WO2004005781A1

WO2004005781A1 - Gate valve

Info

Publication number: WO2004005781A1
Application number: PCT/JP2003/008340
Authority: WO
Inventors: Shigenori Toda; Seiji Shirai; Masaaki Nose; Hisataka Satoh; Masanao Matsushita; Tatsuo Takamure; Takehiro Nishiba
Original assignee: Nippon Valqua Industries, Ltd.
Priority date: 2002-07-03
Filing date: 2003-07-01
Publication date: 2004-01-15
Also published as: AU2003241830A1

Abstract

A gate valve comprises a guide shaft (38) connected to a valve body (10) and guiding the operation of the valve body (10), and a guide mechanism fixed to a valve box main body (2) and guiding a stabilizer (46). In operation of the valve body (10), the stabilizer (46) is guided by the guide mechanism and the valve body (10) is guided by the guide shaft (38) so that the valve body (10) operates in the direction to approach to or depart from a gate opening.

Description

Description Technical Field Gate Valve Technical Field The present invention relates to a gate valve, for example, for a gate valve for vacuum and a shaft seal used between a vacuum chamber and an external atmosphere or between vacuum chambers in a semiconductor manufacturing apparatus or the like. Regarding the structure. 2. Description of the Related Art In the manufacture of semiconductors such as silicon wafers, thin films, and liquid crystals, processing and processing of workpieces such as ion plating and plasma etching are performed in a clean environment in a high vacuum.

In such a vacuum apparatus, the work is once carried into the preliminary chamber, the preparatory chamber is evacuated to a predetermined degree of vacuum, and then the work is sequentially carried into processing chambers, processing chambers, etc., where processing, processing, etc. are performed. I have. Therefore, a vacuum gate valve with high hermeticity is provided at the carry-in / out port between these chambers.

In these manufacturing apparatuses, for example, a so-called "one-action type" vacuum gate valve used between a vacuum chamber and an external atmosphere or between vacuum chambers is shown in FIGS. 20 and 21. The structure shown in FIG.

That is, the vacuum gate valve 201 is provided with a substantially box-shaped valve body 202 and a long valve body 205 that is housed in the valve body 202 and is elongated in the width direction. Box body 2 0 2 And a bonnet flange member 204 covering the lower end opening. The upper portion of one of the long side walls of the valve box body 202 is cut out substantially entirely, and the side plate 203 is fitted into the cutout.

A substantially rectangular gate opening 209 is formed through a pair of long side walls including the side plate 203.

An upper seal seat surface 2 11 and a lower seal seat surface 2 16 are formed in the valve body 200 in such a manner as to sandwich the gate opening 209 up and down. 2 1 1 and 2 16 are continuous even though they are uneven. Thus, a continuous seal seat surface from the upper seal seat surface 2 11 to the lower seal seat surface 2 16 is formed inside the valve box body 202.

On the other hand, the valve body 205 is formed such that the width at the distal end portion 205 a side is narrow and the width at the base end portion 205 b side is large, so that the valve body 205 is In O2, a distal end portion 205a and a proximal end portion 205b are formed so as to abut against the upper seal seat surface 211 and the lower seal seat surface 211, respectively.

A continuous seal member mounting groove is formed in the distal end portion 205 a and the base end portion 205 b of the valve body 205 having such a shape, and an O-ring or the like is formed in the seal member mounting groove. The seal member 2 13 is mounted with an adhesive or the like.

When the valve body 205 provided with such a seal member 13 is moved upward by being guided by a drive 206 from below in the figure, the seal member 21 By contacting the seating surfaces 211 and 216, the flow through the gate opening 209 of the valve box body 202 is cut off.

That is, as shown in the enlarged view of FIG. 22, the vacuum gate valve 201 is inserted into the substantially box-shaped valve box body 202 so as to penetrate the valve box body 202. Gate openings 209a and 209b are formed. And this gate opening 20 The drive shaft 206 is moved by a drive mechanism (not shown) in a direction transverse to 9a and 209b.

The movement of the drive shaft 206 causes the substantially plate-shaped valve body 205 attached to the tip of the drive shaft 206 to separate from the valve seat formed in the valve box body 202. The gate openings 209a and 209b are configured to be opened or closed by approaching.

Note that a seal member 213 is attached to the distal end portion 205a and the base end portion 205b of the valve body 205. As shown in FIG. 23, the seal member 211 is used in a state where a long and thin annular seal member is pushed open to both sides from a broken line position.

As a result, the valve body 205 moves through the drive shaft 206 in the direction to close the gate openings 209a and 209b, and is formed in the valve body 202. When the user sits on the valve seat, the seal member 2 13 allows hermetic closure. In the drawing, reference numeral 203 denotes a side plate mounted on the gate opening 209a of the valve box body 202.

Then, such a vacuum gate valve 201 is inserted into, for example, a semiconductor manufacturing apparatus, and the gate opening 209a is on the atmosphere side and the gate opening 209b is on the pressure reducing side. It is used by being connected (for example, see Japanese Patent Publication No. 6-50148).

By the way, in such a vacuum gate valve 201, the valve body 205 closes the gap between the gate openings 209a and 209b as shown in FIG. In this state, if there is almost no pressure difference between the spaces partitioned by the vacuum gate valve 201, as shown in FIG. The valve seat formed on the main body 202 is stably seated and the closed state is maintained. When there is a pressure difference between the spaces partitioned by the vacuum gate valve 201, for example, the gate opening 209a is on the atmosphere side, and the gate opening 209b is When the pressure is reduced, depending on the magnitude of the differential pressure, the valve element 205 is moved from the gate opening 209a side communicating with the atmosphere to the gate opening 209b side. It will be pressed.

In this case, the sealing member 2 13 attached to the valve body 205 is pressed by a constant force from a drive mechanism connected to the drive shaft 206 to a valve seat surface formed on the valve box body 202. It is in a state pressed against

Therefore, due to such a differential pressure, the valve element 205 is pressed toward the gate opening part 209b, and as shown in FIG. 24, the valve element 205 is moved to the gate opening part 209b. You will lean to the side.

In this case, as shown in FIG. 24 (B), the side surface 205 of the valve body 205 c force may be closely attached to the inner wall surface 202 a of the valve body 202. At this time, the valve box body 202 and the valve body 205 are scratched, which causes the generation of metal particles.

Further, at this time, as shown by the arrow in FIG. 24 (B), the sealing member 211 attached to the valve element 205 is perpendicular to the direction in which the valve element 205 is closed. As a result, the seal member 2 13 rolls and wears.

Therefore, when the inclination of the valve element 205 is large, that is, when the distance between the valve element 205 and the inner wall surface 202 a of the valve box body 202 is large, As described above, the moving distance by which the sealing member 213 is dragged becomes large, so that the sealing member 213 of the valve element 205 is worn and damaged, and the durability of the sealing member 213 is remarkable. As a result, sufficient sealing performance cannot be secured.

For this purpose, the inclination of the valve body 205 is made as small as possible, The best way is to make the moving distance in the direction perpendicular to the direction in which the body 2 • 5 closes, for example, 1 mm or less, preferably 0.3 to 0.7 mm or less.

However, recently, in the manufacture of liquid crystal displays and the like, as the size of the liquid crystal substrate has increased, the gate opening 209 has a large horizontal gate length of 600 mm or more. 0 1 is required. With such a large vacuum gate valve 201, the valve body 205 is also large and heavy, and the force generated by the differential pressure is also large. Therefore, when the valve body 205 is closed, the valve is closed. It is difficult to secure the valve body 205 to the box body 202 so that the inclination of the valve body 205 due to the differential pressure as described above hardly occurs.

In addition, the assembling accuracy is increased, and the inner wall surface of the valve body 205 and the valve box body 202

Even if fine adjustment of the distance to 2a is performed, the valve body 205 is heavy, so that it becomes very unstable during operation. Therefore, the position of the valve body 205 is not always stable, and the valve body 205 may come into contact with the inner wall surface of the valve body 202 during operation, and malfunction may occur. The valve body 205 is scratched, which may cause metal particles.

