WO2004053782A1 - Tactile sensor element and sensor array - Google Patents
Tactile sensor element and sensor array Download PDFInfo
- Publication number
- WO2004053782A1 WO2004053782A1 PCT/DK2003/000848 DK0300848W WO2004053782A1 WO 2004053782 A1 WO2004053782 A1 WO 2004053782A1 DK 0300848 W DK0300848 W DK 0300848W WO 2004053782 A1 WO2004053782 A1 WO 2004053782A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pressure transfer
- sensor element
- transfer layer
- tactile sensor
- elastomeric body
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/033—Pointing devices displaced or positioned by the user, e.g. mice, trackballs, pens or joysticks; Accessories therefor
- G06F3/0354—Pointing devices displaced or positioned by the user, e.g. mice, trackballs, pens or joysticks; Accessories therefor with detection of 2D relative movements between the device, or an operating part thereof, and a plane or surface, e.g. 2D mice, trackballs, pens or pucks
- G06F3/03547—Touch pads, in which fingers can move on a surface
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0447—Position sensing using the local deformation of sensor cells
Definitions
- the invention relates to a tactile sensor element for converting the pressure acting on a surface of a sensor into an electrical signal.
- the invention further relates to sensor arrays comprising a plurality of sensor elements, allowing the determination of pressure variations over the surface of the sensor array.
- Tactile sensor and tactile sensor arrays may be used in various applications to provide informations on the magnitude and the local distribution of pressure applied on a given surface area.
- touch pads or drawing pads for character recognition in computer equipment or contact pads for the determination and control of grip forces of a robotic gripping tool.
- Such sensors widely known are using pressure sensitive devices based on piezo-resistive, piezo-electric or capacitive effects, and may be manufactured by thickfilm or thinfilm technologies, or using discrete elements. Miniaturization of such sensors is typically obtained by taking advantage of silicon micromachining processes. Common to these known sensors are relatively high costs for manufacturing and packaging.
- a tactile sensor element comprises a first pressure transfer layer and a second pressure transfer layer, an elastomeric body arranged between the first and second pressure transfer layers, the body having a first and a second surface opposed to each other, the first and second surfaces having corrugations to allow displacement of elastomeric body material in a predetermined direction perpendicular to the corrugations when exposed to a contact pressure on at least one of the surfaces.
- the sensor element further comprises a first electrode arranged on the first surface and a second electrode arranged on the second surface, the first and the second electrodes being connectable to external means for determining the capacitance of a capacitor formed by the elastomeric body and the electrodes.
- the corrugation of the surfaces of the elastomeric body with electrodes arranged on these surfaces ensure compliance of the electrodes in case of stretching the elastic body in a direction perpendicular to the corrugation.
- the electrodes can follow the geometric deformation without changing their electrical properties, and without detaching from the body surfaces or even breaking. Applying pressure to the pressure transfer layers leads to a decrease in thickness of the elastic body and to a decreased distance between the electrodes. The capacitance of a capacitor formed by the electrodes will thus be increased. Measurement of the capacitance by external equipment will provide information on the pressure acting on the surface of the tactile sensor element.
- At least one portion of at least one pressure transfer layer has an increased thickness in relation to the other portions of the layer.
- the pressure acting on the tactile sensor element will be transferred to the elastomeric body by squeezing the body only in a region corresponding to the portion of increased thickness.
- the displaced material of the body is accommodated in the space formed between the thinner portions of the pressure transfer layer and the elastomeric body.
- At least one pressure transfer layer has a central portion of increased thickness and, on each side of the central portion in the predetermined direction of extension of the body, an end portion of decreased thickness.
- the tactile sensor element is divided into three sections, where the elastomeric body in a central section adjacent to the central portion of the pressure transfer layer will be squeezed and reduced in thickness.
- Body material from the central section will be pressed in a direction perpendicular to the corrugations towards the body sections adjacent to the end portions of the pressure transfer layer.
- the thinner transfer layer in these locations allows an increase in thickness of the body due to the body material displaced from the central section.
- the overall longitudinal dimensions of the sensor element in the direction of extension will be substantially unchanged.
