WO2003083428A9 - Lead iron tungstate capacitive transducer, relaxor material therefor, method of manufacture of relaxor material - Google Patents
Lead iron tungstate capacitive transducer, relaxor material therefor, method of manufacture of relaxor material Download PDFInfo
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- WO2003083428A9 WO2003083428A9 PCT/IN2002/000078 IN0200078W WO03083428A9 WO 2003083428 A9 WO2003083428 A9 WO 2003083428A9 IN 0200078 W IN0200078 W IN 0200078W WO 03083428 A9 WO03083428 A9 WO 03083428A9
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
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- C04B35/497—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates based on solid solutions with lead oxides
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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Definitions
- This invention relates to a lead iron tungstate capacitive transducer. More particularly, the invention relates to a lead iron tungstate capacitive pressure transducer with low temperature coefficient, high pressure coefficient and low hysteresis.
- Measurement of pressure is very vital in industrial manufacturing and processing. Particularly measurement of pressure with accuracy over a wide range is needed in such industries as automobiles, aerospace, steel and for synthesis of high strength materials. In all these industrial sectors, the accuracy in measurement is of paramount importance not only due to quality considerations but also to safety requirements.
- No single gadget can measure the entire pressure range with the same accuracy and reproducibility.
- the gadgets may also not be sensitive enough to small changes in pressure and be stable over a wide working temperature (in the range of 10-50°C). A system is therefore required which will have the necessary characteristics of large pressure coefficient to detect small changes even in a large absolute value and have a rninimum drift over a large temperature range i.e. have a low temperature coefficient.
- Pressure measurements have traditionally been made using a liquid column manometer.
- PCT Application PCT/WO US9405313 discloses a capacitive transducer that can measure pressure from as low as 100PSI to 22,000 PSI.
- the structure used is rather complicated - a metal diaphragm is separated from a dielectric alumina by as small a distance as 0.00005 inch and 0.020 inch. This small distance between the metal diaphragm and the insulator disc is difficult to maintain. Further the transducer when needed for a field experiment, does not possess the ruggedness to withstand transit movements.
- the device of this disclosure also has high hysteresis due to its very structure. Andeen, et aL in Rev. of Sci. Instruments, Vol.
- the material disclosed is a relaxor material of following composition: 44% Lead Iron Niobate, 44% Lead Zirconium Niobate and 12 % Barium Titanate. Pressure coefficient of this complex was observed to increase but without any significant decrease in temperature coefficient thereby again rendering material not worthy of being used as pressure transducer with capacitance parameter.
- the said relaxor material does not have much use as a pressure transducer.
- the main object of the present invention is to provide a lead iron tungstate capacitive transducer.
- Another object of the invention is to provide a process of preparation of lead iron tungstate material with low thermal coefficient, high-pressure coefficient and low hysteresis.
- a further object of the invention is to provide a solid state calcination method for preparation of doped lead iron tungstate relaxor material.
- a still further object of the present invention is to provide a two step calcination process for the preparation of lead iron tungstate relaxor material not requiring any doping.
- Another object of the invention is to provide a capacitance pressure transducer for wide pressure range measurement from a low value of 0.5MPa to a high value of 415MPa .
- the present invention provides lead iron tungstate capacitive pressure transducer which comprises: a disc having a polished smooth first flat surface, a polished smooth second flat surface, the said polished smooth first flat surface being completely coated with metal electrode, the polished smooth second flat surface also being coated with metal electrode, the said metal electrode on polished smooth second flat surface comprising formed coated circular portions comprising a central portion and a coated annular concentric portion separated from the central portion by an annular concentric clear region, conducting metal wires being fixed to the metal electrode on polished smooth first flat surface, metal electrode on coated central portion of polished smooth second flat surface and metal electrode on coated annular concentric portion of polished smooth second flat surface.
- the metal electrode is selected from the group consisting of silver, aluminum and gold.
- the thickness of metal electrode is in the range of 1000-2000 A.
- the width of annular concentric region is in the range of 10-50 ⁇ .
- metal wires are gold or silver.
- purity of metal wire is at least 99.99%.
- the metal electrode is deposited by a known vacuum evaporation method such as thermal evaporation.
- the capacitive pressure transducer is useful for pressure measurement in a range of 0.5 MPa - 415MPa.
- the accuracy of pressure transducer is ⁇ 0.05% over the entire range of 0.5 MPa - 415Mpa.
- the absolute value of pressure coefficient of the transducer is in the range of 497ppm/MPa to 622ppm/MPa.
