WO2003072499A1 - Titania nanosheet alignment thin film, process for producing the same and article including the titania nanosheet alignment thin film - Google Patents

Titania nanosheet alignment thin film, process for producing the same and article including the titania nanosheet alignment thin film Download PDF

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Publication number
WO2003072499A1
WO2003072499A1 PCT/JP2003/002339 JP0302339W WO03072499A1 WO 2003072499 A1 WO2003072499 A1 WO 2003072499A1 JP 0302339 W JP0302339 W JP 0302339W WO 03072499 A1 WO03072499 A1 WO 03072499A1
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Prior art keywords
thin film
titania
oriented
titania nanosheet
nanosheet
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PCT/JP2003/002339
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French (fr)
Japanese (ja)
Inventor
Tsutomu Minami
Toshihiro Kogure
Masahiro Tatsumisago
Kiyoharu Tadanaga
Atsunori Matsuda
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Japan Science And Technology Agency
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Priority to JP2003571210A priority Critical patent/JPWO2003072499A1/en
Priority to US10/504,874 priority patent/US20050042375A1/en
Priority to KR1020047013143A priority patent/KR100657229B1/en
Priority to CA002477160A priority patent/CA2477160A1/en
Priority to EP20030743068 priority patent/EP1491498A1/en
Publication of WO2003072499A1 publication Critical patent/WO2003072499A1/en
Priority to US11/337,449 priority patent/US20060240288A1/en

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/06—Silicon, titanium, zirconium or hafnium; Oxides or hydroxides thereof
    • B01J21/063—Titanium; Oxides or hydroxides thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00—Catalysts, in general, characterised by their form or physical properties
    • B01J35/30—Catalysts, in general, characterised by their form or physical properties characterised by their physical properties
    • B01J35/39—Photocatalytic properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/02—Impregnation, coating or precipitation
    • B01J37/03—Precipitation; Co-precipitation
    • B01J37/031—Precipitation
    • B01J37/033—Using Hydrolysis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
    • B01J37/341—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation making use of electric or magnetic fields, wave energy or particle radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G23/00—Compounds of titanium
    • C01G23/04—Oxides; Hydroxides
    • C01G23/047—Titanium dioxide
    • C01G23/053—Producing by wet processes, e.g. hydrolysing titanium salts
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/36—Compounds of titanium
    • C09C1/3607—Titanium dioxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00—Catalysts, in general, characterised by their form or physical properties
    • B01J35/50—Catalysts, in general, characterised by their form or physical properties characterised by their shape or configuration
    • B01J35/58—Fabrics or filaments
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/01—Particle morphology depicted by an image
    • C01P2004/03—Particle morphology depicted by an image obtained by SEM
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/01—Particle morphology depicted by an image
    • C01P2004/04—Particle morphology depicted by an image obtained by TEM, STEM, STM or AFM
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer

Definitions

  • the invention of this application relates to a titania nanosheet oriented thin film, a method for producing the same, and an article provided with the titania nanosheet oriented thin film. More specifically, the invention of this application provides a novel oriented thin film of titania nanosheets, which exhibits high photocatalytic activity and can maintain excellent superhydrophilicity and antifogging properties for a long time, a method for producing the same, and a titania
  • the present invention relates to an article provided with a nanosheet oriented thin film. Background art
  • titania and including titania thin film, silica and titania silica-titania-based mainly composed of (S i 0 2 - T i 0 2 )
  • This titania has three types of crystals, anatase phase, rutile phase, and brookite phase, metastable phase, and amorphous phase.
  • the photocatalyst with the highest titania in the anaase phase is It is known to show activity. It is also known that properties such as photocatalytic activity also change due to changes in specific surface area, etc., depending on the shape of titania.
  • the titania nanosheet, powdery T i 0 2 in smaller size as compared, and shape high photocatalytic activity in the specific surface area is controlled is increased, more titania nanosheet to form a layered structure Therefore, it is expected to exhibit some new functions.
  • the titania nanosheet in order to use the titania nanosheet as a secondary product, there is a problem that it takes time to support the titania nanosheet on a base material.
  • the invention of this application has been made in view of the above circumstances, and solves the problems of the prior art, exhibits high photocatalytic activity, and has excellent superhydrophilicity and antifogging properties.
  • Novel titania nanosheet oriented thin film that can be maintained for a long time, its manufacturing method and It is an object of the present invention to provide an article provided with the titania nanosheet oriented thin film.
  • the invention of this application is a thin film mainly composed of silica and titania, and a titania nanosheet having a layered structure with a nanometer size and a layer structure is dispersed on the surface thereof.
  • a titania nanosheet oriented thin film characterized by being characterized in that:
  • the invention of this application relates to the above-mentioned invention, secondly, a titania nanosheet oriented thin film characterized in that the interlayer distance of the titania nanosheet is 0.6 to 0.85 nm.
  • a titania nanosheet oriented thin film characterized in that the interlayer distance of the titania nanosheet is at or near 0.7 nm.Fourth, the titania nanosheet is highly dispersed over the entire surface.
  • the contact angle with water is 5 ° or less.
  • the present invention provides an oriented thin film of titania nanosheet characterized by the following: (10) To provide an oriented thin film of titania nanosheet characterized by exhibiting photocatalytic activity.
  • the invention of this application is as follows:
  • the present invention also provides, as an embodiment thereof, an article or the like, which is provided with any one of the above-described oriented titania nanosheet thin films.
  • the invention of this application is, first, a gel film containing a composite metal oxide or hydroxide of a titanium compound and a silicon alkoxide from a solution containing a silicon alkoxide and a titanium compound having hydrolyzability.
  • a gel film containing a composite metal oxide or hydroxide of a titanium compound and a silicon alkoxide from a solution containing a silicon alkoxide and a titanium compound having hydrolyzability.
  • a thirteenth aspect is to prepare a gel film containing a composite oxide or hydroxide of a titanium compound and a silicon alkoxide from a solution containing a silicon alkoxide and a titanium compound having hydrolyzability,
  • the gel film is subjected to an electric field hot water treatment in which hot water is brought into contact and a voltage is applied, so that titania nanosheets having a layer size of nanometer order on the surface are oriented and deposited.
  • an electric field hot water treatment in which hot water is brought into contact and a voltage is applied, so that titania nanosheets having a layer size of nanometer order on the surface are oriented and deposited.
  • a method for producing a titania nanosheet oriented thin film is provided.
  • the invention of this application is directed to a method for producing an oriented thin film of titania nanosheet characterized in that the hydrolyzable titanium compound is titanium alkoxide in the method of the above invention.
  • the 17th method is to form a gel film on a substrate.
  • the 18th method is a method for producing a titania nanosheet oriented thin film, which is characterized in that the gel film is brought into contact with warm water while continuously oscillating the gel film.
  • a method for producing a titania nanosheet oriented thin film characterized by vibrating in the direction of the normal to the surface of the gel film is described as follows: (20) Titania nanosheet orientation characterized by applying a vibration of 30 mmZ seconds or more.
  • the second is a method for producing a titania nanosheet oriented thin film characterized by applying a vibration of 2.5 to 10 Hz with an amplitude of 2.5 mm, and the second is a DC voltage.
  • a method for producing a titania nanosheet oriented thin film characterized by applying an electric field hot water treatment by applying an electric field and, secondly, a method of producing a titania nanosheet oriented thin film characterized by using 90 hot water for the hot water treatment. 24th, more than 2 hours That provides a method for manufacturing a titania nanosheet alignment thin film characterized that you subjected to hot water treatment.
  • FIG. 1 is a cross-sectional view schematically illustrating a titania nanosheet oriented thin film of the invention of the present application.
  • FIG. 2 is a photograph exemplifying the result of observing the oriented titania nanosheet thin film of the invention of this application produced in Example 1 from a sectional perspective direction by a scanning electron microscope (SEM).
  • SEM scanning electron microscope
  • FIG. 3 is a photograph exemplifying a high-resolution transmission electron microscope (HRT EM) image of a cross section of the oriented thin film of titania nanosheets of the present invention prepared in Example 1.
  • HRT EM high-resolution transmission electron microscope
  • Figure 4 shows (a) a high-resolution transmission electron microscope (HRT EM) image of the oriented titania nanosheet thin film of the invention of this application prepared in Example 1, and (b) a result of Fourier transform of the lattice fringe analysis. It is a photograph illustrated.
  • HRT EM high-resolution transmission electron microscope
  • FIGS. 5A and 5B are photographs illustrating high-resolution transmission electron microscope (HRTEM) images of the oriented thin film of titania nanosheets of the present invention prepared in Example 1;
  • FIG. 6 is a diagram illustrating the change over time of the contact angle of water for (A) the titania nanosheet oriented thin film of the invention of the present application, (B) the titania nanocrystal dispersed thin film, and (C) the anatase phase titania crystalline thin film. is there.
  • FIG. 7 is a diagram illustrating the optical resolution of (A) the titania nanosheet oriented thin film of the invention of the present application, (B) the titania nanocrystal dispersed thin film, and (C) the anatase phase titanium oxide thin film.
  • FIG. 8 is a schematic diagram illustrating an electric field hot water treatment method according to the third embodiment.
  • FIG. 9 is a diagram exemplifying the results of observation of a titania nanosheet oriented thin film formed on the negative electrode side in Example 3 by a scanning electron microscope (SEM).
  • FIG. 10 is a cross-sectional view schematically showing a configuration of a conventional titania microcrystal dispersed thin film.
  • the oriented thin film of titania nanosheet provided by the invention of the present application is a thin film containing silica and titania as main components, and has a layer of a titania nanosheet having a layered structure on the surface in nanometer order.
  • the titania nanosheet oriented thin film (1) is a thin film (1) containing silica and titania as main components, and is realized as a dispersion of the titania nanosheet (2) on the surface of the thin film (1).
  • Such a titania nanosheet (2) has a flaky or sheet-like titania with a size of about 5 to 50 nm, but has a size of several nm to several 100 nm as a whole. It has a layered structure with a thickness of about 1 to 20 nm on the order of nanometers.
  • the interlayer distance of the titania nanosheet (2) is about 0.5 to 1. O nm, and typically, the interlayer distance is 0.7. It can be specified as nm or its vicinity.
  • the titania nanosheet can generally be denoted as H X T 1 O y ⁇ z H 2 O, also Toku ⁇ Dzu kick These Chita two Ananoshito interlayer distance (interlayer spacing) Can be. Therefore, the titania nanosheet in the invention of this application is expected to be these similar compounds or mixtures thereof.
  • the dispersion state of the titania nanosheet (2) is such that the titania nanosheet (2) is parallel to the surface of the thin film (1). Instead of being deposited on the surface, at least at the surface of the thin film (1), it is dispersed in an upright state.
  • the titania nanosheet (2) may be dispersed at a low density on a part of the surface of the thin film (1) or on the whole, but in the invention of the invention of this application, more preferred embodiments include Titania nanosheet
  • the expression “highly dispersed” is generally more preferably 30% or more with respect to the plane area of the surface of the thin film (1). Means that more than 50% is recognized as titania nanosheets (2), and nearly 100% as feasible.
  • Such a titania nanosheet (2) oriented thin film (1) of the invention of this application is characterized by exhibiting photocatalytic activity because the titania nanosheet (2) is dispersed on its surface. Since the titania nanosheet (2) has a sufficiently larger surface area than the titania microcrystals (4) in the thin film (1) in which the conventional titania microcrystals (4) are dispersed as shown in FIG. 10, for example, Regarding its photocatalytic activity, the titania nanosheet of the invention of this application
  • the orientation of the oriented thin film (1) is higher than that of the thin film (1) in which titania microcrystals (4) are dispersed.
  • titania nanosheet of the invention of this application (2) Oriented thin film
  • (1) is a titania nanosheet dispersed on the surface (2) is a thin film
  • a fine uneven structure is formed as a whole on the surface.
  • This uneven structure is sufficiently small with respect to the wavelength of light, and light scattering is less likely to occur as compared with titania microcrystals (4). It is characterized by high transparency, excellent design, and super-hydrophilicity with a contact angle to water of 5 ° or less. Further, the superhydrophilicity is, for example, less than 100 ° after being kept in air for 100 hours, and about 10 ° after being kept in dark air for 2000 hours. A low contact angle is maintained, and it can be realized as a super-hydrophilic substance for a long time, which has not been seen before.
  • the antifogging property of the titania nanosheet (2) oriented thin film (1) of the present invention can be shown as an index of the hydrophilicity.
  • This titania nanosheet (2) oriented thin film (1) is hardly clouded by exhalation even if it is kept for 2000 hours in the air, and it is not clouded even if it is held in hot water at 50 degrees. It also has excellent anti-fog properties such as and.
  • titania nanosheet of the invention of this application (2) Oriented thin film
  • the titania nanosheet (2) forms a layered structure, it can be expected to exhibit some new functions.
  • the light transmittance of the oriented thin film (1) is enhanced, and high photocatalytic activity and superhydrophilicity can be obtained.
  • the photocatalytic activity and superhydrophilicity of the titania nanosheet (2) oriented thin film (1) can be provided.
  • the article provided by the invention of this application is characterized in that it comprises the above-described titania nanosheet (2) oriented thin film (1) of the invention of this application.
  • the titania nanosheet of the invention of the present application using any product as a base material (3)
  • the product By arranging the oriented thin film (1), the product has antifouling function, antifogging function, photodecomposition function for water and organic substances, photodecomposition function for air pollutants such as nitrogen oxides, or It is realized as having a bactericidal and antibacterial action against harmful microorganisms.
