WO2003023337A3 - Radiation measuring device - Google Patents

Radiation measuring device Download PDF

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Publication number
WO2003023337A3
WO2003023337A3 PCT/EP2002/009929 EP0209929W WO03023337A3 WO 2003023337 A3 WO2003023337 A3 WO 2003023337A3 EP 0209929 W EP0209929 W EP 0209929W WO 03023337 A3 WO03023337 A3 WO 03023337A3
Authority
WO
WIPO (PCT)
Prior art keywords
radiation
measuring device
measuring
radiation measuring
bar
Prior art date
Application number
PCT/EP2002/009929
Other languages
German (de)
French (fr)
Other versions
WO2003023337A2 (en
Inventor
Ulrich Schulz
Erich Dreier
Original Assignee
Edus Systemtechnik Gmbh
Ulrich Schulz
Erich Dreier
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edus Systemtechnik Gmbh, Ulrich Schulz, Erich Dreier filed Critical Edus Systemtechnik Gmbh
Priority to EP02776996A priority Critical patent/EP1423667A2/en
Priority to AU2002339502A priority patent/AU2002339502A1/en
Publication of WO2003023337A2 publication Critical patent/WO2003023337A2/en
Publication of WO2003023337A3 publication Critical patent/WO2003023337A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/429—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0403—Mechanical elements; Supports for optical elements; Scanning arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/044—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using shutters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0474—Diffusers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0219—Electrical interface; User interface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0295—Constructional arrangements for removing other types of optical noise or for performing calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J2001/0276—Protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J2001/0485—Cosinus correcting or purposely modifying the angular response of a light sensor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Measurement Of Radiation (AREA)

Abstract

The invention relates to a radiation measuring device, especially for measuring high power radiation (10), comprising a measuring window (12) and a deflecting unit which can guide at least one part of the radiation which is to be measured (10) from the measuring window (12) to a sensor unit (14). According to the invention, the deflecting unit comprises at least one bar (16) into which the radiation (10) is injected via the measuring window (12), parallel to the longitudinal extension (18) thereof, via a side (70). The radiation is retransmitted along the longitudinal extension of the surface (18) bar to the sensor unit (14).
PCT/EP2002/009929 2001-09-08 2002-09-05 Radiation measuring device WO2003023337A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP02776996A EP1423667A2 (en) 2001-09-08 2002-09-05 Radiation measuring device
AU2002339502A AU2002339502A1 (en) 2001-09-08 2002-09-05 Radiation measuring device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10144160.6 2001-09-08
DE2001144160 DE10144160A1 (en) 2001-09-08 2001-09-08 Measurement of high-energy radiation, such as UV radiation using a measurement sensor with a detection window arranged perpendicular to the radiation flux, so that only a small part of the radiation is coupled into the sensor

Publications (2)

Publication Number Publication Date
WO2003023337A2 WO2003023337A2 (en) 2003-03-20
WO2003023337A3 true WO2003023337A3 (en) 2003-09-12

Family

ID=7698240

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/009929 WO2003023337A2 (en) 2001-09-08 2002-09-05 Radiation measuring device

Country Status (4)

Country Link
EP (1) EP1423667A2 (en)
AU (1) AU2002339502A1 (en)
DE (1) DE10144160A1 (en)
WO (1) WO2003023337A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6987269B2 (en) * 2002-12-16 2006-01-17 Axcelis Technologies, Inc. Apparatus and process for measuring light intensities
DE102010026443B4 (en) * 2010-07-08 2016-08-04 Precitec Kg Device for measuring the power of a laser beam and laser processing head with such a device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4371897A (en) * 1980-09-02 1983-02-01 Xerox Corporation Fluorescent activated, spatially quantitative light detector
JPH01201124A (en) * 1988-02-05 1989-08-14 Sumitomo Electric Ind Ltd Illuminance measuring instrument for ultraviolet-ray irradiating device for optical fiber wire drawing device
EP0480512A1 (en) * 1990-10-11 1992-04-15 Koninklijke Philips Electronics N.V. Position-sensitive radiation detection system and optical scanning device provided with such a system

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1962594A1 (en) * 1969-12-13 1971-06-24 Licentia Gmbh Device for scanning sheet or band-shaped, continuous material
DE2654465C3 (en) * 1976-12-01 1981-12-03 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Mixing chamber in the form of an internally mirrored optical channel
AT389389B (en) * 1985-09-18 1989-11-27 Tiroler Roehren & Metallwerk DEVICE FOR PHOTOELECTRIC TEMPERATURE MEASUREMENT OF A MEASURED OBJECT
DE29707052U1 (en) * 1997-04-20 1997-11-06 Delta UV Service & Systeme GmbH, 33818 Leopoldshöhe Device for irradiating fluids with UV radiation with integrated optoelectric radiation monitoring

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4371897A (en) * 1980-09-02 1983-02-01 Xerox Corporation Fluorescent activated, spatially quantitative light detector
JPH01201124A (en) * 1988-02-05 1989-08-14 Sumitomo Electric Ind Ltd Illuminance measuring instrument for ultraviolet-ray irradiating device for optical fiber wire drawing device
EP0480512A1 (en) * 1990-10-11 1992-04-15 Koninklijke Philips Electronics N.V. Position-sensitive radiation detection system and optical scanning device provided with such a system

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
AVDOSHIN E S: "INFRARED RADIOMETERS WITH LIGHT GUIDES (SURVEY)", INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, CONSULTANTS BUREAU. NEW YORK, US, vol. 31, no. 2, PART 1, 1 March 1988 (1988-03-01), pages 261 - 282, XP000001546, ISSN: 0020-4412 *
PATENT ABSTRACTS OF JAPAN vol. 013, no. 502 (P - 958) 13 November 1989 (1989-11-13) *

Also Published As

Publication number Publication date
DE10144160A1 (en) 2003-03-27
WO2003023337A2 (en) 2003-03-20
AU2002339502A1 (en) 2003-03-24
EP1423667A2 (en) 2004-06-02

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