WO2004027357A1 - Photodetector array and method for compensating stray light - Google Patents
Photodetector array and method for compensating stray light Download PDFInfo
- Publication number
- WO2004027357A1 WO2004027357A1 PCT/DE2003/002764 DE0302764W WO2004027357A1 WO 2004027357 A1 WO2004027357 A1 WO 2004027357A1 DE 0302764 W DE0302764 W DE 0302764W WO 2004027357 A1 WO2004027357 A1 WO 2004027357A1
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- WO
- WIPO (PCT)
- Prior art keywords
- photodetector
- signal
- compensation
- unit
- arrangement according
- Prior art date
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- 238000000034 method Methods 0.000 title claims description 23
- 230000002452 interceptive effect Effects 0.000 claims description 7
- 239000011159 matrix material Substances 0.000 claims description 5
- 238000005286 illumination Methods 0.000 description 13
- 230000003287 optical effect Effects 0.000 description 10
- 238000005259 measurement Methods 0.000 description 9
- 230000000875 corresponding effect Effects 0.000 description 8
- 230000010354 integration Effects 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000002800 charge carrier Substances 0.000 description 3
- 230000002596 correlated effect Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- CJPQIRJHIZUAQP-MRXNPFEDSA-N benalaxyl-M Chemical compound CC=1C=CC=C(C)C=1N([C@H](C)C(=O)OC)C(=O)CC1=CC=CC=C1 CJPQIRJHIZUAQP-MRXNPFEDSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000012883 sequential measurement Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4228—Photometry, e.g. photographic exposure meter using electric radiation detectors arrangements with two or more detectors, e.g. for sensitivity compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
- G01J1/46—Electric circuits using a capacitor
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
- H04N25/65—Noise processing, e.g. detecting, correcting, reducing or removing noise applied to reset noise, e.g. KTC noise related to CMOS structures by techniques other than CDS
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
- H04N25/77—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
Definitions
- Scenes are often actively illuminated in optical metrology.
- the active lighting z.
- infrared light modulated or non-modulated light
- stray light z.
- B. background light of the sun, other light sources such as floodlights, fluorescent tubes.
- the intensity of the active illumination is below the intensity of the disturbance light with respect to its intensity. Therefore, the detector signal is dominated by the disturbing light, so that the desired useful signal from the active illumination forms only a small fraction of the total signal.
- a separation of photosignals, which are caused by an interaction of active illumination and stray light, can be achieved with current methods and systems only by means of several temporally successive measurements.
- the photosignal or the optical signal is determined by the cumulative effect of stray light and active illumination in a first measurement.
- the photosignal of the disturbing light is determined when the active illumination is switched off.
- the useful signal can then be determined by subtracting the Störlichtsignals from the total signal.
- This procedure corresponds to the procedure for Correlated Double Sampling (CDS for short). Proceeding from this, the object of the invention is to specify a particularly simple photodetector arrangement for interfering light compensation and a particularly simple method for compensating for interfering light for a photodetector arrangement.
- the first object is achieved by a photodetector arrangement for Störlichtkompensation with a photodetector unit for detecting and determining a photocurrent and with an integrated compensation unit for compensation of the photocurrent underlying Störsignalan matter such that the photocurrent, a Störsignalanmaschine representing compensation signal is countered.
- the invention is based on the consideration that for a particularly simple, fast and safe Störlichtkompensation a photodetector arrangement should be specified, with the aid of a compensation of the Störlichtsignals directly on the photosensitive component, z. B. the photodetector or photoelement, and thus directly at the point of origin of the photoelectric or optical signal caused by the disturbance light is possible.
- expensive time-sequential measurements should be reliably avoided.
- a compensation unit in the manner of a circular structure or negative feedback is coupled directly to the photodetector unit.
- the compensation unit of the size to be measured d. H. the measurement signal or the optical signal and the resulting photocurrent
- the output signal, d. H. the compensation signal the counteracted in the feedback compensation unit.