SUMMARY OF THE INVENTION In view of the above situation, the present invention does not cause metal particles to be generated when the side surface of the valve body contacts or adheres to the inner wall surface of the valve body when the valve body is operated. When the body is in the closed state, the distance that the sealing member is dragged in the direction perpendicular to the closing direction by the horizontal movement of the valve body due to the differential pressure can be minimized, and the seal material is worn and damaged It is an object of the present invention to provide a gate valve capable of ensuring a sufficient sealing property over a long period without any problems.

Further, in the conventional vacuum gut valve 201 as described above, it is necessary to replace the sealing member 21 for maintenance. However, in the conventional vacuum gate valve 201, in order to replace the seal member 212, first, the assembly of the valve box body 202 and the bonnet flange member 204 is released, and The valve body 205 had to be withdrawn. As described above, the replacement work of the seal members 2 13 requires a considerable work space in the direction in which the valve body 205 is pulled out, and the replacement work is complicated.

In particular, in the case of a large-sized vacuum gate valve having an opening length of 60 O mm or more, the drive shaft 206 holding the valve element 205 is long and heavy, so The dispensing operation is extremely difficult.

In view of such circumstances, an object of the present invention is to provide a vacuum gate valve that can easily perform a replacement operation of a seal member for closing a gate opening even if the gate valve is large. .

Further, in the conventional vacuum gate valve 201 as described above, a driving portion, for example, a shaft sealing portion between the driving shaft 206 and the valve box body 202 includes an elastomer, a resin, Alternatively, a shaft seal such as a metal bellows is used.

For example, as the elastomer seal structure, a shaft seal 300 as shown in FIG. 25 is used.

That is, the shaft seal 300 includes a substantially cylindrical shaft seal body 302 and a flange portion 304 projecting outward from the lower end of the shaft seal body 302.

Then, the drive shaft 308 is passed through a through hole 303 formed inside the shaft seal main body 302, and the drive shaft 308 can freely move in the through hole 306. ing. In addition, shaft seal grooves 310 are formed at the upper and lower ends of the inner wall of the through hole 310 of the shaft seal body 302, and O-rings and the like are formed in the shaft seal grooves 310. A shaft seal member 3 1 2 consisting of This seals the space between the upper space A (inside the valve box) and the lower space B (atmospheric side) via the shaft seal body 302 in Figs. 25 and 26. .

Further, a flange seal groove 314 is formed on the upper surface of the flange 304, and a flange seal member 316 made of an O-ring or the like is mounted in the flange seal groove 314. ing.

The shaft seal main body 302 is mounted in the shaft seal through hole 320 formed in the housing 330, and the flange portion 304 is sandwiched by the shaft seal mounting plate member 322. Thus, the shaft seal main body 302 is mounted on the housing 330.

However, such a conventional shaft seal 300 has the following problems.

That is, for example, as shown in FIG. 26, such a shaft seal 300 is attached to the above-described vacuum gate valve 201 by, for example, the drive shaft 206 and the valve box main body 202. When it is used for the shaft seal part between the shaft seal body and the drive mechanism, the drive shaft 206 connected to the drive mechanism moves up and down along the inner wall of the through hole 303 of the shaft seal body 302. become.

That is, in the vacuum gate valve 201, the valve body 205 coupled to the drive shaft 206 operates vertically in parallel to the axis of the drive shaft 206.

However, as the valve body 205 becomes farther from the shaft seal 300 which is the shaft seal portion, the valve body which is the point of application of force is further away from the shaft seal 300 which is the fulcrum, and the valve Body 205 will exhibit unstable movement.

Such unstable operation of the valve element 205 does not cause a problem when the weight of the valve element 205 is light and the moving distance (stroke) of the valve element 205 is short. However, recently, in the manufacture of liquid crystal displays and the like, as the size of the liquid crystal substrate has increased, the gate opening 209 has a large horizontal gate length of 60 O mm or more. 0 5 is now required. In such a large vacuum gate valve 201, the valve body 205 is also large and heavy, and the moving distance of the valve body 205 exceeds 10 O mm. The operation of 205 becomes extremely unstable.

Therefore, due to such unstable movement of the valve element 205, the horse kinetic shaft 206 coupled to the valve element 205 has a slight swing as shown by the arrow in FIG. It will move.

As a result, the swing of the drive shaft 206 causes the shaft seal member 3 12 provided on the inner wall of the through hole 303 of the shaft seal body 302 as shown by the arrow in FIG. In addition, an eccentric load is applied to the flange sealing member 316 provided on the upper surface of the flange 304.

That is, since the lower surface 304 a of the flange portion 304 and the shaft seal mounting plate member 322 are in surface contact, the shaft seal body 3

Since the eccentricity of 0 2 cannot be absorbed, an eccentric load is applied to the shaft seal member 3 12.

When such an eccentric load is applied to the shaft seal member 312, the durability of the shaft seal member 312 deteriorates, and the sealing performance decreases.

In addition, when a lateral force is applied to the valve body 205 by the pressure difference in the valve closed state of the valve body 205, the eccentricity of the drive shaft 206 becomes large, and the shaft seal member 3

The sealing performance of 1 and 2 will be reduced.

Further, when such eccentric load is repeatedly applied to the shaft seal member 312, the shaft seal member 312 is worn and damaged, resulting in low durability. And the sealing performance will be reduced.

In view of the above situation, the present invention absorbs the eccentric load of the shaft member even when the shaft member is eccentric, and applies the eccentric load to the seal member provided in the through hole of the shaft seal body. An object of the present invention is to provide a shaft seal that is excellent in sealing performance and durability without any problem.

Another object of the present invention is to provide a gate valve using such a shaft seal and having excellent sealing performance and durability. DISCLOSURE OF THE INVENTION The present invention has been made in order to achieve the problems and objects in the prior art as described above, and a gate valve of the present invention has a substantially box-shaped valve box main body;

A gate opening formed through the valve body;

A drive shaft moving in a direction transverse to the gate opening;

A valve attached to the tip of the drive shaft,

When the drive shaft moves in a direction crossing the gate opening, a valve body attached to the tip of the drive shaft is operated in a direction approaching or moving away from the gate opening,

Accordingly, the gate valve is configured to open or close the gate opening by the valve body,

A guide shaft connected to the valve body for guiding operation of the valve body;

A stabilizer connected to the other end of the guide shaft,

A guide mechanism fixed to the valve body, and configured to form a stabilizer; In the operation of the valve element, the stabilizer is guided by the guide mechanism, and the valve element is guided by the guide shaft, and the valve element is operated in a direction to approach or move away from the gate opening. It is characterized by.

With this configuration, the stabilizer is guided by the guide mechanism fixed to the valve box main body when the valve element is operated by the drive shaft in the direction approaching or moving away from the gate opening, and follows the guide mechanism. Thus, the valve element is guided by the guide shaft.

Therefore, the valve element is guided by the guide mechanism fixed to the valve box main body, and at the time of its operation, the movement of the valve element is regulated and guided, and the valve element is guided by the inner wall of the valve box main body. No metal particles are generated because they do not come into contact with or adhere to such parts.

In addition, since the valve element is guided by a guide mechanism fixed to the valve body, when the valve element is in the closed state, the valve element moves horizontally due to the differential pressure and seals in the direction perpendicular to the closing direction. The member can be guided to a position where the dragging distance is minimized. As a result, the sealing material does not suffer from abrasion and damage, and sufficient sealing performance can be ensured for a long period of time.

Further, in the gate valve of the present invention, the guide mechanism includes: a guide member fixed to a valve box body;

A guide restricting member is mounted on the guide member so as to be rotatably supported in the gate opening direction.

As described above, the guide mechanism includes the guide member fixed to the valve box body, and the guide restricting member attached to the guide member so as to be rotatably supported in the gate opening direction. Therefore, by adjusting the guide member by rotating the guide member in the gate opening direction with respect to the guide member, the position and movement of the valve body when the valve body is operated are adjusted. can do.