  • an arbitrary product is used as the base material (3) and the surface of the titania nanosheet (1) is used.
  • It may be performed by directly manufacturing the oriented thin film (1), or the titania nanosheet (2) which has been manufactured in advance may be attached to the surface of any product by attaching the oriented thin film (1). You may do so.
  • the above-described oriented titania nanosheet thin film of the invention of this application can be produced, for example, by the method of producing an oriented titania nanosheet thin film of the invention of this application. That is, the method for producing a titania nanosheet oriented thin film provided by the invention of this application is based on a method of preparing a composite metal oxide or water of a titanium compound and a silicon alkoxide from a solution containing a silicon alkoxide and a titanium compound having hydrolyzability. A gel film containing an oxide is produced, and the gel film is subjected to a vibration hot water treatment in which hot water is brought into contact with and vibrated, whereby a titanium nanosheet having a layered structure with a nanometer-sized surface is formed. It is characterized by being oriented and deposited.
  • the invention of this application is based on the From a solution containing alkoxide and a titanium compound having hydrolyzability, a gel film containing a composite oxide or hydroxide of a titanium compound and silicon alkoxide is prepared, and the gel film is brought into contact with hot water.
  • the present invention also provides a method for producing an oriented thin film of titania nanosheets, characterized in that by applying an electric field hot water treatment to apply a voltage, a titania nanosheet having a layer size and having a layered structure is oriented and deposited on the surface in the order of nanometers.
  • the silicon alkoxide as a starting material, for example, various compounds represented by the general formula Si (OR) 4 can be used.
  • the organic group R constituting the alkoxyl group OR is, for example, the same or a different lower group such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group and an isobutyl group having 1 to 6 carbon atoms.
  • Alkyl groups can be mentioned. More specifically, for example, using silicon tetraethoxide is shown as a preferable example.
  • Silicon alkoxide is dissolved in an organic solvent to prepare a silicon alkoxide solution.
  • catalyst water may be added to promote the hydrolysis of the alkoxy group or promote the dehydration condensation reaction.
  • the molar ratio of the organic solvent and water to be added to the silicon alkoxide is preferably about 1 to 8, and about 1 to 6, respectively.
  • organic solvents examples include methanol, ethanol, 1-propanol, isopropyl alcohol, 1-butanol, 2-butanol, isobutyl alcohol, ter-butyl alcohol, 1-pentanol, 2-pentanol, and 3-pentanol. Etc. can be illustrated.
  • Examples of the medium include nitric acid, hydrochloric acid, sulfuric acid, phosphoric acid, acetic acid, ammonia, and the like.
  • Examples of the hydrolyzable titanium compound as a starting material include a metal organic compound such as titanium alkoxide, titanium oxalate, and a metal inorganic compound such as titanium nitrate and titanium tetrachloride. It is preferable to use titanium alkoxide.
  • titanium alkoxide examples include tetramethoxytitanium, tetraethoxytitanium, tetra-n-propoxytitanium, tetraisopropoxytitanium, tetra-n-butoxytitanium, and tetraisobutoxytitanium.
  • the titanium compound is also dissolved in the same organic solvent as described above to prepare a titanium solution.
  • the molar ratio of the organic solvent to be added to the titanium compound is preferably about 20.
  • the silicon alkoxide solution and titanium solution prepared as described above are mixed to form a gel film containing a composite metal oxide or hydroxide of a titanium compound and silicon alkoxide.
  • the photocatalytic activity of the obtained titania nanosheet oriented thin film of the invention of this application can be further enhanced.
  • the gel film can be formed on a base material made of various materials.
  • the base material various glass materials, metal materials, inorganic materials, plastic materials, paper, and wood materials can be used.
  • the method of the invention of the present application is to produce a titania nanosheet oriented thin film under mild conditions of 10 ° or less. It can be used as Then, this base material is the entirety of the article provided with the titania nanosheet oriented thin film of the invention of the present application, Can also be used.
  • various methods such as dip coating, spraying, and spin coating can be used.
  • the gel film is then subjected to an oscillating hot water treatment in which hot water is brought into contact and vibration is applied, or an electric field hot water treatment by applying voltage.
  • titania nanosheets having a layer structure in a nanometer order on the surface can be deposited by orientation.
  • the term “oriented deposition” can be understood as an essential requirement for titania not to form and precipitate particles but to form a layered structure and to precipitate at an angle from the film surface.
  • the crystallites grow in the direction of stable surface energy. It is presumed that this vibration or electric field hot water treatment promoted this tendency.
  • the form of the vibration may be a pulsed form having a certain interval or a continuous form such as a wave, and the vibration may be applied directly to the gel film. Alternatively, it may be added to the substrate, or may be added via contacting water.
  • the direction of the vibration and the vibration is essentially applied to the gel film, such as a horizontal direction or a vertical direction to the surface of the gel film, an elliptical vibration, and various combinations thereof. There is no restriction if it is given.
  • the gel film in order to more uniformly and efficiently deposit and align the titania nanosheets, is preferably brought into contact with hot water while continuously vibrating the gel film. It is exemplified that vibration is preferably applied in a direction normal to the surface of the gel film.
  • the magnitude of this vibration differs depending on the composition of the gel film, etc., and cannot be unambiguously determined.However, one measure is to apply a vibration of about 3 O mm Z seconds or more. . More specifically, the vibration having a magnitude of 30 mm Z seconds or more is, for example, a vibration of 180 times Z or more at an amplitude of 2.5 mm and a vibration of 90 times or more at an amplitude of 5 mm. As described above, it can be adjusted according to the device environment. With respect to this frequency, if the frequency is too low, the effect of the vibration cannot be obtained and the titania nanosheet cannot be deposited, and conversely, if it is too high, for example, as in the case of ultrasonic vibration, it is inappropriate. is there. In the invention of this application, for example, when the amplitude is 2.5 mm, it is preferable that the vibration is applied as a vibration having a frequency of 5 to 10 Hz (equivalent to 300 to 600 times). .
  • Electric field hot water treatment by applying a voltage can also be implemented in various forms.
  • a DC voltage may be applied to the opposite positive and negative electrodes to form an electric field, or an AC electric field may be formed.
  • it is generally more effective for DC electric fields. Of course, it is not limited to this.
  • the magnitude of the applied voltage can be determined in consideration of the distance between the opposed substrates, the state of the gel film, and the like.
  • the temperature of the hot water can be set to 100 or less, and further, from about room temperature to 100 or less, more specifically 50 to It is preferable to set the range to about 100. More efficiently, about 90 to about 100 can be used as warm water.
  • the composition of the gel film and It varies depending on the temperature of the water, the applied vibration and the magnitude of the electric field, etc., but it can be arbitrarily determined, and the desired amount and dispersion state of the titania nanosheets to be directionally deposited on the obtained thin film surface are desired. It can be adjusted so that For example, when titania nanosheets are oriented and deposited at high density over the entire surface of a thin film, it is preferable to perform a hot water treatment for at least 2 hours as a rough guide. If the time of the hot water treatment is less than 2 hours, it is conceivable that the titania nanosheets are not oriented and deposited at a sufficiently high density, or the titania nanosheets do not grow to a sufficient size.
  • a novel titania nanosheet oriented thin film capable of maintaining excellent superhydrophilicity for a long time can be produced. Then, using the whole or a part of an arbitrary product as a base material, the titania nanosheet oriented thin film is directly produced on the surface thereof, or the previously produced oriented titania nanosheet oriented thin film is attached to the surface of the arbitrary product by any means. By doing so, an article provided with the titania nanosheet oriented thin film can be manufactured.
  • This sol composition was applied to the surface of a silicon wafer and an alkali-free glass substrate by a dip coating method with a lifting speed of 3.03 mm / sec, dried at 90 for 1 hour, and dried at 75 Si.
  • a 0 2 ⁇ 25 T i O 2 gel film was prepared.
  • this gel film was immersed together with the substrate in warm water at 90 °, and vibrated at 60 mm / sec (amplitude: 2.5 mm, frequency: 360 times Zmin) in a direction perpendicular to the substrate.
  • the warm water treatment was performed for about an hour.
  • a transparent thin film having a thickness of about 100 nm was obtained.
  • the cross section of this transparent thin film was observed with a scanning electron microscope (SEM), and the cross-sectional perspective image is illustrated in FIG.
  • SEM observations show that nanometer-sized titania nanosheets with a size of about 10 O nm are deposited on the surface of this transparent thin film at a high density on the entire surface of the thin film. Was observed.
  • a vibration hot water treatment for 2 hours or more.
  • This transparent thin film was observed with a high-resolution transmission electron microscope (HRT EM), and its cross-sectional image is illustrated in FIG. It was confirmed that the titania nanosheet microcrystals were oriented and deposited at high density on the substrate as if they were growing from the substrate. It was also confirmed that the titania nanosheet microcrystals formed a layered structure having an interlayer distance near 0.7 nm.
  • HRT EM high-resolution transmission electron microscope
  • FIG. 4 shows an example of (a) an HRTEM image and (b) a result obtained by performing a Fourier transform on the image and resolving the lattice.
  • the titania nanosheet microcrystals in (a) have a layer-to-layer distance of about 0.6 nm, and in (b) the titania nanosheet microcrystals, which are not found in the titania of the ana-sease, rutile and brookite phases, two It was found that 0.6 nm spots characteristic of nanosheet microcrystals clearly appeared. A 1.2-nm spot, which is twice as large, was also observed.
  • FIGS. 5 (a) and 5 (b) The results of observing another titania nanosheet in this transparent thin film are illustrated in FIGS. 5 (a) and 5 (b).
  • the titania nanosheet shown in (a) has an interlayer distance of about 0.60 to 0.63 nm.
  • the interlayer distance was about 0.82 nm.
  • titania nanosheet oriented transparent thin film of the invention of the present application there are titania nanosheets which are highly densely oriented in a layered structure having an interlayer distance of about 0.6 nm to 0.85 nm. Was confirmed.
  • a 75 SiO 2 ⁇ 25 Ti O 2 gel film was prepared in the same procedure as in the example. This gel film was immersed together with the substrate in 90 warm water, completely fixed so that the substrate did not vibrate, and subjected to a warm water treatment for about 2 hours. In the transparent thin film obtained by this vibration-free hot water treatment, no titania nanosheet with an interlayer distance of around 0.7 nm was observed, and as previously reported, a granular particle with a diameter of several tens of nm was observed. However, it was observed that titania nanocrystallites in the anatase phase were deposited on the entire surface of the thin film.
  • T i 0 2 gel membrane facilities heat-treated for one hour at 5 0 0 did.
  • T i 0 2 film after the heat treatment was subjected to X-ray diffraction measurement and T EM observation, almost the entire T i O 2 film that has One Do titania anatase phase was confirmed.
  • This is T i ⁇ 2 membrane surface, and titania nanosheet fine crystals having an interlayer distance of 0. 7 nm vicinity, the precipitation of anatase phase titania crystallites like granular diameter of about several tens of nm was not observed, substantially smooth It was confirmed that it was a perfect plane.
  • the (A) titania nanosheet oriented transparent thin film and the (B) titania nanocrystal dispersed thin film prepared by treatment with warm water have a small contact angle of 5 ° or less immediately after preparation. Evening It was found that the change over time of the contact angle was smaller than that of the titania crystal thin film.
  • the contact angle of water is less than 100 ° even after 1000 hours in a dark place in the air, Even after the lapse of time, the contact angle of water was about 10 °, and it was confirmed that the material had excellent properties to maintain superhydrophilicity for a long time.
  • ultraviolet light illuminance was set to be 5 8 mW c m '1. UV light irradiation started 30 minutes after the immersion of the thin film.
  • titania nanocrystallite-dispersed thin films were confirmed to exhibit a photolysis action that is approximately 30% higher than that of (C) anatase-phase titania crystal thin films. This is because the titania content of (A) the titania nanosheet oriented transparent thin film and (B) the titania nanocrystalline fine crystal dispersed thin film is 25%, and (C) the titania crystal thin film of the anatase phase is 100%. Considering that it is much less than that of, it is a remarkably high value, indicating excellent photocatalytic activity.
  • a sol-like composition was prepared by the same procedure as in Example 1, and a 75 S i 0 2 ⁇ 25 T i 0 2 gel film was formed on an alkali-free glass substrate with a transparent conductive thin film of indium tin oxide (ITO). (Mol%) was prepared.
  • ITO indium tin oxide
  • the two gel film ITO OZ glass substrates are opposed to each other in a state where both substrates are in parallel with a 1 cm interval so that the film surfaces face each other.
  • V DC voltage And kept in boiling water for 3 hours.
  • titania nanosheets were generated as in the case of the vibration hot water treatment. From the results of the electron diffraction measurement, the results of the analysis confirmed that these nanosheets also had a layered structure with a layer spacing of about 0.7 nm.
  • the components of the gel film usually dissolve in the form of negatively charged oxides or hydroxides. Therefore, in the gel film on the negative electrode side, diffusion and elution of components to the surface are considered to be promoted. This effect is similar to the effect of applying moderate vibration during hot water treatment to promote the diffusion and elution of gel membrane components. In other words, it is inferred that the conditions under which the diffusion and elution of the gel membrane components are appropriately promoted during the hot water treatment are important factors for the production of the titania nanosheet thin film of the present invention.
  • a novel titania nanosheet oriented thin film As described in detail above, according to the present invention, a novel titania nanosheet oriented thin film, a method for producing the same, and a method for producing the same, which can exhibit high photocatalytic activity and maintain excellent superhydrophilicity and antifogging property for a long time An article provided with an oriented thin film is provided.