- the temperature coefficient of the transducer is in the range of -0.006/°C to 0.008/°C.
- the transducer has negligible hysteresis.
- the invention also relates to lead iron tungstate relaxor material used for manufacture of capacitive transducers comprising in undoped form stoichiometric Pb(Fe 2 /3 W 1 /3)0 3 .
- the relaxor material is doped with lead in an amount of 1 % by wt or 5% by weight.
- the invention also relates to a process for the preparation of relaxor material useful in the manufacture of lead iron tungstate capacitive transducer by subjecting appropriate mixture of weighed amount of the wet ground iron oxide and tungsten oxide and lead oxide taken in such quantities so as to yield the final material as an undoped stoichiometric Pb(Fe 2 / 3 i 3 )0 3 to solid state sintering.
- purity of the starting materials is at least 99.9%.
- excess PbO is used to obtain a self-doped stoichiometric relaxor material the level of doping being to the extent of 1% 5% by weight.
- doping is done by adding excess amount of PbO salt in the initial mixture and wet grinding the mixture so obtained.
- the wet ground material is calcined at a temperature of at least 800°C for a period of 2 hours.
- the calcined material is further ground for about ten hours to ensure complete homogenization of the mixed and reacted constituents.
- a binder preferably polyvinyl alcohol is added to the homogenized powder.
- the invention also relates to a two-step calcination process for the preparation of lead iron tungstate relaxor material by subjecting appropriate mixture of weighed amount of the wet ground iron oxide and tungsten oxide to calcination at a temperature of about 1000°C for a period of 2 hours, subjecting the calcined material to further grinding for about ten hours after mixing the lead oxide to yield a final product stoichiometric Pb(Fe23 W ⁇ C ⁇ .
- Figure 1 represents variation of relative dielectric constant with pressure.
- Plot (A) is for pure lead iron tungstate material,
- (B) is for lwt % lead doped material and
- (C) is for 5wt% lead doped material.
- Figure 2 represents variation of relative dielectric constant with temperature of the sample.
- Plot (A) is for pure lead iron tungstate material
- (B) is for lwt % Pb doped material
- (C) is for 5 wt% lead doped material.
- Figure 3 represents variation of relative dielectric constant with pressure.
- Curve (A) is for the second calcination temperature of 750°C.
- Curve (B) is for the second calcination temperature of 810°C and curve (C) is for the second calcination temperature of 830°C.
- the sample temperature during capacitance measurement is 30°C.
- Figure 4 represents variation of relative dielectric constant with temperature of the sample.
- Curve (A) is for the second calcination temperature of 750°C.
- Curve (B) is for the second calcination temperature of 810°C and curve (C) is for second calcination temperature of 830°C.
- the applied pressure during all measurements was O.lMPa.
- the relaxor material of the present invention is prepared by solid state sintering. All the starting materials are pure and preferably have a purity of at least 99.9%. The materials are weighed in such quantities so as to yield the final material as an undoped stoichiometric Pb(Fe 2 /3 W!/3)03, (PFW). The same material can also be prepared by using excess PbO such that a self-doped stoichiometric PFW is obtained. Doping is done by putting excess amount of PbO salt in the initial mixture for wet grinding, for homogenization of the material. Excess amount of lead oxide is added to compensate for any loss of the lead component due to high vapour pressure during high temperature treatment.
- the other advantage of adding excess lead oxide is to get self-doping of lead in the final material to see the effect on the characteristics.
- Weighed and wet ground material is then calcined to effect the complete reaction of oxides to form the PFW. Calcination is generally done at a temperature of at least 800°C for a period of 2 hours. Calcined material is further ground for about ten hours. This long duration grinding is necessary to ensure complete homogenization of the mixed and reacted constituents.
- a binder, preferably polyvinyl alcohol was added to this powder. This mixture is then put in a pelletising machine for making samples.
- two-step calcination process for the preparation of lead iron tungstate relaxor material is used.
- Columbite method all the starting materials are pure and preferably have a purity of at least 99.9%.
- the materials are weighed in such quantities so as to yield the final material as a stoichiometric Pb(Fe2 3 W!/ 3 )03 herein after referred to as PFW.
- PFW stoichiometric Pb(Fe2 3 W!/ 3 )03 herein after referred to as PFW.
- the appropriate weighed amount of the wet ground iron oxide and tungsten oxide is mixed and then calcined at a temperature of preferably at 1000°C for a period of 2 hours.