- the electrode on at least one of the surfaces comprises a first electrode portion adjacent to the central portion of the pressure transfer layer and second electrode portions adjacent to the end portions of the pressure transfer layer, the first and second electrode portions being isolated from each other. If pressure is applied to the sensor element, the first electrode portions covering the central section of the body form a first capacitor with increasing capacitance, while the second electrode portions form a second capacitor with decreasing capacitance. It is now possible to measure a differential capacitive signal as a function of pressure. This is advantageous to increase the sensor sensitivity and to eliminate measurement errors due to changing environmental conditions.
- the surface area of the first electrode portion is substantially equal to the total surface area of the second electrode portions.
- the initial capacitance for both capacitors is substantially equal, which simplifies the determination of differential capacitance with the external electronic means.
- lateral means are provided on two opposed sides of the sensor element to prevent overall dimensional change of the sensor element in the predetermined direction.
- the force applied to the pressure transfer layer is utilized for displacement of the body material, which increases the sensitivity of the sensor element.
- the thickness of the pressure transfer layer is substantially equal to the thickness of the elastomeric body.
- the body will be subjected to the major part of the pressure forces acting on the surfaces of pressure transfer layers.
- the elastomeric body and the pressure transfer layers have similar elastomeric properties.
- the elastic deformation of both the body and the pressure transfer layers, resulting from the pressure forces acting on the surfaces of the pressure transfer layers, can follow each other.
- a tactile sensor array comprising a plurality of sensor elements, wherein the sensor elements are arranged in a row and column configuration for the determination of local pressure variations over the surface area of the sensor array, and wherein the plurality of sensor elements being integrally formed in a common elastomeric body member.
- a sensor array of this kind shows significant manufacturing cost advantages, as a large amount of sensor element bodies can be manufactured in a single process. High resolution tactile sensor arrays can be provided, where each sensor element presents a pixel-like element of the array.
- each row of sensor elements comprises an elongated common elastomeric body member, the body member constituting a continuous sequence of sensor element bodies.
- a row of sensor elements is provided on the basis of a single elongated elastomeric member with corrugated surfaces. Several rows are arranged to constitute a two-dimensional sensor array.
- Fig. 1 shows a side view of a tactile sensor element with a pressure transfer layer of uniform thickness in unloaded state
- Fig. 2 shows a side view of the same sensor element in loaded state
- Fig. 3 shows a side view of a tactile sensor element with a pressure transfer layer having portions of increased and decreased thickness, in unloaded state
- Fig. 4 shows a side view of the sensor element in Fig.3 in loaded state
- Fig. 5 shows a top view of a tactile sensor array comprising a plurality of sensor elements of Fig. 3
- Fig. 6 shows a side view of the sensor array in Fig. 5
- Fig. 1 shows a tactile sensor element 1 with an elastomeric body 2, preferably made of silicon rubber sheet material.
- the body has upper and lower surfaces
- the ridges and grooves are shown with square profiles, however, other profiles such as sinusoidal or rectangular may be applicable.
- the depth b of the grooves is typically in the range of 10 to 30 % of the total thickness d of the body, which typically is 10 to 50 ⁇ m.
- the body has a thickness of 20 ⁇ m with corrugation depths of 5 ⁇ m.
- Metal electrodes 7 and 8 are arranged on both upper and lower surfaces 3 and
- the electrodes are connected with lead wires 11 to external means 12 for measuring the capacitance of a capacitor formed by the electrodes. Interconnection between the electrodes and the lead wires is established by suitable bonding, welding or soldering technique.
- the thickness of the electrode layer is typically in the range of 20 to 100 nm.
- the sensor element further comprises upper and lower pressure transfer layers 9 and 10 opposed to and covering the upper and lower surfaces of the body.
- the pressure transfer layers of this embodiment are made of elastomeric material having similar elastic properties as the body material. Typically, the thickness for the pressure transfer layers is in the same range as the thickness of the body.
- the lower pressure transfer layer 10 is in contact with a support body 13 to prevent relative movement between the support and the pressure transfer layer.
- Fig. 2 shows the sensor element of Fig. 1 exposed to a pressure p on top of the upper pressure transfer layer 9.
- the pressure transfer layers are now brought into contact with the surfaces 3 and 4 of the elastomeric body, transferring the pressure to the body, which will be subjected to elastic deformation.
- the electrodes 7 and 8 deposited thereon are compliant in a longitudinal direction perpendicular to the ridges and grooves. Compliance of the electrodes in the direction of ridges and grooves is negligible due to the high elastic modulus of the electrode material.
- squeezing of the body leads to a reduction in thickness and to an elongation of the body in the longitudinal direction.
