WO2004063111A1 - Heat treatable coated article with niobium nitride ir reflecting layer and method of making same - Google Patents
Heat treatable coated article with niobium nitride ir reflecting layer and method of making same Download PDFInfo
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- WO2004063111A1 WO2004063111A1 PCT/US2003/041831 US0341831W WO2004063111A1 WO 2004063111 A1 WO2004063111 A1 WO 2004063111A1 US 0341831 W US0341831 W US 0341831W WO 2004063111 A1 WO2004063111 A1 WO 2004063111A1
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
Definitions
- This invention relates to coated articles that include at least one niobium nitride infrared (IR) reflecting layer sandwiched between at least a pair of dielectric layers, and/or a method of making the same.
- IR infrared
- Such coated articles may be used in the context of monolithic windows, insulating glass (IG) window units, laminated windows, and/or other suitable applications.
- Solar control coatings having a layer stack of glass/Si 3 N 4 /NiCr/Si 3 N 4 are known in the art, where the metallic NiCr layer is the sole infrared (IR) reflecting layer in the coating.
- the NiCr IR reflecting layer may be nitrided.
- ⁇ E* value(s) thermal stability upon heat treatment for tempering, heat bending, or the like.
- a known heat treatable coated article having a layer stack of lass/Si 3 N 4 /NiCr/Si 3 N 4 has an undesirably high glass side reflective ⁇ E* value of above 5.0 after heat treatment (HT) at 625 degrees C for ten minutes.
- This high slass side reflective ⁇ E* value means that the coated article when HT will not approximately match its non-HT counterpart with respect to glass side reflective color.
- a coating or layer system which includes an infrared (IR) reflecting layer comprising niobium nitride sandwiched between at least a pair of dielectric layers.
- the coating or layer system has good corrosion resistance to acid(s) such as HCI, good mechanical performance such as scratch resistance, and/or good color stability (i.e., a low ⁇ E* value(s)) upon heat treatment (HT).
- niobium nitride Due to its spectral selectivity, niobium nitride provides thermal performance (e.g., IR blocking) similar to NiCr, but is surprisingly more chemically and/or mechanically durable than NiCr.
- thermal performance e.g., IR blocking
- niobium nitride As an IR reflecting layer results in a solar control coating having excellent scratch resistance, and its resistance to acids such as HCI is exceptional. Its resistance to alkaline solutions is also good.
- niobium nitride as an IR reflecting layer enables a solar control coating to have significantly improved thermal stability upon HT (e.g., a lower ⁇ E* value with a given HT time) than the aforesaid conventional coating where metallic NiCr is used as the IR reflecting layer.
- a coated article according to an example embodiment of this invention utilizes such a niobium nitride layer sandwiched between a pair of silicon nitride dielectric layers.
- Coated articles according to certain embodiments of this invention may be used as monolithic windows due to their excellent durability characteristics, which may or may not be heat treated.
- coated articles according to this invention may also be used in the context of insulating glass (IG) window units, or in other suitable application, which may or may not involve heat treatment.
- IG insulating glass
- heat treated (HT) coated articles including a niobium nitride IR reflecting layer have a glass side reflective ⁇ E* value of no greater than 3.0, more preferably no greater than 2.5, even more preferably no greater than 2.0, and most preferably no greater than 1.8.
- the heat treatment (HT) may be for at least about 5 minutes at a temperature(s) of at least about 580 degrees C.
- the niobium nitride IR reflecting layer may be represented by Nb x N y , where the y/x ratio is from 0.3 to 0.9, even more preferably from 0.4 to 0.8, still more preferably from 0.5 to 0.7, and most preferably from 0.55 to 0.65.
- Nb 5 N 3 translates into a y/x ratio of 3/5 (i.e., 0.6). It has surprisingly been found that these particular y/x ratio range(s) for nitrides of niobium (Nb) are particularly beneficial with respect to coating characteristics such as spectral curves and/or chemical resistance. For instance, nitriding of Nb in amounts greater than this may result in less chemical resistance.
- a heat treated coated article including a layer system supported by a glass substrate, the layer system comprising: a first layer comprising silicon nitride; a layer comprising niobium nitride provided on the glass substrate over the first layer comprising silicon nitride; a second layer comprising silicon nitride provided on the glass substrate over the layer comprising niobium nitride; wherein the layer comprising niobium nitride is sandwiched between and contacts each of the first and second layers comprising silicon nitride; and wherein the coated article has a ⁇ E* value (glass side reflective) of no greater than 3.0 after and/or due to heat treatment.
