WO2003025534A1 - Druckmessgerät - Google Patents
Druckmessgerät Download PDFInfo
- Publication number
- WO2003025534A1 WO2003025534A1 PCT/EP2002/009480 EP0209480W WO03025534A1 WO 2003025534 A1 WO2003025534 A1 WO 2003025534A1 EP 0209480 W EP0209480 W EP 0209480W WO 03025534 A1 WO03025534 A1 WO 03025534A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- membrane
- monitoring unit
- pressure
- measuring device
- edge
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0672—Leakage or rupture protection or detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
Definitions
- the invention relates to a pressure measuring device with a measuring element and a diaphragm seal upstream of the measuring element and filled with a pressure-transmitting liquid, with a diaphragm closing the diaphragm seal, on which a pressure p to be measured acts during operation.
- Diaphragm seals are very often used in pressure measurement technology.
- a diaphragm seal ensures that the measuring element does not come into contact with a medium whose pressure is to be measured. This is e.g. with chemically and / or mechanically sensitive measuring elements, e.g. Semiconductor chips, required.
- diaphragm seals are used when there are very high temperatures at the measuring location which could impair or even destroy the measuring element and / or an electronic unit connected to it for receiving and / or processing signals from the measuring element generated by the measuring element.
- Thin membranes are preferably used so that diaphragm seals transmit a pressure acting on them as unchanged as possible.
- membranes with a thickness of e.g. 0.01 mm to 0.2 mm used.
- Such thin membranes are sensitive to corrosion, mechanical damage, abrasion, etc. Damage to the membrane is often only noticed when the downstream measuring element is damaged and fails. Then, as a rule, the liquid with which the diaphragm seal is filled has already leaked out.
- the invention consists in a pressure measuring device - A measuring element and
- the intermediate space between the first and the second membrane is evacuated, and the change monitored by the monitoring unit is an abolition of the vacuum.
- the monitoring unit has a pressure switch, which is used to detect a pressure increase in the intermediate space.
- the monitoring unit has a capacitor which has an electrode arranged on the second membrane and whose capacitance depends on a distance between the first and the second membrane.
- the intermediate space between the first and the second membrane is filled with a liquid, and the change monitored by the monitoring unit is a change in a consistency of the liquid.
- the monitoring unit has an optical sensor which serves to determine a change in a refractive index of the liquid or a degree of turbidity in the liquid.
- the monitoring unit has an optical sensor which serves to determine a change in the transit time of an optical signal from the optical sensor to the second membrane and back.
- the second membrane has a larger diameter than the first membrane
- the second membrane has an outer annular disk-shaped edge, which lies opposite an annular disk-shaped surface of the diaphragm seal adjoining the first membrane,
- the monitoring unit monitors an edge area defined by the outer edge of the second membrane for changes caused by destruction of the second membrane.
- the space between the first and the second membrane is evacuated, and the change monitored by the monitoring unit is a release of the vacuum.
- the monitoring unit has a pressure switch which serves to detect a pressure increase in the intermediate space, or the monitoring unit has a capacitor which has an electrode arranged on the edge of the second membrane and its capacitance at a distance depends between the edge and the opposite surface of the diaphragm seal.
- FIG. 1 shows schematically a section through a pressure measuring device according to the invention with a diaphragm seal with a first and a second membrane and a monitoring unit which monitors an intermediate space existing between the first and the second membrane;
- Fig. 2 shows schematically a section of the pressure measuring device shown in Fig. 1, wherein the space is evacuated and the monitoring unit has a pressure switch;
- Fig. 3 shows schematically a section of the pressure measuring device shown in Fig. 1, wherein the space is evacuated and the monitoring unit has a capacitor;
- FIG. 4 schematically shows a section of the pressure measuring device shown in FIG. 1, the intermediate space being filled with a liquid and the monitoring unit having an optical sensor;
- FIG. 5 schematically shows a section of the pressure measuring device shown in FIG. 1, a solid being introduced between the first and the second membrane, the remaining free part of the intermediate space being evacuated and the monitoring unit having a pressure switch;
- FIG. 6 shows schematically a section of the pressure measuring device shown in FIG. 1, a solid being introduced between the first and the second membrane, the remaining free part of the intermediate space being evacuated and the monitoring unit having a capacitor;
- Fig. 1 shows a section through a schematically illustrated pressure measuring device. It has a measuring element 1, upstream of which a diaphragm seal 3 is connected. In operation, the diaphragm seal 3 causes a pressure to be measured acting on the diaphragm seal 3 to be transmitted to the measuring element 1.
- the measuring element 1 is a membrane made of a semiconductor in the illustrated embodiment. The membrane is bridge-shaped and applied directly to a rear side of the diaphragm seal 3. Through a bore 5 penetrating the diaphragm seal 3, a pressure to be measured is supplied to the membrane during operation.