- the calcined material is further ground for about ten hours after mixing the lead oxide.
- the mixed calcined powder is again calcined at a temperature in a range of 750 to 830°C and preferably at a temperature of 810°C.
- a binder, preferably polyvinyl alcohol is added to this powder. This mixture is then put in a pelletising machine for making disc shaped samples.
- Typical size of the samples in both the preferred embodiments of preparation of relaxor material was, but not limited to, 18 mm in diameter and 1.5 mm thickness.
- the PFW samples prepared were then used to determine the parameters for pressure measurement. These samples were coated with a silver film on both sides by vacuum evaporation to complete the capacitive structure.
- the electrode structure was such that one flat surface of the disc was coated completely by a thin film of, preferably, silver.
- the other flat surface opposite to the first surface of the pellet was also coated with the silver film through a thin wire ring mask such that a central circular portion of the coated film was formed along with a peripheral annular concentric film at the rim. All the depositions were done by standard vacuum thermal evaporation systems.
- the two portions were separated by a narrow clear annular concentric space. Width of this clear annular space was typically 50 ⁇ .
- the annular concentric ring was used to eliminate errors due to stray capacitance during ac measurements. Thin silver wires of purity 99.99% wee attached to the metal electrodes.
- the so formed capacitive structure was then used to measure the thermal coefficient and the pressure coefficient of the doped and undoped PFW material prepared by the two preferred embodiments of this invention for the preparation of relaxor material.
- the capacitive structure was placed in a standard specimen holder. This holder was placed in a conventional high pressure vessel. Temperature of the vessel was maintained to within ⁇ 0.05°C using temperature bath (Model No. RTE 8DD, NESLAB, USA). Pressure was transmitted through diethyl hexyl sebacate fluid.
- Figure 1 shows the variation of the ratio K/Ko with applied pressure at a sample temperature of 30°C.
- the ratio K/Ko is determined by calculating the dielectric constants K and Ko from the measured capacitance using the formula as given below:
- K and Ko are dielectric constant with pressure applied and without any applied pressure respectively.
- plot (A) is the variation of K/Ko with pressure for undoped relaxor material and shows a near straight line without any hysteresis.
- Plot (B) in the same figure is for doped material with 1 wt % Pb. The slope of this line is seen to be more than that of (A) indicating the role of doping in improving pressure characteristics. This is due to the fact that a small change in pressure results in a large change in dielectric constant.
- Curve (C) is for a 5 wt% doped lead material which further gives an enhanced slope of the curve between and pressure. Thus, increased doping leads to better characteristics of the material.
- the pressure coefficient being calculated by using the following expression: Change in dielectric constant
- temperature was varied from 10°C to 50°C to measure the temperature coefficient of capacitance.
- data was taken of variation of capacitance with temperature increasing in magnitude as well as with decreasing temperature from the maximum temperature reached in order to determine the hysteresis in the material.
- the dielectric constant was determined using the capacitance value and other material parameters and constants from the expressions given earlier in the description.
- Figure 2 shows the variation of K/Ko as a function of temperature at a given fixed pressure, say 0.1 MPa.
- Curve (A) is for undoped material while (B) and (C) are for 1 wt% and 5wt % doped materials respectively.
- Plot (A) in the figure gives the slope of the variation as higher than that for plot (B) and (C). This clearly indicates that doping by lead improves the temperature behavior of the lead iron tungstate and that the material can be easily put to use as a pressure transducer having the desired property of high pressure coefficient, and low temperature coefficient.
- Figure 3 shows the variation of the ratio K/Ko for the lead iron tungstate relaxor material samples prepared with the two-step calcination (Columbite process), with applied pressure at a sample temperature of 30°C, maintained to within ⁇ 0.05°C.
- the ratio K/Ko is determined by calculating the dielectric constants K and Ko from the measured capacitance using the following formula:
- K is the dielectric constant with pressure applied and Ko is the dielectric constant without any applied pressure.
- plot (A) is the variation of K/Ko with pressure for the relaxor material and shows a near straight line without any hysteresis.
- the plot is for a sample which was calcined for a second time at 750°C after mixing required quantity of lead oxide for a stoichiometric material.
- Plot (B) in the same figure is for material with second calcination temperature of 810°C. The slope of this line is seen to be a bit less than that of (A) indicating the role of increase in sintering temperature on the pressure characteristics.