This prevents the valve from contacting or adhering to the inner wall of the valve body when the valve is moved, and minimizes the inclination due to the differential pressure when the valve is closed. The position of the guide restricting member can be adjusted so that the generation of metal particles and the deterioration of the durability and sealing performance of the sealing material due to wear and damage of the sealing member can be prevented.

Further, the gate valve according to the present invention is characterized in that the gate valve includes an adjusting member that adjusts a rotation position of the guide regulating member in the gate opening direction with respect to the guide member.

Thus, the turning position of the guide restricting member in the gate opening direction with respect to the guide member can be easily adjusted by the adjusting member.

Further, the gate valve of the present invention is characterized in that the adjusting member is provided on both sides in the gate opening direction with respect to the guide restricting member.

With this configuration, by operating the adjusting members provided on both sides in the gate opening direction, the turning position of the guide regulating member in the gate opening direction with respect to the guide member can be easily and accurately adjusted. Thus, the position and the movement of the valve body during the operation of the valve body can be accurately controlled.

Further, in the gate valve of the present invention, the guide restricting member includes a guide groove, and the stabilizer includes a guide member guided in the guide groove.

With this configuration, the guide member of the stabilizer is guided along the guide groove of the guide restricting member, so that the position and movement of the valve body when the valve body is operated can be more accurately determined. Can be controlled.

Further, in the gate valve according to the present invention, the guide member of the stabilizer is a guide roller. As a result, the guide roller of the stabilizer is guided along the guide groove of the guide restricting member, so that the position and the movement of the valve body during the operation of the valve body are more accurately controlled. be able to.

Further, in the gate valve of the present invention, the guide member is a drive cylinder that drives a drive shaft,

A guide restricting member mounted so as to be rotatably supported in the gate opening direction with respect to the side wall of the drive cylinder.

By using a drive cylinder that drives the drive shaft as the guide member and mounting the guide restricting member on the side wall of the drive cylinder, there is no need to provide a separate guide member, and the installation space for the drive part can be reduced. Can be. Further, the gate valve of the present invention is characterized in that a plurality of the guide mechanisms are provided.

By providing a plurality of guide mechanisms in this way, it is possible to more stably control the movement and position of the valve element when the valve element is operating.

Also, the present invention provides a valve box body formed in a substantially box shape,

A gate opening formed through the valve body;

A drive shaft that moves in a direction transverse to the gate opening;

A valve attached to the tip of the drive shaft,

The seal member that seals the flow of the fluid in the gut opening portion includes the valve box main body. It is characterized by being attached to the body side.

With such a configuration, the seal member can be replaced by slightly moving the valve body in the axial direction without pulling out the valve body from the valve box body.

Here, the valve body is formed in a box shape having a long side wall and a short side wall.

The gate opening is formed so as to penetrate a long side wall of the valve body.

The valve body is formed to have a substantially L-shaped cross section from a narrow distal end having a sealing surface on a distal end side and a wide proximal end having a sealing surface on a proximal end side,

The seal member may include a first seal portion in contact with a narrow distal end of the valve body, and a second seal portion in contact with a base end of the valve body.

Even with such a vacuum gate valve, the seal member can be easily removed or replaced.

Further, the shaft seal of the present invention comprises: a substantially cylindrical shaft seal body;

A flange portion projecting outward from the lower end of the shaft seal body,

A shaft member penetrating through a through hole formed inside the shaft seal body and slidable in the through hole;

A shaft seal member mounted in a shaft seal groove formed in an inner wall of the through hole of the shaft seal body, for sealing between the shaft member and the shaft seal body;

A flange sealing member mounted in a flange sealing groove formed on the upper surface of the flange,

The shaft seal body is mounted in a shaft seal through hole formed in the housing, and A shaft seal configured to be mounted on a housing by sandwiching the flange portion with a shaft seal mounting plate member,

A flange lower surface sealing groove is formed on the lower surface of the flange portion, and a flange lower surface sealing member is attached to the flange portion lower surface sealing groove.

With this configuration, even if the shaft member is eccentric due to the swinging during operation of the shaft member or the external force during stop, the shaft seal body is eccentric, the flange seal mounted on the upper surface of the flange portion. The crushing amount changes between the member and the flange lower surface sealing member mounted on the lower surface of the flange portion, so that the eccentricity of the shaft seal body can be absorbed.

By the flange seal members provided on the upper and lower surfaces of the flange, an eccentric load is not applied to the shaft seal member provided in the through hole of the shaft seal main body, and the sealing performance and durability of the shaft seal member can be improved. it can.

Further, the shaft seal of the present invention includes a substantially cylindrical shaft seal body,

A flange portion projecting outward from the lower end of the shaft seal body,

A shaft member that is inserted into a through hole formed in a shaft seal body of the shaft seal and is slidable in the through hole;

The shaft seal body is mounted in a shaft seal through-hole formed in the housing, and

A shaft seal configured to be mounted on a housing by sandwiching the flange portion with a shaft seal mounting plate member, A shaft seal main body outer peripheral groove is formed on the outer periphery of the shaft seal main body, and an outer peripheral seal member is mounted on the shaft seal main body outer peripheral groove.

With this configuration, even when the shaft member is eccentric due to the external force during operation or stoppage of the operation of the shaft member or the shaft seal body is eccentric, the outer peripheral seal member mounted on the outer periphery of the shaft seal body. The squashing amount changes between the shaft seals, and the eccentricity of the shaft seal body can be absorbed.

The eccentric load is not applied to the shaft seal member provided in the through hole of the shaft seal body by the outer peripheral seal member mounted on the outer periphery of the shaft seal body, thereby improving the sealing performance and durability of the shaft seal member. be able to.

In addition, the shaft seal of Honmei is composed of a shaft seal body with a substantially cylindrical shape,

A flange portion projecting outward from the lower end of the shaft seal body,

A shaft member that is inserted into a through hole formed inside the shaft seal body and is slidable in the through hole;

The shaft seal body is mounted in a shaft seal through hole formed in the housing, and

A shaft seal configured to be mounted on a housing by sandwiching the flange portion with a shaft seal mounting plate member,

A flange lower surface seal groove is formed on the lower surface of the flange portion, and a flange lower surface seal member is mounted on the flange lower surface seal groove,

A shaft seal body outer peripheral groove is formed on an outer periphery of the shaft seal body, and the shaft seal is formed. An outer peripheral sealing member is mounted in the outer peripheral groove of the main body.

In addition, at this time, even in the outer peripheral seal member mounted on the outer periphery of the shaft seal main body, the crushing amount changes between the outer peripheral seal members, and the eccentricity of the shaft seal main body can be absorbed.

Therefore, the sealing performance can be further maintained by the flange seal members provided on the upper and lower surfaces of the flange and the outer peripheral seal member mounted on the outer periphery of the shaft seal main body, and the through hole of the shaft seal main body can be formed. An eccentric load is not applied to the provided shaft seal member, and the sealing performance and durability of the shaft seal member can be further improved.

In the shaft seal of the present invention, a plurality of flange lower surface seal grooves formed on the lower surface of the flange portion and a plurality of flange lower surface seal members mounted on the flange portion lower surface seal grooves are provided. It is characterized by.

With this configuration, since a plurality of flange lower surface seal members are provided, the amount of crushing varies between the flange seal members provided on the upper and lower surfaces of the flange, thereby absorbing the eccentricity of the shaft seal body. Effect will be further improved.

In addition, since a plurality of flange lower surface seal members are provided, the eccentric load is not applied to the shaft seal member provided in the through hole of the shaft seal body by the flange lower surface seal member, and the seal performance and durability of the shaft seal member are reduced. The effect that can improve the performance is further improved. In the shaft seal of the present invention, a plurality of shaft seal main body outer peripheral grooves formed on the outer periphery of the shaft seal main body, and a plurality of outer peripheral seal members mounted on the shaft seal main body outer peripheral groove are provided. It is characterized by.

With this configuration, since a plurality of outer peripheral seal members are provided, the amount of crushing between the outer peripheral seal members changes, and the effect of absorbing the eccentricity of the shaft seal body is further improved.

In addition, since a plurality of outer peripheral seal members are provided, the outer peripheral seal member does not apply an eccentric load to the shaft seal member provided in the through hole of the shaft seal body, and the sealing performance of the shaft seal member is reduced. However, the effect of improving durability can be further improved.