- the coefficient of friction between the electrodes and the material of the pressure transfer layer are sufficiently high to avoid relative movements between the body with the electrodes and the surface of the pressure transfer layers. Due to the similar elastomeric properties and thickness dimensions of pressure transfer layers 9, 10 and body 2, the elongation of the elastic pressure transfer layers and the body are thereby following each other. External means 12 will now measure an increased capacitance, as the distance between the electrodes is reduced. A linear relationship is achieved between the applied pressure and the measured capacitance change.
- a tactile sensor element according to the invention is shown in Fig. 3 in unloaded state and in Fig. 4 in loaded state.
- Each of the pressure transfer layers 9 and 10 now comprise a central portion 20 of increased thickness and end portions 21 and 22 of decreased thickness.
- the thickness of the central portion 20 of the pressure transfer layers 9, 10 is substantially equal to the thickness of the body 2.
- the first electrode deposited on the upper surface 3 of the body is divided into a first electrode portion 25, arranged adjacent to the central portion 20 of the pressure transfer layer 9, and into second electrode portions 26 arranged adjacent to the end portions 21 and 22 of the pressure transfer layer 9.
- the second electrode deposited on the lower surface 4 of the body is divided into a first electrode section 27, arranged adjacent to central portion 20 of pressure transfer layer 10, and into second electrode portions 28 adjacent to the end portions 21 and 22 of pressure transfer layer 10.
- the electrode portions arranged on each surface of the body are isolated from each other, which results in three independent capacitors: a first capacitor formed by first electrode portions 25 and 27 and two capacitors, each of which is formed by a second electrode portion 26 and a second electrode portion 28.
- Surface portions 23 of surface 3 and surface portions 24 of surface 4 are not covered by electrode material.
- the first electrode portions 25 and 27 are connected by lead wires 29 (se Fig.4) to the external means 12 for determining the capacitance of the first capacitor.
- the second electrode portions 26 are connected to the external means through common lead wire 30, and second electrode portions 28 through common lead wire 31.
- the capacitance of a common second capacitor formed by the second electrodes 26 and the second electrodes 28 can be measured.
- all the electrode portions arranged on one surface of the elastomeric body could be interconnected to define a common ground electrode.
- Second pressure transfer layer 10 is attached to a support body 50. Lateral means 51 for avoiding deformation of the sensor element in the longitudinal direction are arranged on both sides of the sensor element. Spaces 52 between the pressure transfer layers and the body are evacuated. Alternatively, pressure equalizing means (not shown) may be provided between the spaces and the outside environment of the sensor element.
- Fig. 4 shows the sensor element in loaded state, where a load is indicated as a pressure p acting on the upper surface of a relatively soft pressure transfer layer 9.
- the elastomeric body 2 is squeezed by the central portions 20 of the pressure transfer layers.
- Lateral means 51 prevent deformation of the sensor element in the longitudinal direction.
- Part of the material of the elastomeric body is being displaced in a direction perpendicular to the ridges and grooves formed in the surface of the body. Accordingly, the thickness of the elastomeric body decreases between the central portions 20, and the thickness of the body increases between the end portions 21 and 22 of the pressure transfer layers.
- the coefficient of friction between the electrodes and the surface of the pressure transfer layer is sufficiently high to avoid sliding movement of the ridges on the surface of the pressure transfer layer.
- the corrugation pitch represented by the longitudinal distance between adjacent ridges, has increased between the central portions of the pressure transfer layers, and has decreased between the end portions.
- the capacitance of the first capacitor formed by the first electrode portions 25 and 27 has increased, while the capacitance of the capacitor formed by the second electrode portions 26 and 28 has decreased.
- a difference in capacitance in dependence of the applied pressure acting on the sensor element can be measured by the external means 12.
- Fig. 5 shows a top view of a tactile sensor array 40 comprising plurality of sensor elements 1 according to Fig. 3 with the first pressure transfer layer 9 removed.
- the array 40 comprises frame portions 41 and several elongated elastomeric body members 42 in the shape of rubber strips, each body member constituting a continuous row of sensor element bodies 2, illustrated by dashed lines.
- a spacing 43 is provided between adjacent rubber strips or adjacent rows of sensor elements to ensure independent actuation of the sensor elements.
- Lateral means 51 of the sensor element in Fig.3 are also removed. Their lateral limiting function is now performed by the neighboring sensor elements within a row of sensors and by the frame 41.
