WO2004064125A8 - Gas feed line structure - Google Patents

Gas feed line structure

Info

Publication number
WO2004064125A8
WO2004064125A8 PCT/IB2003/006315 IB0306315W WO2004064125A8 WO 2004064125 A8 WO2004064125 A8 WO 2004064125A8 IB 0306315 W IB0306315 W IB 0306315W WO 2004064125 A8 WO2004064125 A8 WO 2004064125A8
Authority
WO
WIPO (PCT)
Prior art keywords
gas
feed
line structure
feed line
gas feed
Prior art date
Application number
PCT/IB2003/006315
Other languages
French (fr)
Other versions
WO2004064125A1 (en
Inventor
Takako Kimura
Jun Sonobe
Hideyuki Sato
Original Assignee
Air Liquide
Takako Kimura
Jun Sonobe
Hideyuki Sato
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide, Takako Kimura, Jun Sonobe, Hideyuki Sato filed Critical Air Liquide
Priority to AU2003292477A priority Critical patent/AU2003292477A1/en
Publication of WO2004064125A1 publication Critical patent/WO2004064125A1/en
Publication of WO2004064125A8 publication Critical patent/WO2004064125A8/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/20—Fluorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • B01D39/2027—Metallic material
    • B01D39/2031—Metallic material the material being particulate
    • B01D39/2034—Metallic material the material being particulate sintered or bonded by inorganic agents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical Vapour Deposition (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Glass Compositions (AREA)
  • Manufacture And Refinement Of Metals (AREA)

Abstract

The problem is to provide a gas feed line structure that is well suited for supplying feed gases that contain 1% or more fluorine gas. A gas feed line structure for supplying a feed gas that contains 1% or more fluorine gas to a main process apparatus (10) has gas feed lines (48) and (28a) that connect a main process apparatus (10) to a feed gas source (32) and also has adsorption devices (52) and (54) that are disposed on said gas feed lines (28a) and (48). These adsorption (10) devices (52) and (54) contain an adsorption layer (66) that is composed mainly of a nickel sinter and that is traversed by the feed gas being supplied to the main process apparatus (10).
PCT/IB2003/006315 2003-01-10 2003-12-22 Gas feed line structure WO2004064125A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003292477A AU2003292477A1 (en) 2003-01-10 2003-12-22 Gas feed line structure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003004555A JP4440546B2 (en) 2003-01-10 2003-01-10 Gas supply line structure
JP2003-004555 2003-01-10

Publications (2)

Publication Number Publication Date
WO2004064125A1 WO2004064125A1 (en) 2004-07-29
WO2004064125A8 true WO2004064125A8 (en) 2004-11-04

Family

ID=32708963

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2003/006315 WO2004064125A1 (en) 2003-01-10 2003-12-22 Gas feed line structure

Country Status (4)

Country Link
JP (1) JP4440546B2 (en)
AU (1) AU2003292477A1 (en)
TW (1) TW200506102A (en)
WO (1) WO2004064125A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101696792B1 (en) * 2009-02-12 2017-01-16 그리피스 유니버시티 A chemical vapour deposition system and process
JP5385891B2 (en) * 2010-12-24 2014-01-08 川崎重工業株式会社 Water-lubricated hydroelectric generator

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3541762A (en) * 1969-03-18 1970-11-24 Atomic Energy Commission Annular packed-bed filter
JPH01261208A (en) * 1988-04-11 1989-10-18 Mitsui Toatsu Chem Inc Method for purifying nitrogen trifluoride gas
DE68907366T2 (en) * 1988-04-11 1993-12-02 Mitsui Toatsu Chemicals Process for refining nitrogen trifluoride gas.
GB9626329D0 (en) * 1996-12-19 1997-02-05 British Nuclear Fuels Plc Improvements in and relating to the storage, transportation and production of active fluoride
CN1639058A (en) * 2001-06-29 2005-07-13 昭和电工株式会社 High-purity fluorine gas, production and use thereof, and method for analyzing trace impurities in high-purity fluorine gas

Also Published As

Publication number Publication date
AU2003292477A1 (en) 2004-08-10
WO2004064125A1 (en) 2004-07-29
JP2004216233A (en) 2004-08-05
TW200506102A (en) 2005-02-16
JP4440546B2 (en) 2010-03-24

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121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
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