit that performs a linear operation. In addition to the above-described devices, devices, instruments, and the like, in general, in machinery and equipment, a driving unit of a positioning device, a driving unit of an attitude control device, a driving unit of a lifting device, a driving unit of a transport device, and a driving device of a moving device. It can be suitably used as a drive unit of an adjustment device for adjusting a part, an amount, a direction, etc., a drive unit of an adjustment device such as a shaft, a drive unit of a guidance device, and a pressing unit of a pressing device. Further, the actuator can be suitably used as a drive unit in a joint device, such as a directly driveable joint unit such as a joint intermediate member or a drive unit that imparts rotational motion to a joint.

The actuator is, for example, a drive unit for an ink jet part in an inkjet printer such as a CAD printer, a drive unit for displacing the optical axis of the light beam of the printer, and a head of a disk drive device such as an external storage device. It can be suitably used as a driving unit and a driving unit of a paper pressing contact force adjusting unit in a paper feeding device of an image forming apparatus including a printer, a copying machine, and a facsimile.

For example, the above-mentioned actuyue is a frequency sharing antenna for radio astronomy, etc. The measurement unit, such as moving the high-frequency power supply unit to the second focal point, the drive unit of the drive mechanism that moves and installs the power supply unit, and the lift in the mast antenna, such as a vehicle-mounted pneumatic telescopic mast (telescopic mast) It can be suitably used for a drive unit of a mechanism.

For example, the actuator may be a driving unit of a massage unit of a chair-shaped massage machine, a driving unit of a nursing or medical bed, a driving unit of a posture control device of an electric reclining chair, a massage machine, a comfortable chair, or the like. The backrest of a reclining chair used for a vehicle, the drive of an extension rod that allows the Ottoman to move up and down, and the retractable type of furniture such as chairs and nursing beds that carry a person such as a backrest or a led rest. The present invention can be suitably used as a driving unit used for turning a chair backrest, a dressing rest or a bed for a nursing care bed, and a driving unit for controlling the posture of a standing chair. For example, the actuator may be a driving unit of an inspection device, a driving unit of a pressure measuring device such as a blood pressure used in an extracorporeal blood treatment device, a driving unit of a catheter, an endoscope device, a forceps, or the like. Of a cataract surgery device using a chin, a drive unit of a movement device such as a jaw movement device, a drive unit of means for relatively expanding and contracting members of a chassis of a hoist for the disabled, and raising and lowering and moving a nursing bed It can be suitably used for a driving unit for controlling the posture and the like.

The actuator is, for example, a drive unit of a vibration isolator that attenuates vibration transmitted from a vibration generating unit such as an engine to a vibration receiving unit such as a frame, and a valve operating device for an intake and exhaust valve of an internal combustion engine. It can be suitably used as a drive unit, a drive unit of a fuel control device of an engine, and a drive unit of a fuel supply device of an engine such as a diesel engine.

For example, the actuator is a driving unit of a calibration device of an imaging device having a camera shake correction function, a driving unit of a lens driving mechanism such as a home video camera lens, and a moving lens group of an optical device such as a still camera or a video camera. Driving mechanism drive unit, camera autofocus unit drive unit, lens barrel drive unit used in imaging devices such as cameras and video cameras, auto-guider drive unit that captures light from optical telescopes, stereoscopic vision cameras and binoculars Etc. 2 optical system Lens drive mechanism or lens barrel drive unit of an optical device having a drive unit, or a drive unit or a pressing unit that applies a compressive force to the fiber for wavelength conversion of a fiber-type wavelength tunable filter used for optical communication, optical information processing, optical measurement, etc. The present invention can be suitably used for a drive unit of an optical axis aligning device and a drive unit of a camera shutter mechanism.

The above-mentioned actuary can be suitably used, for example, for a pressing portion of a fixing tool such as for fixing a hose fitting to a hose body by force.

For example, the actuator may be a drive unit such as a winding spring of a vehicle suspension, a drive unit of a fuel filler opener for unlocking a fuel filler lid of a vehicle, and a drive unit for extending and retracting a bulldozer blade. The present invention can be suitably used for a drive unit of a drive unit for automatically changing the gear ratio of a transmission for an automobile or for automatically connecting and disconnecting a clutch.