The shaft seal of the present invention is characterized in that a bush for guiding a shaft member is mounted in a through hole of the shaft seal body.

With this configuration, when the shaft member is eccentric due to the swing during operation of the shaft member or the external force during stop, the bush for guiding the shaft member first follows the eccentricity of the shaft member. Then, after the shaft member guide bush follows, the shaft seal body follows the eccentricity of the shaft member.

Therefore, an eccentric load is not applied to the shaft seal member provided in the through hole of the shaft seal body, and the effect of improving the sealing performance and durability is further improved.

The shaft seal of the present invention is characterized in that the shaft member guide bush is mounted on upper and lower ends of a through hole of the shaft seal body, respectively.

Since the shaft member guide bush is mounted on each of the upper and lower ends of the through hole of the shaft seal body, the effect of following the eccentricity of the shaft member as described above is excellent, and Eccentric to the shaft seal member provided in the through hole of the seal body No load is applied, and the effect of improving sealing performance and durability is further improved.

Further, the gate valve of the present invention includes: a valve box main body formed in a substantially box shape;

A gate opening formed through the valve body;

A drive shaft that moves in a direction transverse to the gate opening;

A valve attached to the tip of the drive shaft,

A shaft seal according to any of the above is mounted on a shaft seal portion between the drive shaft and a valve box body.

With this configuration, the sealing performance and durability in the shaft sealing portion between the drive shaft and the valve box body are significantly improved.

A gate opening formed through the valve body;

A drive shaft that moves in a direction transverse to the gate opening;

A valve body attached to the tip of the drive shaft,

A guide shaft connected to the valve body, for guiding the operation of the valve body, wherein the drive shaft is attached to the drive shaft and the tip of the guide shaft by moving in a direction crossing the gate opening. The valve is actuated in a direction to approach or move away from the gate opening,

As a result, the gate opening is opened or closed by the valve body. A configured gate valve,

The shaft seal according to any one of the above is attached to a shaft seal portion between the drive shaft and a valve box body and a shaft seal portion between the guide shaft and a valve box body.

With such a configuration, the sealing performance and durability of the drive shaft in the shaft seal portion with the valve box body, and in the shaft seal portion of the guide shaft with the valve box body, are significantly improved. . BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic exploded perspective view of an embodiment of the gate valve of the present invention.

FIG. 2 is a front view of the valve in an open state in which a valve box part in FIG. 1 is omitted.

FIG. 3 is a front view similar to FIG. 2 showing a valve closed state.

FIG. 4 is a view in the direction of arrow A in FIG.

FIG. 5 is a schematic perspective view schematically showing a guide mechanism of the gate valve of the present invention. FIG. 6 is a cross-sectional view showing an operating state of the gut valve of the present invention in a valve open state. FIG. 7 is a cross-sectional view showing the operation state of the gate valve of the present invention during the operation from the valve open state to the valve closed state.

FIG. 8 is a cross-sectional view of the gate valve of the present invention in the closed state, showing the operating state.

FIG. 9 is an exploded perspective view of a vacuum gate valve according to one embodiment of the present invention.

FIG. 10 is a sectional view of the vacuum gate valve shown in FIG.

FIG. 11 is a perspective view of a seal member used for the vacuum gate valve of FIG. FIG. 12 shows another embodiment of the present invention, and is a cross-sectional view of a vacuum gate valve disclosed in Japanese Patent Application Laid-Open Publication No. 2001-465. FIG. 13 is an exploded perspective view of a valve body and a seal member used in the vacuum gate valve of FIG.

FIG. 14 is a partially enlarged sectional view of an embodiment of the shaft seal of the present invention.

FIG. 15 is a partially enlarged cross-sectional view similar to FIG. 14 showing another embodiment of the shaft seal of the present invention.

FIG. 16 is a partially enlarged cross-sectional view similar to FIG. 14 showing another embodiment of the shaft seal of the present invention.

FIG. 17 is a schematic exploded perspective view of an embodiment of the gate valve to which the shaft seal of the present invention is applied.

FIG. 18 is a front view of the valve in an open state in which the valve box portion of FIG. 17 is omitted.

FIG. 19 is a front view similar to FIG. 18 showing the valve closed state.

FIG. 20 is an exploded perspective view of a conventional vacuum gate valve.

FIG. 21 is a cross-sectional view of the conventional vacuum gate valve shown in FIG.

FIG. 22 is a sectional view of a conventional gate valve in a closed state.

FIG. 23 is a perspective view showing a seal member of a conventional gate valve.

FIG. 24 is a cross-sectional view of a conventional gate valve in an operating state showing a valve closing state. FIG. 25 is a partially enlarged sectional view of a conventional shaft seal.

FIG. 26 is a partially enlarged cross-sectional view illustrating a state where a conventional shaft seal is applied to a conventional gate valve. BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments (examples) of the present invention will be described in more detail with reference to the drawings. As shown in FIG. 1, the gate valve 1 has a substantially box-shaped valve body 2 and a side valve. A rate 4, a bonnet flange member 6 that covers the lower end opening of the valve body 2, and a substantially elongated plate-shaped valve body 10 supported by a drive shaft 8 are provided.

The drive shaft 8 is not firmly fixed to the lower end of the valve body 10 at its upper end 8a, but supports the valve body 10 in a swingable manner to transmit the vertical drive operation. It's just a relationship.

A substantially rectangular gate opening 16, 18 penetrates between the long side wall 12, on which the side plate 4 of the valve body 2 is mounted, and the other long side wall 14. It is formed.

In the valve body 2, the upper seal seating surface 20 is located on the upper side of FIG. 1 so as to sandwich the gate openings 16, 18 vertically, and the lower seal seating surface is located on the lower side of FIG. 1. 22 are formed. These seal seat surfaces 20 and 22 are continuously formed so as to be stepped and deformed into a loop shape.

Thus, a continuous seal seat surface extending from the upper seal seat surface 20 to the lower seal seat surface 22 is formed inside the valve body 2. As shown in the cross-sectional views of FIG. 6 and FIG. 7, the seal seat surface 20 with which the distal end portion 10 a of the valve body 10 abuts is formed by a groove 2 formed in the valve body 2. Consists of four.

On the other hand, as shown in FIG. 4, the valve body 10 is formed such that the width at the distal end 10a is small and the width at the base 10b is large. As a result, when the valve body 10 moves, the distal end portion 10a and the base end portion 10b are brought into contact with the upper seal seat surface 20 and the lower seal seat surface 22, respectively. ing.

A seal member 26 having the same shape as the seal member 13 shown in FIG. 11 is attached to the distal end portion 10 and the proximal end portion 10b of the valve body 10.

When the valve body 10 provided with such a sealing member 26 is guided by the drive shaft 8 from below in FIG. 1 and is moved upward in FIG. 1, the sealing member is sealed as shown in FIG. The member 26 comes into contact with the upper seal seat surface 20 and the lower seal seat surface 22. As a result, the space between the gate openings 16 and 18 of the valve body 2 is closed so that the valve is closed.

Further, as shown in FIGS. 2 and 3, the bonnet flange member 6 has a drive cylinder 28 fixed to a central portion and two drive cylinders 28 fixed to both sides thereof. The drive shaft 8 of the drive cylinder 28 moves up and down in a sealed state via a housing 'bush 32 provided in a drive hole 30 formed in the bonnet flange member 6. It is configured as follows.

Further, the bonnet flange member 6 is provided with two guide shaft holes 34 on both sides of the center drive cylinder 28. A housing bush 36 and a guide bush 38 are provided in the guide shaft hole 34.

Then, the two guide shafts 40 are configured to move up and down in a sealed state via the housing bush 36 and the guide bush 38.

The upper end 42 of the guide shaft 40 is fixed to the lower end of the valve body 10, and the lower end 44 of the guide shaft 40 is a plate-shaped stabilizer 14 having a substantially U-shaped cross section. Fixed to 6. As shown in FIGS. 2 to 5, the stabilizer 46 has two column members 50 standing and fixed inside the guide shafts 40, respectively. The central drive cylinder 28 is disposed so as to face both side surfaces 52 of the drive cylinder 28.