- a heat treatable coated article including a coating supported by a glass substrate, the coating comprising: a first dielectric layer; a layer comprising niobium nitride; a second dielectric layer; and wherein layers of the coated article are of respective thicknesses and materials so that if subjected to heat treatment for at least about 5 minutes at temperature(s) of at least about 580 degrees C the coated article would have a ⁇ E* value (glass side reflective) of no greater than 3.0.
- a coated article including a layer system supported by a glass substrate, the layer system comprising: a first dielectric layer; a layer comprising niobium nitride Nb x N y provided on the glass substrate over the first dielectric layer, where a ratio y/x of N to Nb in the layer comprising niobium nitride is from 0.3 to 0.9; and a second dielectric layer provided on the glass substrate over the layer comprising niobium nitride.
- one or more of the above-listed needs is/are fulfilled by providing a method of making a coated article, the method comprising: sputtering a first dielectric layer on a substrate; sputtering a layer comprising niobium nitride on the substrate over the first dielectric layer; sputtering a second dielectric layer on the substrate over the layer comprising niobium nitride; and wherein the layer comprising niobium nitride is sputtered so as to form Nb x N y where y/x is from 0.3 to 0.9.
- FIG. 1 is a partial cross sectional view of an embodiment of a monolithic coated article (heat treated or not heat treated) according to an example embodiment of this invention.
- FIG. 2 is a partial cross-sectional view of an IG window unit as contemplated by this invention, in which the coating or layer system of Fig. 1 may be used.
- Fig. 3 is a graph plotting nitrogen gas flow (during sputtering of a niobium nitride layer) vs. Nb, N atomic content in the resulting layer, illustrating stoichiometry of niobium nitride layers according to different embodiments of this invention as a function of nitrogen gas flow during sputtering (N and Nb atomic percentages were determined using XPS).
- Fig. 4 is a graph plotting nitrogen gas flow as a percentage of total gas flow during sputtering of a niobium nitride layer vs. the resulting ratio y/x (given Nb x N y ) in the resulting niobium nitride layer according to different embodiments of this invention, thereby illustrating different stoichiometries of the layer as a function of the amount of nitrogen in the total sputtering gas flow (N and Nb atomic percentages were determined using XPS).
- Fig. 5 is a graph plotting nitrogen gas flow (in units of seem) during sputtering of a niobium nitride layer vs. the resulting ratio y/x (given Nb x N y ) in the resulting niobium nitride layer according to different embodiments of this invention, thereby illustrating different stoichiometries of the layer as a function of nitrogen gas flow during sputtering (N and Nb atomic percentages were determined using XPS).
- Certain embodiments of this invention provide a coating or layer system that may be used in windows such as monolithic windows (e.g., vehicle, residential, or architectural windows), IG window units, and/or other suitable applications.
- Certain example embodiments of this invention provide a layer system that is characterized by good (a) corrosion resistance to acid (e.g., which can be tested via an HCI boil); (b) mechanical performance such as scratch resistance; and/or (c) thermal stability upon heat treatment.
- thermal stability upon heat treatment this means a low value of ⁇ E*; where ⁇ is indicative of change in view of HT such as thermal tempering, heat bending, or thermal heat strengthening, monolithically and/or in the context of dual pane environments such as IG units or laminates.
- Such heat treatments sometimes necessitate heating the coated substrate to temperatures from about 580° C up to about 800° C for 5 minutes or more.
- Figure 1 is a side cross sectional view of a coated article according to an example embodiment of this invention.
- the coated article includes at least substrate 1 (e.g., clear, green, bronze, grey, blue, or blue-green glass substrate from about 1.0 to 12.0 mm thick), first dielectric layer 2 (e.g., of or including silicon nitride (e.g., Si 3 N 4 ), tin oxide, or some other suitable dielectric), infrared (IR) reflecting layer 3 of or including niobium nitride (Nb x N y ), and second dielectric layer 4 (e.g., of or including silicon nitride (e.g., Si 3 N 4 ), tin oxide, or some other suitable dielectric.
- substrate 1 e.g., clear, green, bronze, grey, blue, or blue-green glass substrate from about 1.0 to 12.0 mm thick
- first dielectric layer 2 e.g., of or including silicon nitride (e.g., Si
- coating 5 does not include any metallic IR reflecting layer such as Ag or Au.
- niobium nitride IR reflecting layer 3 may be the only IR reflecting layer in coating 5.
- niobium nitride IR reflecting layer 3 does not contact any metal IR reflecting layer.
- Overall coating 5 includes at least layers 2-4. It is noted that the terms
- oxide and nitride as used herein include various stoichiometries.