For example, the actuator may be, for example, a driving unit of a lifting device of a wheelchair with a seat plate lifting device, a driving unit of a lifting device for eliminating a step, a driving unit of a lifting and lowering device, a medical bed, an electric bed, an electric table, and an electric motor. Chairs, nursing beds, lifting tables, CT scanners, truck cabin tilting devices, lifting drives for lifters, etc., and various lifting machinery, as well as loading and unloading devices for heavy vehicles It can be suitably used.

The above-mentioned actuary can be suitably used, for example, as a driving unit of a discharge amount adjusting mechanism such as a food discharge nozzle device of a food processing device.

The actuator can be suitably used, for example, in a drive unit for lifting and lowering a truck or a cleaning unit of a cleaning device.

For example, the actuator is a driving unit of a measuring unit of a three-dimensional measuring device that measures the shape of a surface, a driving unit of a stage device, a driving unit of a part of a sensor such as a system for detecting a tire operating characteristic, and a force sensor. Drive unit of the device that gives the initial speed of the shock response evaluation device, drive unit of the piston drive device of the piston cylinder of the device including the borehole permeability test device, drive unit for moving in the elevation direction of the concentrating and tracking power generator, gas Of measurement equipment including concentration measurement equipment The drive unit of the oscillation device of the tuning mirror of the eye laser oscillation wavelength switching mechanism, the X Υ Θ table drive unit when alignment is required in the inspection device of the printed circuit board and the inspection device of the flat panel display such as liquid crystal and PDP. A drive unit for an adjustable aperture device used in an electron beam (E-beam) system or a charged particle beam system such as a forced ion beam (FIB) system, a support device for a measurement object in a flatness measuring instrument, or It can be suitably used as a drive unit of a detection unit and a drive unit of a precision positioning device such as a semiconductor exposure device, a semiconductor inspection device, a three-dimensional shape measuring device, as well as assembling of a fine device.

The actuator can be suitably used, for example, as a driving unit for an electric razor and a driving unit for an electric toothbrush.

The actuator is, for example, a drive unit of an imaging device for a three-dimensional object or a device for adjusting the depth of focus of a readout optical system shared by a CD and a DVD, and the shape of a drive target surface is changed to an active curved surface by a plurality of actuators. This makes it possible to linearly move a movable unit having at least one of a drive unit of a variable mirror and a magnetic head such as an optical pickup which can approximately change a focal position by forming a desired curved surface approximately. Drive unit for simple disk drives, magnetic tape drive unit for linear tape storage systems, etc., drive unit for the head feed mechanism of the assembly, image forming apparatus applied to electrophotographic copying machines, printers, facsimile machines, etc. Drive unit, drive unit for mounting members such as magnetic head members, and light that drives and controls the focusing lens group in the optical axis direction. Driving unit for disc master exposure device, driving unit for head driving means for driving optical head, driving unit for information recording / reproducing device for recording information on recording medium or reproducing information recorded on recording medium In addition, it can be suitably used for a drive unit for opening and closing a circuit breaker or a circuit breaker (a power distribution circuit breaker or a circuit breaker).