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Abstract

A titania nanosheet alignment thin film whose main components are silica and titania, wherein titania nanosheets of layer structure having a nanometer order size are dispersed on a surface thereof. The titania nanosheet alignment thin film not only exhibits high photocatalytic activity but also can maintain excellent ultrahydrophilic and anti-fogging properties for a prolonged period of time. Further, there are provided a process for producing the same and an article including the titania nanosheet alignment thin film.

Description

明 細 書 チタニアナノシート配向薄膜とその製造方法 およぴチタニアナノシート配向薄膜を備えた物品 技術分野  Description Oriented thin film of titania nanosheet and its manufacturing method, and article provided with orientated thin film of titania nanosheet
この出願の発明は、 チタニアナノシート配向薄膜とその製造方 法およびチタニアナノシート配向薄膜を備えた物品に関するもの である。 さらに詳しくは、 この出願の発明は、 高い光触媒活性を 示すとともに、 優れた超親水性および防曇性を長時間維持するこ とができる、 新規なチタニアナノシ一ト配向薄膜とその製造方法 およびそのチタニアナノシート配向薄膜を備えた物品に関するも のである。 背景技術  The invention of this application relates to a titania nanosheet oriented thin film, a method for producing the same, and an article provided with the titania nanosheet oriented thin film. More specifically, the invention of this application provides a novel oriented thin film of titania nanosheets, which exhibits high photocatalytic activity and can maintain excellent superhydrophilicity and antifogging properties for a long time, a method for producing the same, and a titania The present invention relates to an article provided with a nanosheet oriented thin film. Background art
従来より、 チタニアのもつ光触媒活性および超親水性等といつ た特性が注目されており、 チタニア薄膜をはじめとし、 シリカと チタニアを主成分とするシリカーチタニア系 （S i 0 2— T i 0 2 系） 薄膜等の、 チタニアを含有する薄膜を用いた、 浄化、 抗菌、 防汚等の幅広い機能を有する物品の開発が進められ、 既に実用化 されてもいる。 このチタニアには、 アナターゼ相、 ルチル相、 ブ ルッカイ ト相の 3種類の結晶体と、 準安定相、 アモルファス相な どがあり、 これらのうちで、 アナ夕ーゼ相のチタニアが最も高い 光触媒活性を示すことが知られている。 また、 チタニアの形状に よっても、 比表面積が変わることなどから、 光触媒活性等の特性 が変化することが知られている。 Conventionally, attention has been focused on the photocatalytic activity and super hydrophilicity or the like and the time was characteristic of titania, and including titania thin film, silica and titania silica-titania-based mainly composed of (S i 0 2 - T i 0 2 ) Articles using titania-containing thin films, such as thin films, that have a wide range of functions such as purification, antibacterial, and antifouling are being developed and are already in practical use. This titania has three types of crystals, anatase phase, rutile phase, and brookite phase, metastable phase, and amorphous phase. Of these, the photocatalyst with the highest titania in the anaase phase is It is known to show activity. It is also known that properties such as photocatalytic activity also change due to changes in specific surface area, etc., depending on the shape of titania.
このチタニアを含有する薄膜のうち、 S i 0 2— T i 0 2系薄膜 について、 チタニアの結晶構造や形状を考慮した研究が既にいく つかなされている。 たとえば、 Ab eらにより、 ビスァセチルァ セトナートチタニウムジイソプロボキシドあるいはビスァセト酢 酸ェチルチタニウムジィソプロポキシドとゲイ酸を用いて製造さ れた S i 02-T i O 2系複合酸化物において、 チタニアをアナ夕 ーゼ相にするために、 この複合酸化物が T i 02を 94 m o 1 % 含む場合には 5 0 0 以上の熱処理を、 8 9〜6 7mo l %含む 場合には 7 5 0で以上の熱処理をそれぞれ施す必要があること、 さらに、 5 0 m o 1 %の i 02を含む場合には 1 0 0 O で熱 処理を行ってもアナタ一ゼ相の T i 02を得ることはできず、 非 晶質のままである こと、 などが報告されている （Y. Abe. N. Sugimoto, Y. Nagano and T. Misono, J. Non-Cryst. , 104 (1988) 164. 、。 Of the thin film containing titania, S i 0 2 - for T i 0 2 based thin film, research goes already considering the crystal structure and shape of titania Have been hooked. For example, the Ab e et al, in S i 0 2 -T i O 2 composite oxide prepared using Bisuasechirua Seto inert titanium diisopropoxide Boki Sid or Bisuaseto acetic acid E chill titanium Jie source propoxide and Gay acid to the titania Ana evening over Ze phase, the heat treatment 5 0 0 or more when the composite oxide containing T i 0 2 94 mo 1% , when it contains 8 9~6 7mo l% is It is necessary to carry out the above heat treatment at 75 0 C. Further, when 50 mo 1% of i 0 2 is contained, even if the heat treatment is carried out at 100 O, the T i 0 2 cannot be obtained and remain amorphous (Y. Abe. N. Sugimoto, Y. Nagano and T. Misono, J. Non-Cryst., 104 (1988) ) 164.
また、 この出願の発明者らにより、 チタニウムノルマルブトキ シドとシリコンテトラエトキシドを出発原料に用い、 希塩酸で加 水分解を行った溶液から T i 02を 1 6. 5mo l %含有する S i 02— T i 02系薄膜を形成し、 これを 3 5 0でで熱処理した後 に 1 0 0^、 1気圧程度の水蒸気に暴露させることによって、 ァ ナタターゼ型の T i〇 2を、 微結晶として膜表面に析出できるこ とが報告されている （A. Matsuda, T. Kogure, Y. Matsuno, S. Kataya a, T. Tsuno, N. Tohge and T. Minami, J. Am. Ceram. Soc. , 76 (1993) 2899)。 さらに、 S i 〇 2— T i 02ゲル 膜を温水という温和な条件で処理することにより、 膜状面にアナ 夕一ゼ相チタニア微結晶を析出させる方法等についても提案 （P CT/J P 9 9/0 047 7) されている。 これらのように、 チ タニアが膜表面に微結晶として析出された S i 02— T i 02系薄 膜は、 T i 02の比表面積が増大されていることから、 通常の S i 02— T i 02系薄膜よりも光触媒活性が高められていることが 確認されている。 その一方で、 T i〇 2の単体に関して、 S a s a k i らにより、 種々のチタン酸塩をイオン交換して機械的な摩砕操作を行うこと により、 0. 7 9〜 1. 04 nm付近の比較的大きな層間距離を 有する層状のチタニアナノシートが得られることが報告されてい る （ T. Sasaki, M. Watanabe, Y. Michiue, Y. Komatsu, F. Izumi, S. Takenouchi, Chemstry of Materials, 7 (1995) 1001 )。 このチタニアナノシートは、 粉末状の T i 02に比較し て大きさが小さく、 かつ形状が制御されて比表面積が増大されて いるために光触媒活性が高く、 さらにチタニアナノシートが層状 構造を形成していることから、 なんらかの新規な機能を発現する ことが期待されている。 しかしながら、 このチタニアナノシート を 2次製品に利用するには、 このチタニアナノシートを基材上に 担持させるための手間がかかるという問題があった。 Further, S this by the inventors of the application, using the titanium normal butoxide and silicon tetraethoxide as a starting material, containing T i 0 2 1 6. 5mo l % from the solution was subjected to pressure hydrolysis with dilute hydrochloric acid i 0 2 - T i 0 to form a 2-based thin film, 1 0 0 ^ after heat treatment at this in a 3 5 0, by exposure to about 1 atmosphere steam, the T I_〇 2 § Natataze type It has been reported that microcrystals can be deposited on the film surface (A. Matsuda, T. Kogure, Y. Matsuno, S. Katayaa, T. Tsuno, N. Tohge and T. Minami, J. Am. Ceram. Soc., 76 (1993) 2899). In addition, we propose a method of precipitating fine crystals of ana-yuzuichi phase titania on the film surface by treating the S i 〇 2 — T i 0 2 gel film under mild conditions of warm water (P CT / JP 9 9/0 047 7) has been done. As these, S i 0 2 of titania is deposited as microcrystals on the membrane surface - T i 0 2 based thin film, since the specific surface area of T i 0 2 is increased, the normal S i It has been confirmed that the photocatalytic activity is higher than that of the 0 2 — Ti 0 2 thin film. On the other hand, for Ti イ オ ン2 alone, Sasaki et al. Conducted a mechanical trituration operation by ion-exchange of various titanates to compare around 0.79 to 1.04 nm. It has been reported that a layered titania nanosheet having an extremely large interlayer distance can be obtained (T. Sasaki, M. Watanabe, Y. Michiue, Y. Komatsu, F. Izumi, S. Takenouchi, Chemstry of Materials, 7 ( 1995) 1001). The titania nanosheet, powdery T i 0 2 in smaller size as compared, and shape high photocatalytic activity in the specific surface area is controlled is increased, more titania nanosheet to form a layered structure Therefore, it is expected to exhibit some new functions. However, in order to use the titania nanosheet as a secondary product, there is a problem that it takes time to support the titania nanosheet on a base material.
この出願の発明者らは、 S i 02-T i 02ゲル膜の組成を厳密 に制御して温水で処理することにより、 0. 7 nm近傍の層間距 離をもつチタニア微結晶を膜表面に析出させた S i 02— T i o 2 透明薄膜を得ることに成功している （特願 2 0 0 0— 2 8 9 5 2 8 )。 この方法により得られる S i 02— T i 02ゲル膜は、 優れ た超親水性や光触媒活性を示すものとしてその応用が期待されて いるものである。 そして、 このチタニア微結晶が表面に析出され た S i 02— T i 02透明薄膜の実現により、 膜表面にチタ二アナ ノシートが分散された S i〇 2— T i O 2ゲル膜の実現も望まれる ようになってきている。 しかしながら、 その実現は、 実際には、 未だなされていないものである。 The inventors of this application, by treatment with warm water strictly control the composition of the S i 0 2 -T i 0 2 gel film, film titania crystallites having an interlayer distance of 0. 7 nm near We have succeeded in obtaining a Si 0 2 —T io 2 transparent thin film deposited on the surface (Japanese Patent Application No. 2000-2895). Obtained by this method S i 0 2 - T i 0 2 gel film is to its application is expected as an indication of the excellent super-hydrophilicity and photocatalytic activity. Then, S i 0 2 of titania crystallites are deposited on the surface - the realization of T i 0 2 transparent film, S I_〇 2 Chita two Ana Noshito is dispersed on the membrane surface - of T i O 2 gel film Realization is also being desired. However, its realization has not yet been done.
そこで、 この出願の発明は、 以上の通りの事情に鑑みてなされ たものであり、 従来技術の問題点を解消し、 高い光触媒活性を示 すとともに、 優れた超親水性および防曇性を長時間維持すること ができる、 新規なチタニアナノシート配向薄膜とその製造方法お ょぴそのチタニアナノシート配向薄膜を備えた物品を提供するこ とを課題としている。 Accordingly, the invention of this application has been made in view of the above circumstances, and solves the problems of the prior art, exhibits high photocatalytic activity, and has excellent superhydrophilicity and antifogging properties. Novel titania nanosheet oriented thin film that can be maintained for a long time, its manufacturing method and It is an object of the present invention to provide an article provided with the titania nanosheet oriented thin film.
発明の開示 Disclosure of the invention
そこで、 この出願の発明は、 上記の課題を解決するものとして、 以下の通りの発明を提供する。  Therefore, the invention of this application provides the following inventions to solve the above problems.
すなわち、 まず第 1には、 この出願の発明は、 シリカとチタ二 ァを主成分とする薄膜であって、 その表面に、 大きさがナノメー トルオーダーで、 層状構造を有するチタニアナノシートが分散さ れていることを特徴とするチタニアナノシー卜配向薄膜を提供す る。  That is, first, the invention of this application is a thin film mainly composed of silica and titania, and a titania nanosheet having a layered structure with a nanometer size and a layer structure is dispersed on the surface thereof. Provided is a titania nanosheet oriented thin film characterized by being characterized in that:
そしてこの出願の発明は、 上記の発明について、 第 2には、 チ タニアナノシートの層間距離が、 0. 6〜 0. 8 5 nmであるこ とを特徵とするチタニアナノシート配向薄膜を、 第 3には、 チタ ニァナノシートの層間距離が、 0. 7 nmもしくはその近傍であ ることを特徴とするチタニアナノシート配向薄膜を、 第 4には、 チタニアナノシートが、 表面全体に高分散されていることを特徴 とするチタニアナノシート配向薄膜を、 第 5には、 シリカとチタ ニァの配合が、 モル比で、 S i 02 : T i 02= 5 : l〜 l : 3の 範囲であることを特徵とするチタニアナノシート配向薄膜を、 第 6には、 シリカとチタニアの配合が、 モル比で、 S i〇 2 ： T i 02 = 3 ： 1であることを特徴とするチタニアナノシート配向薄 膜を、 第 7には、 水に対する接触角が 5 ° 以下の超親水性を示す ことを特徵とするチタニアナノシート配向薄膜を、 第 8には、 防 曇性を示すことを特徴とするチタニアナノシート配向薄膜を、 第 9には、 水に対する接触角が、 空気中暗所で 20 0 0時間保持後 に 1 0。 以下であることを特徴とするチタニアナノシート配向薄 膜を、 第 1 0には、 光触媒活性を示すことを特徴とするチタニア ナノシート配向薄膜を提供する。 またこの出願の発明は、 第 1 1 には、 上記のいずれかのチタニアナノシート配向薄膜を備えてい ることを特徴とする物品等もその態様として提供する。 Then, the invention of this application relates to the above-mentioned invention, secondly, a titania nanosheet oriented thin film characterized in that the interlayer distance of the titania nanosheet is 0.6 to 0.85 nm. Is characterized by a titania nanosheet oriented thin film characterized in that the interlayer distance of the titania nanosheet is at or near 0.7 nm.Fourth, the titania nanosheet is highly dispersed over the entire surface. and a titania nanosheet alignment thin film, the fifth, the formulation of the silica and titanium Nia is a molar ratio, S i 0 2: T i 0 2 = 5: l~ l: and Toku徵to be in the range of 3 Sixth, a titania nanosheet oriented thin film characterized in that the molar ratio of silica and titania is S i〇 2 : T i 0 2 = 3: 1 Seventh, the contact angle with water is 5 ° or less. An oriented thin film of titania nanosheet characterized by exhibiting hydrophilicity; an eighth, oriented thin film of titania nanosheet characterized by exhibiting anti-fogging property; 10 hours after holding for 2000 hours. The present invention provides an oriented thin film of titania nanosheet characterized by the following: (10) To provide an oriented thin film of titania nanosheet characterized by exhibiting photocatalytic activity. The invention of this application is as follows: The present invention also provides, as an embodiment thereof, an article or the like, which is provided with any one of the above-described oriented titania nanosheet thin films.
一方で、 この出願の発明は、 第 1 2には、 シリコンアルコキシ ドと加水分解性を有するチタニウム化合物を含む溶液から、 チタ ニゥム化合物とシリコンアルコキシドの複合金属酸化物あるいは 水酸化物を含むゲル膜を作製し、 このゲル膜に対して、 温水を接 触させるとともに振動を加える振動温水処理を施すことで、 表面 に大きさがナノメートルオーダーで、 層状構造を有するチタニア ナノシートを配向析出させることを特徴とするチタニアナノシー 卜配向薄膜の製造方法を提供する。  On the other hand, the invention of this application is, first, a gel film containing a composite metal oxide or hydroxide of a titanium compound and a silicon alkoxide from a solution containing a silicon alkoxide and a titanium compound having hydrolyzability. By subjecting the gel film to vibration hot water treatment by bringing hot water into contact and applying vibration, it is possible to orientate and precipitate titania nanosheets having a layered structure with a nanometer size on the surface. Provided is a method for producing a titania nanosheet oriented thin film, which is characterized by:
また、 この出願の発明は、 第 1 3にはシリコンアルコキシドと 加水分解性を有するチタニウム化合物を含む溶液から、 チタニゥ ム化合物とシリコンアルコキシドの複合酸化物あるいは水酸化物 を含むゲル膜を作製し、 このゲル膜に対して、 温水を接触させる とともに電圧を印加する電場温水処理を施すことで、 表面に大き さがナノメートルオーダーで、 層状構造を有するチタニアナノシ 一トを配向析出させることを特徴とするチタニアナノシート配向 薄膜の製造方法を提供する。  In the invention of this application, a thirteenth aspect is to prepare a gel film containing a composite oxide or hydroxide of a titanium compound and a silicon alkoxide from a solution containing a silicon alkoxide and a titanium compound having hydrolyzability, The gel film is subjected to an electric field hot water treatment in which hot water is brought into contact and a voltage is applied, so that titania nanosheets having a layer size of nanometer order on the surface are oriented and deposited. Provided is a method for producing a titania nanosheet oriented thin film.
そして、 この出願の発明は、 上記発明の方法において、 第 1 4 には、 加水分解性を有するチタニウム化合物が、 チタニウムアル コキシドであることを特徵とするチタニアナノシート配向薄膜の 製造方法を、 第 1 5には、 シリコンアルコキシドとチタニウム化 合物の配合が、 モル比で、 S i 02 : T i 02 = 5 : l〜 l : 3の 範囲であることを特徴とするチタニアナノシート配向薄膜の製造 方法を、 第 1 6には、 シリコンアルコキシドとチタニウム化合物 の配合が、 モル比で、 S i 02 : T i 02= 3 ： 1であることを特 徵とするチタニアナノシート配向薄膜の製造方法を、 第 1 7には、 ゲル膜を、 基板上に形成することを特徴とするチタニアナノシー ト配向薄膜の製造方法を、 第 1 8には、 ゲル膜に連続的な振動を 与えながら温水と接触させることを特徵とするチタニアナノシー ト配向薄膜の製造方法を、 第 1 9には、 ゲル膜の表面法線方向に 振動させることを特徴とするチタニアナノシー卜配向薄膜の製造 方法を、 第 2 0には、 3 0 mmZ秒以上の振動を加えることを特 徵とするチタニアナノシート配向薄膜の製造方法を、 第 2 1には、 振幅 2. 5mmで 5〜 1 0 H zの振動を加えることを特徵とする チタニアナノシート配向薄膜の製造方法を、 第 2 2には、 直流電 圧を印加して電場温水処理を施すことを特徴とするチタニアナノ シート配向薄膜の製造方法を、 第 2 3には、 温水処理には、 9 0 の温水を使用することを特徴とするチタニアナノシート配向 薄膜の製造方法を、 第 24には、 2時間以上の温水処理を施すこ とを特徴とするチタニアナノシート配向薄膜の製造方法を提供す る。 図面の簡単な説明 The invention of this application is directed to a method for producing an oriented thin film of titania nanosheet characterized in that the hydrolyzable titanium compound is titanium alkoxide in the method of the above invention. the 5, the formulation of the silicon alkoxide and titanium of compound is, in molar ratio, S i 0 2: T i 0 2 = 5: l~ l: titania nanosheet oriented thin film, which is a range of 3 the manufacturing method, in the first 6, the formulation of the silicon alkoxide and titanium compound, a molar ratio, S i 0 2: T i 0 2 = 3: production of titania nanosheet oriented thin film to FEATURE: it is a 1 The 17th method is to form a gel film on a substrate. The 18th method is a method for producing a titania nanosheet oriented thin film, which is characterized in that the gel film is brought into contact with warm water while continuously oscillating the gel film. A method for producing a titania nanosheet oriented thin film characterized by vibrating in the direction of the normal to the surface of the gel film is described as follows: (20) Titania nanosheet orientation characterized by applying a vibration of 30 mmZ seconds or more. The second is a method for producing a titania nanosheet oriented thin film characterized by applying a vibration of 2.5 to 10 Hz with an amplitude of 2.5 mm, and the second is a DC voltage. A method for producing a titania nanosheet oriented thin film characterized by applying an electric field hot water treatment by applying an electric field, and, secondly, a method of producing a titania nanosheet oriented thin film characterized by using 90 hot water for the hot water treatment. 24th, more than 2 hours That provides a method for manufacturing a titania nanosheet alignment thin film characterized that you subjected to hot water treatment. BRIEF DESCRIPTION OF THE FIGURES
図 1は、 この出願の発明のチタニアナノシート配向薄膜を模式 的に例示した断面図である。  FIG. 1 is a cross-sectional view schematically illustrating a titania nanosheet oriented thin film of the invention of the present application.
図 2は、 実施例 1において作製したこの出願の発明のチタニア ナノシート配向薄膜を断面斜視方向から走査型電子顕微鏡 （S E M) 観察した結果を例示した写真である。  FIG. 2 is a photograph exemplifying the result of observing the oriented titania nanosheet thin film of the invention of this application produced in Example 1 from a sectional perspective direction by a scanning electron microscope (SEM).
図 3は、 実施例 1において作製したこの出願の発明のチタニア ナノシート配向薄膜の断面の高分解能透過型電子顕微鏡 （HRT EM) 像を例示した写真である。  FIG. 3 is a photograph exemplifying a high-resolution transmission electron microscope (HRT EM) image of a cross section of the oriented thin film of titania nanosheets of the present invention prepared in Example 1.
図 4は、 実施例 1において作製したこの出願の発明のチタニア ナノシート配向薄膜の （a) 高分解能透過型電子顕微鏡 （HRT EM) 像と、 （b) これをフーリエ変換して格子縞解析した結果 を例示した写真である。  Figure 4 shows (a) a high-resolution transmission electron microscope (HRT EM) image of the oriented titania nanosheet thin film of the invention of this application prepared in Example 1, and (b) a result of Fourier transform of the lattice fringe analysis. It is a photograph illustrated.
差替え用紙（規則 26) 図 5は、 （ a) (b) は、 実施例 1において作製したこの出願の 発明のチタニアナノシート配向薄膜の高分解能透過型電子顕微鏡 (HRTEM) 像を例示した写真である。 Replacement form (Rule 26) FIGS. 5A and 5B are photographs illustrating high-resolution transmission electron microscope (HRTEM) images of the oriented thin film of titania nanosheets of the present invention prepared in Example 1;
図 6は、 （A) この出願の発明のチタニアナノシート配向薄膜、 (B) チタニアナノ微結晶分散薄膜、 （C) アナターゼ相チタ二 ァ結晶薄膜について、 水の接触角の経時変化を例示した図である。  FIG. 6 is a diagram illustrating the change over time of the contact angle of water for (A) the titania nanosheet oriented thin film of the invention of the present application, (B) the titania nanocrystal dispersed thin film, and (C) the anatase phase titania crystalline thin film. is there.
図 7は、 （A) この出願の発明のチタニアナノシート配向薄膜、 (B) チタニアナノ微結晶分散薄膜、 （C) アナターゼ相チ夕二 ァ結晶薄膜について、 光分解能を例示した図である。  FIG. 7 is a diagram illustrating the optical resolution of (A) the titania nanosheet oriented thin film of the invention of the present application, (B) the titania nanocrystal dispersed thin film, and (C) the anatase phase titanium oxide thin film.
図 8は、 実施例 3における電場温水処理の方法を例示した概要 図である。  FIG. 8 is a schematic diagram illustrating an electric field hot water treatment method according to the third embodiment.
図 9は、 実施例 3により負極側に生成されたチタニアナノシー ト配向薄膜について走査型電子顕微鏡 （S EM) 観察した結果を 例示した図である。  FIG. 9 is a diagram exemplifying the results of observation of a titania nanosheet oriented thin film formed on the negative electrode side in Example 3 by a scanning electron microscope (SEM).
図 1 0は、 従来のチタニア微結晶分散薄膜の構成を模式的に示 した断面図である。  FIG. 10 is a cross-sectional view schematically showing a configuration of a conventional titania microcrystal dispersed thin film.
なお、 図中の符号は次のものを示す。  In addition, the code | symbol in a figure shows the following.
1 チタニアナノシート配向薄膜  1 Titania nanosheet oriented thin film
2 チタニアナノシート  2 Titania nanosheet
3 基材  3 Substrate
4 チタニアナノ微結晶 発明を実施するための最良の形態  4 Titania nanocrystals Best mode for carrying out the invention
この出願の発明は、 上記の通りの特徵を持つものであるが、 以 下にその実施の形態について説明する。  The invention of this application has the features as described above, and embodiments thereof will be described below.
この出願の発明が提供するチタニアナノシート配向薄膜は、 シ リカとチタニアを主成分とする薄膜であって、 その表面に、 大き さがナノメートルオーダーで、 層状構造を有するチタニアナノシ  The oriented thin film of titania nanosheet provided by the invention of the present application is a thin film containing silica and titania as main components, and has a layer of a titania nanosheet having a layered structure on the surface in nanometer order.
7 7
差替 え用 紙（規則 26) ―トが分散されていることを特徴としている。 Replacement paper (Rule 26) -It is characterized by the fact that
この出願の発明のチタニアナノシート配向薄膜を、 模式的に図 Schematic diagram of the titania nanosheet oriented thin film of the invention of this application
1に例示した。 チタニアナノシート配向薄膜 （ 1 ) は、 シリカと チタニアを主成分とする薄膜 （ 1) であって、 その薄膜 （ 1 ) の 表面に、 チタニアナノシート （2) が分散されたものとして実現 されている。 Example 1 The titania nanosheet oriented thin film (1) is a thin film (1) containing silica and titania as main components, and is realized as a dispersion of the titania nanosheet (2) on the surface of the thin film (1).
このようなチタニアナノシート （2) は、 一枚の大きさが 5〜 5 0 nm程度の、 薄片状ないしはシート状のチタニアが、 全体と しては、 大きさが数 nm〜数 l O O nmのナノメートルオーダー で、 厚さが 1〜 2 0 nm程度の層状構造を形成しているものであ る。  Such a titania nanosheet (2) has a flaky or sheet-like titania with a size of about 5 to 50 nm, but has a size of several nm to several 100 nm as a whole. It has a layered structure with a thickness of about 1 to 20 nm on the order of nanometers.
そしてこの出願の発明のチタニアナノシート配向薄膜 （ 1 ) に おいては、 チタニアナノシート （2) の層間距離は 0. 5〜 1. O nm程度であり、 代表的には、 層間距離は 0. 7 nmもしくは その近傍のものとして特徵づけることができる。  In the titania nanosheet oriented thin film (1) of the present invention, the interlayer distance of the titania nanosheet (2) is about 0.5 to 1. O nm, and typically, the interlayer distance is 0.7. It can be specified as nm or its vicinity.
表 1に示したように、 チタニアナノシートは、 一般に、 HXT 1 Oy · z H 2 Oとして表記することができ、 またこれらのチタ二 ァナノシートは層間距離 （interlayer spacing) によって特徵づ けることができる。 従って、 この出願の発明におけるチタ二アナ ノシートは、 これらの類似の化合物もしくはこれらの混合物であ ると予想される。 As shown in Table 1, the titania nanosheet can generally be denoted as H X T 1 O y · z H 2 O, also Toku徵Dzu kick These Chita two Ananoshito interlayer distance (interlayer spacing) Can be. Therefore, the titania nanosheet in the invention of this application is expected to be these similar compounds or mixtures thereof.
Titania nanosheet (Protonated titanate) Interlayer spaclng/nm Titania nanosheet (Protonated titanate) Interlayer spaclng / nm
H2Ti307 *1 0.782 0.891 0.656 H2Ti409. H20 *2 0.905 0.5 0.367 H2Ti4Og - 1.2H20 *3 0.829 1.235 0.991 H2Ti409 · 1.9H20 *4 0.904 1.04 0.593 Η2ΤΙ50" · H20 *5 0.829 1.235 0.991 H2T\5O · 3H20 *6 1.041 1.338 0.638 . H 2 Ti 3 0 7 * 1 0.782 0.891 0.656 H 2 Ti 4 0 9 H 2 0 * 2 0.905 0.5 0.367 H 2 Ti 4 O g - 1.2H 2 0 * 3 0.829 1.235 0.991 H 2 Ti 4 0 9 · 1.9 H 2 0 * 4 0.904 1.04 0.593 Η 2 ΤΙ 5 0 "H 2 0 * 5 0.829 1.235 0.991 H 2 T \ 5 O3H 2 0 * 6 1.041 1.338 0.638
CO HXTI2— x/4C]x/404. H2O(x〜0.7) 0.94CO H X TI 2 — x / 4 C] x / 4 0 4. H 2 O (x ~ 0.7) 0.94
.07丁 7304 · nH20 *8 0.922 出典 , . 07 chome 73 0 4 · nH 2 0 * 8 0.922 Source,
*1 JCPDS 41-0192  * 1 JCPDS 41-0192
*2 JCP8D 36-006-55  * 2 JCP8D 36-006-55
*3 Sasaki et al. Inorg. Chem., 24,2265 (1985) * 3 Sasaki et al. Inorg. Chem., 24, 2265 (1985)
*4 JCPDS 39-0040  * 4 JCPDS 39-0040
*5 JCPDS 44- 0131  * 5 JCPDS 44-0131
*6 JCPDS 44-0130  * 6 JCPDS 44-0130
*7 Sasaki et al., Ghem.Mater., 【5】1001 (1995).  * 7 Sasaki et al., Ghem. Mater., [5] 1001 (1995).
*8 Feng et al., Chem.Mater.,Hf2]290(2001). * 8 Feng et al., Chem. Mater., Hf2] 290 (2001).
そして、 特徴的なことに、 この出願の発明のチタニアナノシー ト配向薄膜 （ 1) においては、 チタニアナノシート （2) の分散 の状態は、 チタニアナノシート （2) が薄膜 （ 1 ) の表面に平行 に堆積しているのではなく、 少なくとも薄膜 （ 1) の表面部では 角度を持って立ち上がった状態で分散されている。 このチタニア ナノシート （ 2) は、 薄膜 （ 1 ) の表面の一部に、 あるいは全体 に低密度で分散されたものであってもよいが、 この出願の発明の 発明においては、 より好ましい態様として、 チタニアナノシートCharacteristically, in the titania nanosheet oriented thin film (1) of the present invention, the dispersion state of the titania nanosheet (2) is such that the titania nanosheet (2) is parallel to the surface of the thin film (1). Instead of being deposited on the surface, at least at the surface of the thin film (1), it is dispersed in an upright state. The titania nanosheet (2) may be dispersed at a low density on a part of the surface of the thin film (1) or on the whole, but in the invention of the invention of this application, more preferred embodiments include Titania nanosheet
(2) が、 薄膜 （1) の表面全体に高分散されたチタニアナノシ ート （2) 配向薄膜 （ 1) を実現している。 なお、 この出願の発 明において、 「高分散されている」 との表現は、 薄膜 （ 1 ) の表 面の平面積に対して、 一般的には、 3 0 %以上が、 さらに好まし くは 50 %以上が、 また実現可能なものとしてほぼ 1 0 0 %がチ タニアナノシート （2) として認められることを意味している。 (2) realizes a titania nanosheet (2) oriented thin film (1) that is highly dispersed over the entire surface of the thin film (1). In the invention of the present application, the expression “highly dispersed” is generally more preferably 30% or more with respect to the plane area of the surface of the thin film (1). Means that more than 50% is recognized as titania nanosheets (2), and nearly 100% as feasible.