- the main advantages of the invention consist in the fact that by such a photodetector arrangement with a compensation unit arranged in a feedback branch and a resulting feedback signal processing method compared to a conventional so-called "Correlated Double Sampling method" for the Störlichtkompensation already after an initialization process, the detected measurement signal is processed on the basis of the feedback compensation signal and thus the Störlichtkompensation already during a first
- the third step which is necessary for the so-called "correlated double sampling method” eliminates the difference between the two signals, which considerably shortens the signal processing time and enables higher refresh rates in imaging systems ,
- the compensation unit expediently comprises at least one storage element, in particular a storage capacity, for determining the compensation signal.
- a further memory element is provided for determining the usage signal on which the photocurrent is based.
- the compensation unit preferably comprises a reset circuit for initializing the photodetector arrangement.
- the reset circuit puts the arrangement in the initial or basic state. This ensures that subsequently the compensation signal representing the interference signal component can be determined and fed to a feedback branch.
- the compensation unit comprises a switching element, which is provided state-dependent for determining the compensation signal.
- the compensation signal is detected as a voltage signal. For conversion of the voltage signal in a proportional current signal is preferably a voltage-current converter is provided.
- this comprises, for example as photomix detector, a plurality of photodetector units arranged parallel to one another, followed by a compensation unit having a number of memory elements corresponding to the number of photodetector units for determining the respectively associated useful signal and another common memory element for determining the compensation signal comprises.
- a current mirror arrangement is connected downstream of the common memory element by means of which the compensating signal is switched counter to each photosignal.
- the photodetector arrangement can comprise a compensation unit for a separate and thus signal-related compensation, which has a number of memory elements corresponding to the number of photodetector units for determining the respectively associated useful signal and a corresponding number of has further memory elements for determining the respectively associated compensation signal.
- the photodetector arrangement is preferably constructed with the aid of integrated electronic components, whereby the compensation unit is assigned directly to the photodetector unit and is thus integrated.
- the photodetector arrangement can be embodied as a so-called "active pixel sensor” (APS for short), which is constructed in a simple manner in CMOS technology, for example - formed detector units as an image sensor of a line or matrix camera.
- APS active pixel sensor
- the second object is achieved according to the invention in a method for interfering light compensation for a photodetector arrangement, wherein a photocurrent is detected by means of a photodetector unit whose Störsignalanmaschine be compensated such that the photocurrent representing the Störsignalanmaschine and counter-formed compensating signal formed by an integrated compensation unit ,
- the method is not limited exclusively to photodetectors, but can in principle be applied to all signals which are composed of interfering and useful signal.
- the method can be implemented in the form of integrated components in the semiconductor detector.
- photodetectors are possible as so-called "Active Pixel Sensors" (APS) whose dynamic range can be used as far as possible for the detection of an active scene lighting.
- the advantages achieved by the invention are in particular that by the negative feedback of a compensation signal to be processed photodetector signal to Störsignal- shares, z. B. of interfering light sources, is largely reduced by the useful signal components, ie the useful light is separated from the stray light.
- control control terminal
- the photodetector arrangement is suitable for single detectors or for row or array arrangements, eg for an Active Pixel Sensor (called APS for short) and Photonic mixer detectors (PMD for short) in semiconductor technology
- APS Active Pixel Sensor
- PMD Photonic mixer detectors
- FIG. 2 shows a timing diagram for the control of the photodetector arrangement according to FIG. 1;
- FIG 3 shows a schematic representation of the photodetector arrangement according to the invention with simplified circuitry for a photonic mixer detector (PMD).
- PMD photonic mixer detector
- the photodetector arrangement 1 comprises a photodetector unit 2 with a photodetector circuit 3 and a photovoltaic cell 4 for the detection of a photocurrent Ip.
- the measuring signal or the photocurrent Ip is determined by means of a photovoltaic cell 4, e.g. B. a photodiode detected optical signal 0, which is in an electrical signal, the photocurrent Ip h (also called photodetector) is converted.