- corrugation of the surface of the body members in the form of straight and parallel ridges and grooves extending along the width of the strips is only illustrated for a single sensor element body 2.
- Fig. 6 shows a side view of the sensor array in Fig.5, illustrating the realization 5 of a plurality of sensor elements 1 in an elongated elastomeric body member 42. This is possible by the fact that, upon actuation of a single sensor element, displacement of elastomeric material is substantially limited to the region of this sensor element.
- the dimensions for a single sensor element may vary from an upper range of several centimeters to a minimum of 100 ⁇ m.
- the length of the elastomeric body member 42 as shown in Fig.6, which is 5 constituted by six sensor elements, will be 1.2 mm.
- a square shape sensor array with a total area of 1.5 mm 2 would contain twelve body members, resulting in a number of pixels of 72. It can be understood, that high-resolution tactile sensor arrays can be realized even with limited overall dimensions.
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Human Computer Interaction (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Push-Button Switches (AREA)
- Switches That Are Operated By Magnetic Or Electric Fields (AREA)
- Burglar Alarm Systems (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Pressure Sensors (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2003287874A AU2003287874A1 (en) | 2002-12-12 | 2003-12-10 | Tactile sensor element and sensor array |
EP03779712A EP1570415B1 (en) | 2002-12-12 | 2003-12-10 | Tactile sensor element and sensor array |
US10/538,260 US7481120B2 (en) | 2002-12-12 | 2003-12-10 | Tactile sensor element and sensor array |
DE60328913T DE60328913D1 (en) | 2002-12-12 | 2003-12-10 | TOUCH SENSOR ELEMENT AND SENSOR GROUP |
AT03779712T ATE440319T1 (en) | 2002-12-12 | 2003-12-10 | TOUCH SENSOR ELEMENT AND SENSOR GROUP |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DKPA200201908 | 2002-12-12 | ||
DKPA200201908 | 2002-12-12 |
Publications (1)
Publication Number | Publication Date |
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WO2004053782A1 true WO2004053782A1 (en) | 2004-06-24 |
Family
ID=32479668
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DK2003/000848 WO2004053782A1 (en) | 2002-12-12 | 2003-12-10 | Tactile sensor element and sensor array |
Country Status (7)
Country | Link |
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US (1) | US7481120B2 (en) |
EP (1) | EP1570415B1 (en) |
CN (1) | CN1320432C (en) |
AT (1) | ATE440319T1 (en) |
AU (1) | AU2003287874A1 (en) |
DE (1) | DE60328913D1 (en) |
WO (1) | WO2004053782A1 (en) |
Cited By (28)
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---|---|---|---|---|
WO2006023147A3 (en) * | 2004-08-19 | 2006-05-04 | Synaptics Inc | Capacitive sensing apparatus having varying depth sensing elements |
GB2426341A (en) * | 2005-05-19 | 2006-11-22 | Univ Basel | Measuring nano-scale mechanical displacements by the compression or expansion of a compliant insulator |
US7233097B2 (en) | 2001-05-22 | 2007-06-19 | Sri International | Rolled electroactive polymers |
US7320457B2 (en) | 1997-02-07 | 2008-01-22 | Sri International | Electroactive polymer devices for controlling fluid flow |
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US7368862B2 (en) | 1999-07-20 | 2008-05-06 | Sri International | Electroactive polymer generators |
US7378783B2 (en) | 2001-03-02 | 2008-05-27 | Sri International | Electroactive polymer torsional device |
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US7492076B2 (en) | 2006-12-29 | 2009-02-17 | Artificial Muscle, Inc. | Electroactive polymer transducers biased for increased output |
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US7521840B2 (en) | 2005-03-21 | 2009-04-21 | Artificial Muscle, Inc. | High-performance electroactive polymer transducers |