このようなこの出願の発明のチタニアナノシート （2) 配向薄 膜 （ 1) は、 その表面に、 チタニアナノシート （ 2) が分散され ていることから、 光触媒活性を示すことを特徴としている。 この チタニアナノシート （2) は、 たとえば図 1 0に例示したような 従来のチタニア微結晶 （4) が分散された薄膜 （ 1) におけるチ タニア微結晶 （4) よりも表面積が十分大きいことから、 その光 触媒活性についても、 この出願の発明のチタニアナノ シート Such a titania nanosheet (2) oriented thin film (1) of the invention of this application is characterized by exhibiting photocatalytic activity because the titania nanosheet (2) is dispersed on its surface. Since the titania nanosheet (2) has a sufficiently larger surface area than the titania microcrystals (4) in the thin film (1) in which the conventional titania microcrystals (4) are dispersed as shown in FIG. 10, for example, Regarding its photocatalytic activity, the titania nanosheet of the invention of this application
(2) 配向薄膜 （ 1) のほうが、 チタニア微結晶 （4) が分散さ れた薄膜 （1 ) よりも高められている。 (2) The orientation of the oriented thin film (1) is higher than that of the thin film (1) in which titania microcrystals (4) are dispersed.
また、 この出願の発明のチタニアナノシート （ 2 ) 配向薄膜 In addition, the titania nanosheet of the invention of this application (2) Oriented thin film
( 1 ) は、 表面に分散されたチタニアナノシート （2) が、 薄膜(1) is a titania nanosheet dispersed on the surface (2) is a thin film
( 1 ) の表面に全体として微細な凹凸組織を形成している。 この 凹凸組織は光の波長に対して十分に小さいものであり、 また、 チ タニア微結晶 （4) に比べて光散乱が起こりにくいため、 薄膜は 透明性が高く、 意匠性に優れているとともに、 水に対する接触角 が 5 ° 以下の超親水性を示すことを特徴としている。 さらにこの 超親水性については、 たとえば、 空気中喑所で 1 0 0 0時間保持 した後に 1 0 ° 以下で、 さらに空気中暗所で 2 0 0 0時間保持し た後にも 1 0 ° 程度という低い接触角が維持され、 従来には見ら れないほど長時間にわたって超親水性を示すものとして実現する ことができる。 (1) A fine uneven structure is formed as a whole on the surface. This uneven structure is sufficiently small with respect to the wavelength of light, and light scattering is less likely to occur as compared with titania microcrystals (4). It is characterized by high transparency, excellent design, and super-hydrophilicity with a contact angle to water of 5 ° or less. Further, the superhydrophilicity is, for example, less than 100 ° after being kept in air for 100 hours, and about 10 ° after being kept in dark air for 2000 hours. A low contact angle is maintained, and it can be realized as a super-hydrophilic substance for a long time, which has not been seen before.
加えて、 この親水性の指標として、 この出願の発明のチタニア ナノシート （ 2 ) 配向薄膜 （ 1 ) の有する防曇性を示すことがで きる。 このチタニアナノシート （ 2 ) 配向薄膜 （ 1 ) は、 空気中 喑所で 2 0 0 0時間保持したものについても、 呼気によってほと んど曇らない、 5 0で程度のお湯にかざしても曇らない、 などの 優れた防曇性をも備えている。  In addition, the antifogging property of the titania nanosheet (2) oriented thin film (1) of the present invention can be shown as an index of the hydrophilicity. This titania nanosheet (2) oriented thin film (1) is hardly clouded by exhalation even if it is kept for 2000 hours in the air, and it is not clouded even if it is held in hot water at 50 degrees. It also has excellent anti-fog properties such as and.
さらに、 この出願の発明のチタニアナノシート （ 2 ) 配向薄膜 Furthermore, the titania nanosheet of the invention of this application (2) Oriented thin film
( 1 ) は、 チタニアナノシート （ 2 ) が層状構造を形成している ことから、 なんらかの新規な機能を発現することが期待できるも のでもある。 In (1), since the titania nanosheet (2) forms a layered structure, it can be expected to exhibit some new functions.
このようなこの出願の発明のチタニアナノシート （ 2 ) 配向薄 膜 （ 1 ) は、 シリカとチタニアの配合を、 モル比で、 S i 02 : T i O 2 = 5 ： 1〜 1 ： 3 と、 広い範囲で調整することができる。 これによつて、 上記のこの出願の発明のチタニアナノシー トSuch titania nanosheet (2) alignment thin film 1 of this invention is a blend of silica and titania in a molar ratio, S i 0 2: T i O 2 = 5: 1~ 1: 3 and , Can be adjusted in a wide range. As a result, the titania nanosheet of the invention of the present application described above is obtained.
( 2 ) 配向薄膜 （ 1 ) の光透過性が高められ、 高い光触媒活性と 超親水性が得られることになる。 そして、 このシリカとチタニア の配合については、 より限定的には、 S i 02 : T i 02= 3 : l およびその付近とすることを好適な例として示すことができる。 これによると、 このチタニアナノシート （ 2 ) 配向薄膜 （ 1 ) の 光触媒活性や、 超親水性がより高められたものとして提供するこ とができる。 以上のこの出願の発明のチタニアナノシー ト （ 2 ) 配向薄膜(2) The light transmittance of the oriented thin film (1) is enhanced, and high photocatalytic activity and superhydrophilicity can be obtained. As a preferable example of the combination of silica and titania, it is preferable to set S i 0 2 : T i 0 2 = 3: l and its vicinity. According to this, the photocatalytic activity and superhydrophilicity of the titania nanosheet (2) oriented thin film (1) can be provided. The above-described titania nanosheet of the invention of this application (2) Oriented thin film
( 1 ) は、 たとえば、 超親水性コーティ ング薄膜や高光触媒活性 コ一ティ ング薄膜等として様々な応用が可能とされている。 そこ で、 この出願の発明が提供する物品は、 上記のこの出願の発明の チタニアナノシート （ 2 ) 配向薄膜 （ 1 ) を備えていることを特 徵としている。 この物品として、 より具体的には、 たとえば任意 の製品を基材 （ 3 ) としてこの出願の発明のチタニアナノシート(1) can be applied to various applications, for example, as a super-hydrophilic coating thin film or a high photocatalytically active coating thin film. Therefore, the article provided by the invention of this application is characterized in that it comprises the above-described titania nanosheet (2) oriented thin film (1) of the invention of this application. As this article, more specifically, for example, the titania nanosheet of the invention of the present application using any product as a base material (3)
( 2 ) 配向薄膜 （ 1 ) を配設することで、 その製品に、 防汚機能、 防曇機能、 水や有機物等の光分解機能、 窒素酸化物等の大気汚染 物質の光分解機能、 あるいは有害微生物に対する殺菌および抗菌 作用が付与されたものとして実現される。 このチタニアナノシー ト （ 2 ) 配向薄膜 （ 1 ) の基材 （ 3 ) 上への配設については、 後 で説明するとおり、 任意の製品を基材 （ 3 ) としてその表面にチ タニアナノシート （ 2 ) 配向薄膜 （ 1 ) を直接製造するようにし て行なってもよいし、 予め製造されたチタニアナノシート （ 2 ) 配向薄膜 （ 1 ) を任意の製品の表面に付着させるなどして配設す るようにしてもよい。 (2) By arranging the oriented thin film (1), the product has antifouling function, antifogging function, photodecomposition function for water and organic substances, photodecomposition function for air pollutants such as nitrogen oxides, or It is realized as having a bactericidal and antibacterial action against harmful microorganisms. Regarding the arrangement of the titania nanosheet (2) oriented thin film (1) on the base material (3), as will be described later, an arbitrary product is used as the base material (3) and the surface of the titania nanosheet (1) is used. 2) It may be performed by directly manufacturing the oriented thin film (1), or the titania nanosheet (2) which has been manufactured in advance may be attached to the surface of any product by attaching the oriented thin film (1). You may do so.
以上のこの出願の発明のチタニアナノシート配向薄膜は、 たと えば、 この出願の発明のチタニアナノシート配向薄膜の製造方法 によって製造することができる。 すなわち、 この出願の発明が提 供するチタニアナノシー卜配向薄膜の製造方法は、 シリコンアル コキシドと加水分解性を有するチタニウム化合物を含む溶液から、 チタニウム化合物とシリコンアルコキシドの複合金属酸化物ある いは水酸化物を含むゲル膜を作製し、 このゲル膜に対して、 温水 を接触させるとともに振動を加える振動温水処理を施すことで、 表面に大きさがナノメートルオーダーで、 層状構造を有するチタ ニァナノシートを配向析出させることを特徴としている。  The above-described oriented titania nanosheet thin film of the invention of this application can be produced, for example, by the method of producing an oriented titania nanosheet thin film of the invention of this application. That is, the method for producing a titania nanosheet oriented thin film provided by the invention of this application is based on a method of preparing a composite metal oxide or water of a titanium compound and a silicon alkoxide from a solution containing a silicon alkoxide and a titanium compound having hydrolyzability. A gel film containing an oxide is produced, and the gel film is subjected to a vibration hot water treatment in which hot water is brought into contact with and vibrated, whereby a titanium nanosheet having a layered structure with a nanometer-sized surface is formed. It is characterized by being oriented and deposited.
また、 この出願の発明は、 振動温水処理法とは別に、 シリコン アルキシドと加水分解性を有するチタニウム化合物を含む溶液か ら、 チタニウム化合物とシリコンアルコキシドの複合酸化物ある いは水酸化物を含むゲル膜を作製し、 このゲル膜に対して、 温水 を接触させるとともに電圧を印加する電場温水処理を施すことで、 表面に大きさがナノメートルオーダ一で、 層状構造を有するチタ ニァナノシートを配向析出させることを特徴とするチタニアナノ シート配向薄膜の製造方法も提供する。 Also, the invention of this application is based on the From a solution containing alkoxide and a titanium compound having hydrolyzability, a gel film containing a composite oxide or hydroxide of a titanium compound and silicon alkoxide is prepared, and the gel film is brought into contact with hot water. The present invention also provides a method for producing an oriented thin film of titania nanosheets, characterized in that by applying an electric field hot water treatment to apply a voltage, a titania nanosheet having a layer size and having a layered structure is oriented and deposited on the surface in the order of nanometers.
この出願の発明のこれらの製造方法においては、 出発物質とし てのシリコンアルコキシドとしては、 たとえば一般式 S i ( O R ) 4で表される各種のものを使用することができる。 ここで、 ァ ルコキシル基 O Rを構成する有機基 Rとしては、 たとえば、 炭素 数 1〜 6の、 メチル基、 ェチル基、 プロピル基、 イソプロピル基、 ブチル基、 ィソブチル基等の同一または別異の低級アルキル基を 挙げることができる。 より具体的には、 たとえば、 シリコンテト ラエトキシドを用いることが、 好適な例として示される。 In these production methods of the invention of this application, as the silicon alkoxide as a starting material, for example, various compounds represented by the general formula Si (OR) 4 can be used. Here, the organic group R constituting the alkoxyl group OR is, for example, the same or a different lower group such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group and an isobutyl group having 1 to 6 carbon atoms. Alkyl groups can be mentioned. More specifically, for example, using silicon tetraethoxide is shown as a preferable example.
シリコンアルコキシドは、 有機溶媒に溶解させて、 シリコンァ ルコキシド溶液を調製する。 このとき、 必要に応じて、 アルコキ シル基の加水分解を促進したり脱水縮合反応を促進するための触 媒ゃ水を添加してもよい。 シリコンアルコキシドに加える有機溶 媒および水は、 モル比で、 それぞれ 1〜 8、 1〜 6程度とするこ とが好ましい。  Silicon alkoxide is dissolved in an organic solvent to prepare a silicon alkoxide solution. At this time, if necessary, catalyst water may be added to promote the hydrolysis of the alkoxy group or promote the dehydration condensation reaction. The molar ratio of the organic solvent and water to be added to the silicon alkoxide is preferably about 1 to 8, and about 1 to 6, respectively.
有機溶媒としては、 たとえば、 メタノール、 エタノール、 1 一 プロパノール、 イソプロピルアルコール、 1 ーブタノール、 2— ブタノール、 イソブチルアルコール、 t e r —ブチルアルコール、 1 _ペン夕ノール、 2 —ペン夕ノール、 3 —ペン夕ノール等を例 示することができる。  Examples of organic solvents include methanol, ethanol, 1-propanol, isopropyl alcohol, 1-butanol, 2-butanol, isobutyl alcohol, ter-butyl alcohol, 1-pentanol, 2-pentanol, and 3-pentanol. Etc. can be illustrated.
媒としては、 たとえば、 硝酸、 塩酸、 硫酸、 燐酸、 酢酸、 ァ ンモニァ等を例示することができる。 出発物質としての加水分解性を有するチタニウム化合物は、 一 例として、 金属有機化合物であるチタニウムアルコキシド、 しゅ う酸チタン、 金属無機化合物として硝酸チタン、 四塩化チタン等 を用いることができるが、 なかでもチタニウムアルコキシドを用 いることが好ましい。 チタニウムアルコキシドとしては、 例えば、 テ卜ラメ 卜キシチタン、 テ卜ラエ卜キシチタン、 テトラ n—プロ ポキシチタン、 テトライソプロポキシチタン、 テトラ n—ブトキ シチタン、 テトライソブトキシチタン等が例示される。 Examples of the medium include nitric acid, hydrochloric acid, sulfuric acid, phosphoric acid, acetic acid, ammonia, and the like. Examples of the hydrolyzable titanium compound as a starting material include a metal organic compound such as titanium alkoxide, titanium oxalate, and a metal inorganic compound such as titanium nitrate and titanium tetrachloride. It is preferable to use titanium alkoxide. Examples of the titanium alkoxide include tetramethoxytitanium, tetraethoxytitanium, tetra-n-propoxytitanium, tetraisopropoxytitanium, tetra-n-butoxytitanium, and tetraisobutoxytitanium.
チタニウム化合物についても、 前記と同様の有機溶媒に溶解さ せて、 チタニウム溶液を調製する。 チタニウム化合物に加える有 機溶媒は、 モル比で 2 0程度とすることが好ましい。  The titanium compound is also dissolved in the same organic solvent as described above to prepare a titanium solution. The molar ratio of the organic solvent to be added to the titanium compound is preferably about 20.
上記のように調製したシリコンアルコキシド溶液およびチタ二 ゥム溶液を混合し、 チタニウム化合物とシリコンアルコキシドの 複合金属酸化物あるいは水酸化物を含むゲル膜を形成させる。 シ リコンアルコキシドとチタニウム化合物の配合は、 モル比で、 前 記の通りの S i O 2 ： T i 0 2 = 5 ： 1 ~ 1 ： 3の範囲、 より好ま しくは、 3 ： 1付近となるように調整することができる。 チタ二 ゥム化合物とシリコンアルコキシドのモル比を 3 ： 1付近とする ことで、 得られるこの出願の発明のチタニアナノシート配向薄膜 の光触媒活性をより高めることができる。 The silicon alkoxide solution and titanium solution prepared as described above are mixed to form a gel film containing a composite metal oxide or hydroxide of a titanium compound and silicon alkoxide. The molar ratio of the silicon alkoxide and the titanium compound is in the range of SiO 2 : Ti 0 2 = 5: 1 to 1: 3 as described above, and more preferably in the vicinity of 3: 1 Can be adjusted as follows. By setting the molar ratio between the titanium compound and the silicon alkoxide to be about 3: 1, the photocatalytic activity of the obtained titania nanosheet oriented thin film of the invention of this application can be further enhanced.