As shown in FIGS. 4 and 5, two guide rollers 56 functioning as guide members are rotatable on the column member 50 via an L-shaped guide roller support member 54. It is supported by. As shown in FIGS. 2 to 5, both sides 52 of the central drive cylinder 28 functioning as a guide member are provided with a guide functioning as a guide restricting member via a pivot pin 58. The plate 60 is rotatably supported in the direction of the gate openings 16 and 18 as indicated by arrows in FIG.

In addition, connecting plates 64, 66 are fixed to the other side surfaces 62 of the central drive cylinder 28. Each of the connecting plates 64 and 66 is provided with a fine adjustment screw 68 that functions as an adjusting member. By operating the fine adjustment adjusting screw 68, the position of the guide plate 60 in the direction of the gate openings 16 and 18 can be finely adjusted as shown by the arrow in FIG. It is like that.

As shown in FIGS. 4 and 5, the guide plate 60 is formed with a guide groove 70 in the longitudinal direction, that is, in the vertical direction. The guide roller 56 rotates and slides in the guide groove 70.

The vacuum gate valve 1 thus constructed according to the present invention is operated as follows, as shown in FIGS.

That is, as shown in FIG. 6, in the valve open state, the drive shaft 8 of the drive cylinder 28 is immersed in the drive cylinder 28. In this state, the guide roller 56 is located at the lower end of the guide groove 70 of the guide plate 60, and the stabilizer 46 is also at the lower end position.

Therefore, as shown in FIG. 1, the guide shaft 40 is also at the lower end position, whereby the valve body 10 fixed to the upper end 42 of the guide shaft 40 has a force S, a lower position, that is, a gate opening. The valve is in the open position away from 16 and 18.

When this valve is operated from the open state to the closed state, it is shown in Figs. As described above, the drive shaft 8 of the drive cylinder 28 protrudes from the drive cylinder 28. As a result, the valve body 10 is pushed upward by the upper end 8a of the drive shaft 8.

At this time, the guide roller 56 is guided upward by rotating and sliding in the guide groove 70 of the guide plate 60. As a result, the moving position of the guide shaft 40 fixed to the stabilizer 46 is increased via the stabilizer 46 while being regulated.

Accordingly, the valve body 10 fixed to the upper end 42 of the guide shaft 40 rises while its movement position is regulated.

Conversely, when the valve operates from the valve closed state to the valve open state, the drive cylinder 28 is immersed in the drive cylinder 28 with the drive shaft 8 force. Thereby, the valve body 10 is pulled down by the upper end 8a of the drive shaft 8.

At this time, the guide roller 56 is guided downward by rotating and sliding in the guide groove 70 of the guide plate 60. As a result, the guide shaft 40 fixed to the stabilizer 46 moves downward while being regulated via the stabilizer 46.

Along with this, the valve body 10 fixed to the upper end 42 of the guide shaft 40 descends while its movement position is regulated.

Therefore, when the valve body 10 is operated by the drive shaft 8 in a direction approaching or moving away from the gate openings 16, 18, the guide roller support member 54 of the column member 50 of the stabilizer 46 is not moved. Guide rollers 56 provided Forced to be guided in guide grooves 70 of guide plates 60 provided in drive cylinder 28 fixed to valve body 2.

As a result, the guide shaft 40 fixed to the stabilizer 46 moves. The valve body 10 moves while its position is regulated, and accordingly, the valve body 10 fixed to the upper end 42 of the guide shaft 40 moves while its movement position is regulated.

Therefore, during operation, the movement of the valve body 10 is regulated and guided, and the valve body 10 does not come into contact with or adhere to the inner wall of the valve box body 2, so that the metal particles Does not occur.

In addition, since the valve element 10 is guided by the guide groove 70 of the plan plate 60 provided on the drive cylinder 28 fixed to the valve box body 2, the valve element 10 is in the closed state, The horizontal movement of the valve body 10 due to the effect of the differential pressure guides the seal member 26 to a position where the dragging distance of the seal member 26 in the direction perpendicular to the closing direction is minimized. Therefore, the sealing material does not suffer from abrasion and damage, and a sufficient sealing life can be secured for a long period of time.

By operating the fine adjustment screw 68 to rotate the guide plate 60 in the gate opening direction with respect to the drive cylinder 28, the valve body 10 is actuated. The position and movement of the valve element can be adjusted, and the effect of preventing the generation of the metal particles and the effect of preventing the seal member from being worn and damaged can be further improved.

In the above-described embodiment, the center drive cylinder 28 is used as the guide member. However, the drive cylinders 28 on both sides can be used, and the number thereof is not particularly limited. Further, the plan plates 60 are provided on both side surfaces of the center drive cylinder 28, but it is also possible to provide them on only one side surface.

Further, in the above embodiment, the guide plate 60 having the guide groove 70 and the guide roller 56 are provided as the guide member, but a known guide member such as an LM guide may be used instead. is there.

The preferred embodiment of the present invention has been described above, but the present invention is not limited to this. However, the shape of the valve body 2 and the shape of the valve body 10 are not limited to the above-described embodiment, and the present invention has been described for the case where the valve body is used as a vacuum gate valve. Various changes can be made without departing from the object of the present invention, such as being able to be used as a gate valve when other gates are required. 9 and 10 show a vacuum gate valve according to one embodiment of the present invention.

The vacuum gate valve 1 covers a substantially box-shaped valve body 2, is housed in the valve body 2, and covers an elongated valve body 10 long in the width direction and a lower end opening of the valve body 2. And a bonnet flange member 6. In addition, one long side wall of the valve body 2 is cut out substantially entirely, and the point that the side plate 4 is fitted into the cutout is that the vacuum gate shown in FIGS. Same as valve 1.

A substantially rectangular gate opening 16 is formed through a pair of long side walls including the side plate 4.

On the other hand, the inside of the valve body 2 is formed substantially in the same manner as the inside of the valve body 2 shown in FIG. 20. The seal seat surface 22 is formed continuously.

In this embodiment, a seal member mounting groove is formed in the upper seal seat surface 20 and the lower seal seat surface 22 of the valve box main body 2 內. In the seal member mounting groove, as shown in FIG. The seal member 13 as shown is mounted. The seal member 13 is formed in a shape that can be mounted in a seal member mounting groove formed so as to be connected to the upper seal seat surface 20 and the lower seal seat surface 22. In other words, it is formed in a ring shape that pushes open from both sides from the horizontal portion at both ends. It is preferable that the seal member 13 is formed of a flexible material such as fluoro rubber.

On the other hand, the valve body 10 mounted movably in the up and down direction in the valve body 2 has a narrow width. The distal end portion 10a and the wide base end portion 10b are formed so as to be long in the lateral direction, and are further formed in a substantially L-shaped cross section. And, unlike the valve element 205 shown in FIG. 20 or FIG. 21, no seal member is attached to such a valve element 10.

The point that such a valve body 10 is housed in the valve body 2 and is moved in the vertical direction with the movement of the drive shaft 8 is the same as the vacuum gate valve 201 shown in FIG. It is.

In the thus configured gate valve for vacuum 1 according to the present embodiment, the seal member 13 shown in FIG. 11 is mounted not on the valve body 10 that moves up and down but on the valve box body 2 side. However, since the sealing area is secured, a sufficient sealing force can be exhibited.

According to the gate valve 1 of the present embodiment, the bonnet flange member 6 is removed from the valve box body 2 for maintenance or for improving the degree of vacuum, for example, when replacing the deteriorated seal member 13. It can be replaced without removing it. That is, by lowering the position of the narrow tip portion 10a of the valve body 10 to a position about 50 mm or more lower than the lower seal seating surface 22 of the valve box, the operator can operate the gate 10 By reaching inward from the outside of the opening 16, the seal member 13 can be replaced without removing the bonnet flange member 6 from the valve box body 2. Therefore, it is preferable to make the opening of the side plate 4 large so that maintenance can be easily performed.