US7567681B2 (en) | 2003-09-03 | 2009-07-28 | Sri International | Surface deformation electroactive polymer transducers |
US7595580B2 (en) | 2005-03-21 | 2009-09-29 | Artificial Muscle, Inc. | Electroactive polymer actuated devices |
US7626319B2 (en) | 2005-03-21 | 2009-12-01 | Artificial Muscle, Inc. | Three-dimensional electroactive polymer actuated devices |
US7750532B2 (en) | 2005-03-21 | 2010-07-06 | Artificial Muscle, Inc. | Electroactive polymer actuated motors |
US7915789B2 (en) | 2005-03-21 | 2011-03-29 | Bayer Materialscience Ag | Electroactive polymer actuated lighting |
US8054566B2 (en) | 2005-03-21 | 2011-11-08 | Bayer Materialscience Ag | Optical lens displacement systems |
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US8970503B2 (en) | 2007-01-05 | 2015-03-03 | Apple Inc. | Gestures for devices having one or more touch sensitive surfaces |
US9195058B2 (en) | 2011-03-22 | 2015-11-24 | Parker-Hannifin Corporation | Electroactive polymer actuator lenticular system |
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US7400080B2 (en) | 2002-09-20 | 2008-07-15 | Danfoss A/S | Elastomer actuator and a method of making an actuator |
US8181338B2 (en) | 2000-11-02 | 2012-05-22 | Danfoss A/S | Method of making a multilayer composite |
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US7609178B2 (en) * | 2006-04-20 | 2009-10-27 | Pressure Profile Systems, Inc. | Reconfigurable tactile sensor input device |
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US8212575B2 (en) * | 2008-12-29 | 2012-07-03 | Lexmark International, Inc. | Device for analyzing size and location of conductive item |
US8915151B2 (en) * | 2009-06-05 | 2014-12-23 | Sungkyunkwan University Foundation For Corporate Collaboration | Active skin for conformable tactile interface |
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US8069735B1 (en) | 2010-11-10 | 2011-12-06 | Artann Laboratories Inc. | Tactile sensor array for soft tissue elasticity imaging |
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US9239346B2 (en) | 2012-01-28 | 2016-01-19 | The Regents Of The University Of California | Systems for providing electro-mechanical sensors |
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TW201416652A (en) * | 2012-10-18 | 2014-05-01 | Ind Tech Res Inst | Pressure sensing device and clipping apparatus using the same |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4634917A (en) * | 1984-12-26 | 1987-01-06 | Battelle Memorial Institute | Active multi-layer piezoelectric tactile sensor apparatus and method |
KR900001465B1 (en) * | 1981-10-27 | 1990-03-12 | 로즈 마운트 인코오포레이티드 | Capacitive pressure transducer with isolated sensing diapharm |
US5528452A (en) * | 1994-11-22 | 1996-06-18 | Case Western Reserve University | Capacitive absolute pressure sensor |
Family Cites Families (91)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2716708A (en) * | 1950-11-17 | 1955-08-30 | Nat Res Dev | Apparatus for launching ultrasonic waves |
US3109202A (en) * | 1952-10-09 | 1963-11-05 | Continental Gummi Werke Ag | Mold for use in connection with the casting of transmission belts |
BE642434A (en) * | 1958-06-04 | |||
US3565195A (en) * | 1969-04-16 | 1971-02-23 | Sibany Mfg Corp | Electrical weighing apparatus using capacitive flexible mat |
US3753294A (en) | 1970-02-27 | 1973-08-21 | Schlumberger Technology Corp | Method and apparatus for measuring depth |
US3875481A (en) * | 1973-10-10 | 1975-04-01 | Uniroyal Inc | Capacitive weighing mat |
CH609774A5 (en) * | 1977-01-21 | 1979-03-15 | Semperit Ag | |
FR2409654B1 (en) * | 1977-11-17 | 1985-10-04 | Thomson Csf | PIEZOELECTRIC TRANSDUCER DEVICE AND MANUFACTURING METHOD THEREOF |
US4376302A (en) * | 1978-04-13 | 1983-03-08 | The United States Of America As Represented By The Secretary Of The Navy | Piezoelectric polymer hydrophone |