- a pressure acting on the membrane causes a pressure-dependent deflection of the membrane, which is detected by means of an electromechanical transducer, for example resistance elements doped into the membrane, and converted into a pressure-dependent electrical signal.
- an electromechanical transducer for example resistance elements doped into the membrane
- the electrical signal is accessible via connection lines 7 for further processing and / or evaluation.
- the diaphragm seal 3 has a cylindrical solid block, e.g. from a steel, in the middle of which the bore 5 runs.
- the diaphragm seal 3 has a chamber 9 on a side facing away from the measuring element 1.
- the bore 5 opens into the chamber 9 and the chamber 9 is closed off by means of a first membrane 11.
- the chamber 9, the bore 5 and an interior of the measuring element 1 facing the diaphragm seal 3, here the space enclosed by the bridge-shaped membrane, are filled with an incompressible liquid, e.g. a silicone oil.
- the liquid serves to transmit a pressure acting on the first membrane 11 to the measuring element 1.
- a second membrane 13 is arranged directly on a side of the first membrane 11 facing away from the measuring element.
- the second membrane 13 runs parallel to the first membrane 11.
- the first and second diaphragms 11, 13 consist, for example, of a stainless steel and can be connected to the diaphragm seal 3, for example by welding at their outer circular edge.
- the pressure p to be measured is present on the second membrane 13, is transmitted through it to the first membrane 11 and from there through the liquid to the measuring element 1.
- a monitoring unit 17 is provided, which monitors the intermediate space 15 for changes caused by the destruction of the second membrane 13.
- the intermediate space 15 between the first and the second membrane 11, 13 is evacuated.
- the two membranes 11 and 13 are mechanically coupled to one another and there is only very little reaction of the second membrane 13 to the pressure measurement.
- the second membrane 13 can also be mechanically connected to the first membrane 11, e.g. be welded to it.
- the second diaphragm 13 In normal operation, the second diaphragm 13 is in close contact with the first diaphragm 11 and the annular disk-shaped surface of the diaphragm seal 3 due to the vacuum. If the second membrane 13 leaks or is even completely destroyed, the vacuum is released. Abrasion and corrosion may be mentioned here as examples of possible damage and / or destruction of the second membrane 13.
- the change monitored by the monitoring unit 17 is here an abolition of the vacuum.
- a suitable monitoring unit 17 is e.g. a pressure switch 19, which serves to detect a pressure increase in the intermediate space 15.
- a simple switch is sufficient, which is switched by a certain pressure acting thereon, the value of which is greater than a predetermined switch-specific threshold value.
- FIG. 2 shows an enlarged section of the pressure measuring device shown in FIG. 1, which contains the first and second diaphragms 11, 13 and the monitoring unit 17.
- the second membrane 13 is damaged in the pressure measuring device shown in FIG. 2. It has a crack 21. The vacuum is therefore destroyed and the pressure p to be measured acts in the intermediate space. This pressure p is above the threshold. Accordingly, the pressure switch 19 is pressed.
- a switch position which corresponds to a pressure switch 19 that is not pressed in, is shown in the form of a dashed line.
- An electronic circuit 23 is connected to the pressure switch 19 and serves to recognize whether the pressure switch 19 is open or closed. This can be, for example, a simple resistance measurement circuit that measures a resistance of the pressure switch 19.
- the electronic Circuit 23 has connection lines 24, via which a signal corresponding to a pressure switch state is available for further use. It can be used, for example, to report the damage and / or to trigger an alarm.
- the damage is detected immediately by the monitoring unit 17, here the pressure switch 19, without the need for extensive maintenance and / or measuring device checks.
- the first membrane 11, which is still intact, offers the certainty that no liquid escapes from the diaphragm seal 3.
- the operator of the pressure measuring device has a period of time to remedy the damage, since the first membrane 11 is still completely intact. Only when there is a risk that the first membrane 11, which is now exposed due to the damage or destruction of the second membrane 13, is also damaged, is there a risk that the liquid will escape. Is the damage or destruction e.g. caused by corrosion or another slow process, the operator can determine a minimum service life of the second membrane 13 and use this to determine a guide value for the period of time available to remedy the damage. Especially in large systems in which a large number of pressure gauges are used, maintenance and damage repair can be made much more economical.
- FIG. 3 shows a further enlarged section of the pressure measuring device shown in FIG. 1, which contains the first and second diaphragms 11, 13 and the monitoring unit 17.
- the monitoring unit 17 has a capacitor, the capacitance of which depends on a distance between the first and the second membrane.
- the capacitor has two electrodes 25, 27.
- An electrode 25 is arranged on the second membrane 13.
- the further electrode 27 is arranged opposite the first electrode 25 on a side of the intermediate space 15 facing the measuring element.