- the optical signal 0 is composed of a noise signal component SL, z. B. stray light, sunlight, and a Nutzsignalanteil NL, z. B. infrared light.
- the photocurrent I P a the Störsignalanmaschine SL largely corresponding compensation signal I HL countered according to:
- a compensation unit 6 is provided, which is connected downstream of the photodetector unit 2.
- the compensation unit 6 includes a storage element C HL -
- the memory element C HL is used to determine a signal proportional to the compensation signal I HL voltage value V C _ HL -
- An additional storage element C S i g is used for determining a the photocurrent I P underlying wanted signal NL with reference to a the compensated photoelectric current Ip h _ ⁇ o mp representing voltage signal V_si g -
- a voltage-current converter 8 and a comparison amplifier unit 10 of each storage element C HL and C S is assigned to initialize the photodetector array 1 is associated beyond the respective storage element C and C HL S ig, as well as the photodetector unit 2, a reset circuit 12th
- All elements or components of the photodetector arrangement 1 are preferably arranged directly on the photodetector or photoelement 4 on a semiconductor.
- the photodetector arrangement 1 with the photoelement 4 and the photodetector circuit 3 and the compensation unit 6 thus represents a possible embodiment of a so-called Active Pixel Sensor (abbreviated to APS).
- the photodetector or the photoelement 4 for example a photodiode, a photogate detector, supplies the photocurrent I Ph , which is processed by means of the photodetector circuit 3 and the compensation unit 6 to the compensated photocurrent Ip h _ ⁇ om .
- the photocurrent I Ph is the use of active scene lighting caused by stray light of the scene, the Störsignalan former SL, and by the additional active scene lighting, the Nutzsignalan fixing NL.
- the compensated photocurrent Iph_ ⁇ omp in this case is generated largely exclusively by the stray light which is present at the memory unit C HL Z-B of a capacitance a voltage signal is determined on the basis of the voltage values V C _ HL , in particular integrated.
- the switch Si is opened after a time T 2 , the result of the signal integration is kept as the voltage value V C _ HL at the memory element C HL .
- a proportional current value is generated from the voltage value V C _ HL , which represents the compensation signal I L.
- a conversion or compensation factor k representing the degree of compensation can be set with "Control" at the voltage / current converter 8.
- the compensation signal I HL can be adjusted by means of the conversion factor k adjustable or fixed.
- the active scene illumination and closes when the switch Si has a storage element C S ig associated second switch S so is the voltage-current converter 8 due to the noise light power by means of the compensation signal I HL directly to the photo detector circuit 3, so that the corresponding interference-relevant current component is compensated directly at its formation, namely immediately after the photoelement 4.
- a predetermined degree of compensation is set, ie by means of the compensation factor k the compensation signal I H ⁇ , a complete compensation or a partial compensation of the interference signal components SL can take place.
- the memory element C S i g is used to determine the voltage signal of the active illumination, ie the useful signal components NL.
- the signal integration is aborted by opening the switch S 2 .
- the voltage signal V c _sig of the memory element C S i g (also called integration capacity) is held and guided with the switch S 3 closed via the amplifier unit 10 to the output line 16 (also called “signal line”).
- the timing diagram representing the photodetector arrangement 1 is shown in FIG. After expiry of the timing scheme or according to specification, the photodetector arrangement 1 can be restored to the initial state by means of a reset pulse (reset) by means of the reset circuit 12. That is, the resetting of the memory elements C HL and C S i g is in each case via the associated reset circuit 12, by which a Initial Deutschenspegel is defined at the capacitors.
- the arranged on the photovoltaic element 4 photodetector circuit 3 comparable also evaluates the reset pulse for initialization of the photosensitive member 4. in addition, during the signal integration, ie during signal processing, keep the potential at the photoelement 4 constant.
- the control of the photodetector arrangement 1 can be described in more detail with reference to FIG 2.
- the active scene illumination ⁇ E Mo a is added to the disturbance light E DC , which in the simplest case is shown here as a direct signal, for example a signal obtained from the sunlight.