The actuator can be suitably used, for example, as a drive unit of the following apparatus: a drive section of a rubber composition press-molding vulcanization apparatus; Parts alignment equipment to align to the posture Drive of compression molding equipment, drive of holding mechanism of welding equipment, drive of bag filling and packaging machine, machine tool such as machining center, molding machine such as injection molding machine and press machine, etc. Driving unit, printing unit, driving unit of fluid application device such as coating device and lacquer spraying device, driving unit of manufacturing device for manufacturing camshaft, etc., driving unit of lifting device for covering material, tuft in shuttleless loom Driving device such as ear control body, needle driving system of tufting machine, looper driving system, driving unit such as knife driving system, driving of polishing device for polishing parts such as cam grinder and ultra-precision processing parts Drive unit of the overall frame braking device in the loom, drive unit of the shedding device for forming the warp opening for weft insertion in the loom, drive unit of the protective sheet peeling device for semiconductor substrates, etc. Drive Drive unit for CRT electron gun assembling equipment, clothing trim, torsion lace for torsion lace machine for manufacturing table races and seat covers, etc. The drive unit of the control device, the drive unit of the horizontal moving mechanism of the anneal window drive device, the drive unit of the support arm of the glass melting furnace forehearth, the drive for moving the rack of the exposure device forward and backward, such as the method of forming the fluorescent screen of the empty picture tube Drive unit for the torch arm of the pole bonding machine, drive unit for the bonding head in the XY direction, drive unit for the component mounting process and measurement inspection process in the mounting of chip components and measurement using probes, Driving unit for lifting and lowering the cleaning tool support of the substrate cleaning device, driving unit for moving the detection head that scans the glass substrate, and transferring the pattern onto the substrate The drive of the positioning device of the exposure equipment, the drive of the fine positioning device in the sub-micron order in the field of precision machining, the drive of the positioning device of the measurement device of the chemical mechanical polishing tool, the conductive circuit element, A drive unit for positioning a stage device suitable for an exposure apparatus and a scanning exposure apparatus used in manufacturing a circuit device such as a liquid crystal display element in a lithography process, a drive unit for transporting or positioning a work or the like, a reticle. Drive for positioning and transporting stages and wafer stages, precision positioning stage in chamber Drive for chemical mechanical polishing system, work in chemical mechanical polishing system Driving unit of positioning device for piece or semiconductor wafer, driving unit of semiconductor stepper device, driving unit of device for positioning accurately in the introduction station of processing machine, machine tool such as NC machine, machining center, etc. Light beam scanning in the drive section of passive vibration isolation and active vibration isolation devices for various devices typified by steppers in the IC industry, and in exposure devices used in the lithographic process of manufacturing semiconductor devices and liquid crystal display devices. A drive unit for displacing the reference grating plate of the apparatus in the optical axis direction of the light beam, and a transfer device for transferring the reference lattice plate into the article processing unit in a direction transverse to the conveyor.

The actuator can be suitably used, for example, as a drive unit for a probe positioning device of a scanning probe microscope such as an electron microscope, and a drive unit for positioning a fine movement device for a sample for an electron microscope.

For example, the actuator is used for a drive unit of a joint mechanism represented by a wrist of a robot arm in a robot or manipulator including an automatic welding pot, an industrial mouth pot, a nursing robot, and a joint other than a direct drive type. The drive unit, the finger of the mouth pot itself, the drive unit of the motion conversion mechanism of the slide opening and closing type chuck device used as a hand of the mouth pot, etc. Driving unit of micromanipulator for operating in arbitrary state, driving unit of prosthesis such as electric prosthesis having multiple openable fingers, driving unit of handling robot, driving unit of prosthesis, and driving of power suit It can be suitably used for parts.

The actuator can be suitably used, for example, as a pressing portion of a device for pressing an upper rotary blade or a lower rotary blade of a side trimmer.

The above-mentioned actuyue is suitably used, for example, as a drive unit for a character or the like in a game machine such as a pachinko machine, a drive unit for an amusement device such as a doll or a pet mouth pot, and a drive unit for a simulation device of a boarding simulation device. be able to.

The actuator can be used, for example, in a drive unit of a valve used in a general machine including the above-described equipment and the like. Drive for bellows-type pressure-sensitive control valve, drive for opening device that drives the pig iron frame, drive for vacuum gate valve, and solenoid-operated control valve for hydraulic system Suitable for drive unit, valve drive unit incorporating a motion transmission device using a pivot lever, rocket movable nozzle valve drive unit, suck back valve drive unit, and pressure control valve drive unit Can be.

The actuator can be used, for example, as a pressing portion of a brake used in a general machine including the above-described devices, and is preferably used for, for example, an emergency, security, parking brake, etc., or an elevator brake. It can be suitably used for a pressing portion of a simple braking device, and a pressing portion of a brake structure or a brake system.