US4330730A (en) * | 1980-03-27 | 1982-05-18 | Eastman Kodak Company | Wound piezoelectric polymer flexure devices |
US4386386A (en) | 1980-04-22 | 1983-05-31 | Nippon Soken, Inc. | Capacitor type sensor for detecting displacement or load |
US4494409A (en) | 1981-05-29 | 1985-01-22 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Engine vibration sensor |
US4431882A (en) * | 1982-08-12 | 1984-02-14 | W. H. Brady Co. | Transparent capacitance membrane switch |
DE3372407D1 (en) * | 1982-09-29 | 1987-08-13 | Emi Ltd | A tactile array sensor |
US4584625A (en) * | 1984-09-11 | 1986-04-22 | Kellogg Nelson R | Capacitive tactile sensor |
US4578735A (en) * | 1984-10-12 | 1986-03-25 | Knecht Thomas A | Pressure sensing cell using brittle diaphragm |
US4654546A (en) | 1984-11-20 | 1987-03-31 | Kari Kirjavainen | Electromechanical film and procedure for manufacturing same |
US4640137A (en) * | 1985-05-31 | 1987-02-03 | Lord Corporation | Tactile sensor |
US4852443A (en) * | 1986-03-24 | 1989-08-01 | Key Concepts, Inc. | Capacitive pressure-sensing method and apparatus |
DE3642780A1 (en) * | 1986-05-05 | 1987-11-12 | Siemens Ag | DETECTOR MAT AND METHOD FOR THEIR PRODUCTION |
GB8619800D0 (en) * | 1986-08-14 | 1986-09-24 | Microelectronics Applic Resear | Tactile sensor device |
DE3634855C1 (en) | 1986-10-13 | 1988-03-31 | Peter Seitz | Capacitive measuring arrangement for the determination of forces and / or pressures |
GB8625686D0 (en) * | 1986-10-27 | 1986-11-26 | Ministry Of Agriculture Fisher | Assessing processing strains |
US4825116A (en) * | 1987-05-07 | 1989-04-25 | Yokogawa Electric Corporation | Transmitter-receiver of ultrasonic distance measuring device |
FR2615941B1 (en) * | 1987-05-25 | 1991-12-06 | Sfena | DEVICE FOR DETECTING THE POSITION OF A CONTROL MEMBER ON A TOUCH TABLET |
US4879698A (en) * | 1988-11-03 | 1989-11-07 | Sensor Electronics, Inc. | Piezopolymer actuators |
DE8815246U1 (en) * | 1988-12-07 | 1990-04-05 | Brunner, Wolfgang, Dipl.-Ing. (FH), 88167 Maierhöfen | Measuring arrangement, preferably in the form of a measuring platform |
US5090248A (en) | 1989-01-23 | 1992-02-25 | The University Of Melbourne | Electronic transducer |
US5028876A (en) * | 1989-01-30 | 1991-07-02 | Dresser Industries, Inc. | Precision capacitive transducer circuits and methods |
US5173162A (en) | 1989-07-05 | 1992-12-22 | Mitsui Toatsu Chemicals, Inc. | Multi-layered electrostrictive effect element |
US5060527A (en) * | 1990-02-14 | 1991-10-29 | Burgess Lester E | Tactile sensing transducer |
US5425275A (en) | 1990-06-01 | 1995-06-20 | Lockshaw; James | Hull monitoring apparatus and method |
DE4027753C2 (en) * | 1990-09-01 | 1994-06-09 | Karlheinz Dr Ziegler | Capacitive force sensor |
US5090246A (en) * | 1990-09-19 | 1992-02-25 | Johnson Service Corp. | Elastomer type low pressure sensor |
FR2667256A1 (en) * | 1990-10-02 | 1992-04-03 | Thomson Csf | Device for removing the icing formed on the surface of a wall, especially of an optical or radio frequency window |
US5259099A (en) * | 1990-11-30 | 1993-11-09 | Ngk Spark Plug Co., Ltd. | Method for manufacturing low noise piezoelectric transducer |
JPH04253382A (en) | 1991-01-30 | 1992-09-09 | Nec Corp | Electrostrictive effect element |
US5115680A (en) | 1991-03-04 | 1992-05-26 | Lew Hyok S | Displacement sensor with mechanical preamplification means |
US5225959A (en) * | 1991-10-15 | 1993-07-06 | Xerox Corporation | Capacitive tactile sensor array and method for sensing pressure with the array |
US5300813A (en) * | 1992-02-26 | 1994-04-05 | International Business Machines Corporation | Refractory metal capped low resistivity metal conductor lines and vias |
US5329496A (en) * | 1992-10-16 | 1994-07-12 | Duke University | Two-dimensional array ultrasonic transducers |
US5449002A (en) * | 1992-07-01 | 1995-09-12 | Goldman; Robert J. | Capacitive biofeedback sensor with resilient polyurethane dielectric for rehabilitation |