- silicon nitride includes stoichiometric S1 3 N 4 , as well as non-stoichiometric silicon nitride such as Si-rich silicon nitride.
- Layers 2-4 may be deposited on substrate 1 via magnetron sputtering, or via any other suitable technique in different embodiments of this invention.
- IR reflecting layer 3 is sputter-deposited as niobium nitride.
- the stoichiometry of this layer as deposited may be represented, in certain example embodiments, by Nb x N y , where the ratio y/x (i.e., the ratio of N to Nb) is from 0.3 to 0.9, even more preferably from 0.4 to 0.8, still more preferably from 0.5 to 0.7, and most preferably from 0.55 to 0.65.
- niobium nitride in the form of Nb 5 N 3 translates into a y/x ratio of 3/5 (i.e., 0.6).
- the aforesaid y/x ratio ranges for nitrides of niobium are particularly beneficial with respect to coating characteristics such as spectral curves and/or chemical resistance.
- nitriding of Nb in amounts greater than this may result in less chemical resistance of coating 5.
- chemical durability degrades.
- solar performance suffers in that not as much IR is blocked (reflected and/or absorbed) by the coating.
- Fig. 1 illustrates coating 5 in a manner where Nb x N y layer 3 is in direct contact with dielectric layers 2 and 4, and wherein Nb x N y layer 3 is the only IR reflecting layer in the coating
- the instant invention is not so limited.
- Other layer(s) may be provided between layers 2 and 3 (and/or between layers 3 and 4) in certain other embodiments of this invention.
- other layer(s) may be provided between substrate 1 and layer 2 in certain embodiments of this invention; and/or other layer(s) may be provided on substrate 1 over layer 4 in certain embodiments of this invention.
- the coating 5 or layers thereof is/are "on" or “supported by" substrate 1 (directly or indirectly), other layer(s) may be provided therebetween.
- the layer system 5 and layers thereof shown in Fig. 1 are considered “on” the substrate 1 even when other layer(s) may be provided therebetween (i.e., the terms “on” and “supported by” as used herein are not limited to directly contacting).
- Nb x N y in layer 3 results in a coated article having: (a) improved corrosion resistance with respect to acid such as HCI; (b) improved mechanical performance such as better scratch resistance; and/or (c) improved thermal stability (i.e., lower ⁇ E* value(s)) in the context of a heat treatable coating.
- dielectric anti- reflection layers 2 and/or 4 each may have an index of refraction "n" of from about 1.5 to 2.5, more preferably from 1.9 to 2.3.
- layer 3 may have an index "n" of from about 2.0 to 2.4, more preferably from about 2.17 to 2.3 in certain example embodiments of this invention.
- the anti-reflection function of the dielectric (s) is associated with the complex refractive index (n + ik).
- the difference in complex index (k in the case of silicon nitride is about 0.01 or lower, while k for niobium nitride layer is about 2.5 to 3.1 at 550 nm) enables antireflection to be achieved in certain example embodiments of this invention.
- layers 2 and/or 4 comprise silicon nitride (e.g., Si 3 N 4 )
- sputtering targets including Si employed to form these layers may or may not be admixed with up to 6- 20% by weight aluminum or stainless steel (e.g. SS#316), with about this amount then appearing in the layers so formed.
- FIG. 1 illustrates a coated article according to an embodiment of this invention in monolithic form
- Fig. 2 illustrates the coating or layer system 5 of Fig. 1 being utilized on surface #2 of an IG (insulating glass) window unit.
- the two glass substrates e.g., float glass 2 mm to 12 mm thick
- a conventional sealant and/or spacer not shown
- a conventional desiccant strip not shown
- insulating space 9 may be at a pressure less than atmospheric pressure in certain alternative embodiments, although this of course is not necessary in all IG embodiments.
- coating 5 from Fig. 1 may be provided on the inner wall of substrate 1 in certain embodiments of this invention (as in Fig. 2), and/or on the inner wall of substrate 7 in other embodiments of this invention.
- example thicknesses and materials for the respective layers on the glass substrate 1 are as follows:
- silicon nitride (layer 2) 10-1,000 A 20-900 A 30-850 A
- Nb x N y (layer 3): 50-700 A 100-500 A 150-350 A
- silicon nitride layer 4: 100-900 A 150-800 ' A 200-500 A
- the color stability with lengthy HT may result in substantial matchability between heat-treated and non-heat treated versions of the coating or layer system.
- two glass substrates having the same coating system thereon appear to the naked human eye to look substantially the same.
- the coated article has good color stability upon HT.
