WO2003088350A1

WO2003088350A1 - Closed container conveying system

Info

Publication number: WO2003088350A1
Application number: PCT/JP2003/001524
Authority: WO
Inventors: Masaru Fujimoto; Yukiharu Tokisato; Akemichi Yamamoto
Original assignee: Hirata Corporation
Priority date: 2002-04-12
Filing date: 2003-02-14
Publication date: 2003-10-23
Also published as: JP2005294280A

Abstract

A closed container conveying system (10) used in a production line inside a clean room and capable of freely conveying closed containers (6) between a plurality of processing devices in the clean room, comprising a plurality of closed container holding means (11) for holding the closed containers (6), a horizontal movement means (12) laid in an upper ceiling space in the clean room for horizontally moving the closed container holding means (11), and a lifting means (13) installed on the horizontal movement means (12) and suspending, lifting, and turning the closed container holding means (11), wherein the lifting means (13) is formed of a telescopic extending mechanism, and a turning mechanism to turn the closed container holding means (11) is installed at the lower end part thereof, whereby the conveying efficiency, functionality, space-saving, and safety of the closed container conveying system can be improved.

Description

Description Closed container transport system Technical field

The invention of the present application relates to a closed container transport system, particularly in a semiconductor manufacturing plant or the like.

FOUP (Front Opening Unified Pod: closed container that can open the front side for storing semiconductor wafers, etc.) and SMIF (Standardized Mechanical Interface) pod (the bottom side for storing semiconductor wafers, etc.) between multiple processing equipment installed in the clean room The present invention relates to an improvement in an overhead traveling type closed container transfer system capable of freely transferring a closed container such as a closed container. Background art

In the manufacturing process of semiconductor integrated circuits, liquid crystal display panels, and the like, the yield of products is reduced due to the attachment of dust and particles to wafers, glass substrates, and the like. For this reason, the production line in the clean room is in operation, and various ideas have been devised regarding the FOUP transport device and FOUP transport system that can freely transport FOUP between various types of processing equipment installed in this clean room. It has been done.

The present applicant previously created a FOUP transport device having a moving means capable of moving the F0UP gripping means for gripping the FOUP in an arbitrary three-dimensional direction in the ceiling space above the clean room, A patent application was filed (Japanese Patent Application No. 2001-283407). In this case, a pair of horizontal fixed guide rails are arranged in parallel in the ceiling space, and one or more horizontal traveling guide rails are erected between the pair of fixed guide rails. The travel guide rail can travel along the fixed guide rail. Further, the traveling guide rail is provided with a traveling body traveling along the traveling guide rail, and the fixed guide rail, the traveling guide rail, and the traveling body constitute horizontal moving means. Further, the traveling body is provided with elevating means capable of elevating and rotating the FOUP gripping means, and three-dimensional moving means is provided by the elevating means and the horizontal moving means. Is configured.

This FOUP transfer device does not require an area for FOUP transfer on the floor of the clean room, and can effectively utilize the inside of the clean room. Therefore, for the same equipment, the required clean room volume can be reduced, and the equipment cost and maintenance cost of the clean room can be reduced. In addition, the installation position and installation direction of the processing equipment installed in the clean room are not easily restricted, so that the optimal arrangement can be selected.Furthermore, the FOUP gripping means is moved linearly from one position to another. Therefore, it is possible to improve the transport efficiency of the FOUP, and so on, and so on.

Moreover, in this FOUP transfer device, the lifting means comprises a multi-joint arm, and the plurality of arms of the multi-joint arm are sequentially and alternately overlapped and connected at their respective ends. Since the articulated arm expands and contracts by rotating each arm, the center of gravity of the articulated arm does not shift, the weight balance of the entire arm is stabilized, and the articulated arm extends ( Even when the lifting / lowering means descends, the radius due to gravity is small. As a result, the FOUP gripping means can transfer the FOUP to each processing device without displacement, and the articulated arm can be smoothly extended and retracted.When horizontally transporting the FOUP, the lifting / lowering means is compactly folded to reduce airflow. It has excellent effects such as minimizing turbulence, etc. o

However, this device has only one FOUP holding means, which is not sufficient in terms of FOUP transport efficiency, and has a stocker (in addition to a shelf, a device for loading and unloading). The FOUP was also equipped with a system to sort the wafers stored in the FOUP, but since it was placed on the floor as a single unit, space was required for that. Was. Furthermore, the multi-joint arm that constitutes the elevating means can be folded compactly, but still requires space. Further, although the FOUP transport device passes above the worker's path, there is no provision of a fall prevention net or the like, and there is a possibility that worker safety may be impaired. As described above, the conventional FOUP transfer apparatus still has room for improvement in terms of transfer efficiency, functionality, space saving, and safety. Disclosure of the invention

The invention of the present application solves the above-mentioned problems of the conventional F0UP transfer device, and further improves the transfer efficiency, functionality, space saving and safety, and improves the production line in the clean room. The objective is to provide a FOUP transport system that greatly improves production efficiency, reduces equipment costs and maintenance costs, and gives due consideration to safety.

