WO2003106954A3 - VACUUM PRESSURE GAUGE - Google Patents

VACUUM PRESSURE GAUGE Download PDF

Info

Publication number
WO2003106954A3
WO2003106954A3 PCT/GB2003/002452 GB0302452W WO03106954A3 WO 2003106954 A3 WO2003106954 A3 WO 2003106954A3 GB 0302452 W GB0302452 W GB 0302452W WO 03106954 A3 WO03106954 A3 WO 03106954A3
Authority
WO
WIPO (PCT)
Prior art keywords
filament
pressure gauge
gauge head
vacuum pressure
ambient pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/GB2003/002452
Other languages
French (fr)
Other versions
WO2003106954A2 (en
Inventor
Kenneth George Packer
Matthew Key
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to AU2003250360A priority Critical patent/AU2003250360A1/en
Priority to AT03760071T priority patent/ATE443853T1/en
Priority to EP03760071A priority patent/EP1511983B1/en
Priority to DE60329387T priority patent/DE60329387D1/en
Priority to US10/516,963 priority patent/US7165458B2/en
Publication of WO2003106954A2 publication Critical patent/WO2003106954A2/en
Publication of WO2003106954A3 publication Critical patent/WO2003106954A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Impact Printers (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)

Abstract

Un manomètre à conductivité thermique comprend une tête de jauge (2) montée rotative dans une cuve dont la pression ambiante doit être mesurée ainsi qu'un filament électrique (6) monté sur la tête de jauge, laquelle est dotée d'une entrée qui permet d'exposer le filament électrique à la pression ambiante de la cuve. Les longueurs des composantes directionnelles du filament (6) suivent deux axes orthogonaux X-X dont l'un est parallèle à l'axe de rotation de la tête de jauge (2).A thermally conductive pressure gauge comprises a gauge head (2) rotatably mounted in a tank whose ambient pressure is to be measured as well as an electrical filament (6) mounted on the gauge head, which has an inlet which allows to expose the electric filament to the ambient pressure of the tank. The lengths of the directional components of the filament (6) follow two orthogonal axes X-X, one of which is parallel to the axis of rotation of the gauge head (2).

PCT/GB2003/002452 2002-06-13 2003-06-06 Vacuum gauge Ceased WO2003106954A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AU2003250360A AU2003250360A1 (en) 2002-06-13 2003-06-06 Vacuum gauge
AT03760071T ATE443853T1 (en) 2002-06-13 2003-06-06 VACUUM METER
EP03760071A EP1511983B1 (en) 2002-06-13 2003-06-06 Vacuum gauge
DE60329387T DE60329387D1 (en) 2002-06-13 2003-06-06 VACUUM METER
US10/516,963 US7165458B2 (en) 2002-06-13 2003-06-06 Vacuum gauge

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0213611.7 2002-06-13
GBGB0213611.7A GB0213611D0 (en) 2002-06-13 2002-06-13 Vacuum Gauge

Publications (2)

Publication Number Publication Date
WO2003106954A2 WO2003106954A2 (en) 2003-12-24
WO2003106954A3 true WO2003106954A3 (en) 2004-06-03

Family

ID=9938523

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2003/002452 Ceased WO2003106954A2 (en) 2002-06-13 2003-06-06 Vacuum gauge

Country Status (7)

Country Link
US (1) US7165458B2 (en)
EP (1) EP1511983B1 (en)
AT (1) ATE443853T1 (en)
AU (1) AU2003250360A1 (en)
DE (1) DE60329387D1 (en)
GB (1) GB0213611D0 (en)
WO (1) WO2003106954A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004035728B4 (en) * 2004-07-23 2020-10-01 BSH Hausgeräte GmbH Shut-off valve and pressure measuring head
US9247598B2 (en) * 2009-01-16 2016-01-26 Mag Instrument, Inc. Portable lighting devices
US9335231B2 (en) * 2014-03-25 2016-05-10 Mks Instruments, Inc. Micro-Pirani vacuum gauges

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB827311A (en) * 1957-01-03 1960-02-03 Mini Of Supply Improvements in or relating to low pressure or vacuum gauges
DE1094341B (en) * 1958-12-13 1960-12-08 Cons Electrodynamics Corp Arrangement for the automatic control of the temperature of a resistor through which current flows
US4729241A (en) * 1985-11-21 1988-03-08 Leybold-Heraeus Gmbh Measuring head for vacuum gauge

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3199356A (en) * 1961-11-06 1965-08-10 Andriulis Vytautas Pressure gauge
SU491858A1 (en) 1973-01-02 1975-11-15 Ленинградский Ордена Ленина Электротехнический Институт Им.В.И.Ульянова (Ленина) Thermal vacuum gauge
US3915009A (en) * 1973-05-03 1975-10-28 Ruska Instr Corp Precision pressure gauge
JPS561133A (en) 1979-06-20 1981-01-08 Tokyo Electric Co Ltd Suction port body for carpet
JPS564481A (en) 1979-06-22 1981-01-17 Tdk Corp Thermal pen tip and preparation thereof
US4307323A (en) 1980-04-04 1981-12-22 Granville-Phillips Company Vacuum gauge
JP3069975B2 (en) 1991-09-06 2000-07-24 アネルバ株式会社 Ionization gauge
JP4339948B2 (en) 1999-02-25 2009-10-07 キヤノンアネルバ株式会社 Hot cathode ionization gauge

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB827311A (en) * 1957-01-03 1960-02-03 Mini Of Supply Improvements in or relating to low pressure or vacuum gauges
DE1094341B (en) * 1958-12-13 1960-12-08 Cons Electrodynamics Corp Arrangement for the automatic control of the temperature of a resistor through which current flows
US4729241A (en) * 1985-11-21 1988-03-08 Leybold-Heraeus Gmbh Measuring head for vacuum gauge

Also Published As

Publication number Publication date
WO2003106954A2 (en) 2003-12-24
AU2003250360A8 (en) 2003-12-31
EP1511983B1 (en) 2009-09-23
US7165458B2 (en) 2007-01-23
DE60329387D1 (en) 2009-11-05
ATE443853T1 (en) 2009-10-15
GB0213611D0 (en) 2002-07-24
AU2003250360A1 (en) 2003-12-31
EP1511983A2 (en) 2005-03-09
US20060086189A1 (en) 2006-04-27

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