- Curve (C) is for a sample with second calcination temperature of 830°C, which shows some anomalous behaviour but has a tendency to give enhanced slope of the curve between K/Ko and pressure. This points to the fact that increase in radionation temperature may affect the pressure characteristics.
- the pressure coefficient being calculated by using the following expression:
- temperature of the sample was varied from 10°C to 50°C to measure the temperature coefficient of capacitance.
- the data were taken of variation of capacitance with temperature increasing in magnitude as well as with decreasing temperature from the maximum temperature reached. This was done to determine the hysteresis in the material. From the capacitance data the dielectric constant, temperature coefficient of the specimen were calculated using following formula
- the dielectric constant was determined using the capacitance value and other material parameters and constants from the expressions given earlier in the description.
- Figure 4 shows the variation of K/Ko, as a function of temperature at a given fixed pressure, say 0.1 MPa.
- Ko is the dielectric constant at 10°C.
- Plot (A) is the variation of K/Ko with temperature for the relaxor material and does not show any hysteresis. The plot is for a sample, which was calcined for a second time at 750°C after mixing the required quantity of lead oxide for a stoichiometric material. The curve shows a negative slope and decreasing with increasing temperature. This means that the material has a better temperature characteristic when worked at slightly higher temperature.
- Plot (B) in the same figure is for a material with second calcination temperature of 810°C.
- Curve (B) in the figure gives the slope of the variation as higher than that for plot (A) though still being negative in the temperature range studied.
- Curve (C) is for a sample with second calcination temperature of 830°C. This curve shows an anomalous behavior compared to (A) and (B) but is still capable of being used as a pressure transducer.
- Novelty of relaxor material of the invention lies in its having low temperature coefficient, high pressure coefficient and low hysteresis due to the inventive step of doping by lead in excess of 1% of lead to the parent lead iron tungstate material.
- Lead Iron Tungstate Pb(Fe2 3 Wi/ 3 )03-specimens abbreviated - PFW]
- starting oxides were PbO, Fe 2 03 and W0 3 .
- Specimens were prepared using following formula:
- PFW was prepared as 7 gm sample by taking 4.4171 gm ofPbO, 1.0535 gm of Fe 2 0 3 and 1.5294 gm of W0 3 .
- Examplel The material of Examplel was used to measure the pressure characteristics.
- the temperature of the material was kept constant at 30°C to within ⁇ 0.05°C by keeping the material in a constant temperature bath.
- the capacitance of the capacitor structure incorporating the lead iron tungstate material was measured as a function of pressure applied from 0.1 MPa to 415 MPa.
- the dielectric constant of the material was then calculated and plotted as a function of pressure. Pressure coefficient calculated from slope of variation of dielectric constant with pressure was found to be -500ppm/MPa
- Example 1 The material of Example 1 was used to measure temperature characteristics. Pressure applied on the material was kept constant at 100 Mpa. Capacitance of the capacitor structure incorporating the lead iron tungstate material was measured as a function of temperature of the material (varying from 10 - 50°C) keeping the temperature constant to within ⁇ 0.05°C by keeping the material in a constant temperature bath. Dielectric constant of the material was then calculated and plotted as a function of temperature. Temperature coefficient calculated from slope of variation of dielectric constant with temperature was found to be -0.0066/°C
- Example 4 Material of Example 4 was used to measure pressure characteristics. Temperature of material was kept constant at 30°C to within ⁇ 0.05°C by keeping material in constant temperature bath. Capacitance of capacitor structure incorporating lead iron tungstate material was measured as function of pressure applied from 0.1 MPa to 415 MPa. Dielectric constant of material was then calculated and plotted as function of pressure. Pressure coefficient calculated from slope of variation of dielectric constant with pressure was found to be 515ppm/Mpa.
- Example 4 Material of Example 4 was used to measure temperature characteristics. Pressure applied on material was kept constant at 100 MPa Capacitance of capacitor structure incorporating lead iron tungstate material was measured as function of temperature of material (varying from 10-50°C) keeping temperature constant to within ⁇ 0.05°C by keeping the material in a constant temperature bath. Dielectric constant of the material was then calculated and plotted as a function of temperature. Temperature coefficient calculated from slope of variation of dielectric constant with temperature was found to be -0.0069/°C.
- Example 7 Material of Example 7 was used to measure pressure characteristics. Temperature of material was kept constant at 30°C ( ⁇ 0.05°C) by keeping material in constant temperature bath. Capacitance of capacitor structure incorporating lead iron tungstate material was measured as function of pressure applied from 0.1 MPa to 415 MPa. Dielectric constant of material was then calculated and plotted as function of pressure. Pressure coefficient calculated from slope of variation of dielectric constant with pressure was found to be 556ppm/Mpa.