It is another object of the invention of the present application to provide a closed container transport system that can solve the same problem and achieve the same effect without being limited to FOUP. According to the invention of the present application, such problems include a closed container gripping means for gripping a closed container, and a horizontal moving means laid in a ceiling space above a clean room, and for moving the closed container gripping means in a horizontal direction. An elevating means provided on the horizontal moving means for suspending the closed container gripping means, and elevating and turning the same. A plurality of processing apparatuses in the clean room, In the closed container transfer system, the closed container holding system is provided so that a plurality of closed container gripping means are provided. According to the transfer system, the closed container transfer system of the ceiling traveling type carries in and out of the closed containers to and from the multiple processing equipment groups installed in the clean room. Space saving in the clean room transport, Ru it is possible to realize a price reduction. In addition, since a plurality of closed container gripping means are provided, loading and unloading of the closed container can be performed in a short time, the efficiency of transporting the closed container is improved, and production of a production line in a clean room is performed. Efficiency can be greatly improved.

In a preferred embodiment, in this closed container transport system, the elevating means comprises a telescopic-type telescopic mechanism, and a lower end portion thereof is provided with a turning mechanism for turning the closed container gripping means. As a result, the lifting mechanism can be simplified and space-saving, and the closed container can be transported for a short distance, and further space-saving and low-cost transport in a clean room can be realized. In addition, since the closed container gripping means is provided with a swivel mechanism, the closed container can be loaded and unloaded in any direction, and the closed container in any direction can be taken out. From The transfer efficiency of the closed container is improved.

In another preferred embodiment, in the closed container transport system, a shelf for placing the closed container is disposed in the work area and above the worker passage. As a result, there is no need to arrange a separate stocker, and the stock position and the processing device position are close to each other, so that the transfer tact time can be shortened and the transfer efficiency of the sealed container can be further improved. In addition, since it can be used as a temporary buffer, it can be applied to a transfer step in which process time is important, and a closed container transfer system with high functionality can be provided.

Further, in another preferred embodiment, in this closed container transport system, a work for sorting storage substrates in a closed container is provided in the work area. As a result, there is no need to secure a separate storage area, further space savings can be achieved, wafers can be reloaded during transfer, and the transfer tact time can be further shortened and sealed. The container transport efficiency can be further improved.

Further, in another preferred embodiment, in the closed container transport system, a safety net in which only an access portion to the processing device is cut out is stretched in the work area. As a result, sufficient safety for workers can be achieved while ensuring the transfer efficiency, space saving, and functionality of the closed container transfer system. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is an overall perspective view showing a basic configuration of a production line in a clean room to which an FUP transfer system according to an embodiment of the present invention is applied.

FIG. 2 is a similar diagram illustrating that the FOUP transport system supplies FOUP transported by an automatic guided vehicle to a processing device.

FIG. 3 is an enlarged perspective view of a FOUP gripping portion of the FOUP transfer system. FIG. 4 is an overall perspective view of a production line in a clean room explaining that shelves are arranged in a work area of the FOUP transfer system above a worker passageway.

Figure 5 is a side view showing the FOUP transfer system loading and unloading FOUPs on the shelf. FIG. 6 is an overall perspective view of a production line in a clean room for explaining that the software is installed in the work area of the F0UP transfer system.

Fig. 7 is a side view showing the FOUP transfer system loading and unloading FOUPs overnight.

FIG. 8 is an overall perspective view of a production line in a clean room, explaining that a safety net has been installed in the work area of the FOUP transfer system. BEST MODE FOR CARRYING OUT THE INVENTION

As shown in FIG. 1, a production line 1 in a clean room to which the FOUP transport system according to the present embodiment is applied has a plurality of processing units 3 arranged in two rows on a floor 2 in a clean room. A worker passage is provided between the rows, and an interface device 4 is attached to each processing device 3 so as to face the worker passage.