Therefore, according to the present embodiment, it is not necessary to secure a large working space in the direction in which the drive shaft 8 is pulled out.

The vacuum gate valve according to one embodiment of the present invention has been described above, but the present invention is not limited to the above-described embodiment.

For example, in the above embodiment, the valve element 10 has a narrow distal end 10 a and a wide proximal end. 10b, a substantially L-shaped cross-section is adopted, and the seal member 13 is formed into a deformed ring shape.The shape of the valve body 10 and the seal member 13 is as follows. The present invention is not limited to the embodiments.

For example, as shown in FIG. 12, a vacuum gate valve 1 ′ provided with a valve element 10 ′ having a substantially T-shaped cross section disclosed in Japanese Patent Application Laid-Open No. Applicable. In this case, conventionally, when closing the gate opening 16 ′, as shown in FIG. 13, a valve body 10 ′ having a substantially T-shaped cross section is provided with a three-part sealing device. A seal member 13a is mounted. In the case of such a vacuum gate valve 10 ′, a seal member 13 b having the same shape as the seal member 13 a is mounted in a seal groove formed in the valve body 2.

As described above, the shape of the valve element and the valve seat constituting the vacuum gate valve, the shape of the sealing member for sealing the gate opening, and the like are not limited to the embodiment.

Furthermore, the sealing member is not limited to a round cross section, but may be formed in a flat plate shape.

In FIG. 14, 101 indicates the shaft seal of the present invention as a whole.

The shaft seal 101 includes a substantially cylindrical shaft seal body 102 and a flange 104 projecting outward from the lower end of the shaft seal body 102.

Then, the shaft member 108 is passed through a through hole 106 formed inside the shaft seal main body 102, and the shaft member 108 is slidable in the through hole 106. It is configured to be.

That is, on the inner wall of the through hole 06 of the shaft seal body 102, shaft seal grooves 110 are formed near the upper and lower ends, respectively, and the O-ring is formed in the shaft seal groove 110. A shaft seal member 1 1 2 made of a material such as the above is mounted. A flange seal groove 122 is formed on the upper surface of the flange 104, and a flange seal member 124 such as an O-ring is mounted in the flange seal groove 122. ing. Thus, the space between the upper space A and the lower space B of the shaft seal body 102 is sealed.

Further, bearing grooves 1 14 are formed at the upper and lower ends of the shaft seal body 102, and the bearing grooves 1 14 are used as bearings for the shaft members 108, and bushings 1 1 Six are accommodated. The shaft member guide bush 1 16 is fixed to the shaft seal body 102 by fastening the bearing retaining ring member 118 with a fastening member 120 such as a screw.

A flange lower surface seal groove 1 26 is formed on the lower surface of the flange portion 104. The flange lower surface seal groove 1 26 has a flange lower surface seal member 1 28 made of an O-ring or the like. Is installed.

The housing 130 has a shaft seal through hole 132 formed therein, and the shaft seal body 102 is mounted in the shaft seal through hole 132.

Further, the shaft seal mounting plate member 1 34 has a flange accommodating recess 1 36 formed therein. The flange accommodating recess 1 36 accommodates the flange portion 104,

The shaft seal body 102 is mounted on the housing 130 by sandwiching the flange portion 104 with the shaft seal mounting plate member 134.

According to the shaft seal 101 of the present invention configured as described above, when the shaft member 108 is eccentric due to rocking during the operation of the shaft member 108 or external force during stoppage, the shaft member Guide bush 1 1 6 Force Follows eccentricity of shaft member 108 first. Then, after the shaft member guide bush 1 16 has followed, the shaft seal body 102 follows the eccentricity of the shaft member 108. Therefore, an eccentric load is not applied to the shaft seal member 112 provided in the through hole 106 of the shaft seal body 102, and the sealing performance and the durability can be improved. In addition, even if the shaft member 108 is eccentric due to the swinging during the operation of the shaft member 108 or the external force during the stop, the shaft seal body 102 is eccentric, it is mounted on the upper surface of the flange portion 104. The squeezing amount changes between the flanged seal member 124 and the flanged lower seal member 128 mounted on the lower surface of the flange to absorb the eccentricity of the shaft seal body 102. be able to.

Therefore, the eccentric load may be applied to the shaft seal member 112 provided in the through hole 106 of the shaft seal body 102 by the flange seal members 124, 128 provided on the upper and lower surfaces of the flange. In addition, sealing performance and durability can be improved. The shaft seal body 102 is not particularly limited, and may be a metal such as aluminum or SUS, or a synthetic resin such as tetrafluoroethylene resin.

The shaft seal member 112 is not particularly limited, and may be an elastomer such as NBR or fluoro rubber, or a synthetic resin such as tetrafluoroethylene resin. Although a ring is used, it is possible to use a deformed sealing member such as a U-packing square ring.

Further, the flange seal member 124 and the flange lower seal member 128 are not particularly limited, and elastomers such as NBR and fluorine rubber, and synthetic resins such as tetrafluoroethylene resin can be used. In this embodiment, an O-ring is used, but a deformed sealing member such as a square ring can be used.

In this embodiment, the lower surface of the flange portion 104 has a lower surface seal groove 126 of the flange portion, and a lower surface seal groove mounted on the lower surface seal groove 126 of the flange portion. Although one notch member 1 28 was provided for each, not shown, a plurality of flange bottom seal grooves 1 26 and a flange bottom seal member 128 on the lower surface of the flange are separated by a certain distance. It is also possible to provide.

With this configuration, since a plurality of flange lower surface sealing members 128 are provided, the crushing amount changes between the flange sealing members 124, 128 provided on the upper and lower surfaces of the flange, The effect of absorbing the eccentricity of the shaft seal body 102 is further improved.

Since the shaft seal 101 of this embodiment has basically the same configuration as the shaft seal 101 shown in FIG. 14, the same components are denoted by the same reference numerals and detailed description thereof will be given. Description is omitted.

In the shaft seal 101 of this embodiment, a flange lower surface seal groove 1 26 on the lower surface of the flange portion 104 of the shaft seal 101 shown in FIG. The flange lower surface sealing member 1 28 attached to 1 26 is omitted.

Further, in the shaft seal 101 of this embodiment, the outer periphery of the shaft seal body 102 is formed with a shaft seal body outer peripheral groove 138 which is vertically spaced at a constant interval of two values, and these shaft seal bodies are formed. An outer peripheral seal portion forest 140 is attached to each of the outer peripheral grooves 1 38.

With such a configuration, even if the shaft member 108 is eccentric due to the external force during operation or stop of the shaft member 108 during operation, the shaft seal body 102 is eccentric, The amount of crushing varies between the outer peripheral sealing members 140 mounted on the outer periphery of the seal main body 102, so that the eccentricity of the shaft seal main body 102 can be absorbed. Thus, the sealing performance can be maintained by the outer peripheral sealing member 140 mounted on the outer periphery of the shaft seal main body 102, and provided in the through hole 106 of the shaft seal main body 102. The eccentric load is not applied to the shaft seal member 112, and the sealing performance and durability can be improved.

The outer peripheral sealing member 140 is not particularly limited, and may be an elastomer such as NBR or fluoro rubber, or a synthetic resin such as tetrafluoroethylene resin. In this embodiment, Although an O-ring is used, a deformed sealing member such as a square ring can be employed.

Further, in this embodiment, two shaft seal body outer peripheral grooves 1 38 and an outer peripheral seal member 140 are provided on the outer periphery of the shaft seal main body 102, but this number can be changed as appropriate. And is not particularly limited.

In the shaft seal 101 of this embodiment, as in the case of the shaft seal 101 shown in FIG. 14, the lower surface seal groove 1 26 of the flange portion on the lower surface of the flange portion 104 and the lower surface seal groove of this flange portion And a flange lower surface sealing member 1 28 attached to 1 2 6. Further, in the shaft seal 101 of this embodiment, two outer circumferential grooves 1 38 of the shaft seal body which are spaced apart from each other by a predetermined distance are formed on the outer circumference of the shaft seal body 102. An outer peripheral sealing member 140 is mounted on each of the outer peripheral grooves 1 38.