またゲル膜については、 各種の材料からなる基材の上に形成す ることができる。 基材としては、 各種のガラス材料、 金属材料、 無機質材料、 プラスチック材料、 紙、 木質材料等とすることがで きる。 また、 後で述べるが、 この出願の発明の方法は、 1 0 o 以下の温和な条件でチタニアナノシ一ト配向薄膜を製造するよう にしているため、 たとえば、 有機高分子や生体組織等を基材とし て用いることができる。 そしてこの基材は、 この出願の発明のチ タニアナノシート配向薄膜が備えられた物品の全部、 あるいはそ の一部を用いることもできる。 基材上への塗布方法は、 上記のと おり、 ディップコーティング法、 スプレー法、 スピンコーティン グ法等の各種の方法を利用することができる。 Also, the gel film can be formed on a base material made of various materials. As the base material, various glass materials, metal materials, inorganic materials, plastic materials, paper, and wood materials can be used. Also, as will be described later, the method of the invention of the present application is to produce a titania nanosheet oriented thin film under mild conditions of 10 ° or less. It can be used as Then, this base material is the entirety of the article provided with the titania nanosheet oriented thin film of the invention of the present application, Can also be used. As the method of coating on the substrate, various methods such as dip coating, spraying, and spin coating can be used.
この出願の発明の方法において特徴的なことは、 次いでこのゲ ル膜に对して、 温水を接触させるとともに振動を加える振動温水 処理もしくは電圧印加による電場温水処理を施すようにしている。 この処理により、 表面に大きさがナノメートルオーダーで、 層状 構造を有するチタニアナノシートを配向析出させることができる。 ここで、 配向析出とは、 チタニアが粒子を形成して析出するので はなく、 層状構造を形成し、 かつ、 膜表面から角度をもって析出 するために必須な要件として理解することができる。 そして、 こ の出願の発明の振動もしくは電場による温水処理による配向析出 の誘起に、 どのような機構が関係しているのかは定かではないが、 おそらく、 微結晶が表面エネルギーの安定な方向へ成長する傾向 をこの振動もしくは電場温水処理が助長しているものと推測され る。  What is characteristic of the method of the invention of this application is that the gel film is then subjected to an oscillating hot water treatment in which hot water is brought into contact and vibration is applied, or an electric field hot water treatment by applying voltage. By this treatment, titania nanosheets having a layer structure in a nanometer order on the surface can be deposited by orientation. Here, the term “oriented deposition” can be understood as an essential requirement for titania not to form and precipitate particles but to form a layered structure and to precipitate at an angle from the film surface. And it is not clear what mechanism is involved in the induction of the orientational precipitation by the hot water treatment by the vibration or electric field of the invention of this application, but it is supposed that the crystallites grow in the direction of stable surface energy. It is presumed that this vibration or electric field hot water treatment promoted this tendency.
このゲル膜に加える振動については、 様々な振動の形態を、 様々な方法で加えることを考慮することができる。 たとえば、 振 動の形態としては、 間隔を持ったパルス的なものや、 波動のよう な連続的なもの等を、 振動を加える方法としては、 振動を直接ゲ ル膜に加えてもよいし、 あるいは基板に加えてもよいし、 さらに は接触している水を介して加えるようにしてもよい。 またこの振 動の方向については特に制限はなく、 ゲル膜の表面に水平な方向 や垂直な方向、 あるいは楕円振動や、 さらにはこれらを様々に組 み合わせる等、 本質的にゲル膜に振動を与えるものであれば制限 されることはない。 この出願の発明において、 より均一にかつ効 率的にチタニアナノシートを配向析出させるには、 ゲル膜に連続 的な振動を与えながら温水と接触させることが好ましく、 さらに は振動をゲル膜の表面法線方向に加えることが好ましいものとし て例示される。 Regarding the vibration applied to the gel film, it is possible to consider applying various modes of vibration in various ways. For example, the form of the vibration may be a pulsed form having a certain interval or a continuous form such as a wave, and the vibration may be applied directly to the gel film. Alternatively, it may be added to the substrate, or may be added via contacting water. There is no particular limitation on the direction of the vibration, and the vibration is essentially applied to the gel film, such as a horizontal direction or a vertical direction to the surface of the gel film, an elliptical vibration, and various combinations thereof. There is no restriction if it is given. In the invention of this application, in order to more uniformly and efficiently deposit and align the titania nanosheets, the gel film is preferably brought into contact with hot water while continuously vibrating the gel film. It is exemplified that vibration is preferably applied in a direction normal to the surface of the gel film.
また、 この振動の大きさについては、 ゲル膜の組成などにより 異なるため一概には言えないが、 おおよそ 3 O m m Z秒以上の大 きさの振動を加えることを一つの目安とすることができる。 この 3 0 mm Z秒以上の大きさの振動は、 より具体的には、 たとえば 振幅 2 . 5 m mで 1 8 0回 Z分以上の振動として、 振幅 5 m mで 9 0回ノ分以上等のように、 装置環境に応じて調整することがで きる。 この振動数については、 小さすぎる場合には振動の効果が 得られずにチタニアナノシートを析出させることができず、 また 逆に、 たとえば超音波振動のように、 あまりにも大きすぎるのも 不適当である。 そしてこの出願の発明においては、 たとえば振幅 2 . 5 m mの場合には、 振動数 5〜 1 0 H z ( 3 0 0〜 6 0 0回 ズ分） の振動として加えることを好適なものとしている。  The magnitude of this vibration differs depending on the composition of the gel film, etc., and cannot be unambiguously determined.However, one measure is to apply a vibration of about 3 O mm Z seconds or more. . More specifically, the vibration having a magnitude of 30 mm Z seconds or more is, for example, a vibration of 180 times Z or more at an amplitude of 2.5 mm and a vibration of 90 times or more at an amplitude of 5 mm. As described above, it can be adjusted according to the device environment. With respect to this frequency, if the frequency is too low, the effect of the vibration cannot be obtained and the titania nanosheet cannot be deposited, and conversely, if it is too high, for example, as in the case of ultrasonic vibration, it is inappropriate. is there. In the invention of this application, for example, when the amplitude is 2.5 mm, it is preferable that the vibration is applied as a vibration having a frequency of 5 to 10 Hz (equivalent to 300 to 600 times). .
また、 電圧の印加による電場温水処理も様々な形態として実施 することができる。 温水中に浸漬した状態で、 たとえば直流電圧 を、 対向させた正負極に印加して電場を形成してもよいし、 ある いは交流の電場を形成してもよい。 実際的には、 一般的に直流電 場の場合により有効性が高い。 もちろんこれに限られることはな い。  Electric field hot water treatment by applying a voltage can also be implemented in various forms. In a state of being immersed in warm water, for example, a DC voltage may be applied to the opposite positive and negative electrodes to form an electric field, or an AC electric field may be formed. In practice, it is generally more effective for DC electric fields. Of course, it is not limited to this.
印加する電圧の大きさは、 対向させた基板の距離やゲル膜の状 態等を考慮して定めることができる。  The magnitude of the applied voltage can be determined in consideration of the distance between the opposed substrates, the state of the gel film, and the like.
振動温水処理、 そして電界温水処理のいずれの場合も、 温水の 温度は、 1 0 0で以下とすることができ、 さらには室温程度から 1 0 0で以下の、 より限定的には 5 0〜 1 0 0 程度の範囲とす ることが好ましい。 より効率的には、 9 0で〜 1 0 0で程度温水 とすることができる。  In both cases of the vibration hot water treatment and the electric field hot water treatment, the temperature of the hot water can be set to 100 or less, and further, from about room temperature to 100 or less, more specifically 50 to It is preferable to set the range to about 100. More efficiently, about 90 to about 100 can be used as warm water.
また、 温水処理の処理時間についてはゲル膜の組成や用いる温 水の温度、 さらには加える振動や電場の大きさ等によっても異な つてくるが、 任意に決定することができ、 得られる薄膜表面に配 向析出されるチタニアナノシートの量、 分散状態が所望のものと なるように調整することができる。 たとえば、 チタニアナノシー トを薄膜の表面全体に高密度に配向析出させる場合には、 おおよ その目安として、 2時間以上の温水処理を施すことが好ましい。 温水処理の時間が 2時間未満の場合では、 チタニアナノシートが 十分高密度に配向析出されなかったり、 チタニアナノシートが十 分な大きさに成長しなかったりすることが考えられる。 Also, regarding the processing time of the hot water treatment, the composition of the gel film and It varies depending on the temperature of the water, the applied vibration and the magnitude of the electric field, etc., but it can be arbitrarily determined, and the desired amount and dispersion state of the titania nanosheets to be directionally deposited on the obtained thin film surface are desired. It can be adjusted so that For example, when titania nanosheets are oriented and deposited at high density over the entire surface of a thin film, it is preferable to perform a hot water treatment for at least 2 hours as a rough guide. If the time of the hot water treatment is less than 2 hours, it is conceivable that the titania nanosheets are not oriented and deposited at a sufficiently high density, or the titania nanosheets do not grow to a sufficient size.
これによつて、 優れた超親水性を長時間維持することができる、 新規なチタニアナノシート配向薄膜を製造することができる。 そ して、 任意の製品の全体あるいはその一部を基材としてその表面 にこのチタニアナノシート配向薄膜を直接製造したり、 予め製造 した タニアナノシート配向薄膜を任意の製品の表面に何らかの 手段で付着させるなどすることで、 このチタニアナノシート配向 薄膜を備えた物品を製造することができる。  Thereby, a novel titania nanosheet oriented thin film capable of maintaining excellent superhydrophilicity for a long time can be produced. Then, using the whole or a part of an arbitrary product as a base material, the titania nanosheet oriented thin film is directly produced on the surface thereof, or the previously produced oriented titania nanosheet oriented thin film is attached to the surface of the arbitrary product by any means. By doing so, an article provided with the titania nanosheet oriented thin film can be manufactured.
以下、 添付した図面に沿って実施例を示し、 この発明の実施の 形態についてさらに詳しく説明する。 実 施 例  Hereinafter, embodiments will be described with reference to the accompanying drawings, and embodiments of the present invention will be described in further detail. Example
(実施例 1 )  (Example 1)
テトラエトキシシラン、 エタノール、 水からなる混合溶液に、 3 . 6 w t %の塩酸を加えて 3 0分間加水分解させた後、 テトラ ノルマルブ卜キシチタンのェタノ—ル溶液を加えて 3 0分間攪拌 することで、 ゾル状の組成物を得た。 ここで、 テトラエトキシシ ラン、 エタノールおよび水の混合割合は、 モル比で 1 ： 5 ： 4と し、 テトラノルマルブトキシチタンとエタノールの混合割合は、 モル比で 1 ： 2 0とした。 また、 混合溶液とテトラノルマルブト キシチタンのエタノール溶液の混合割合は、 モル比で、 S i O 2 ： T i 0 a = 7 5 ： 2 5となるようにした。 To a mixed solution consisting of tetraethoxysilane, ethanol and water, add 3.6 wt% hydrochloric acid to hydrolyze for 30 minutes, then add a solution of tetra normal butoxytitanium in ethanol and stir for 30 minutes. Thus, a sol-like composition was obtained. Here, the mixing ratio of tetraethoxysilane, ethanol and water was 1: 5: 4 in molar ratio, and the mixing ratio of tetranormal butoxytitanium and ethanol was 1:20 in molar ratio. In addition, the mixed solution and tetranormalbut The mixing ratio of the ethanol solution of xititanium was such that the molar ratio was SiO 2 : Ti 0 a = 75:25.
このゾル状組成物を、 引き上げ速度 3. 0 3 mm/ s e c とし たディップコーティング法により、 シリコンウェハーおよび無ァ ルカリガラス基板の表面に塗布し、 9 0でで 1時間乾燥させて、 7 5 S i 02 · 2 5 T i O 2ゲル膜を作成した。 This sol composition was applied to the surface of a silicon wafer and an alkali-free glass substrate by a dip coating method with a lifting speed of 3.03 mm / sec, dried at 90 for 1 hour, and dried at 75 Si. A 0 2 · 25 T i O 2 gel film was prepared.
次いでこのゲル膜を基板ごと 9 0での温水に浸漬し、 基板と垂 直な方向に 6 0 mm/ s e c (振幅 2. 5 mm、 振動数 3 6 0回 Zm i n) で振動させながら、 2時間程度の温水処理を施した。 これにより、 厚さが約 1 0 0 nmの、 透明な薄膜が得られた。 この透明薄膜の断面を走査型電子顕微鏡 （S E M) で観察し、 その断面斜視像を図 2に例示した。 S EM観察から、 この透明薄 膜の表面には、 大きさが〜 1 0 O nm程度のナノメートルサイズ のチタニアナノシ一卜が、 薄膜の表面全体に高密度に配向して析 出している様子が観察された。 透明薄膜の表面全体にチタ二アナ ノシート微結晶を析出させるには、 この場合、 振動温水処理を 2 時間以上施す必要があった。  Next, this gel film was immersed together with the substrate in warm water at 90 °, and vibrated at 60 mm / sec (amplitude: 2.5 mm, frequency: 360 times Zmin) in a direction perpendicular to the substrate. The warm water treatment was performed for about an hour. As a result, a transparent thin film having a thickness of about 100 nm was obtained. The cross section of this transparent thin film was observed with a scanning electron microscope (SEM), and the cross-sectional perspective image is illustrated in FIG. SEM observations show that nanometer-sized titania nanosheets with a size of about 10 O nm are deposited on the surface of this transparent thin film at a high density on the entire surface of the thin film. Was observed. In order to deposit titania nanosheet microcrystals on the entire surface of the transparent thin film, it was necessary to perform a vibration hot water treatment for 2 hours or more.
この透明薄膜を高分解能透過型電子顕微鏡 （HRT EM) で観 察し、 その断面像を図 3に例示した。 チタニアナノシート微結晶 が、 あたかも基板から生え伸びているように、 基板上に高密度に 配向して析出している様子が確認された。 このチタニアナノシ一 ト微結晶は、 0. 7 nm近傍の層間距離を持つ層状組織を形成し ていることも確認された。  This transparent thin film was observed with a high-resolution transmission electron microscope (HRT EM), and its cross-sectional image is illustrated in FIG. It was confirmed that the titania nanosheet microcrystals were oriented and deposited at high density on the substrate as if they were growing from the substrate. It was also confirmed that the titania nanosheet microcrystals formed a layered structure having an interlayer distance near 0.7 nm.
また、 この透明薄膜をさ らに高倍率で観察し、 図 4 にその ( a ) HR T EM像と、 （b ) これをフーリエ変換して格子縞解 祈した結果を例示した。 （ a) のチタニアナノシート微結晶は層 間距離が 0. 6 nm程度であり、 （b ) には、 アナ夕ーゼ相、 ル チル相、 ブルッカイ ト相のチタニアには見られない、 このチタ二 ァナノシート微結晶に特徴的な 0. 6 nmのスポッ トが明瞭に現 われることがわかった。 またその 2倍に相当する 1. 2 nmのス ポッ トも見られた。 Further, the transparent thin film was observed at a higher magnification, and FIG. 4 shows an example of (a) an HRTEM image and (b) a result obtained by performing a Fourier transform on the image and resolving the lattice. The titania nanosheet microcrystals in (a) have a layer-to-layer distance of about 0.6 nm, and in (b) the titania nanosheet microcrystals, which are not found in the titania of the ana-sease, rutile and brookite phases, two It was found that 0.6 nm spots characteristic of nanosheet microcrystals clearly appeared. A 1.2-nm spot, which is twice as large, was also observed.