- Example 7 The material of Example 7 was used to measure temperature characteristics. Pressure applied on the material was kept constant at 0.1 Mpa. Capacitance of the capacitor structure incorporating the lead iron tungstate material was measured as a function of temperature of the material (varying from 10 - 50°C) keeping the temperature constant to within ⁇ 0.05°C by keeping the material in a constant temperature bath. Dielectric constant of the material was then calculated and plotted as a function of temperature. Temperature coefficient calculated from slope of variation of dielectric constant with temperature was found to be -0.007°C.
- Example 10 The material of Example 10 was used to measure pressure characteristics. Temperature of the material was kept constant at 30°C to within ⁇ 0.05°C by keeping material in a constant temperature bath. Capacitance of the capacitor structure incorporating the lead iron tungstate material was measured as a function of pressure applied from 0.5MPa to 415 MPa. Dielectric constant of the material was then calculated and plotted as a function of pressure. Pressure coefficient calculated from slope of variation of dielectric constant with pressure was found to be -497 ppm/Mpa.
- Example 11 The material of Example 11 was used to measure temperature characteristics. Pressure applied on the material was kept constant at 0.1 Mpa. Capacitance of the capacitor structure incorporating the lead iron tungstate material was measured as a function of temperature of the material (varying from 10 - 50°C) keeping the temperature constant to within ⁇ 0.05°C by keeping the material in a constant temperature bath. Dielectric constant of the material was then calculated and plotted as a function of temperature. Temperature coefficient calculated from slope of variation of dielectric constant with temperature was found to be -0.0033°C.
- Example 13 Material of Example 13 was used to measure pressure characteristics. Temperature of material was kept constant at 30°C ( ⁇ 0.05°C) by keeping the material in constant temperature bath. Capacitance of capacitor structure incorporating lead iron tungstate material was measured as function of pressure applied from 0.5MPa to 415MPa. Dielectric constant of material was then calculated and plotted as function of pressure. Pressure coefficient calculated from slope of variation of dielectric constant with pressure was found to be -534 ppm/Mpa. Example 15
- Example 13 The material of Example 13 was used to measure temperature characteristics. Pressure applied on the material was kept constant at 0.1 Mpa. Capacitance of the capacitor structure incorporating the lead iron tungstate material was measured as a function of temperature of the material (varying from 10 - 50°C) keeping the temperature constant to within ⁇ 0.05°C by keeping the material in a constant temperature bath. Dielectric constant of the material was then calculated and plotted as a function of temperature. Temperature coefficient calculated from slope of variation of dielectric constant with temperature was found to be -0.008°C.
- wet ground iron oxide and tungsten oxide was calcined at a temperature of at 1000°C for a period of 2 hours.
- the calcined material was further ground for about ten hours after mixing the lead oxide. This mixture was then calcined at 830°C for 2h.
- the calcined powder was further ground for 10 hours.
- polyvinyl alcohol was added as binder for making cylindrical shaped specimen which was then sintered at a temperature of 870°C for 2 hours. After sintering, the specimen was cooled and after polishing of the surfaces, silver electrodes were formed by vacuum evaporation.
- Example 16 Material of Example 16 was used to measure pressure characteristics. Temperature of the material was kept constant at 30°C to within ⁇ 0.05°C by keeping the material in a constant temperature bath. Capacitance of the capacitor structure incorporating the lead iron tungstate material was measured as a function of pressure applied from 0.1 MPa to 415 MPa. Dielectric constant of the material was then calculated and plotted as a function of pressure. The pressure coefficient calculated from slope of variation of dielectric constant with pressure was found to be -622 ppm/Mpa.
- Example 16 The material of Example 16 was used to measure temperature characteristics. Pressure applied on the material was kept constant at 0.1 Mpa. Capacitance of the capacitor structure incorporating the lead iron tungstate material was measured as a function of temperature of the material (varying from 10 - 50°C) keeping the temperature constant to within ⁇ 0.05°C by keeping the material in a constant temperature bath. Dielectric constant of the material was then calculated and plotted as a function of temperature. Temperature coefficient calculated from slope of variation of dielectric constant with temperature was found to be 0.007°C.
- the relaxor material can be used over a wide pressure range.
- the relaxor material can be used under varying temperature ambiences thereby avoiding the use of additional means for temperature control.