- the modulation type and signal shape of the active scene lighting ⁇ E M ⁇ d can be arbitrary.
- all signal forms for example rectangular signals, sine signals, triangular signals, pseudo noise signals, pulse group signals, etc., are suitable for the method according to the invention. It should only be noted that the time average values of the respective signal forms are formed by the integrating functionality of the described method. This applies both to the signal of the active scene illumination ⁇ E M ⁇ d and to the interference light signal ⁇ E D c (corresponds to the interference signal components SL).
- the method and the photodetector arrangement 1 can be used both for a single photodetector unit 2 with a single photoelement 4 and for a row or array arrangement of photovoltaic cells 4.
- An example of such an arrangement is shown in FIG.
- the application in a photodetector arrangement 1 in a two-channel system is particularly advantageous as a so-called photonic mixer device (PMD) .
- the photonic mixer device 18 is used as a mixer component for mixing electrical signals E and optical signals 0.
- the photonic mixer 18 comprises at least two paired photodetector units 2, each with associated photoelement 4 and a signal source V Mo a for generating the electrical signal E.
- the electric signal E generated by the signal source V mod is in the photonic mixer 18 with the optical signal 0.
- the result of the mixture is determined by one of the number of photodetector inputs. 2 corresponding number of signal paths Signal_A and Signal_B simultaneously provided.
- charge carriers which are generated by an active scene lighting ⁇ E Mod in the respective semiconductor or photoelement 4 are distributed in the mixture with the electrical signal E according to a specific scheme to the two photodetector units 2 of a detector pair.
- a number of memory elements C S i g _A and C S i g _B corresponding to the number of photodetector units 2 is determined by means of a respective useful signal component NL relevant voltage signal V c _si g _A and V c _si_B provided.
- a common further memory element C HL is provided in addition to the memory elements C S i g _ A and C S ⁇ g _ B for the voltage signals V c _si g _A and V c _ S ig_B of Nutzsignalanteils NL.
- the compensation signal I HL signal-related, ie per voltage signal V c _si g _A and V c _si g _B be determined.
- the compensation unit 6 a number of further memory elements C HL corresponding to the number of photodetector units 2 for determining a respectively associated compensation signal, z. B.
- I HL _si g _ A to I H L_si g _z include.
- an associated output line 16 with integrated amplifier unit 10 and associated switch S 3 is provided in each case.
- the suppression or compensation of the disturbing light signal or the interfering signal components SL can be assigned to each detector unit 2 of a detector pair in the case of a photonic mixer detector 18. Since a detector pair is usually constructed symmetrically in a photonic mixer 18, it is sufficient to determine the interference signal components SL only at a detector unit 2 of the detector pair. For symmetry reasons, the same signal is then switched on as the compensation signal I HL of the second detector unit 2. This results in a simplified wiring, as shown in FIG. That to
- feedback in the two detector units 2 of the detector pair required compensation signal I HL can be generated in a simple manner by forming a copy of this current, for example by means of a simple current mirror arrangement 20.
- the current mirror arrangement 20 is connected in a feedback or feedback line 22 of the compensation unit 6.
- the initialization of the photodetector arrangement 1 according to FIG. 3 is analogous to the initialization of the photodetector arrangement 1 according to FIG. 1.
- the photodetector arrangement 1 with the photonic mixer 18 a significantly higher dynamic range is made possible, which considerably increases the performance of such components in technical applications.
- the proposed photodetector arrangement 1 moreover comprises a plurality of parallel arranged photoelements 4 with associated photodetector unit 2.
- sen which are used for example in a row arrangement as image sensor in line scan cameras application.
- row arrangements are possible as multichannel optical systems for the separation of different modulation channels.
- the control and signal readout of the individual pixels of such line arrangements is usually carried out with so-called multiplexer components.
- multiplexer components are used for control and readout of the detector elements in each case for the rows and the columns of the matrix arrangement.