The worker passage and the passage between the adjacent processing units 3 in each row constitute a minimum maintenance area for maintenance staff and operator personnel to work, and the processing unit 3 and the in-face unit 4 Are arranged across this maintenance area, thus minimizing the floor area of the clean room, maximizing the use of the clean room, and improving the efficiency of FOUP transfer by the FOUP transfer system 10 described later. Is being planned. However, the processing devices 3 do not need to be particularly arranged in a plurality of rows, and the direction of the front surface (the surface on which the interface device 4 is provided) is not specified, and some random arrangement is allowed. .

Each processing device 3 is a facility for sequentially processing the work stored in the FOUP, and performs different processing for each.However, in consideration of the balance of the tact time of the work processing, a plurality of the same processing devices are used. May be included. Examples of such a processing apparatus 3 include a processing apparatus for performing processing such as resist coating, exposure, development, ion implantation, annealing, and sputtering of a semiconductor wafer. In the following description, the description will be made with the processing for the semiconductor wafer in mind.

The face device 4 constitutes a buffer space for shutting off the processing device 3 and the clean room, and stores the wafers stored in the F 0 UP into the processing device 3. Loading and unloading are performed via the interface device 4. The wafer loading / unloading port 5 of the interface device 4 is sealed except when loading / unloading the wafers stored in the FOUP 6 into / from the processing device 3.

In the space above the clean room, a FOUP transfer system 10 for transferring the FOUPs 6 to the respective processing apparatuses 3 in a processing order is provided. The floor 2 is provided with a special space for the automatic guided vehicle 7 (see Fig. 2). When the automatic guided vehicle 7 places the FOUP 6 on it and enters the clean room, the FOUP transport is performed. The FOUP holding means 11 described later of the system 10 holds the FOUP 6, and the FOUP transfer system 10 transfers the FOUP 6 to a predetermined processing device 3. FIG. 2 illustrates the FOUP transfer system 10 trying to transfer the FOUP 6 to the predetermined processing apparatus 3 in this manner. The delivery of the FOUP 6 from the automatic guided vehicle 7 to the FOUP transport system 10 may be carried out by a shelf, a table, or the like.

As shown in FIG. 1, the FOUP transport system 10 includes a FOUP gripping unit 11 for gripping the FOUP 6, a horizontal moving unit 12 for horizontally moving the FOUP gripping unit 11 in a ceiling space above the clean room, The FOUP gripping means 11 is suspended from the moving means 12, and the FOUP gripping means 11 is lifted and lowered and turned.

The horizontal moving means 12 includes a pair of horizontal fixed guide rails 14 arranged in parallel with the ceiling space above the clean room, and one or more horizontal fixed guide rails 14 installed between the pair of horizontal fixed guide rails 14. The vehicle comprises a traveling guide rail 15 and a traveling body 16 movably disposed along the traveling guide rail 15. Therefore, the horizontal moving means 12 enables arbitrary movement of the traveling body 16 in the XY horizontal plane sandwiched between the pair of fixed guide rails 14 in the ceiling space above the clean room, thereby Means 13 and F 0 UP gripping means 11 are linearly moved from one position to the other position on the opposite side across the central passage so that the FOUP gripping means 11 is directly above the FOUP mounting table of the interface device 4. Can be Note that each of the pair of horizontal fixed guide rails 14 is provided with a plurality of columns 17 substantially above the F0UP mounting table of the plurality of interface devices 4 aligned on one side along the central passage. It is supported and arranged. Although the traveling drive mechanism of the traveling body 16 is not shown in detail, a motor integrated with the traveling body 16 is accommodated in the traveling guide rail 15, and rollers fixed to the rotating shaft of the traveling guide rail 15 The running body 16 runs along the running guide rail 15 by rolling on the inner wall surface. The elevating means 13 has a base end (upper end) fixedly connected to the traveling body 16 and travels along with the traveling body 16. The elevating means 13 is composed of a telescopic type telescopic mechanism, and the telescopic type telescopic mechanism expands and contracts in the Z direction, thereby raising and lowering the FOUP gripping means U, and the FOUP gripping means 11 and the interface device 4. Ensure that FOUP 6 is delivered to and from The lifting / lowering means 13 is provided at its lower end with a turning mechanism (not shown) for turning the FOUP holding means 11. The horizontal moving means 12 and the elevating means 13 constitute a three-dimensional moving mechanism. In addition, such a moving mechanism is sometimes called a gantry robot.

Next, the structure of the FOUP holding means 11 will be described in detail.