- the material can be used over a wide temperature range of 10-50°C.
- the capacitive transducer can be used to measure pressure over a wide range from 0.5MPa to415Mpa with an accuracy of ⁇ 0.05% over the entire range.
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- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Insulating Materials (AREA)
- Compounds Of Iron (AREA)
Abstract
Description
Claims
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/IN2002/000078 WO2003083428A1 (en) | 2002-03-28 | 2002-03-28 | Lead iron tungstate capacitive transducer, relaxor material therefor, method of manufacture of relaxor material |
CNB028286715A CN100538296C (en) | 2002-03-28 | 2002-03-28 | The manufacture method of ferrotungsten lead plumbate capacitive transducer, relaxation material and relaxation material |
CA002480285A CA2480285C (en) | 2002-03-28 | 2002-03-28 | Lead iron tungstate capacitive transducer, relaxor material therefor, method of manufacture of relaxor material |
JP2003580818A JP4637485B2 (en) | 2002-03-28 | 2002-03-28 | Capacitive pressure transducer and process for adjusting relaxor material for the capacitive pressure transducer |
IL16414502A IL164145A0 (en) | 2002-03-28 | 2002-03-28 | Lead iron tungstate capacitive transducer, relax or material therefor, method of manufacture of relaxor material |
AU2002247947A AU2002247947A1 (en) | 2002-03-28 | 2002-03-28 | Lead iron tungstate capacitive transducer, relaxor material therefor, method of manufacture of relaxor material |
EP02717027A EP1490662A1 (en) | 2002-03-28 | 2002-03-28 | Lead iron tungstate capacitive transducer, relaxor material therefor, method of manufacture of relaxor material |
IL164145A IL164145A (en) | 2002-03-28 | 2004-09-19 | Lead iron tungstate capacitive transducer, relaxor material therefor and method of manufacture of relaxor material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/IN2002/000078 WO2003083428A1 (en) | 2002-03-28 | 2002-03-28 | Lead iron tungstate capacitive transducer, relaxor material therefor, method of manufacture of relaxor material |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003083428A1 WO2003083428A1 (en) | 2003-10-09 |
WO2003083428A9 true WO2003083428A9 (en) | 2011-06-30 |
Family
ID=28460454
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/IN2002/000078 WO2003083428A1 (en) | 2002-03-28 | 2002-03-28 | Lead iron tungstate capacitive transducer, relaxor material therefor, method of manufacture of relaxor material |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP1490662A1 (en) |
JP (1) | JP4637485B2 (en) |
CN (1) | CN100538296C (en) |
AU (1) | AU2002247947A1 (en) |
CA (1) | CA2480285C (en) |
IL (2) | IL164145A0 (en) |
WO (1) | WO2003083428A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8943895B2 (en) * | 2012-09-07 | 2015-02-03 | Dynisco Instruments Llc | Capacitive pressure sensor |
CN111024273B (en) * | 2019-12-27 | 2021-12-24 | 浙江清华柔性电子技术研究院 | Pressure sensor with temperature stability and preparation method thereof |
-
2002
- 2002-03-28 AU AU2002247947A patent/AU2002247947A1/en not_active Abandoned
- 2002-03-28 WO PCT/IN2002/000078 patent/WO2003083428A1/en active Search and Examination
- 2002-03-28 EP EP02717027A patent/EP1490662A1/en not_active Withdrawn
- 2002-03-28 CA CA002480285A patent/CA2480285C/en not_active Expired - Fee Related
- 2002-03-28 IL IL16414502A patent/IL164145A0/en unknown
- 2002-03-28 CN CNB028286715A patent/CN100538296C/en not_active Expired - Fee Related
- 2002-03-28 JP JP2003580818A patent/JP4637485B2/en not_active Expired - Fee Related
-
2004
- 2004-09-19 IL IL164145A patent/IL164145A/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CA2480285C (en) | 2009-10-13 |
CN100538296C (en) | 2009-09-09 |
JP4637485B2 (en) | 2011-02-23 |
IL164145A0 (en) | 2005-12-18 |
JP2005521872A (en) | 2005-07-21 |
CN1628243A (en) | 2005-06-15 |
CA2480285A1 (en) | 2003-10-09 |
AU2002247947A1 (en) | 2003-10-13 |
WO2003083428A1 (en) | 2003-10-09 |
IL164145A (en) | 2010-11-30 |
EP1490662A1 (en) | 2004-12-29 |
AU2002247947A8 (en) | 2011-07-21 |
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