- the value(s) ⁇ E* is important in determining whether or not there is matchability, or substantial color matchability upon HT, in the context of certain embodiments of this invention (i.e., the term ⁇ E* is important in determining color stability upon HT). Color herein is described by reference to the conventional a*, b* values. For example, the term ⁇ a* is indicative of how much color value a* changes due to HT.
- ⁇ E* (and ⁇ E) is well understood in the art and is reported, along with various techniques for determining it, in ASTM 2244-93 as well as being reported in Hunter et. al., The Measurement of Appearance, 2 nd Ed. Cptr. 9, page 162 et seq. (John Wiley & Sons, 1987).
- ⁇ E* (and ⁇ E) is a way of adequately expressing the change (or lack thereof) in reflectance and/or transmittance (and thus color appearance, as well) in an article after or due to HT.
- ⁇ E may be calculated by the "ab” technique, or by the Hunter technique (designated by employing a subscript "H").
- ⁇ E corresponds to the Hunter Lab L, a, b scale (or L h , a h , b h ).
- ⁇ E* corresponds to the CIE LAB Scale L*, a*, b*. Both are deemed useful, and equivalent for the purposes of this invention.
- CIE LAB 1976 the rectangular coordinate/scale technique known as the L*, a*, b* scale may be used, wherein:
- a* is (CIE 1976) red-green units
- ⁇ E may be calculated using equation (1) by replacing a*, b*, L* with Hunter Lab values a h , b h , L h . Also within the scope of this invention and the quantification of ⁇ E* are the equivalent numbers if converted to those calculated by any other technique employing the same concept of ⁇ E* as defined above.
- coated articles After heat treatment (HT) such as thermal tempering, in certain example embodiments of this invention coated articles have color characteristics as follows in Table 2. It is noted that subscript “G” stands for glass side reflective color, subscript “T” stands for transmissive color, and subscript “F” stands for film side color. As is known in the art, glass side (G) means reflective color when viewed from the glass side (as opposed to the layer/film side) of the coated article. Film side (F) (not shown in Table 2) means reflective color when viewed from the side of the coated article on which the coating 5 is provided.
- HT heat treatment
- subscript "G” stands for glass side reflective color
- subscript "T” stands for transmissive color
- subscript “F” stands for film side color.
- glass side (G) means reflective color when viewed from the glass side (as opposed to the layer/film side) of the coated article.
- Film side (F) (not shown in Table 2) means reflective color when viewed from the side of the coated article on which the coating 5 is provided.
- Coated articles herein may even have a glass side reflective ⁇ E* value
- Figs. 3-5 illustrate various stoichiometries of niobium nitride layer 3 according to different embodiments of this invention.
- these figures illustrate various ratios of N to Nb in the niobium nitride layer 3 as a function of nitrogen gas flow during the sputtering process in which the layer 3 is sputter- deposited.
- the N and Nb atomic percentages were determined using XPS.
- the correlation between nitrogen gas flows and the N to Nb ratio(s) was determined in accordance with the ILS coater used to deposit these samples since the flows were measured in this sputter coater.
- Fig. 3-5 illustrate various stoichiometries of niobium nitride layer 3 according to different embodiments of this invention.
- these figures illustrate various ratios of N to Nb in the niobium nitride layer 3 as a function of nitrogen gas flow during the sputtering process in which the layer 3 is sputter- deposited
- FIG. 3 is a graph plotting nitrogen gas flow (during sputtering of a niobium nitride layer) vs. Nb, N atomic content in the resulting layer, illustrating stoichiometry of niobium nitride layers according to different embodiments of this invention as a function of nitrogen gas flow during sputtering.
- Fig. 4 is a graph plotting nitrogen gas flow as a percentage of total gas flow during sputtering of a niobium nitride layer vs.
- Fig. 5 is a graph plotting nitrogen gas flow (in units of seem) during sputtering of a niobium nitride layer vs.
- the resulting ratio y/x (given Nb x N y ) in the resulting niobium nitride layer according to different embodiments of this invention, thereby illustrating different stoichiometries of the layer as a function of nitrogen gas flow during sputtering.
- the best performance occurs when the Nb x N y layer 3 is characterized by a N to Nb ratio y/x of from 0.3 to 0.9, even more preferably from 0.4 to 0.8, still more preferably from 0.5 to 0.7, and most preferably from 0.55 to 0.65.
- Example coated articles each ultimately annealed and heat treated were made.
- the Si 3 N 4 layers 2 and 4 in each example were deposited by sputtering a silicon target (doped with Al) in an atmosphere including nitrogen gas.
