WO2003066513A3 - A microelectromechanical device having a system for sensing position - Google Patents

A microelectromechanical device having a system for sensing position Download PDF

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Publication number
WO2003066513A3
WO2003066513A3 PCT/IL2003/000087 IL0300087W WO03066513A3 WO 2003066513 A3 WO2003066513 A3 WO 2003066513A3 IL 0300087 W IL0300087 W IL 0300087W WO 03066513 A3 WO03066513 A3 WO 03066513A3
Authority
WO
WIPO (PCT)
Prior art keywords
moving element
sensing position
microelectromechanical device
mems
sections
Prior art date
Application number
PCT/IL2003/000087
Other languages
French (fr)
Other versions
WO2003066513A2 (en
Inventor
Igal Chertkow
Original Assignee
Memlink Ltd
Igal Chertkow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memlink Ltd, Igal Chertkow filed Critical Memlink Ltd
Priority to AU2003207975A priority Critical patent/AU2003207975A1/en
Publication of WO2003066513A2 publication Critical patent/WO2003066513A2/en
Publication of WO2003066513A3 publication Critical patent/WO2003066513A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
    • G02B6/266—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/25—Selecting one or more conductors or channels from a plurality of conductors or channels, e.g. by closing contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H3/00—Mechanisms for operating contacts
    • H01H3/02—Operating parts, i.e. for operating driving mechanism by a mechanical force external to the switch
    • H01H3/16—Operating parts, i.e. for operating driving mechanism by a mechanical force external to the switch adapted for actuation at a limit or other predetermined position in the path of a body, the relative movement of switch and body being primarily for a purpose other than the actuation of the switch, e.g. for a door switch, a limit switch, a floor-levelling switch of a lift

Abstract

A microelectromechanical (MEMS) device (100) having a system for sensing the position of the moving element (106) of the MEMS (100) device. The present invention digitally senses the movement and/or the position of the moving element (106) by generating digital signals in a way that the signal has a certain value, true value, when the moving element (106) is in an area associated with one of the sections of the conductive lines (120, 130, 320, 330), and another value, false signal, when the moving element (106) is not in an area of one of the sections, false signal.
PCT/IL2003/000087 2002-02-07 2003-02-04 A microelectromechanical device having a system for sensing position WO2003066513A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003207975A AU2003207975A1 (en) 2002-02-07 2003-02-04 A microelectromechanical device having a system for sensing position

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US35429702P 2002-02-07 2002-02-07
US60/354,297 2002-02-07

Publications (2)

Publication Number Publication Date
WO2003066513A2 WO2003066513A2 (en) 2003-08-14
WO2003066513A3 true WO2003066513A3 (en) 2003-11-27

Family

ID=27734349

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2003/000087 WO2003066513A2 (en) 2002-02-07 2003-02-04 A microelectromechanical device having a system for sensing position

Country Status (2)

Country Link
AU (1) AU2003207975A1 (en)
WO (1) WO2003066513A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1025523C2 (en) * 2004-02-19 2005-08-22 Iku Holding Montfoort Bv Mechatronic control system.

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6212939B1 (en) * 1999-09-24 2001-04-10 Lockheed Martin Energy Research Corporation Uncoated microcantilevers as chemical sensors
US6235550B1 (en) * 1997-10-24 2001-05-22 Stmicroelectronics, Inc. Integrated sensor having plurality of released beams for sensing acceleration and associated methods
US6327909B1 (en) * 1999-11-30 2001-12-11 Xerox Corporation Bistable mechanical sensors capable of threshold detection and automatic elimination of excessively high amplitude data

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6235550B1 (en) * 1997-10-24 2001-05-22 Stmicroelectronics, Inc. Integrated sensor having plurality of released beams for sensing acceleration and associated methods
US6212939B1 (en) * 1999-09-24 2001-04-10 Lockheed Martin Energy Research Corporation Uncoated microcantilevers as chemical sensors
US6327909B1 (en) * 1999-11-30 2001-12-11 Xerox Corporation Bistable mechanical sensors capable of threshold detection and automatic elimination of excessively high amplitude data

Also Published As

Publication number Publication date
AU2003207975A8 (en) 2003-09-02
AU2003207975A1 (en) 2003-09-02
WO2003066513A2 (en) 2003-08-14

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