WO2003059804A3 - Verfahren zur herstellung einer folie mit oberflächenstrukturen im mikro- und nanometerbereich sowie eine diesbezügliche folie - Google Patents

Verfahren zur herstellung einer folie mit oberflächenstrukturen im mikro- und nanometerbereich sowie eine diesbezügliche folie Download PDF

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Publication number
WO2003059804A3
WO2003059804A3 PCT/EP2003/000360 EP0300360W WO03059804A3 WO 2003059804 A3 WO2003059804 A3 WO 2003059804A3 EP 0300360 W EP0300360 W EP 0300360W WO 03059804 A3 WO03059804 A3 WO 03059804A3
Authority
WO
WIPO (PCT)
Prior art keywords
film
microchannels
microscopic
producing
surface structures
Prior art date
Application number
PCT/EP2003/000360
Other languages
English (en)
French (fr)
Other versions
WO2003059804A2 (de
Inventor
Joerg-Uwe Meyer
Original Assignee
Fraunhofer Ges Forschung
Joerg-Uwe Meyer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung, Joerg-Uwe Meyer filed Critical Fraunhofer Ges Forschung
Publication of WO2003059804A2 publication Critical patent/WO2003059804A2/de
Publication of WO2003059804A3 publication Critical patent/WO2003059804A3/de

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0323—Grooves
    • B81B2203/0338—Channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0147—Film patterning
    • B81C2201/0154—Film patterning other processes for film patterning not provided for in B81C2201/0149 - B81C2201/015
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Micromachines (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Beschrieben wird ein Verfahren zur Oberflächenstrukturierung einer Folie mit Strukturgrössen im Mikro- und Nanometerbereich. Die Erfindung zeichnet sich dadurch aus, dass eine Folie mit wenigstens einer Folienoberfläche, in der wenigstens abschnittsweise zusammenhängende, zur Folienoberfläche einseitig offen ausgebildete Mikrokanäle vorgesehen sind, bereitgestellt wird, dass eine zweite Folie mit der oberflächenstrukturierten Folie derart verfügt wird, dass die Mikrokanäle von der zweiten Folie fluid- und/oder gasdicht überdeckt werden, und dass wenigstens ein flüssiges oder gasförmiges Medium durch die Mikrokanäle geleitet wird, das durch chemische Wechselwirkung Folienmaterial innerhalb der Mikrokanäle zur Erzeugung von Mikro- und/oder Nanostrukuren abträgt und/oder Beschichtungsmuster mit Strukturgrößen im Mikro-und/oder Nanometerbereich erzeugt.
PCT/EP2003/000360 2002-01-17 2003-01-15 Verfahren zur herstellung einer folie mit oberflächenstrukturen im mikro- und nanometerbereich sowie eine diesbezügliche folie WO2003059804A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10201640.2 2002-01-17
DE2002101640 DE10201640A1 (de) 2002-01-17 2002-01-17 Verfahren zur Herstellung einer Folie mit Oberflächenstrukturen im Mikro- und Nanometerbereich sowie eine diesbezügliche Folie

Publications (2)

Publication Number Publication Date
WO2003059804A2 WO2003059804A2 (de) 2003-07-24
WO2003059804A3 true WO2003059804A3 (de) 2004-03-11

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2003/000360 WO2003059804A2 (de) 2002-01-17 2003-01-15 Verfahren zur herstellung einer folie mit oberflächenstrukturen im mikro- und nanometerbereich sowie eine diesbezügliche folie

Country Status (2)

Country Link
DE (1) DE10201640A1 (de)
WO (1) WO2003059804A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050191419A1 (en) * 2003-04-11 2005-09-01 Helt James M. Fabrication of nanostructures
DE102004035267B3 (de) * 2004-07-21 2006-02-09 Forschungszentrum Karlsruhe Gmbh Formkörper, Verfahren zu seiner Herstellung und seine Verwendung
DE102005007707A1 (de) * 2004-09-27 2006-03-30 Powerfluid Gmbh Rekuperator, Mikrokanal-Rekuperator, Folie, Verwendung einer Folie und Verfahren zum Herstellen sowie zum Betreiben eines Rekuperators
JP4969449B2 (ja) 2004-10-27 2012-07-04 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 二つのプレートから構成される流体容器
DE102009004305A1 (de) * 2008-12-12 2010-06-17 Bpe E.K. Verfahren zur Herstellung von plattenförmigen Körpern mit mikro- und/oder nanostrukturierten Oberflächen oder von mikro- und/oder nanogroß durchbrochenen Folien
DE102018209083A1 (de) 2018-06-07 2019-12-12 Infineon Technologies Ag Verfahren zum Herstellen eines Nanofilms, Sensoranordnung mit einem Nanofilm und Nanosieb mit einem Nanofilm

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999065664A1 (en) * 1998-06-18 1999-12-23 3M Innovative Properties Company Microfluidic articles and method of manufacturing same
WO2001089788A2 (en) * 2000-05-25 2001-11-29 President And Fellows Of Harvard College Patterning of surfaces utilizing microfluidic stamps including three-dimensionally arrayed channel networks

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4728591A (en) * 1986-03-07 1988-03-01 Trustees Of Boston University Self-assembled nanometer lithographic masks and templates and method for parallel fabrication of nanometer scale multi-device structures
US6159739A (en) * 1997-03-26 2000-12-12 University Of Washington Device and method for 3-dimensional alignment of particles in microfabricated flow channels
US5900130A (en) * 1997-06-18 1999-05-04 Alcara Biosciences, Inc. Method for sample injection in microchannel device
DE19758533B4 (de) * 1997-12-04 2005-09-29 Micronas Gmbh Verfahren zum Strukturieren einer Oberflächenschicht
US6210986B1 (en) * 1999-09-23 2001-04-03 Sandia Corporation Microfluidic channel fabrication method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999065664A1 (en) * 1998-06-18 1999-12-23 3M Innovative Properties Company Microfluidic articles and method of manufacturing same
WO2001089788A2 (en) * 2000-05-25 2001-11-29 President And Fellows Of Harvard College Patterning of surfaces utilizing microfluidic stamps including three-dimensionally arrayed channel networks

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
BARKER S L R ET AL: "Fabrication, derivatization and applications of plastic microfluidic devices", ADVANCED ENVIRONMENTAL AND CHEMICAL SENSING TECHNOLOGY, BOSTON, MA, USA, 5-8 NOV. 2000, PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 2001, SPIE-INT. SOC. OPT. ENG, USA, PAGE(S) 112 - 118, ISSN: 0277-786X, XP009016312 *
CHIU D T ET AL: "Patterned deposition of cells and proteins onto surfaces by using three dimensional microfluidic systems", PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF USA, NATIONAL ACADEMY OF SCIENCE. WASHINGTON, US, vol. 97, no. 6, 14 March 2000 (2000-03-14), pages 2408 - 2413, XP002159237, ISSN: 0027-8424 *
TAKAYAMA S ET AL: "Patterning of cells and their environments using multiple laminar fluid flows in capillary networks", PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF USA, NATIONAL ACADEMY OF SCIENCE. WASHINGTON, US, vol. 96, May 1999 (1999-05-01), pages 5545 - 5548, XP002159130, ISSN: 0027-8424 *

Also Published As

Publication number Publication date
WO2003059804A2 (de) 2003-07-24
DE10201640A1 (de) 2003-08-07

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