- the niobium nitride layer 3 in each example was deposited by sputtering in an atmosphere including argon and nitrogen gas.
- Example 1 the following sputtering process parameters were used in depositing the coating.
- Line speed is in inches per minute (IPM):
- SiN layer 2 2.5 kW 486 V 49.5 8 40 55
- Nb x N y layer 3 1.0 kW 426 V 33 3 30 12
- SiN layer 4 2.5 kW 482 V 49.5 3 40 55
- Example 2 the following sputtering process parameters were used in depositing the coating. Again, line speed is in inches per minute (IPM):
- SiN layer 2 1.0 kW 453 V 41.2 1 40 55
- Nb x N y layer 3 1.0 kW 432 V 36.3 3 30 12
- SiN layer 4 1.0 kW 448 V 41.2 6 40 55
- Examples 1-2 had the following characteristics after being sputtered (annealed and non-HT) (111. C, 2 degree observer):
- Example 2 Glass/Si 3 N 4 (50 A)/Nb x N y (231 A)/Si 3 N 4 (300 A)
- each of Examples 1 and 2 was then heat treated for 10 minutes at about 625 degrees C.
- Table 7 below sets forth certain thermal stability characteristics of Examples 1-2 upon/after heat treatment (HT).
- IR reflecting layer include (a) improved corrosion resistance with respect to acid such as HCI; (b) improved mechanical performance such as better scratch resistance; and/or (c) improved thermal stability (i.e., lower ⁇ E* value(s)).
- coated articles may or may not be heat treated.
- Intensity of reflected visible wavelength light i.e. "reflectance” is defined by its percentage and is reported as R X Y (i.e. the Y value cited below in ASTM E-308- 85), wherein "X” is either "G” for glass side or “F” for film side.
- Glass side e.g. “G”
- film side i.e. “F”
- visible transmittance As reported herein, is characterized by the standard CIE Illuminant C, 2 degree observer, technique at 380 - 720 nm; near-infrared is 720 - 2500 nm; ultraviolet is 300 - 800 nm; and total solar is 300 - 2500 nm.
- a particular infrared range i.e. 2,500 - 40,000 nm.
- Visible transmittance can be measured using known, conventional techniques. For example, by using a spectrophotometer, such as a Perkin Elmer Lambda 900 or Hitachi U4001, a spectral curve of transmission is obtained.
- Visible transmission is then calculated using the aforesaid ASTM 308/2244-93 methodology. A lesser number of wavelength points may be employed than prescribed, if desired.
- Another technique for measuring visible transmittance is to employ a spectrometer such as a commercially available Spectrogard spectrophotometer manufactured by Pacific Scientific Corporation. This device measures and reports visible transmittance directly. As reported and measured herein, visible transmittance (i.e. the Y value in the CIE tristimulus system, ASTM E-308-85) uses the 111. C.,2 degree observer.
- Sheet resistance is a well known term in the art and is used herein in accordance with its well known meaning. It is here reported in ohms per square units. Generally speaking, this term refers to the resistance in ohms for any square of a layer system on a glass substrate to an electric current passed through the layer system. Sheet resistance is an indication of how well the layer or layer system is reflecting infrared energy, and is thus often used along with emittance as a measure of this characteristic. "Sheet resistance” may for example be conveniently measured by using a 4-point probe ohmmeter, such as a dispensable 4-point resistivity probe with a Magnetron Instruments Corp. head, Model M-800 produced by Signatone Corp. of Santa Clara, California.
- Chemical durability or “chemically durable” is used herein synonymously with the term of art “chemically resistant” or “chemical stability”.
- chemical durability may be determined by boiling a sample of a coated glass substrate in about 500 cc of 5% HCI for one hour (i.e. at about 195°F).
- chemical durability may be determined by an NaOH boil which includes boiling a sample of a coated glass substrate in a solution having a pH of about 12.2 that is a mixture of water and NaOH (about 0.4% NaOH); the solution is available from LabChem, Inc., Cat. No. LC 24270-4 (this is what is meant by NaOH boil herein).
- the NaOH boil may be carried out at a temperature of about 145 degrees F (Examples above), or about 195 degrees F in other instances.
- the terms "heat treatment” and “heat treating” as used herein mean heating the article to a temperature sufficient to enabling thermal tempering, bending, and/or heat strengthening of the glass inclusive article. This definition includes, for example, heating a coated article to a temperature of at least about 580 degrees C for a sufficient period to enable tempering. In some instances, the HT may be for at least about 4 or 5 minutes.