- the electrode 25 is arranged on an outer edge of the second membrane 13.
- the further electrode 27 is arranged on the annular disk-shaped surface of the diaphragm seal 3.
- the electrode 25 can also be formed directly by the second membrane 13 itself. That offers the Advantage that no electrode has to be applied later and its electrical connection can also be omitted. In the latter case, the membrane 13 is preferably at a fixed reference potential, for example to ground.
- the intermediate space 15 is evacuated in normal operation.
- the vacuum is released and the distance between the two electrodes 25, 27 changes due to a push-back force of the second membrane 13.
- An electronic circuit 29 is connected to the capacitor and serves to recognize whether the capacitance of the capacitor changes. For example, a simple capacitance measurement circuit can be used.
- the electronic circuit 29 has connecting lines 24, via which a signal corresponding to a change in capacitance is available for further use. For example, be used to report the damage and / or trigger an alarm.
- FIG. 4 shows a further enlarged section of the pressure measuring device shown in FIG. 1, which contains the first and second diaphragms 11, 13 and the monitoring unit 17.
- the intermediate space 15 is not evacuated, but is filled with a liquid.
- the liquid should be selected in such a way that a small amount can escape completely. Since the amount of liquid is very small due to the small space volume, a variety of liquids can be used. While the liquid with which the diaphragm seal 3 is filled, its physical properties, in particular its compressibility and its coefficient of thermal expansion, because of the large amount, play an important role for the measurement accuracy and therefore not all liquids can be used, the physical ones Properties of the liquid with which the intermediate space 15 is filled are insignificant due to the small amount of liquid. Accordingly, it is much easier to find liquids that the operator considers harmless.
- an optical sensor 31 is particularly suitable, which is embedded, for example, in the surface of the diaphragm seal 3 in the form of an annular disk
- Window 33 sends optical signals in the space 15, which at the second
- Membrane 13 are reflected back to the sensor 31.
- the optical sensor 31 detects e.g. a change in a refractive index of the liquid or a change in a degree of turbidity of the liquid.
- the optical sensor 31 can also serve to determine a change in the transit time of an optical signal from the optical sensor 31 to the second membrane 13 and back.
- an electronic circuit which converts the monitored change into a corresponding signal and makes it available for further use via connecting lines 24.
- FIG. 5 shows a further section of the pressure measuring device shown in FIG. 1.
- the second membrane 13 has a larger diameter than the first membrane 11.
- An outer annular disk-shaped edge 35 of the second membrane 13 lies opposite an annular disk-shaped surface of the diaphragm seal 3 adjoining the first membrane 11.
- a suitable solid 35 is e.g. an elastomer, e.g. a silicone elastomer.
- the monitoring unit 17 is used here to monitor an edge region defined by the outer edge 35 of the second membrane 13 for changes caused by destruction of the second membrane 13.
- the intermediate space 15 between the first and second diaphragms 11, 13 is also evacuated here, and the change monitored by the monitoring unit 17 removes the vacuum.
- a pressure switch 19 can be provided, which serves to detect a pressure increase in the edge region of the intermediate space 15. This is shown in FIG. 5.
- a capacitor can be provided which has an electrode 25 arranged on the edge 35 of the second membrane 13 and its capacitance at a distance between the edge 35 and the opposite surface of the diaphragm seal 3 depends. This is shown in FIG. 6.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Glass Compositions (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE50211564T DE50211564D1 (de) | 2001-09-07 | 2002-08-24 | Druckmessgerät |
EP02760326A EP1425563B1 (de) | 2001-09-07 | 2002-08-24 | Druckmessgerät |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10144230.0 | 2001-09-07 | ||
DE10144230A DE10144230A1 (de) | 2001-09-07 | 2001-09-07 | Druckmeßgerät |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2003025534A1 true WO2003025534A1 (de) | 2003-03-27 |
