WO2003079240A3 - System and method for placement of dummy metal fills while preserving device matching and/or limiting capacitance increase - Google Patents
System and method for placement of dummy metal fills while preserving device matching and/or limiting capacitance increase Download PDFInfo
- Publication number
- WO2003079240A3 WO2003079240A3 PCT/US2003/007497 US0307497W WO03079240A3 WO 2003079240 A3 WO2003079240 A3 WO 2003079240A3 US 0307497 W US0307497 W US 0307497W WO 03079240 A3 WO03079240 A3 WO 03079240A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- dummy
- locating
- integrated circuit
- device matching
- fills
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F30/00—Computer-aided design [CAD]
- G06F30/30—Circuit design
- G06F30/39—Circuit design at the physical level
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2119/00—Details relating to the type or aim of the analysis or the optimisation
- G06F2119/18—Manufacturability analysis or optimisation for manufacturability
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2004-7014312A KR20050007440A (en) | 2002-03-12 | 2003-03-12 | System and method for placement of dummy metal fills while preserving device matching and/or limiting capacitance increase |
JP2003577169A JP2005520336A (en) | 2002-03-12 | 2003-03-12 | System and method for positioning a dummy metal fill while preventing interference with device matching and selective capacity limitation |
EP03714076A EP1493111A2 (en) | 2002-03-12 | 2003-03-12 | System and method for placement of dummy metal fills while preserving device matching and/or limiting capacitance increase |
AU2003218093A AU2003218093A1 (en) | 2002-03-12 | 2003-03-12 | System and method for placement of dummy metal fills while preserving device matching and/or limiting capacitance increase |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/097,978 | 2002-03-12 | ||
US10/097,978 US6751785B1 (en) | 2002-03-12 | 2002-03-12 | System and method for limiting increase in capacitance due to dummy metal fills utilized for improving planar profile uniformity |
US10/158,617 | 2002-05-30 | ||
US10/158,617 US6904581B1 (en) | 2002-03-12 | 2002-05-30 | System and method for placement of dummy metal fills while preserving device matching and/or limiting capacitance increase |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003079240A2 WO2003079240A2 (en) | 2003-09-25 |
WO2003079240A3 true WO2003079240A3 (en) | 2004-07-15 |
Family
ID=28044138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2003/007497 WO2003079240A2 (en) | 2002-03-12 | 2003-03-12 | System and method for placement of dummy metal fills while preserving device matching and/or limiting capacitance increase |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1493111A2 (en) |
JP (1) | JP2005520336A (en) |
CN (1) | CN1643525A (en) |
AU (1) | AU2003218093A1 (en) |
WO (1) | WO2003079240A2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7712056B2 (en) | 2002-06-07 | 2010-05-04 | Cadence Design Systems, Inc. | Characterization and verification for integrated circuit designs |
US7757195B2 (en) | 2002-06-07 | 2010-07-13 | Cadence Design Systems, Inc. | Methods and systems for implementing dummy fill for integrated circuits |
US7774726B2 (en) | 2002-06-07 | 2010-08-10 | Cadence Design Systems, Inc. | Dummy fill for integrated circuits |
US7962867B2 (en) | 2002-06-07 | 2011-06-14 | Cadence Design Systems, Inc. | Electronic design for integrated circuits based on process related variations |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7124386B2 (en) | 2002-06-07 | 2006-10-17 | Praesagus, Inc. | Dummy fill for integrated circuits |
EP1532670A4 (en) | 2002-06-07 | 2007-09-12 | Praesagus Inc | Characterization adn reduction of variation for integrated circuits |
US7393755B2 (en) | 2002-06-07 | 2008-07-01 | Cadence Design Systems, Inc. | Dummy fill for integrated circuits |