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Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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CA002512597A CA2512597C (en) | 2003-01-09 | 2003-12-31 | Heat treatable coated article with niobium nitride ir reflecting layer and method of making same |
DE60332494T DE60332494D1 (en) | 2003-01-09 | 2003-12-31 | HEAT-TREATABLE COATED ARTICLES COMPRISING AN INFRARED REFLECTIVE NITROBIALIDE LAYER AND METHOD OF MANUFACTURING THEREOF |
AU2003300209A AU2003300209A1 (en) | 2003-01-09 | 2003-12-31 | Heat treatable coated article with niobium nitride ir reflecting layer and method of making same |
EP03800460A EP1587766B1 (en) | 2003-01-09 | 2003-12-31 | Heat treatable coated article with niobium nitride ir reflecting layer and method of making same |
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US10/338,878 | 2003-01-09 | ||
US10/338,878 US6994910B2 (en) | 2003-01-09 | 2003-01-09 | Heat treatable coated article with niobium nitride IR reflecting layer |
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EP (1) | EP1587766B1 (en) |
AU (1) | AU2003300209A1 (en) |
CA (1) | CA2512597C (en) |
DE (1) | DE60332494D1 (en) |
ES (1) | ES2345655T3 (en) |
PL (1) | PL206598B1 (en) |
WO (1) | WO2004063111A1 (en) |
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US9296650B1 (en) | 2014-10-13 | 2016-03-29 | Intermolecular, Inc. | Low-E panels and methods for forming the same |
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KR101807208B1 (en) * | 2015-08-18 | 2017-12-08 | 주식회사 엘지화학 | Low refractive layer and anti-reflective film comprising the same |
US11739418B2 (en) | 2019-03-22 | 2023-08-29 | Applied Materials, Inc. | Method and apparatus for deposition of metal nitrides |
US10214956B2 (en) | 2017-01-05 | 2019-02-26 | Guardian Glass, LLC | Heat treatable coated article having titanium nitride and nickel chrome based IR reflecting layers |
US10294147B2 (en) | 2017-01-05 | 2019-05-21 | Guardian Glass, LLC | Heat treatable coated article having titanium nitride based IR reflecting layer(s) |
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EP3681849A4 (en) | 2017-09-15 | 2021-06-09 | Saint-Gobain Glass France | Coated solar control glass articles |
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MX2022009556A (en) * | 2020-02-04 | 2022-09-09 | Saint Gobain | Coated article comprising protective overcoat layers made from titanium zirconium hafnium nitride and carbon. |
US20220204399A1 (en) * | 2020-12-28 | 2022-06-30 | Vitro Flat Glass Llc | Article Coated with a Solar Control Coating Having Solar Protection and Thermal Insulation |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020192473A1 (en) * | 1999-09-23 | 2002-12-19 | Carole Gentilhomme | Glazing provided with a stack of thin layers acting on solar radiation |
Family Cites Families (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US330326A (en) * | 1885-11-10 | Railroad-spike | ||
US2901099A (en) * | 1956-07-02 | 1959-08-25 | American Sealants Company | Packaged metal fasteners and bonding agent |
NL120413C (en) * | 1960-03-04 | |||
US3029939A (en) * | 1960-05-20 | 1962-04-17 | Albert J Feldman | Tag dispenser for packages |
US3189227A (en) * | 1962-12-07 | 1965-06-15 | American Home Prod | Fluid dispenser |
US3254828A (en) * | 1963-12-18 | 1966-06-07 | Automated Packaging Corp | Flexible container strips |
US3380578A (en) * | 1964-03-04 | 1968-04-30 | George C. Sparks | Strip package assembly |
LU52726A1 (en) | 1966-12-30 | 1968-08-05 | ||
US3522177A (en) * | 1967-12-26 | 1970-07-28 | Standard Pressed Steel Co | Aqueous lubricant composition |
US3540579A (en) * | 1968-03-27 | 1970-11-17 | Hellstrom Harold R | Individualized dispensing packages |
BE787599A (en) * | 1971-08-16 | 1973-02-16 | Battelle Memorial Institute | ANTISOLAR FILTERING AND THERMAL INSULATION GLASS |