この透明薄膜における別のチタニアナノシートを観察した結果 を図 5 (a) (b) に例示した。 （a) に示したチタニアナノシー トは、 層間距離が 0. 6 0〜 0. 6 3 nm程度であり、 一方の The results of observing another titania nanosheet in this transparent thin film are illustrated in FIGS. 5 (a) and 5 (b). The titania nanosheet shown in (a) has an interlayer distance of about 0.60 to 0.63 nm.
(b) に示したチタニアナノシート微結晶は、 層間距離が〜 0. 8 2 n m程度であった。 In the titania nanosheet microcrystals shown in (b), the interlayer distance was about 0.82 nm.
このように、 この出願の発明のチタニアナノシート配向透明薄 膜には、 層間距離がおよそ 0. 6 nm〜 0. 8 5 nmの層状組織 に高密度に配向しているチタニアナノシー卜が存在することが確 認された。  As described above, in the titania nanosheet oriented transparent thin film of the invention of the present application, there are titania nanosheets which are highly densely oriented in a layered structure having an interlayer distance of about 0.6 nm to 0.85 nm. Was confirmed.
(比較例 1 )  (Comparative Example 1)
実、施例と同じ手順で 7 5 S i O 2 · 2 5 T i 02ゲル膜を作成し た。 このゲル膜を基板ごと 9 0 の温水に浸漬し、 基板が振動し ないように完全に固定して、 2時間程度の温水処理を施した。 こ の振動のない温水処理で得られた透明薄膜には、 0. 7 nm近傍 の層間距離を持つチタニアナノシートは観察されず、 既に報告さ れているとおりの、 直径数十 nm程度の粒状の、 アナターゼ相の チタニアナノ微結晶が薄膜の表面全体に析出しているのが観察さ れた。 Actually, a 75 SiO 2 · 25 Ti O 2 gel film was prepared in the same procedure as in the example. This gel film was immersed together with the substrate in 90 warm water, completely fixed so that the substrate did not vibrate, and subjected to a warm water treatment for about 2 hours. In the transparent thin film obtained by this vibration-free hot water treatment, no titania nanosheet with an interlayer distance of around 0.7 nm was observed, and as previously reported, a granular particle with a diameter of several tens of nm was observed. However, it was observed that titania nanocrystallites in the anatase phase were deposited on the entire surface of the thin film.
(比較例 2)  (Comparative Example 2)
出発原料としてテ卜ラノルマルブ卜キシチタン、 溶媒としてェ タノ一ル、 加水分解触媒として塩酸を用いて T i 02ゲルを作製 し、 このゲルをディ ップコーティング法によりシリコンウェハー およぴ無アル力リガラス基板に塗布して 1 0 0 %T i 02ゲル膜 を得た。 Te Bok Ranorumarubu Bok Kishichitan as a starting material, E as solvent Tano Ichiru, using hydrochloric acid as a hydrolysis catalyst to produce a T i 0 2 gel, silicon wafers Oyopi No Al force the gel by di-up coating method was applied to Rigarasu substrate was obtained 1 0 0% T i 0 2 gel film.
この T i 02ゲル膜に対して、 5 0 0でで 1時間の熱処理を施 した。 熱処理後の T i 02膜を X線回折測定および T EM観察し たところ、 T i O 2膜のほぼ全体がアナターゼ相のチタニアとな つていることが確認された。 この T i 〇 2膜の表面には、 0. 7 nm近傍の層間距離を持つチタニアナノシート微結晶や、 直径数 十 nm程度の粒状のアナターゼ相チタニアナノ微結晶等の析出は 見られず、 ほぼ平滑な平面であることが確認された。 For this T i 0 2 gel membrane, facilities heat-treated for one hour at 5 0 0 did. When a T i 0 2 film after the heat treatment was subjected to X-ray diffraction measurement and T EM observation, almost the entire T i O 2 film that has One Do titania anatase phase was confirmed. This is T i 〇 2 membrane surface, and titania nanosheet fine crystals having an interlayer distance of 0. 7 nm vicinity, the precipitation of anatase phase titania crystallites like granular diameter of about several tens of nm was not observed, substantially smooth It was confirmed that it was a perfect plane.
(実施例 2)  (Example 2)
実施例 1と同様のこの出願の発明のチタニアナノシート配向薄 膜 （A) と、 比較例 1 と同様のチタニアナノ微結晶分散薄膜 A titania nanosheet oriented thin film of the invention of the present application similar to Example 1 (A), and a titania nanocrystal dispersed thin film similar to Comparative Example 1
(B)、 および比較例 2と同様のアナターゼ相チタニア結晶薄膜(B) and an anatase phase titania crystal thin film similar to Comparative Example 2
(C) について、 水の接触角、 光触媒活性能を調べた。 For (C), the contact angle of water and the photocatalytic activity were examined.
まず、 これら 3種類の薄膜 （A) (B) (C) を作製し、 作製直 後から空気中、 暗所で保持した場合の、 水の接触角の経時変化を 測定 た。 その結果を図 6に示した。  First, these three types of thin films (A), (B), and (C) were prepared, and the temporal change of the contact angle of water was measured immediately after the preparation in air or in a dark place. The results are shown in FIG.
(C) アナ夕一ゼ相チタニア結晶薄膜の接触角はもともと 4 2 ° と大きいものであるが、 空気中の有機物を吸着することによ り、 数 1 0 0時間の経過後には 8 0 ° 近くにまで増大してしまう ことがわかった。  (C) The contact angle of the ana-phase titania crystal thin film was originally as large as 42 °, but it was 80 ° after a lapse of several hundred hours by adsorbing organic matter in the air. It turned out to increase to near.
一方、 温水を用いた処理で作製した （A) チタニアナノシート 配向透明薄膜と （B) チタニアナノ微結晶分散薄膜は、 作製直後 の接触角が 5 ° 以下と小さく、 また、 いずれも、 （C) アナ夕ーゼ 相チタニア結晶薄膜に比べて接触角の経時変化が小さいことがわ かった。 とくに、 この出願の発明の （A) チタニアナノシート配 向透明薄膜については、 空気中暗所で 1 0 0 0時間の経過後も水 の接触角が 1 0 ° 以下で、 2 0 0 0時間の経過後も水の接触角が 1 0 ° 程度であり、 超親水性を長時間維持する、 優れた特性を有 していることが確認された。 また、 この空気中暗所で 2 0 0 0時 間保持後の （A) チタニアナノシート配向透明薄膜において、 呼 気によりほとんど曇らないこと、 5 0 程度のお湯にかざしても 曇らないことが確認され、 優れた防曇性が備わっていることが示 された。 On the other hand, the (A) titania nanosheet oriented transparent thin film and the (B) titania nanocrystal dispersed thin film prepared by treatment with warm water have a small contact angle of 5 ° or less immediately after preparation. Evening It was found that the change over time of the contact angle was smaller than that of the titania crystal thin film. In particular, regarding the (A) titania nanosheet-oriented transparent thin film of the invention of the present application, the contact angle of water is less than 100 ° even after 1000 hours in a dark place in the air, Even after the lapse of time, the contact angle of water was about 10 °, and it was confirmed that the material had excellent properties to maintain superhydrophilicity for a long time. In addition, in this (A) titania nanosheet oriented transparent thin film after holding for 2000 hours in a dark place in the air, It was confirmed that there was almost no fogging due to air, and that there was no fogging even if it was held over hot water of about 50, indicating that it had excellent antifogging properties.
また、 これら 3種類の薄膜 （A) (B) (C) をメチレンブルー (M B) 水溶液に基板ごと浸潰し、 超高厚水銀ランプを用いて紫 外光を照射したときの、 MBの濃度変化を示した。 その結果を図 7に示した。 なお、 用いた薄膜 （A) (B) (C) の厚さは 8 0〜 In addition, these three types of thin films (A), (B), and (C) were immersed together with the substrate in an aqueous solution of methylene blue (MB) and irradiated with ultraviolet light using an ultra-high-thickness mercury lamp. Indicated. The results are shown in FIG. The thickness of the thin films (A), (B) and (C) used was 80-
1 0 0 nmで表面積を同じとし、 紫外光照度は 5 8 mW c m'1 となるように設定した。 紫外光照射は、 薄膜の浸漬後 3 0分の時 点で開始した。 1 0 0 the same as those of the surface area in nm, ultraviolet light illuminance was set to be 5 8 mW c m '1. UV light irradiation started 30 minutes after the immersion of the thin film.
薄膜 （A) (B) (C) のいずれの場合にも、 チタニアの光触媒 作用によって MBが分解され、 MBの濃度が減少していく ことが 確認された。 そして、 （A) チタニアナノシート配向透明薄膜と In each of the thin films (A), (B) and (C), it was confirmed that MB was decomposed by the photocatalytic action of titania, and the concentration of MB decreased. And (A) titania nanosheet oriented transparent thin film
(ΒΪ チタニアナノ微結晶分散薄膜の光分解能については同レべ ルであるものの、 これらは （C) アナターゼ相チタニア結晶薄膜 に比べて、 約 3 0 %近く高い光分解作用を示すことが確認された。 これは、 （A) チタニアナノシート配向透明薄膜および （B ) ァ ナ夕ーゼ相チタニアナノ微結晶分散薄膜におけるチタニア含有率 が 2 5 %と、 （C) アナターゼ相チタニア結晶薄膜の 1 0 0 %に 比べて大幅に少ないことを考慮すると、 特筆すべき高い値であり、 優れた光触媒活性を示すといえる。 (ΒΪ Although the optical resolution of titania nanocrystallite-dispersed thin films is at the same level, they were confirmed to exhibit a photolysis action that is approximately 30% higher than that of (C) anatase-phase titania crystal thin films. This is because the titania content of (A) the titania nanosheet oriented transparent thin film and (B) the titania nanocrystalline fine crystal dispersed thin film is 25%, and (C) the titania crystal thin film of the anatase phase is 100%. Considering that it is much less than that of, it is a remarkably high value, indicating excellent photocatalytic activity.
(実施例 3 )  (Example 3)
実施例 1 と同じ手順によって、 ゾル状組成物を調製し、 インジ ゥムースズ酸化物 （ I T O) 透明導電性薄膜付き無アルカリガラ ス基板上に 7 5 S i 02 · 2 5 T i 02ゲル膜 （モル％) を作製し た。 次いで、 図 8に示すように、 このゲル膜ノ I T OZガラス基 板 2枚を、 両基板を膜面が向かい合うように 1 c mの間隔で平行 した状態で対向させ、 さらに両基板に 2. 5 Vの直流電電圧を印 加し 3時間沸縢水で保持した。 その結果、 実施例 1の振動温水処 理と類似の効果が、 負極側基板上に形成したゲル膜に対して発揮 されることがわかった。 S E M観察結果を、 図 9に示した。 振動 温水処理を行った場合と同様に、 チタニアナノシートが生成して いることがわかる。 電子回折の測定結果から、 分析の結果、 これ らのナノシートも約 0 . 7 n m層間隔を持つ層状組織が形成され ていることが確認された。 A sol-like composition was prepared by the same procedure as in Example 1, and a 75 S i 0 2 · 25 T i 0 2 gel film was formed on an alkali-free glass substrate with a transparent conductive thin film of indium tin oxide (ITO). (Mol%) was prepared. Next, as shown in Fig. 8, the two gel film ITO OZ glass substrates are opposed to each other in a state where both substrates are in parallel with a 1 cm interval so that the film surfaces face each other. V DC voltage And kept in boiling water for 3 hours. As a result, it was found that an effect similar to the vibration hot water treatment of Example 1 was exerted on the gel film formed on the negative electrode side substrate. Figure 9 shows the SEM observation results. It can be seen that titania nanosheets were generated as in the case of the vibration hot water treatment. From the results of the electron diffraction measurement, the results of the analysis confirmed that these nanosheets also had a layered structure with a layer spacing of about 0.7 nm.
温水処理の際に、 ゲル膜の成分は、 通常負に帯電した酸化物も しくは水酸化物の形で溶解する。 したがって負極側のゲル膜では、 成分の表面への拡散 · 溶出が促進されるものと考えられる。 この 効果は、 温水処理中に適度な振動を加え、 ゲル膜の成分の拡散， 溶出を促進する効果と類似している。 すなわち、 温水処理中にゲ ル膜成分の拡散 ·溶出が適度に促進される条件が、 この出願の発 明のチタニアナノシート薄膜の生成には重要な因子になっている と推察される。  During warm water treatment, the components of the gel film usually dissolve in the form of negatively charged oxides or hydroxides. Therefore, in the gel film on the negative electrode side, diffusion and elution of components to the surface are considered to be promoted. This effect is similar to the effect of applying moderate vibration during hot water treatment to promote the diffusion and elution of gel membrane components. In other words, it is inferred that the conditions under which the diffusion and elution of the gel membrane components are appropriately promoted during the hot water treatment are important factors for the production of the titania nanosheet thin film of the present invention.
なお、 この実施例の条件下では、 正極側には、 チタニアナノシ —トの生成は、 ほとんど認められなかった。 また、 この例の条件 下において、 印加電圧を 1 V未満とした場合には、 チタニアナノ シートの析出は、 明瞭ではなかった。 一方、 印加する電圧を 3 V、 5 Vとした場合も 2 . 5 Vとほぼ同じ効果が得られたが、 1 0 V 以上まで高くすると、 膜が黒ずみ T i の還元が起こっていること が示唆された。 また、 交流電場についても、 類似のチタニアナノ シー卜の析出を助長する効果が確認された。  Under the conditions of this example, almost no titania nanosheet was formed on the positive electrode side. Further, when the applied voltage was less than 1 V under the conditions of this example, the precipitation of titania nanosheets was not clear. On the other hand, when the applied voltage was set to 3 V or 5 V, the effect was almost the same as that of 2.5 V. However, when the applied voltage was increased to 10 V or more, the film was darkened and the reduction of Ti was observed. It was suggested. The effect of promoting the deposition of similar titania nanosheets was also confirmed for the AC electric field.
電場温水処理の場合も、 振動温水処理の場合同様、 効果が得ら れるゲル膜組成は、 7 5 S i 0 2 · 2 5 T i 0 2場合に限定される ものではなく、 たとえば好ましい範囲としての、 モル比で S i O 2 ： T i O 2 = 5 ： 1〜 1 ： 3の比較的広い範囲で確認された。 In the case of the electric field warm water treatment, similar case of vibration warm water treatment, the effect is a gel film composition is obtained colleagues, 7 5 S i 0 2 · 2 5 T i 0 2 is not limited to the case, as for example the preferred range The molar ratio of SiO 2: TiO 2 = 5: 1 to 1: 3 was confirmed in a relatively wide range.
もちろん、 この発明は以上の例に限定されるものではなく、 細 部については様々な態様が可能であることは言うまでもない。 産業上の利用可能性 Of course, the present invention is not limited to the above examples. It goes without saying that various aspects are possible for the section. Industrial applicability
以上詳しく説明した通り、 この発明によって、 高い光触媒活性 を示すとともに、 優れた超親水性および防曇性を長時間維持する ことができる、 新規なチタニアナノシート配向薄膜とその製造方 法およびそのチタニアナノシート配向薄膜を備えた物品が提供さ れる。  As described in detail above, according to the present invention, a novel titania nanosheet oriented thin film, a method for producing the same, and a method for producing the same, which can exhibit high photocatalytic activity and maintain excellent superhydrophilicity and antifogging property for a long time An article provided with an oriented thin film is provided.

