WO2003035548A3 - Procede de production de silicium de grande purete - Google Patents

Procede de production de silicium de grande purete Download PDF

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Publication number
WO2003035548A3
WO2003035548A3 PCT/EP2002/011519 EP0211519W WO03035548A3 WO 2003035548 A3 WO2003035548 A3 WO 2003035548A3 EP 0211519 W EP0211519 W EP 0211519W WO 03035548 A3 WO03035548 A3 WO 03035548A3
Authority
WO
WIPO (PCT)
Prior art keywords
producing high
purity silicon
silane
silicon
melt
Prior art date
Application number
PCT/EP2002/011519
Other languages
German (de)
English (en)
Other versions
WO2003035548A2 (fr
Inventor
Franz Hugo
Alf Bjoerseth
Bruno Ceccaroli
Jan Maurits
Original Assignee
Silicon Technologies As
Franz Hugo
Alf Bjoerseth
Bruno Ceccaroli
Jan Maurits
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silicon Technologies As, Franz Hugo, Alf Bjoerseth, Bruno Ceccaroli, Jan Maurits filed Critical Silicon Technologies As
Priority to AU2002350543A priority Critical patent/AU2002350543A1/en
Publication of WO2003035548A2 publication Critical patent/WO2003035548A2/fr
Publication of WO2003035548A3 publication Critical patent/WO2003035548A3/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/029—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of monosilane
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)

Abstract

L'invention concerne un procédé de production de silicium de grande pureté utilisé notamment dans des applications photovoltaïques, de préférence, dans la production de plaquettes. Selon ce procédé, du silane est soumis à une décomposition thermique pour obtenir du silicium. L'invention est caractérisée en ce que du silane gazeux est insufflé dans une masse fondue de silicium et en ce qu'au terme de l'insufflation de silane, la masse fondue est coulée et solidifiée.
PCT/EP2002/011519 2001-10-19 2002-10-15 Procede de production de silicium de grande purete WO2003035548A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002350543A AU2002350543A1 (en) 2001-10-19 2002-10-15 Method for producing high-purity silicon

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2001151159 DE10151159A1 (de) 2001-10-19 2001-10-19 Verfahren zur Herstellung von hochreinem Silizium
DE10151159.0 2001-10-19

Publications (2)

Publication Number Publication Date
WO2003035548A2 WO2003035548A2 (fr) 2003-05-01
WO2003035548A3 true WO2003035548A3 (fr) 2004-03-11

Family

ID=7702744

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/011519 WO2003035548A2 (fr) 2001-10-19 2002-10-15 Procede de production de silicium de grande purete

Country Status (3)

Country Link
AU (1) AU2002350543A1 (fr)
DE (1) DE10151159A1 (fr)
WO (1) WO2003035548A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006094714A1 (fr) 2005-03-05 2006-09-14 Joint Solar Silicon Gmbh & Co. Kg Reacteur et procede de production de silicium
KR20140047614A (ko) * 2011-05-11 2014-04-22 인스티튜트 포 에너지테크니크 유동층을 위한 가스 분배 장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1572479A (en) * 1976-08-12 1980-07-30 Wacker Chemitronic Manufacture of elemental semiconductor material
DE2938670A1 (de) * 1979-09-25 1981-04-02 Justice Neal Santa Ana Calif. Carman Verfahren und einrichtung zum erzeugen und giessen von fluessigem silizium
US4737348A (en) * 1982-06-22 1988-04-12 Harry Levin Apparatus for making molten silicon

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1572479A (en) * 1976-08-12 1980-07-30 Wacker Chemitronic Manufacture of elemental semiconductor material
DE2938670A1 (de) * 1979-09-25 1981-04-02 Justice Neal Santa Ana Calif. Carman Verfahren und einrichtung zum erzeugen und giessen von fluessigem silizium
US4737348A (en) * 1982-06-22 1988-04-12 Harry Levin Apparatus for making molten silicon

Also Published As

Publication number Publication date
DE10151159A1 (de) 2003-04-30
WO2003035548A2 (fr) 2003-05-01
AU2002350543A1 (en) 2003-05-06

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