US3963124A (en) * | 1972-08-17 | 1976-06-15 | Monarch Marking Systems, Inc. | Web of record assemblies |
US3931885A (en) * | 1973-04-30 | 1976-01-13 | Nahill Edmond P | Medicine dispensing system |
US4026413A (en) * | 1973-11-02 | 1977-05-31 | John Philip Britt | Plastics strips |
US4425065A (en) * | 1978-08-24 | 1984-01-10 | Theodore Sweeney & Company | Adhesively securable fastener |
US4238541A (en) * | 1979-08-30 | 1980-12-09 | Burton William E | Identifying marker for tear perforation lines of rolled paper webs |
US4726890A (en) * | 1985-08-12 | 1988-02-23 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Method of producing high Tc superconducting NbN films |
US4681222A (en) * | 1985-12-24 | 1987-07-21 | Longhenry Raymond L | Oriented array of self-locking fasteners |
JPH0684256B2 (en) | 1987-02-24 | 1994-10-26 | 旭硝子株式会社 | Veneer heat ray reflective glass |
JP2535350B2 (en) | 1987-06-26 | 1996-09-18 | 旭硝子株式会社 | High transmission solar control glass |
US5407733A (en) | 1990-08-10 | 1995-04-18 | Viratec Thin Films, Inc. | Electrically-conductive, light-attenuating antireflection coating |
US6274244B1 (en) | 1991-11-29 | 2001-08-14 | Ppg Industries Ohio, Inc. | Multilayer heat processable vacuum coatings with metallic properties |
SG45418A1 (en) | 1991-10-30 | 1998-01-16 | Asahi Glass Co Ltd | Method of making a heat treated coated glass |
US5229194A (en) | 1991-12-09 | 1993-07-20 | Guardian Industries Corp. | Heat treatable sputter-coated glass systems |
US5344718A (en) * | 1992-04-30 | 1994-09-06 | Guardian Industries Corp. | High performance, durable, low-E glass |
US5395698A (en) | 1993-06-04 | 1995-03-07 | Ppg Industries, Inc. | Neutral, low emissivity coated glass articles and method for making |
US5688585A (en) | 1993-08-05 | 1997-11-18 | Guardian Industries Corp. | Matchable, heat treatable, durable, IR-reflecting sputter-coated glasses and method of making same |
US5376455A (en) | 1993-10-05 | 1994-12-27 | Guardian Industries Corp. | Heat-treatment convertible coated glass and method of converting same |
US5405022A (en) * | 1993-10-05 | 1995-04-11 | Do-It Corporation | Display strip and product support combination |
AU680786B2 (en) | 1995-06-07 | 1997-08-07 | Guardian Industries Corporation | Heat treatable, durable, IR-reflecting sputter-coated glasses and method of making same |
MX9605168A (en) | 1995-11-02 | 1997-08-30 | Guardian Industries | Neutral, high performance, durable low-e glass coating system, insulating glass units made therefrom, and methods of making same. |
FR2752235B3 (en) | 1996-08-07 | 1998-08-28 | Saint Gobain Vitrage | GLASS SUBSTRATE HAVING A REFLECTIVE LAYER |
US6231999B1 (en) | 1996-06-21 | 2001-05-15 | Cardinal Ig Company | Heat temperable transparent coated glass article |
FR2752570B1 (en) | 1996-08-22 | 1998-10-02 | Saint Gobain Vitrage | GLAZING WITH VARIABLE OPTICAL AND / OR ENERGY PROPERTIES |
FR2755962B1 (en) | 1996-11-21 | 1998-12-24 | Saint Gobain Vitrage | GLAZING COMPRISING A SUBSTRATE PROVIDED WITH A STACK OF THIN FILMS FOR SUN PROTECTION AND / OR THERMAL INSULATION |
FR2759362B1 (en) | 1997-02-10 | 1999-03-12 | Saint Gobain Vitrage | TRANSPARENT SUBSTRATE EQUIPPED WITH AT LEAST ONE THIN LAYER BASED ON SILICON NITRIDE OR OXYNITRIDE AND ITS PROCESS FOR OBTAINING IT |
US6495263B2 (en) | 1999-12-06 | 2002-12-17 | Guardian Industries Corp. | Low-E matchable coated articles and methods of making same |
US6475626B1 (en) | 1999-12-06 | 2002-11-05 | Guardian Industries Corp. | Low-E matchable coated articles and methods of making same |
FR2809388B1 (en) * | 2000-05-23 | 2002-12-20 | Saint Gobain Vitrage | GLAZING COMPRISING AT LEAST ONE LAYER WITH THERMOCHROMIC PROPERTIES |
US6576349B2 (en) | 2000-07-10 | 2003-06-10 | Guardian Industries Corp. | Heat treatable low-E coated articles and methods of making same |