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10393757T DE10393757D2 (en) | 2002-09-13 | 2003-08-19 | Photodetector arrangement and method for Störlichtkompensation |
AU2003266130A AU2003266130A1 (en) | 2002-09-13 | 2003-08-19 | Photodetector array and method for compensating stray light |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10242691 | 2002-09-13 | ||
DE10242691.0 | 2002-09-13 | ||
DE10301598.1 | 2003-01-16 | ||
DE10301598A DE10301598A1 (en) | 2002-09-13 | 2003-01-16 | Photodetector structure for e.g. 3D telemetric image cameras for motor vehicles, has a photodetector unit to record and determine a photoelectric current and an integrated unit to compensate for unwanted signal portions |
Publications (1)
Publication Number | Publication Date |
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WO2004027357A1 true WO2004027357A1 (en) | 2004-04-01 |
Family
ID=32031476
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2003/002764 WO2004027357A1 (en) | 2002-09-13 | 2003-08-19 | Photodetector array and method for compensating stray light |
Country Status (3)
Country | Link |
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AU (1) | AU2003266130A1 (en) |
DE (1) | DE10393757D2 (en) |
WO (1) | WO2004027357A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1584905A2 (en) * | 2004-04-05 | 2005-10-12 | PMDTechnologies GmbH | Electronic device for processing signals |
EP2546620A1 (en) * | 2011-07-13 | 2013-01-16 | ELMOS Semiconductor AG | Ambient light compensation device for optical sensors equally exposed to useful light and ambient light |
EP3270183A1 (en) * | 2016-07-15 | 2018-01-17 | ELMOS Semiconductor Aktiengesellschaft | Ambient light compensation device for optical sensors exposed to useful light and ambient light |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0521255A2 (en) * | 1991-05-02 | 1993-01-07 | Licentia Patent-Verwaltungs-GmbH | Photo detector arrangement |
WO2002032114A1 (en) * | 2000-10-07 | 2002-04-18 | Silicon Vision Ag | Optical sensor |
WO2002033922A2 (en) * | 2000-10-16 | 2002-04-25 | Rudolf Schwarte | Method and device for the recording and processing of signal waves and corresponding method |
-
2003
- 2003-08-19 WO PCT/DE2003/002764 patent/WO2004027357A1/en not_active Application Discontinuation
- 2003-08-19 AU AU2003266130A patent/AU2003266130A1/en not_active Abandoned
- 2003-08-19 DE DE10393757T patent/DE10393757D2/en not_active Withdrawn - After Issue
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0521255A2 (en) * | 1991-05-02 | 1993-01-07 | Licentia Patent-Verwaltungs-GmbH | Photo detector arrangement |
WO2002032114A1 (en) * | 2000-10-07 | 2002-04-18 | Silicon Vision Ag | Optical sensor |
WO2002033922A2 (en) * | 2000-10-16 | 2002-04-25 | Rudolf Schwarte | Method and device for the recording and processing of signal waves and corresponding method |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1584905A2 (en) * | 2004-04-05 | 2005-10-12 | PMDTechnologies GmbH | Electronic device for processing signals |
EP1584905A3 (en) * | 2004-04-05 | 2007-10-24 | PMDTechnologies GmbH | Electronic device for processing signals |
EP2546620A1 (en) * | 2011-07-13 | 2013-01-16 | ELMOS Semiconductor AG | Ambient light compensation device for optical sensors equally exposed to useful light and ambient light |
US8822901B2 (en) | 2011-07-13 | 2014-09-02 | Elmos Semiconductor Ag | Device for ambient light compensation for optical sensors exposed to both useful light and ambient light |
EP3270183A1 (en) * | 2016-07-15 | 2018-01-17 | ELMOS Semiconductor Aktiengesellschaft | Ambient light compensation device for optical sensors exposed to useful light and ambient light |
Also Published As
Publication number | Publication date |
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DE10393757D2 (en) | 2005-08-11 |
AU2003266130A1 (en) | 2004-04-08 |
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