As described above, a plurality of FOUP gripping means 11 are provided (two in the present embodiment), and these are pivotally attached to the lower end of the elevating means 13. As shown in FIGS. 3 and 7, the specific structure thereof is such that the central portion of a bottom horizontal piece 11a formed by bending the central portion of a single elongated metal plate into a concave shape is provided by the lifting means 13 The two vertical pieces lib that are rotatably attached to the lower end of the telescopic type telescopic mechanism that constitutes a vertical section from both ends of the bottom horizontal piece 11a, and the top of each lib have a bottom horizontal piece 11a An upper horizontal piece 11c extends outward on the opposite side, and a gripping tool 18 having gripping claws (not shown in detail) is fixed to the tip of the upper horizontal piece 11c.

As the gripping claws of the gripper 18, an inflatable bag-shaped elastic body can be adopted. In this case, in order for the FOUP gripping means 11 to grip the FOUP 6, the bag-shaped elastic body is provided with an engaging plate (not shown) formed at the center of the locking plate 19 fixed to the upper part of the FOUP 6. The FOUP 6 is contracted and fitted, and then expanded and restored after fitting. When the FOUP gripping means 11 releases the gripping of the FOUP 6, the bag-shaped elastic body contracts again and escapes from the engagement hole. As described above, the force that contracts when the bag-like elastic body is fitted into the engagement hole and the force that contracts again when the bag-like elastic body escapes from the engagement hole are formed by the bag-shaped elastic member. The expansion / contraction mechanism of the elevating means 13 is contracted and overcomes by the reaction force of the force exerted on the engagement hole by the body, so that it is externally applied. The gripper 18 may of course be replaced by an open / close air chuck or an electric manipulator.

Actually, the upper horizontal pieces llc and 11c are radially arranged at intervals of about 120 degrees as shown in FIGS. In accordance with this, the bottom horizontal strip 11a (see Fig. 7) should also be spaced approximately 120 degrees from the center, which is rotatably attached to the lower end of the telescopic mechanism of the lifting / lowering means 13. Bent (not shown). The angle formed by the upper horizontal pieces 11c and the bent angle of the lower horizontal piece 11a is not limited to 120 degrees. In the extreme, it is possible to make the bottom horizontal piece 11a straight (180 degrees).

When the gripper 18 locks the FOUP 6, the FOUP gripping means 11 is raised by the elevating means 13 and transported to the predetermined processing apparatus 3 by the horizontal moving means 12. When the FOUP gripping means 11 arrives at the position of the predetermined processing device 3, it is lowered by the elevating means 13 and the FOUP 6 is placed and fixed on the mounting table of the interface device 4, and the elevating means 13 The gripper 18 releases the grip of F 0 UP 6 by slightly rising once. If it is necessary to correct the mounting direction of the FOUP 6, before the gripping is released, the turning mechanism provided in the lifting / lowering means 13 is activated, and the FOU P gripping means 11 and F0UP 6 are moved. By rotating a required amount, the mounting direction of F 0 UP 6 can be corrected.

In the work area of the FOUP transport system 10 and above the worker path, a shelf 20 for placing the FOUP 6 can be provided as shown in FIGS. The shelf 20 is mounted and fixed on a plurality of horizontal columns 21 erected between columns 17 erected on both sides of the passage. However, the shelf 20 may be replaced with a floor-standing three-dimensional one as long as the shelf 20 is within the work area of the FOUP transfer system 10.

On this shelf 20, FOUPs 6 to be carried next into each processing unit 3 can be temporarily placed (temporarily stocked) at a position close to the processing unit 3, and each FOUP 6 can be temporarily stored. FOUP 6 that has just been unloaded from Can be Furthermore, the shelves 20 can be used as a temporary buffer by temporarily storing a plurality of them according to the processing time of each processing device 3 o

Further, in the working area of the FOUP transfer system 10, as shown in FIGS. 6 and 7, a saw 22 for sorting the wafers stored in the FOUP can be further provided. The so-called night 22 is assembled into a well-shaped framed column 23 that is further erected between two horizontal columns 21 erected between columns 17 erected on both sides of the passage. A substantially central portion in the vertical direction of the torso is supported and suspended above the worker passage. A work base plate may be laid on the upper surface of the assembling column 23 as necessary. In a series of wafer processing steps, the processing order of a plurality of wafers stored and transported in the FOUP 6 is correctly performed, and the history of each wafer can be understood. This is a device that stores and arranges individual wafers at a predetermined location in a predetermined FOUP 6. As described above, by arranging such a source 22 above the worker's passage, it is possible to reload wafers during the transfer of the FOUP 6, thereby shortening the transfer tact time, FOUP transfer efficiency can be improved.