The actuator can be used, for example, as a pressing portion of a lock device used in a general machine including the above-described devices and the like, for example, a pressing portion of a mechanical locking device, a pressing portion of a steering lock device for a vehicle, Further, it can be suitably used for a pressing portion of a power transmission device having both a load limiting mechanism and a coupling release mechanism. Industrial applicability

According to a first aspect of the present invention, there is provided an actuating unit including an operating unit, a counter electrode, and an electrolyte, wherein a lead for applying a voltage to the operating unit and the counter electrode through the electrolyte is provided. A plurality of the actuators are connected to each other, and at least one of the leads is an actuator having a conductive buffer. By using this actuator, it is possible to apply a sufficient voltage to the vicinity of the end of the working part, so that the conductive polymer can fully exhibit the stretching performance even at the end of the working part. It is possible to do. Further, even if the operating portion expands and contracts greatly, the tension applied to the lead is reduced by the buffer, so that the lead does not break. In addition, since the lead is provided with the buffer, even when a voltage is applied to the operating portion from a plurality of locations in order to obtain a large amount of expansion and contraction, even if a voltage is applied to the operating portion from a plurality of locations, the tip of the actuator can be used. Since the voltage can be sufficiently applied, the expansion and contraction is not hindered by the lead, and the expansion and contraction of the operating portion does not occur, so that a large expansion and contraction can be obtained as an actuator.

An actuating device according to a second aspect of the present invention is an actuating device including an operating portion, a counter electrode, and an electrolyte, and a lead for applying a voltage to the operating portion and the counter electrode via the electrolyte. Are actuating units connected to the operating unit in a plurality, and the leads are connected in series to the operating unit. Even with the use of this actuator, it is possible to apply a sufficient voltage to the vicinity of the end of the working part. It can be used to its full potential, and can be used to get a quick stretch. Furthermore, even if the operating portion expands and contracts significantly, the tension applied to the lead is reduced, so that not only does the expansion and contraction be prevented, but also the lead does not break.

As described above, according to the first invention and the second invention of the second invention, even if the expansion and contraction is large, not only does the expansion and contraction not be hindered, but the lead does not break due to the expansion and contraction. It is suitable for artificial muscles that are used when the elasticity of the operating portion is large. In addition, since the actuator is an actuator in which the conductive polymer is driven by electricity, there is no sound at the time of driving. Therefore, the actuator is suitable as a driving unit or a pressing unit in an indoor use device. In addition, the actuator is lighter than the conventional linear actuator because it has fewer metal parts, so the positioning device, the posture control device, the elevating device, the transport device, the moving device, the adjusting device, and the adjusting device are used. It can be suitably used as a driving unit of a guiding device and a joint device.

Claims

The scope of the claims

1. An actuating device including an operating portion, a counter electrode and an electrolyte, wherein a plurality of leads for applying a voltage to the operating portion and the counter electrode via the electrolyte are connected to the operating portion, and the lead At least one of the leads has a conductive buffer.

2. The actuator according to claim 1, wherein the leads connected to the operating portion are arranged in series, and at least one of the leads has a conductive buffer.

3. The method according to claim 1, wherein the buffer is an elastic body.

4. The actuary according to claim 3, wherein the elastic body is a panel.

5. The actuator according to claim 1, wherein the operating portion includes a conductive polymer.

6. The activator according to claim 1, wherein the stretch ratio as the activator is 3% or more.

7. An artificial muscle using the actuator according to claim 1.

8. An actuating device including an operating portion, a counter electrode, and an electrolyte, wherein a plurality of leads for applying a voltage to the operating portion and the counter electrode via the electrolyte are connected to the operating portion, and the lead is provided. Are connected in series to the actuator I'm having fun.

9. The actuator according to claim 8, wherein the operating portion includes a conductive polymer.

10. The actuary according to claim 8, wherein the stretch ratio as the actuir is 3% or more.

11. An artificial muscle using the actiyue as set forth in claim 8.

12. A positioning device, an attitude control device, an elevating device, a transport device, a moving device, an adjusting device, an adjusting device, a guiding device, or an articulating device using the actuator of claim 1 as a driving portion.

13. A pressing device using the actuator of claim 1 for the pressing portion.

14. A positioning device, an attitude control device, an elevating device, a transport device, a moving device, an adjusting device, an adjusting device, a guiding device, or a joint device using the actuator according to claim 8 as a driving unit.

15. A pressing device using the actuator of claim 8 for the pressing portion.