Family
ID=7698283
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2002/009480 WO2003025534A1 (de) | 2001-09-07 | 2002-08-24 | Druckmessgerät |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1425563B1 (de) |
AT (1) | ATE384253T1 (de) |
DE (2) | DE10144230A1 (de) |
WO (1) | WO2003025534A1 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019238627A1 (en) * | 2018-06-13 | 2019-12-19 | Danfoss A/S | Pressure sensor arrangement |
WO2020187761A1 (de) | 2019-03-18 | 2020-09-24 | Siemens Aktiengesellschaft | Multifunktionaler sensor für die prozess- oder versorgungstechnik |
CN112400062A (zh) * | 2019-06-12 | 2021-02-23 | Gea机械设备意大利股份公司 | 在流体产品的均质装置中使用的双隔膜泵以及用于检测所述泵中的泄漏的方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10200779B4 (de) * | 2002-01-10 | 2009-03-12 | Endress + Hauser Gmbh + Co. Kg | Druckmittler mit Modul zur Erkennung von Membranbrüchen und Druckmessgerät zur Erkennung von Membranbrüchen |
DE10352471A1 (de) | 2003-11-07 | 2005-06-23 | Endress + Hauser Gmbh + Co. Kg | Feldgerät zur Bestimmung und/oder Überwachung einer Prozessgröße |
DE102004033812B4 (de) * | 2004-07-12 | 2010-01-28 | Endress + Hauser Gmbh + Co. Kg | Druck- oder Differenzdruckaufnehmer |
DE102015112408A1 (de) | 2015-07-29 | 2017-02-02 | Endress + Hauser Gmbh + Co. Kg | Drucksensor und Verfahren zum Überwachen eines Drucksensors |
DE102016015447A1 (de) * | 2016-12-24 | 2017-03-30 | Wika Alexander Wiegand Se & Co. Kg | Druckmittler mit evakuierter Doppelmembran und Vakuumüberwachung |
DE102018218503A1 (de) * | 2018-10-29 | 2020-04-30 | Vega Grieshaber Kg | Membrandruckmittler zur Membranbruchdetektion |
CN109667941A (zh) * | 2018-12-11 | 2019-04-23 | 合肥市久环给排水燃气设备有限公司 | 一种具有报警功能的燃气调压器 |
DE102019005819B3 (de) * | 2019-08-21 | 2020-10-01 | Armano Messtechnik GmbH | Druckmittler mit Sensorüberwachung |
DE102019125272A1 (de) * | 2019-09-19 | 2021-03-25 | LABOM Meß- und Regeltechnik Gesellschaft mit beschränkter Haftung | Druckmess-Einwegartikel sowie Druckmesssystem mit derartigem Druckmess-Einwegartikel |
DE102022102680A1 (de) | 2022-02-04 | 2023-08-10 | Endress+Hauser SE+Co. KG | Kolbendruckmittler und System umfassend einen Druckmessaufnehmer und einen Kolbendruckmittler |
DE102022130915A1 (de) | 2022-11-22 | 2024-05-23 | Endress+Hauser SE+Co. KG | Druckmessaufnehmer und Differenzdruckmessaufnehmer |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0001188A1 (de) * | 1977-09-12 | 1979-03-21 | Holledge (Instruments) Limited | Druckempfindliche Anordnung und Überwachungseinrichtung welche diese Anordnung enthält |
DE19949831A1 (de) * | 1999-10-15 | 2001-04-19 | Wika Alexander Wiegand Gmbh | Membrandruckmittler |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5072190A (en) * | 1990-08-14 | 1991-12-10 | The Foxboro Company | Pressure sensing device having fill fluid contamination detector |
-
2001
- 2001-09-07 DE DE10144230A patent/DE10144230A1/de not_active Withdrawn
-
2002
- 2002-08-24 AT AT02760326T patent/ATE384253T1/de not_active IP Right Cessation
- 2002-08-24 EP EP02760326A patent/EP1425563B1/de not_active Expired - Lifetime
- 2002-08-24 DE DE50211564T patent/DE50211564D1/de not_active Expired - Fee Related
- 2002-08-24 WO PCT/EP2002/009480 patent/WO2003025534A1/de active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0001188A1 (de) * | 1977-09-12 | 1979-03-21 | Holledge (Instruments) Limited | Druckempfindliche Anordnung und Überwachungseinrichtung welche diese Anordnung enthält |
DE19949831A1 (de) * | 1999-10-15 | 2001-04-19 | Wika Alexander Wiegand Gmbh | Membrandruckmittler |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019238627A1 (en) * | 2018-06-13 | 2019-12-19 | Danfoss A/S | Pressure sensor arrangement |
CN112262304A (zh) * | 2018-06-13 | 2021-01-22 | 丹佛斯有限公司 | 压力传感器布置 |
US11656141B2 (en) | 2018-06-13 | 2023-05-23 | Danfoss A/S | Pressure sensor arrangement |
WO2020187761A1 (de) | 2019-03-18 | 2020-09-24 | Siemens Aktiengesellschaft | Multifunktionaler sensor für die prozess- oder versorgungstechnik |
CN112400062A (zh) * | 2019-06-12 | 2021-02-23 | Gea机械设备意大利股份公司 | 在流体产品的均质装置中使用的双隔膜泵以及用于检测所述泵中的泄漏的方法 |
Also Published As
Publication number | Publication date |
---|---|
DE10144230A1 (de) | 2003-03-27 |
DE50211564D1 (de) | 2008-03-06 |
EP1425563A1 (de) | 2004-06-09 |
ATE384253T1 (de) | 2008-02-15 |
EP1425563B1 (de) | 2008-01-16 |
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