Further, as shown in FIG. 8, a safety net 24 in which only an access portion to each processing unit 3 is cut out is provided in the work area of the FOUP transfer system 10 above the worker passage. May be done. The safety net 24 is supported and stretched by a plurality of pillars 17 and is formed of a mesh so as not to hinder the downflow of clean air. Thereby, the safety of the worker can be achieved. A part of the safety net 24 can also be used as a shelf for temporarily storing the FOUP 6.

Since the present embodiment is configured as described above, the following effects can be obtained.

The overhead traveling FOUP transport system 10 carries in and out the FOUPs 6 to and from the three processing units installed in the clean room, thus realizing space-saving and low-cost transportation in the clean room. Can be. Also, since a plurality of FOUP gripping means 11 are provided, loading and unloading of FOUP 6 are performed. Can be performed in a short time, and the transfer efficiency of the FOUP 6 can be improved, and the production efficiency of the production line in the clean room can be greatly improved.

Further, the lifting / lowering means 13 is formed of a telescopic type telescopic mechanism, and has a turning mechanism for turning the FOUP gripping means 11 at the lower end thereof. Short-distance transportation is now possible, and further space-saving and low-cost transportation within the clean room can be realized. Furthermore, since the turning mechanism of the FOUP gripping means 11 is provided, the FOUP 6 can be carried in any direction, and the FOUP 6 in any direction can be taken out. Therefore, the transport efficiency of FOUP is improved.

In addition, when a shelf 20 for placing the FOUP 6 is provided in the work area of the FOUP transfer system 10 and above the worker passageway, it is not necessary to separately provide a stocker, and the stock position is not required. Since the position of the processing apparatus 3 approaches, the transfer tact time can be shortened, and the transfer efficiency of the FOUP can be further improved. Further, since the shelf 20 can also be used as a temporary buffer, the shelf 20 can be applied to a transfer step in which the process time is important, and the FOUP transfer system 10 with high functionality can be provided.

Furthermore, if the storage area 22 for the wafers stored in the FOUP is installed in the working area of the FOUP transfer system 10, there is no need to secure a separate storage area, further saving space. In addition to this, it is possible to reload wafers during transfer, thereby shortening the transfer tact time and further improving the transfer efficiency of the FOUP 6.

Further, when a safety net 24 is cut in the working area of the FOUP transport system 10 in which only the access portion to each processing device 3 is cut off, the transport efficiency of the FOUP transport system 10 is improved. Workers can be sufficiently safe while saving space and ensuring functionality.

Although the automatic guided vehicle 7 is used in the present embodiment, the present invention is not limited to this, and an aerial guided vehicle can be used. In addition, as long as the F0UP 6 can be transferred to the work area of the FOUP transfer system 10, any transfer means may be adopted. Further, in the present embodiment, the FOUP gripping means 11 including the gripper 18 is used. However, the present invention is not limited to this, and a fork may be used.

Further, the FOUP transport system 10 in the present embodiment can operate and have the same effect even when the SMI F pod is to be transported instead of the FOUP6. Generally, it can be suitably used as a transport system for closed containers.

In addition, various modifications can be made without departing from the gist of the present invention.

Claims

The scope of the claims

1. A closed container holding means for holding the closed container;

Horizontal moving means laid in the ceiling space above the clean room and moving the closed container gripping means in a horizontal direction;

Lifting / lowering means provided on the horizontal moving means, suspending the closed container gripping means, and raising / lowering and turning the same;

With

In a closed container transfer system configured to be able to transfer the closed container freely between a plurality of processing devices in the clean room,

A plurality of the closed container gripping means are provided.

A closed container transport system, characterized in that:

2. The closed container transport system according to claim 1, wherein the lifting / lowering means comprises a telescopic type telescopic mechanism, and a lower end portion thereof includes a turning mechanism for turning the closed container gripping means. .

3. The shelves for placing the above-mentioned closed containers are arranged in the work area of the closed container transport system and above the worker's path, 3. The shelf according to claim 1 or 2, wherein: Closed container transport system.

4. The work container according to claim 1, further comprising a source in the work area of the closed container transport system for sorting the storage substrate in the closed container. Closed container transport system.

5. A safety net in which only an access portion to the processing device is cut out is stretched in a working area of the closed container transport system, according to any one of claims 1 to 4, wherein The closed container transport system according to the above.