With this configuration, it is possible to swing or rotate the shaft member 108 during operation. Even if the shaft member 108 is eccentric due to the external force during stop and the shaft seal body 102 is eccentric, the flange seal member 124 mounted on the upper surface of the flange 104 and the flange The crushing amount changes between the flange lower surface sealing members 128 mounted on the lower surface of the portion, and the eccentricity of the shaft seal main body 102 can be absorbed. Moreover, at this time, even in the outer peripheral seal member 140 mounted on the outer periphery of the shaft seal main body 102, the crushing amount changes between the outer peripheral seal members 140, and the shaft seal main body 102 Eccentricity can be absorbed.

As a result, the sealing performance is further improved by the flange seal members 124 and 128 provided on the upper and lower surfaces of the flange and the outer peripheral seal member 140 mounted on the outer periphery of the shaft seal body 102. As well as being able to maintain, the eccentric load is not applied to the shaft seal member 112 provided in the through hole 106 of the shaft seal body 102, further improving the performance and durability of the seal 'I'. Can be improved.

FIG. 17 is a schematic exploded perspective view of an embodiment of the gate valve to which the shaft seal 101 of the present invention is applied, and FIG. 18 is a front view of the valve opened state in which the valve box portion of FIG. 17 is omitted. FIG. 19 is a front view similar to FIG. 18 showing a valve closed state.

As shown in FIG. 17, the gate valve 150 has a substantially box-shaped valve box body 152, a side plate 154, and a bonnet flange covering the lower end opening of the valve box body 152. And a substantially long plate-shaped valve element 160 supported by the drive shaft 158.

Note that the drive shaft 158 is not firmly fixed to the lower end of the valve body 160 with its upper end 158a force, but supports the valve body 160 swingably. The relationship is only to transmit the driving motion in the vertical direction.

A substantially rectangular gate opening 16 is provided between one long side wall 16 2 on which the side plate 15 4 of the valve body 15 2 is mounted and the other long side wall 16 4. 6 a, 1 66 b is formed to penetrate.

An upper seal seating surface 170 is provided in the valve box body 152 on the upper side of the opening in FIG. 17 so as to sandwich the gate openings 1666a and 1666b up and down. On the lower side of the opening in FIG. 17, a lower seal seat surface 172 is formed. These seal seat surfaces 170 and 172 are continuously formed so as to be stepped and deformed into a loop shape.

As a result, a continuous seal seat surface from the upper seal seat surface 170 to the lower seal seat surface 72 is formed inside the valve box main body 152.

On the other hand, the valve element 160 is formed such that the width at the distal end portion 160a is small and the width at the proximal end portion 160b is large. As a result, when the valve element 160 moves, the distal end portion 160a and the base end portion 160b force are brought into contact with the upper seal seat surface 170 and the lower seal seat surface 72, respectively. It is configured as follows.

Further, a seal member 176 is attached to the distal end 160a and the proximal end 160b of the valve element 160.

When the valve element 160 provided with such a sealing member 176 is guided by the drive shaft 158 from below in FIG. 17 and is moved upward in FIG. 17, the sealing member 17 6 comes in contact with the upper seal seat surface 170 and the lower seal seat surface 170. This closes the space between the gate openings 1666a and 1666b of the valve body 152 so that the valve is closed.

Also, as shown in FIGS. 18 to 19, the bonnet flange 5 | 5 material 1 56 has a drive cylinder 178 at the center and two drive cylinders 178 at both sides. ing. The drive shafts 158 of these drive cylinders 178 are sealed in a sealed state through shaft seals 182 provided in drive holes 180 formed in the bonnet flange member 156. It is configured to move up and down. Further, the bonnet flange member 156 is provided with two guide shaft holes 184 on both sides of the central drive cylinder 178. The guide shaft hole 184 is provided with a shaft seal 186.

Then, the two guide shafts 190 are configured to move up and down in a sealed state via the shaft see-throughs 186 and the guide covers 188, respectively.

The upper end 192 of the guide shaft 190 is fixed to the lower end of the valve body 160.

The shaft seal 101 of the present invention is used for the shaft seal 1802 of the drive shaft 158 of the gate valve 150 and the shaft seal 186 of the guide shaft 190 configured as described above. Can be.

With such a configuration, in the gate valve, the sealing performance and durability of the shaft seal portion of the drive shaft 15 1 with the valve body and the shaft seal portion of the guide shaft 190 with the valve case body can be achieved. The properties are greatly improved.

Although the preferred embodiment of the present invention has been described above, the present invention is not limited to this. In the present invention, the case where the present invention is used as a vacuum gate valve has been described. Various changes can be made without departing from the purpose of the present invention, for example, it can be used as a gate valve. (The invention's effect)

According to the present invention, the stabilizer is guided by the guide mechanism fixed to the valve box main body when the valve body is operated by the drive shaft in the direction approaching or moving away from the gate opening, and follows the guide mechanism. Then, the valve element is guided by the guide shaft. Therefore, the valve body is guided by the guide mechanism fixed to the valve box body, and the At this time, the movement of the valve body is regulated and guided, and the valve body does not come into contact with or adhere to the inner wall of the valve body, so that no metal particles are generated.

In addition, since the valve is guided by a guide mechanism fixed to the valve body, highly reproducible position control is possible, and even when the valve is closed, the valve moves horizontally due to the effect of the differential pressure. Thus, the distance that the seal member is dragged in the direction perpendicular to the closing direction can be minimized. As a result, the gate sealing material does not suffer from abrasion and damage, and sufficient sealing performance can be ensured for a long period of time.

Further, according to the present invention, the guide mechanism includes a guide member fixed to the valve body, and a guide regulating member mounted on the guide member so as to be rotatably supported in the gate opening direction. By adjusting the guide restricting member by rotating the guide restricting member in the gate opening direction with respect to the guide member, it is possible to adjust the position and the movement of the valve element when the valve element operates.

As a result, when the valve element moves, the valve element does not come into contact with or adhere to the inner wall of the valve box body, and when the valve element is tilted due to the effect of the differential pressure in the closed state of the valve element. In addition, the position of the guide restricting member can be adjusted so that the inclination can be minimized, preventing the generation of metal particles and the deterioration of the durability of the sealing material due to the wear and damage of the sealing member. it can.

Further, according to the present invention, the turning position of the guide restricting member in the gate opening direction with respect to the guide member can be easily adjusted by the adjusting member.

Further, according to the present invention, by operating the adjusting members provided on both sides in the gate opening direction, the turning position of the guide regulating member in the gate opening direction with respect to the guide member can be easily and accurately adjusted. It is possible to accurately control the position and movement of the valve element when the valve element is operated. Further, according to the present invention, since the guide member of the stabilizer is guided along the guide groove of the guide regulating member, the position and the movement of the valve body when the valve body is operated are more accurately controlled. be able to.

Further, according to the present invention, the guide roller of the stabilizer is guided along the guide groove of the guide regulating member, so that the position and the movement of the valve body when the valve body is operated can be controlled more accurately. be able to.

Furthermore, according to the present invention, a drive cylinder that drives a drive shaft is used as a guide member, and a guide restricting member is attached to a side wall of the drive cylinder. Installation space can be reduced.

Further, according to the present invention, by providing a plurality of guide mechanisms, it is possible to more stably move and control the position of the valve body during the operation of the valve body. Further, according to the vacuum gate valve of the present invention, the valve body or the seal member can be replaced without completely removing the valve body from the valve box.

Therefore, even for a large vacuum gate valve, it is not necessary to use a large amount of labor and it is not necessary to secure a work space for it. Therefore, it is effective for use in a narrow place, and in particular, even for a large vacuum gate valve, a great deal of labor can be eliminated.

Furthermore, according to the present invention, even if the shaft member is eccentric due to the swinging force during operation of the shaft member or the external force during stop, the flange seal member mounted on the upper surface of the flange portion even if the shaft seal member tries to be eccentric. Then, the squashing amount changes between the flange lower surface seal members mounted on the lower surface of the flange portion, and the shaft seal main body is eccentric, so that the shaft seal member can be prevented from being eccentric.