JP3270527B2 (en) | 1992-07-08 | 2002-04-02 | 呉羽化学工業株式会社 | Cylindrical or curved piezoelectric element |
US5321332A (en) * | 1992-11-12 | 1994-06-14 | The Whitaker Corporation | Wideband ultrasonic transducer |
US5760530A (en) * | 1992-12-22 | 1998-06-02 | The United States Of America As Represented By The Secretary Of The Air Force | Piezoelectric tactile sensor |
US6282956B1 (en) | 1994-12-29 | 2001-09-04 | Kazuhiro Okada | Multi-axial angular velocity sensor |
US5642015A (en) * | 1993-07-14 | 1997-06-24 | The University Of British Columbia | Elastomeric micro electro mechanical systems |
DE69519858T2 (en) | 1994-06-24 | 2001-06-21 | United Technologies Corp | PRE-INJECTION FOR GAS TURBINE SYSTEMS |
US5604314A (en) * | 1994-10-26 | 1997-02-18 | Bonneville Scientific Incorporated | Triaxial normal and shear force sensor |
US5977685A (en) | 1996-02-15 | 1999-11-02 | Nitta Corporation | Polyurethane elastomer actuator |
US5755909A (en) * | 1996-06-26 | 1998-05-26 | Spectra, Inc. | Electroding of ceramic piezoelectric transducers |
US6882086B2 (en) | 2001-05-22 | 2005-04-19 | Sri International | Variable stiffness electroactive polymer systems |
US6586859B2 (en) | 2000-04-05 | 2003-07-01 | Sri International | Electroactive polymer animated devices |
US6376971B1 (en) | 1997-02-07 | 2002-04-23 | Sri International | Electroactive polymer electrodes |
US6812624B1 (en) | 1999-07-20 | 2004-11-02 | Sri International | Electroactive polymers |
US6543110B1 (en) | 1997-02-07 | 2003-04-08 | Sri International | Electroactive polymer fabrication |
US6545384B1 (en) | 1997-02-07 | 2003-04-08 | Sri International | Electroactive polymer devices |
US7052594B2 (en) | 2002-01-31 | 2006-05-30 | Sri International | Devices and methods for controlling fluid flow using elastic sheet deflection |
US6781284B1 (en) | 1997-02-07 | 2004-08-24 | Sri International | Electroactive polymer transducers and actuators |
US6891317B2 (en) | 2001-05-22 | 2005-05-10 | Sri International | Rolled electroactive polymers |
WO1998035529A2 (en) | 1997-02-07 | 1998-08-13 | Sri International | Elastomeric dielectric polymer film sonic actuator |
US7320457B2 (en) | 1997-02-07 | 2008-01-22 | Sri International | Electroactive polymer devices for controlling fluid flow |
US6809462B2 (en) | 2000-04-05 | 2004-10-26 | Sri International | Electroactive polymer sensors |
US5841143A (en) | 1997-07-11 | 1998-11-24 | The United States Of America As Represented By Administrator Of The National Aeronautics And Space Administration | Integrated fluorescene |
US6210514B1 (en) | 1998-02-11 | 2001-04-03 | Xerox Corporation | Thin film structure machining and attachment |
EP1212800B1 (en) | 1999-07-20 | 2007-12-12 | Sri International | Electroactive polymer generators |
US6664718B2 (en) | 2000-02-09 | 2003-12-16 | Sri International | Monolithic electroactive polymers |
US6806621B2 (en) | 2001-03-02 | 2004-10-19 | Sri International | Electroactive polymer rotary motors |
US6222305B1 (en) | 1999-08-27 | 2001-04-24 | Product Systems Incorporated | Chemically inert megasonic transducer system |
JP2001135873A (en) * | 1999-11-08 | 2001-05-18 | Minolta Co Ltd | Piezoelectric conversion element |
US6911764B2 (en) | 2000-02-09 | 2005-06-28 | Sri International | Energy efficient electroactive polymers and electroactive polymer devices |
JP2001230462A (en) * | 2000-02-17 | 2001-08-24 | Minolta Co Ltd | Piezoelectric transducer |
WO2001063738A2 (en) | 2000-02-23 | 2001-08-30 | Sri International | Electroactive polymer thermal electric generators |
EP2290721B1 (en) | 2000-02-23 | 2017-09-20 | SRI International | Environmentally powered electroactive polymer generators |
US7400080B2 (en) * | 2002-09-20 | 2008-07-15 | Danfoss A/S | Elastomer actuator and a method of making an actuator |