US6524714B1 (en) | 2001-05-03 | 2003-02-25 | Guardian Industries Corp. | Heat treatable coated articles with metal nitride layer and methods of making same |
US6770321B2 (en) * | 2002-01-25 | 2004-08-03 | Afg Industries, Inc. | Method of making transparent articles utilizing protective layers for optical coatings |
JP4298654B2 (en) | 2002-07-31 | 2009-07-22 | 日本板硝子株式会社 | Quenchable high light-shielding coating |
US6994910B2 (en) * | 2003-01-09 | 2006-02-07 | Guardian Industries Corp. | Heat treatable coated article with niobium nitride IR reflecting layer |
US6967060B2 (en) * | 2003-05-09 | 2005-11-22 | Guardian Industries Corp. | Coated article with niobium zirconium inclusive layer(s) and method of making same |
US6974630B1 (en) * | 2003-05-20 | 2005-12-13 | Guardian Industries Corp. | Coated article with niobium chromium inclusive barrier layer(s) and method of making same |
-
2003
- 2003-01-09 US US10/338,878 patent/US6994910B2/en not_active Expired - Lifetime
- 2003-12-31 EP EP03800460A patent/EP1587766B1/en not_active Expired - Lifetime
- 2003-12-31 WO PCT/US2003/041831 patent/WO2004063111A1/en not_active Application Discontinuation
- 2003-12-31 PL PL376559A patent/PL206598B1/en unknown
- 2003-12-31 ES ES03800460T patent/ES2345655T3/en not_active Expired - Lifetime
- 2003-12-31 AU AU2003300209A patent/AU2003300209A1/en not_active Abandoned
- 2003-12-31 CA CA002512597A patent/CA2512597C/en not_active Expired - Lifetime
- 2003-12-31 DE DE60332494T patent/DE60332494D1/en not_active Expired - Lifetime
-
2005
- 2005-02-04 US US11/049,959 patent/US20050205416A1/en not_active Abandoned
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020192473A1 (en) * | 1999-09-23 | 2002-12-19 | Carole Gentilhomme | Glazing provided with a stack of thin layers acting on solar radiation |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2869606A1 (en) * | 2004-04-28 | 2005-11-04 | Saint Gobain | GLAZING PROVIDED WITH A STACK OF THIN LAYERS ACTING ON SOLAR RADIATION |
WO2005105687A2 (en) * | 2004-04-28 | 2005-11-10 | Saint-Gobain Glass France | Glazing comprising a stack of thin layers which act on solar radiation |
WO2005105687A3 (en) * | 2004-04-28 | 2006-01-26 | Saint Gobain | Glazing comprising a stack of thin layers which act on solar radiation |
JP2011520755A (en) * | 2008-05-19 | 2011-07-21 | サン−ゴバン グラス フランス | Glazing provided with a laminate consisting of multiple thin layers |
WO2010073042A1 (en) | 2008-12-24 | 2010-07-01 | Pilkington Group Limited | Heat treatable coated glass pane |
US9598311B2 (en) | 2011-02-17 | 2017-03-21 | Pilkington Group Limited | Heat treatable coated glass pane |
WO2012110823A1 (en) | 2011-02-17 | 2012-08-23 | Pilkington Group Limited | Heat treatable coated glass pane |
EP3725751A1 (en) | 2013-04-11 | 2020-10-21 | Pilkington Group Limited | Heat treatable coated glass pane |
WO2020115507A1 (en) | 2018-12-07 | 2020-06-11 | Pilkington Group Limited | Coated glass pane |
WO2021019259A1 (en) | 2019-08-01 | 2021-02-04 | Pilkington Group Limited | Coated substrate |
WO2021019258A1 (en) | 2019-08-01 | 2021-02-04 | Pilkington Group Limited | Toughenable coated substrate |
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WO2021094765A1 (en) | 2019-11-13 | 2021-05-20 | Pilkington Group Limited | Coated glass substrate |
WO2023007153A1 (en) | 2021-07-28 | 2023-02-02 | Pilkington Group Limited | Coated glass pane |
Also Published As
Publication number | Publication date |
---|---|
EP1587766A1 (en) | 2005-10-26 |
AU2003300209A1 (en) | 2004-08-10 |
US6994910B2 (en) | 2006-02-07 |
PL206598B1 (en) | 2010-08-31 |
US20050205416A1 (en) | 2005-09-22 |
DE60332494D1 (en) | 2010-06-17 |
CA2512597C (en) | 2008-09-16 |
US20040137234A1 (en) | 2004-07-15 |
CA2512597A1 (en) | 2004-07-29 |
EP1587766B1 (en) | 2010-05-05 |
PL376559A1 (en) | 2006-01-09 |
ES2345655T3 (en) | 2010-09-29 |
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