The flange seal members provided on the upper and lower surfaces of these flanges allow the shaft An eccentric load is not applied to the shaft seal member provided in the through hole of the seal body, and the sealing performance and durability of the shaft seal member can be improved.

Further, according to the present invention, even if the shaft member is eccentric due to the swinging during operation of the shaft member or the external force during stop, the shaft seal body is eccentric, the outer peripheral seal mounted on the outer periphery of the shaft seal body. The amount of squashing between the members changes, and the eccentricity of the shaft seal body can be absorbed.

Further, according to the present invention, the shaft member is eccentric by the external force during the operation or stop of the shaft member due to the external force during the operation or stop of the shaft member, and the shaft seal body is eccentric Even if it does, the amount of crushing between the flange seal member mounted on the upper surface of the flange and the flange lower seal member mounted on the lower surface of the flange may change, thereby absorbing the eccentricity of the shaft seal body. it can.

The flange seal members provided on the upper and lower surfaces of the flange and the outer peripheral seal member mounted on the outer periphery of the shaft seal body may cause an eccentric load to be applied to the shaft seal member provided in the through hole of the shaft seal body. Therefore, the sealing performance and durability of the shaft seal member can be further improved.

Further, according to the present invention, since a plurality of flange lower surface seal members are provided, the amount of crushing between the flange seal members provided on the upper and lower surfaces of the flange changes, thereby absorbing the eccentricity of the shaft seal body. Will be even better. In addition, since a plurality of flange lower surface seal members are provided, the eccentric load is not applied to the shaft seal member provided in the through hole of the shaft seal body by the flange lower surface seal member, and the seal performance and durability of the shaft seal member are reduced. The effect that can improve the performance is further improved.

Further, according to the present invention, since a plurality of outer peripheral seal members are provided, the squashing amount changes between the outer peripheral seal members, and the effect of absorbing the eccentricity of the shaft seal body is further improved. .

In addition, since a plurality of outer peripheral seal members are provided, the outer peripheral seal member does not apply an eccentric load to the shaft seal member provided in the through hole of the shaft seal body, thereby improving sealing performance and durability. The effect that can be improved is further improved.

Further, according to the present invention, when the shaft member is eccentric due to rocking during operation of the shaft member or external force during stop, the shaft member guide bush first follows the eccentricity of the shaft member. Then, after the push for guiding the shaft member follows, the shaft seal body follows the eccentricity of the shaft member.

Further, according to the present invention, since the shaft member guide pushes are respectively mounted on the upper and lower ends of the through hole of the shaft seal body, the effect of following the eccentricity of the shaft member as described above is excellent. Thus, an eccentric load is not applied to the shaft seal member provided in the through hole of the shaft seal body, and the effect of improving the sealing performance and durability is further improved.

Further, according to the present invention, in a gate valve, a shaft seal between a drive shaft and a valve box body is provided. The sealing performance and durability of the part will be significantly improved.

Further, according to the present invention, in the gate valve, the sealing performance and durability in the shaft seal portion between the drive shaft and the valve box main body and in the shaft seal portion between the guide shaft and the valve box main body are significantly improved. This is an extremely excellent invention which has many remarkable and unique effects such as:

Claims

The scope of the claims

1. A valve box body formed in a substantially box shape,

A gate opening formed through the valve body,

A drive shaft that moves in a direction transverse to the gate opening;

A valve attached to the tip of the drive shaft,

A stabilizer connected to the other end of the guide shaft,

A guide mechanism fixed to the valve box main body, for guiding a stabilizer, wherein, when the valve body is operated, the stabilizer is guided by the guide mechanism, and the valve body is guided by the guide shaft; A gate valve configured to operate in a direction approaching or moving away from a gate opening.

2. The guide mechanism comprises: a guide member fixed to the valve body;

2. The gate valve according to claim 1, further comprising: a guide restricting member mounted so as to be rotatably supported in the direction of the gate opening with respect to the guide member.

3. Rotational position of the guide restricting member in the gate opening direction with respect to the guide member 3. The gate valve according to claim 2, further comprising an adjusting member that adjusts the pressure.

4. The gate valve according to claim 3, wherein the adjusting member is provided on both sides of the guide restricting member in a gate opening direction.

5. The guide restricting member has a guide groove,

The gate valve according to any one of claims 2 to 4, wherein the stabilizer includes a guide member that is guided in the guide groove.

6. The gate valve according to claim 5, wherein the guide member of the stabilizer is a guide roller.

7. The guide member is a drive cylinder that drives a drive shaft, and includes a guide restricting member mounted so as to be rotatably supported on a side wall of the drive cylinder in the gate opening direction. 7. The gate valve according to claim 2, wherein:

8. The gate valve according to any one of claims 1 to 7, wherein a plurality of the guide mechanisms are provided.

9. A valve box body formed in a substantially box shape,

A gut opening formed through the valve body,

A drive shaft that moves in a direction transverse to the gate opening;

A valve attached to the tip of the drive shaft,

The drive shaft moves in a direction transverse to the gate opening, thereby The valve body attached to the tip of the shaft is actuated in the direction approaching or moving away from the gate opening,

A vacuum gate valve, wherein a seal member for sealing a flow of a fluid in the gate opening is attached to the valve body.

10. The valve body is formed in a box shape having a long side wall and a short side wall.

The seal member includes a first seal portion abutting on a narrow distal end portion of the valve body, and a second seal portion abutting on a base end portion of the valve body. 10. The vacuum gate valve according to claim 9, wherein:

1 1. A substantially cylindrical shaft seal body,

A flange portion projecting outward from the lower end of the shaft seal body,

The flange attached to the flange seal groove formed on the upper surface of the flange A seal member, and

A shaft seal, wherein a flange portion lower surface seal groove is formed on a lower surface of the flange portion, and a flange lower surface seal member is attached to the flange portion lower surface seal groove.

1 2. A substantially cylindrical shaft seal body,

A flange portion projecting outward from the lower end of the shaft seal body,

A shaft member penetrated through a through hole formed in a shaft seal body of the shaft seal, and slidable in the through hole;

A shaft seal, wherein a shaft seal main body outer peripheral groove is formed on an outer periphery of the shaft seal main body, and an outer peripheral seal member is mounted on the shaft seal main body outer peripheral groove.

1 3. A substantially cylindrical shaft seal body,

A flange portion projecting outward from the lower end of the shaft seal body,

14. A plurality of flange lower surface seal grooves formed on the lower surface of the flange portion, and a plurality of flange lower surface seal members mounted in the flange lower surface seal grooves. The shaft seal according to any one of items 1 to 13.

15. A plurality of shaft seal body outer peripheral grooves formed on the outer periphery of the shaft seal body and a plurality of outer peripheral seal members mounted on the shaft seal body outer peripheral grooves are provided. The shaft seal according to any one of claims 12, 13, and 14, wherein:

16. The shaft seal according to any one of claims 11 to 15, wherein a shaft member guide bush is mounted in a through hole of the shaft seal body.

17. The shaft seal according to claim 16, wherein the shaft member guiding pushes are respectively mounted on upper and lower ends of a through hole of the shaft seal body.

1 8. A valve box body formed in a substantially box shape,

A gate opening formed through the valve body;

A drive shaft that moves in a direction transverse to the gate opening;

A valve attached to the tip of the drive shaft,

A gate valve, wherein the shaft seal according to any one of claims 11 to 17 is attached to a shaft seal portion between the drive shaft and a valve box body.

1 9. A valve box body formed in a substantially box shape,

A gate opening formed through the valve body;

A drive shaft that moves in a direction transverse to the gate opening;

A valve body attached to the tip of the drive shaft, A guide shaft connected to the valve body, for guiding the operation of the valve body, wherein the drive shaft is attached to the drive shaft and the tip of the guide shaft by moving in a direction crossing the gate opening. The valve is actuated in a direction to approach or move away from the gate opening,

The shaft seal according to any one of claims 11 to 17, is attached to a shaft seal portion between the drive shaft and the valve box body and a shaft seal portion between the guide shaft and the valve box body. Gate valve to do.