DE10054247C2 (en) * | 2000-11-02 | 2002-10-24 | Danfoss As | Actuator and method for its manufacture |
WO2003056287A1 (en) * | 2001-12-21 | 2003-07-10 | Danfoss A/S | Dielectric actuator or sensor structure and method of making it |
WO2002057799A2 (en) | 2001-01-17 | 2002-07-25 | Honeywell International Inc. | Accelerometer whose seismic mass is shaped as whiffletree |
US7166953B2 (en) | 2001-03-02 | 2007-01-23 | Jon Heim | Electroactive polymer rotary clutch motors |
JP2002289462A (en) * | 2001-03-27 | 2002-10-04 | Alps Electric Co Ltd | Method for manufacturing thin film capacitor, thin film capacitor for temperature compensation provided with the thin film capacitor, electronic apparatus and electronic circuit |
US6581481B1 (en) | 2001-05-07 | 2003-06-24 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Capacitive extensometer |
US7233097B2 (en) | 2001-05-22 | 2007-06-19 | Sri International | Rolled electroactive polymers |
GB0123294D0 (en) * | 2001-09-27 | 2001-11-21 | 1 Ltd | Piezoelectric structures |
US6689970B2 (en) | 2001-10-04 | 2004-02-10 | Lester E. Burgess | Pressure actuated switching device and method and system for making same |
US6876135B2 (en) | 2001-10-05 | 2005-04-05 | Sri International | Master/slave electroactive polymer systems |
DE60238274D1 (en) * | 2001-12-21 | 2010-12-23 | Danfoss As | Positionssensor mit elastomerischem material |
SG103371A1 (en) * | 2001-12-28 | 2004-04-29 | Matsushita Electric Works Ltd | Wearable human motion applicator |
US6707236B2 (en) | 2002-01-29 | 2004-03-16 | Sri International | Non-contact electroactive polymer electrodes |
AU2003225913A1 (en) | 2002-03-18 | 2003-10-08 | Roy David Kornbluh | Electroactive polymer devices for moving fluid |
US6965189B2 (en) * | 2002-09-20 | 2005-11-15 | Monodrive Inc. | Bending actuators and sensors constructed from shaped active materials and methods for making the same |
ES2398525T3 (en) | 2003-09-03 | 2013-03-19 | Sri International | Electroactive polymer transducers for surface deformation |
-
2003
- 2003-12-10 EP EP03779712A patent/EP1570415B1/en not_active Expired - Lifetime
- 2003-12-10 CN CNB2003801058508A patent/CN1320432C/en not_active Expired - Fee Related
- 2003-12-10 WO PCT/DK2003/000848 patent/WO2004053782A1/en not_active Application Discontinuation
- 2003-12-10 AT AT03779712T patent/ATE440319T1/en not_active IP Right Cessation
- 2003-12-10 AU AU2003287874A patent/AU2003287874A1/en not_active Abandoned
- 2003-12-10 US US10/538,260 patent/US7481120B2/en not_active Expired - Fee Related
- 2003-12-10 DE DE60328913T patent/DE60328913D1/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR900001465B1 (en) * | 1981-10-27 | 1990-03-12 | 로즈 마운트 인코오포레이티드 | Capacitive pressure transducer with isolated sensing diapharm |
US4634917A (en) * | 1984-12-26 | 1987-01-06 | Battelle Memorial Institute | Active multi-layer piezoelectric tactile sensor apparatus and method |
US5528452A (en) * | 1994-11-22 | 1996-06-18 | Case Western Reserve University | Capacitive absolute pressure sensor |
Cited By (49)
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US7320457B2 (en) | 1997-02-07 | 2008-01-22 | Sri International | Electroactive polymer devices for controlling fluid flow |
US7368862B2 (en) | 1999-07-20 | 2008-05-06 | Sri International | Electroactive polymer generators |
US7456549B2 (en) | 2001-03-02 | 2008-11-25 | Sri International | Electroactive polymer motors |
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Also Published As
Publication number | Publication date |
---|---|
US20060016275A1 (en) | 2006-01-26 |
ATE440319T1 (en) | 2009-09-15 |
EP1570415B1 (en) | 2009-08-19 |
CN1320432C (en) | 2007-06-06 |
DE60328913D1 (en) | 2009-10-01 |
CN1726453A (en) | 2006-01-25 |
AU2003287874A1 (en) | 2004-06-30 |
EP1570415A1 (en) | 2005-09-07 |
US7481120B2 (en) | 2009-01-27 |
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