US20030229875A1 (en) | 2002-06-07 | 2003-12-11 | Smith Taber H. | Use of models in integrated circuit fabrication |
US7188321B2 (en) | 2003-11-06 | 2007-03-06 | International Business Machines Corporation | Generation of metal holes by via mutation |
JP5180625B2 (en) * | 2007-03-12 | 2013-04-10 | ルネサスエレクトロニクス株式会社 | Semiconductor device |
CN102130043B (en) * | 2010-12-30 | 2013-10-02 | 中国科学院微电子研究所 | Method for filling redundancy metal |
CN115705459A (en) * | 2021-08-13 | 2023-02-17 | 长鑫存储技术有限公司 | Dummy pattern filling method and semiconductor device layout |
CN114722768B (en) * | 2022-06-08 | 2022-09-30 | 珠海妙存科技有限公司 | Chip virtual component design method and device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5763955A (en) * | 1996-07-01 | 1998-06-09 | Vlsi Technology, Inc. | Patterned filled layers for integrated circuit manufacturing |
US6323113B1 (en) * | 1999-12-10 | 2001-11-27 | Philips Electronics North America Corporation | Intelligent gate-level fill methods for reducing global pattern density effects |
-
2003
- 2003-03-12 CN CNA038068435A patent/CN1643525A/en active Pending
- 2003-03-12 AU AU2003218093A patent/AU2003218093A1/en not_active Abandoned
- 2003-03-12 JP JP2003577169A patent/JP2005520336A/en not_active Withdrawn
- 2003-03-12 WO PCT/US2003/007497 patent/WO2003079240A2/en not_active Application Discontinuation
- 2003-03-12 EP EP03714076A patent/EP1493111A2/en not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5763955A (en) * | 1996-07-01 | 1998-06-09 | Vlsi Technology, Inc. | Patterned filled layers for integrated circuit manufacturing |
US6323113B1 (en) * | 1999-12-10 | 2001-11-27 | Philips Electronics North America Corporation | Intelligent gate-level fill methods for reducing global pattern density effects |
Non-Patent Citations (4)
Title |
---|
BALASA F ET AL: "Module placement for analog layout using the sequence-pair representation", DESIGN AUTOMATION CONFERENCE, 1999. PROCEEDINGS. 36TH NEW ORLEANS, LA, USA 21-25 JUNE 1999, PISCATAWAY, NJ, USA,IEEE, US, 21 June 1999 (1999-06-21), pages 274 - 279, XP010343916, ISBN: 1-58113-092-9 * |
KAHNG A B ET AL: "FILLING ALGORITHMS AND ANALYSES FOR LAYOUT DENSITY CONTROL", IEEE TRANSACTIONS ON COMPUTER AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS, IEEE INC. NEW YORK, US, vol. 18, no. 4, April 1999 (1999-04-01), pages 445 - 462, XP002161725, ISSN: 0278-0070 * |
STINE B E ET AL: "THE PHYSICAL AND ELECTRICAL EFFECTS OF METAL-FILL PATTERNING PROCTICES FOR OXIDE CHEMICAL-MECHANICAL POLISHING PROCESSES", IEEE TRANSACTIONS ON ELECTRON DEVICES, IEEE INC. NEW YORK, US, vol. 45, no. 3, 1 March 1998 (1998-03-01), pages 665 - 679, XP000738545, ISSN: 0018-9383 * |
WAI-CHEE WONG ET AL: "A technology-independent methodology of placement generation for analog circuit", DESIGN AUTOMATION CONFERENCE, 1999. PROCEEDINGS OF THE ASP-DAC '99. ASIA AND SOUTH PACIFIC WANCHAI, HONG KONG 18-21 JAN. 1999, PISCATATWAY, NJ, USA,IEEE, US, 18 January 1999 (1999-01-18), pages 141 - 144, XP010326324, ISBN: 0-7803-5012-X * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7712056B2 (en) | 2002-06-07 | 2010-05-04 | Cadence Design Systems, Inc. | Characterization and verification for integrated circuit designs |
US7757195B2 (en) | 2002-06-07 | 2010-07-13 | Cadence Design Systems, Inc. | Methods and systems for implementing dummy fill for integrated circuits |
US7774726B2 (en) | 2002-06-07 | 2010-08-10 | Cadence Design Systems, Inc. | Dummy fill for integrated circuits |
US7962867B2 (en) | 2002-06-07 | 2011-06-14 | Cadence Design Systems, Inc. | Electronic design for integrated circuits based on process related variations |
Also Published As
Publication number | Publication date |
---|---|
AU2003218093A1 (en) | 2003-09-29 |
CN1643525A (en) | 2005-07-20 |
JP2005520336A (en) | 2005-07-07 |
WO2003079240A2 (en) | 2003-09-25 |
EP1493111A2 (en) | 2005-01-05 |
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