Claims

請求の範囲 The scope of the claims
1 . シリカとチタニアを主成分とする薄膜であって、 その表面 に、 大きさがナノメートルオーダーで、 層状構造を有するチタ二 アナノシートが分散されていることを特徴とするチタニアナノシ 一ト配向薄膜。 1. An oriented titania nanosheet thin film, which is a thin film containing silica and titania as main components, and on the surface of which a titania nanosheet having a layered structure of a nanometer order is dispersed.
2 . チタニアナノシートの層間距離が、 0 . 6〜0 . 8 5 n m であることを特徵とする請求項 1記載のチタニアナノシート配向 薄膜。  2. The oriented thin film of titania nanosheet according to claim 1, wherein an interlayer distance of the titania nanosheet is 0.6 to 0.85 nm.
3 . チタニアナノシートの層間距離が、 0 . 7 n mもしくはそ の近傍であることを特徴とする請求項 1または 2記載のチタニア ナノシート配向薄膜。  3. The oriented titania nanosheet thin film according to claim 1 or 2, wherein an interlayer distance of the titania nanosheet is 0.7 nm or near.
4 . チタニアナノシートが、 表面全体に高分散されていること を特徵とする請求項 1ないし 3いずれかに記載のチタニアナノシ 一ト配向薄膜。  4. The oriented titania nanosheet thin film according to any one of claims 1 to 3, wherein the titania nanosheet is highly dispersed over the entire surface.
5 . シリカとチタニアの配合が、 モル比で、 S i O 2 ·· T i O 2 = 5 ： 1〜 1 ： 3の範囲であることを特徴とする請求項 1ないし 4いずれかに記載のチタニアナノシート配向薄膜。 5. The composition according to any one of claims 1 to 4, wherein the mixing ratio of silica and titania is in the range of SiO 2 ··· Ti O 2 = 5: 1 to 1: 3 in molar ratio. Titania nanosheet oriented thin film.
6 . シリ力とチタニアの配合が、 モル比で、 S i O 2 ： T i O 2 = 3 ： 1であることを特徵とする請求項 1ないし 5いずれかに記 載のチタニアナノシート配向薄膜。 6. The oriented titania nanosheet thin film according to any one of claims 1 to 5, wherein the blending of the silylation force and titania is, in molar ratio, SiO 2 : TiO 2 = 3: 1.
7 . 水に対する接触角が 5 ° 以下の超親水性を示すことを特徴 とする請求項 1ないし 6いずれかに記載のチタニアナノシート配 向薄膜。  7. The titania nanosheet-oriented thin film according to any one of claims 1 to 6, wherein the thin film exhibits superhydrophilicity with a contact angle to water of 5 ° or less.
8 . 防曇性を示すことを特徴とする請求項 1ないし 7いずれか に記載のチタニアナノシート配向薄膜。  8. The oriented thin film of titania nanosheets according to any one of claims 1 to 7, which exhibits antifogging property.
9 . 水に対する接触角が、 空気中暗所で 1 0 0 0時間保持後に 1 0 ° 以下であることを特徴とする請求項 1ないし 8いずれかに 記載のチタニアナノシート配向薄膜。 9. The method according to any one of claims 1 to 8, wherein the contact angle with water is 10 ° or less after being kept for 100 hours in a dark place in the air. The titania nanosheet oriented thin film according to the above.
1 0 . 光触媒活性を示すことを特徵とする請求項 1ないし 9い ずれかに記載のチタニアナノシート配向薄膜。  10. The oriented titania nanosheet thin film according to any one of claims 1 to 9, which exhibits photocatalytic activity.
1 1 . 請求項 1ないし 1 0いずれかに記載のチタニアナノシ一 ト配向薄膜を備えていることを特徴とする物品。  11. An article comprising the titania nanosheet oriented thin film according to any one of claims 1 to 10.
1 2 . シリコンアルコキシドと加水分解性を有するチタニウム 化合物を含む溶液から、 チタニウム化合物とシリコンアルコキシ ドの複合金属酸化物あるいは水酸化物を含むゲル膜を作製し、 こ のゲル膜に対して、 温水を接触させるとともに振動を加える振動 温水処理を施すことで、 表面に大きさがナノメートルオーダーで、 層状構造を有するチタニアナノシートを配向析出させることを特 徵とするチタニアナノシ一ト配向薄膜の製造方法。  12. A gel film containing a composite metal oxide or hydroxide of a titanium compound and a silicon alkoxide is prepared from a solution containing a silicon alkoxide and a titanium compound having a hydrolyzing property, and the gel film is heated with hot water. A method for producing an oriented thin film of titania nanosheets, which comprises subjecting a surface to titania nanosheets having a layered structure and having a size of nanometers by subjecting them to oriented precipitation by subjecting them to vibration and applying vibration.
1 3 . シリコンアルコキシドと加水分解性を有するチタニウム化 合物を含む溶液からチタニウム化合物とシリコンアルコキシドの 複合酸化物あるいは水酸化物を含むゲル膜を作製し、 このゲル膜 に対して、 温水を接触させるとともに電圧を印加する電場温水処 理を施すことで、 表面に大きさがナノメートルオーダーで、 層状 構造を有するチタニアナノシートを配向析出させることを特徴と するチタニアナノシート配向薄膜の製造方法。  13. A gel film containing a composite oxide or hydroxide of a titanium compound and silicon alkoxide is prepared from a solution containing a silicon alkoxide and a titanium compound having hydrolyzability, and hot water is brought into contact with the gel film. A method for producing an oriented thin film of titania nanosheets, comprising: subjecting an electric field hot water treatment for applying a voltage and applying a voltage to deposit oriented titania nanosheets having a layered structure on the surface in the order of nanometers.
1 4 . 加水分解性を有するチタニウム化合物が、 チタニウムァ ルコキシドであることを特徴とする請求項 1 2または 1 3記載の チタニアナノシート配向薄膜の製造方法。  14. The method for producing an oriented thin film of titania nanosheet according to claim 12 or 13, wherein the hydrolyzable titanium compound is titanium alkoxide.
1 5 . シリコンアルコキシドとチタニウム化合物の配合が、 モ ル比で、 S i O a ： T i O 2 = 5 ： 1〜 1 ： 3の範囲であることを 特徴とする請求項 1 2ないし 1 4いずれかに記載のチタニアナノ シート配向薄膜の製造方法。 . 1 5 formulation of silicon alkoxide and titanium compound, in molar ratio, S i O a: T i O 2 = 5: 1~ 1: to claim 1 2 or, characterized in that in the range of 3 1 4 The method for producing a titania nanosheet oriented thin film according to any one of the above.
1 6 . シリコンアルコキシドとチタニウム化合物の配合が、 モル 比で、 S i 0 2 : T i 0 2 = 3 ： 1であることを特徵とする請求項 1 2ないし 1 5いずれかに記載のチタニアナノシート配向薄膜の 製造方法。 . 1 6 formulation of silicon alkoxide and titanium compound, a molar ratio, S i 0 2: T i 0 2 = 3: claim to Toku徵that the 1 12. The method for producing a titania nanosheet oriented thin film according to any one of 12 to 15.
1 7 . ゲル膜を、 基板上に形成することを特徴とする請求項 1 2ないし 1 6いずれかに記載のチタニアナノシート配向薄膜の製 造方法。  17. The method for producing an oriented thin film of titania nanosheets according to any one of claims 12 to 16, wherein the gel film is formed on a substrate.
1 8 . ゲル膜に連続的な振動を与えながら温水と接触させるこ とを特徵とする請求項 1 2記載のチタニアナノシート配向薄膜の 製造方法。  18. The method for producing a titania nanosheet oriented thin film according to claim 12, wherein the gel film is brought into contact with warm water while continuously vibrating the gel film.
1 9 . ゲル膜の表面法線方向に振動させることを特徴とする請 求項 1 2記載のチタニアナノシート配向薄膜の製造方法。  19. The method for producing a titania nanosheet oriented thin film according to claim 12, wherein the method is oscillated in a direction normal to the surface of the gel film.
2 0 . 3 0 mm ,秒以上の振動を加えることを特徴とする請求 項 1 2記載のチタニアナノシート配向薄膜の製造方法。  13. The method for producing an oriented thin film of titania nanosheets according to claim 12, wherein a vibration of 20.30 mm or more is applied for at least seconds.
2 1 . 振幅 2 . 5 m mで 5〜： L 0 H zの振動を加えることを特 徵とする請求項 2 0記載のチタニアナノシー卜配向薄膜の製造方 法。  21. The method for producing a titania nanosheet oriented thin film according to claim 20, wherein vibrations of 5 to L0 Hz are applied at an amplitude of 2.5 mm.
2 2 . 直流電圧を印加することを特徴とする請求項 1 3記載のチ タニアナノシート配向薄膜の製造方法。  22. The method for producing an oriented titania nanosheet thin film according to claim 13, wherein a DC voltage is applied.
2 3 . 温水処理には、 9 0で〜 1 0 0での温水を使用すること を特徴とする請求項 1 2ないし 2 2いずれかに記載のチタ二アナ ノシート配向薄膜の製造方法。  23. The method for producing an oriented thin film of titania nanosheet according to any one of claims 12 to 22, wherein the hot water treatment uses hot water at 90 to 100.
2 4 . 2時間以上の温水処理を施すことを特徵とする請求項 1 2ないし 2 3いずれかに記載のチタニアナノシート配向薄膜の製 造方法。  The method for producing an oriented thin film of titania nanosheets according to any one of claims 12 to 23, wherein a hot water treatment is performed for 24.2 hours or more.
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007217219A (en) * 2006-02-16 2007-08-30 Kao Corp Dispersion liquid of layered titanate nano sheet
JP2007320777A (en) * 2006-05-30 2007-12-13 Kao Corp Dispersion of titanate nanosheet
JP2009515032A (en) * 2005-11-08 2009-04-09 マサチューセッツ・インスティテュート・オブ・テクノロジー Super hydrophilic coating
JP2009119431A (en) * 2007-11-19 2009-06-04 Taketo Maejima Production method of bond type titania silica film and coating liquid
JP2022097787A (en) * 2020-12-21 2022-07-01 トヨタ自動車株式会社 Coating and composite material having coating

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7303815B2 (en) * 2002-08-16 2007-12-04 The Regents Of The University Of California Functional bimorph composite nanotapes and methods of fabrication
US7166732B2 (en) 2004-06-16 2007-01-23 Advanced Technology Materials, Inc. Copper (I) compounds useful as deposition precursors of copper thin films
US7713632B2 (en) 2004-07-12 2010-05-11 Cardinal Cg Company Low-maintenance coatings
CN100346875C (en) * 2005-02-18 2007-11-07 中国科学院上海硅酸盐研究所 Iron oxide sensitized lamellar titanium oxide visible light catalyst and its preparation method
TW200631899A (en) 2005-03-09 2006-09-16 Tokai Ryokaku Tetsudo Kk Titanium oxide-coating agent, and forming method for titanium oxide-coating film
US7862910B2 (en) * 2006-04-11 2011-01-04 Cardinal Cg Company Photocatalytic coatings having improved low-maintenance properties
US20080011599A1 (en) 2006-07-12 2008-01-17 Brabender Dennis M Sputtering apparatus including novel target mounting and/or control
US7820296B2 (en) 2007-09-14 2010-10-26 Cardinal Cg Company Low-maintenance coating technology
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0925123A (en) * 1995-07-10 1997-01-28 Natl Inst For Res In Inorg Mater Titania sol and its production
JP2002097013A (en) * 2000-09-22 2002-04-02 Japan Science & Technology Corp Transparent thin film and its manufacturing method

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS504389B1 (en) * 1970-12-24 1975-02-18
US4754012A (en) * 1986-10-03 1988-06-28 Ppg Industries, Inc. Multi-component sol-gel protective coating composition
US4958592A (en) * 1988-08-22 1990-09-25 General Electric Company Resistance heater for diamond production by CVD
JPH04325446A (en) * 1991-04-26 1992-11-13 Central Glass Co Ltd Water-repellent oxide film and its formation
DE4221101C2 (en) * 1992-06-26 1994-05-05 Veitsch Radex Ag Use of a refractory ceramic mass for lining floors on electric arc furnaces
AU676299B2 (en) * 1993-06-28 1997-03-06 Akira Fujishima Photocatalyst composite and process for producing the same
DE29623901U1 (en) * 1995-03-20 2000-07-06 Toto Ltd., Kitakyushu, Fukuoka Substrate with a superhydrophilic photocatalytic surface
US5601867A (en) * 1995-06-22 1997-02-11 The United States Of America As Represented By The Secretary Of The Navy Method and apparatus for generating fingerprints and other skin prints
US5648173A (en) * 1996-01-25 1997-07-15 Dow Corning Corporation Room temperature, moisture-curable abrasion-resistant coating composition having enhancable weatherability
US5935646A (en) * 1996-08-23 1999-08-10 Gas Research Institute Molecular sieving silica membrane fabrication process
JPH10321921A (en) * 1997-05-22 1998-12-04 Ngk Insulators Ltd Thermoelectric conversion module and its manufacture
US6737118B2 (en) * 1997-05-28 2004-05-18 Nippon Steel Corporation Low dielectric constant materials and their production and use
JP3174829B2 (en) * 1997-05-30 2001-06-11 経済産業省産業技術総合研究所長 Porous titanosilicate and method for producing the same
FR2775914B1 (en) * 1998-03-13 2000-04-21 Saint Gobain Vitrage METHOD FOR DEPOSITING LAYERS BASED ON METAL OXIDE (S)
US6951682B1 (en) * 1998-12-01 2005-10-04 Syntrix Biochip, Inc. Porous coatings bearing ligand arrays and use thereof
JP3427003B2 (en) * 1999-03-31 2003-07-14 株式会社東芝 Fuel cell
JP2001194780A (en) * 2000-01-11 2001-07-19 Nippon Sheet Glass Co Ltd Method for producing patterned film coated article and photosensitive composition
JP2001240800A (en) * 2000-02-25 2001-09-04 Nippon Sheet Glass Co Ltd Preparation process of article having predetermined surface form
US6387453B1 (en) * 2000-03-02 2002-05-14 Sandia Corporation Method for making surfactant-templated thin films
JP3513589B2 (en) * 2000-03-24 2004-03-31 独立行政法人物質・材料研究機構 Ultra thin titania film and method for producing the same
CN1235063C (en) * 2001-02-16 2006-01-04 日本板硝子株式会社 Irregular film and method of manufacturing the film
KR100404891B1 (en) * 2001-03-13 2003-11-10 주식회사 엘지화학 Positive active material for lithium secondary battery and method for preparing the same
US20070207182A1 (en) * 2006-03-06 2007-09-06 Jan Weber Medical devices having electrically aligned elongated particles

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0925123A (en) * 1995-07-10 1997-01-28 Natl Inst For Res In Inorg Mater Titania sol and its production
JP2002097013A (en) * 2000-09-22 2002-04-02 Japan Science & Technology Corp Transparent thin film and its manufacturing method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
TAKAYOSHI SASAKI ET AL.: "Titan no hakuhen-ka", FUNCTION & MATERIALS, vol. 16, 1996, pages 44 - 50, XP002969536 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009515032A (en) * 2005-11-08 2009-04-09 マサチューセッツ・インスティテュート・オブ・テクノロジー Super hydrophilic coating
JP2007217219A (en) * 2006-02-16 2007-08-30 Kao Corp Dispersion liquid of layered titanate nano sheet
JP2007320777A (en) * 2006-05-30 2007-12-13 Kao Corp Dispersion of titanate nanosheet
JP2009119431A (en) * 2007-11-19 2009-06-04 Taketo Maejima Production method of bond type titania silica film and coating liquid
JP2022097787A (en) * 2020-12-21 2022-07-01 トヨタ自動車株式会社 Coating and composite material having coating
JP7431150B2 (en) 2020-12-21 2024-02-14 トヨタ自動車株式会社 Coatings and composite materials with coatings

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