WO2002100593A3 - Polishing pads with polymer filled fibrous web, and methods for fabricating and using same - Google Patents

Polishing pads with polymer filled fibrous web, and methods for fabricating and using same Download PDF

Info

Publication number
WO2002100593A3
WO2002100593A3 PCT/US2001/043208 US0143208W WO02100593A3 WO 2002100593 A3 WO2002100593 A3 WO 2002100593A3 US 0143208 W US0143208 W US 0143208W WO 02100593 A3 WO02100593 A3 WO 02100593A3
Authority
WO
WIPO (PCT)
Prior art keywords
fibers
fabricating
methods
same
fibrous web
Prior art date
Application number
PCT/US2001/043208
Other languages
French (fr)
Other versions
WO2002100593A2 (en
Inventor
Shyng-Tsong Chen
Kenneth P Rodbell
Oscar Kai Chi Hsu
Jean Vangsness
David S Gilbride
Scott Clayton Billings
Kenneth Davis
Original Assignee
Ibm
Shyng-Tsong Chen
Kenneth P Rodbell
Oscar Kai Chi Hsu
Jean Vangsness
David S Gilbride
Scott Clayton Billings
Kenneth Davis
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/715,184 external-priority patent/US6712681B1/en
Application filed by Ibm, Shyng-Tsong Chen, Kenneth P Rodbell, Oscar Kai Chi Hsu, Jean Vangsness, David S Gilbride, Scott Clayton Billings, Kenneth Davis filed Critical Ibm
Priority to AU2001297847A priority Critical patent/AU2001297847A1/en
Priority to JP2003503398A priority patent/JP2004528997A/en
Priority to EP01274075A priority patent/EP1341643A4/en
Priority to CA002441419A priority patent/CA2441419A1/en
Publication of WO2002100593A2 publication Critical patent/WO2002100593A2/en
Publication of WO2002100593A3 publication Critical patent/WO2002100593A3/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • B24B37/20Lapping pads for working plane surfaces
    • B24B37/24Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/008Finishing manufactured abrasive sheets, e.g. cutting, deforming
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28Resins or natural or synthetic macromolecular compounds

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Nonwoven Fabrics (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)

Abstract

A polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, and the precursors fill these interstices substantially completely before completion of the reaction. The pad may include a thin layer of free fibers at its polishing surface. A segment of at least a portion of the free fibers are embedded in the adjacent body of the polymer and fibers. The fibers may be separate, or in the form of a woven or non-woven web.
PCT/US2001/043208 2000-11-20 2001-11-20 Polishing pads with polymer filled fibrous web, and methods for fabricating and using same WO2002100593A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AU2001297847A AU2001297847A1 (en) 2000-11-20 2001-11-20 Polishing pads with polymer filled fibrous web, and methods for fabricating and using same
JP2003503398A JP2004528997A (en) 2000-11-20 2001-11-20 Abrasive pad having a polymer-filled fibrous web and methods of making and using the same
EP01274075A EP1341643A4 (en) 2000-11-20 2001-11-20 Polishing pads with polymer filled fibrous web, and methods for fabricating and using same
CA002441419A CA2441419A1 (en) 2000-11-20 2001-11-20 Polishing pads with polymer filled fibrous web, and methods for fabricating and using same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/715,184 2000-11-20
US09/715,184 US6712681B1 (en) 2000-06-23 2000-11-20 Polishing pads with polymer filled fibrous web, and methods for fabricating and using same

Publications (2)

Publication Number Publication Date
WO2002100593A2 WO2002100593A2 (en) 2002-12-19
WO2002100593A3 true WO2002100593A3 (en) 2003-06-05

Family

ID=24872997

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/043208 WO2002100593A2 (en) 2000-11-20 2001-11-20 Polishing pads with polymer filled fibrous web, and methods for fabricating and using same

Country Status (5)

Country Link
EP (1) EP1341643A4 (en)
JP (1) JP2004528997A (en)
AU (1) AU2001297847A1 (en)
CA (1) CA2441419A1 (en)
WO (1) WO2002100593A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7086932B2 (en) * 2004-05-11 2006-08-08 Freudenberg Nonwovens Polishing pad
TWI409136B (en) * 2006-07-19 2013-09-21 Innopad Inc Chemical mechanical planarization pad having micro-grooves on the pad surface
JP5234916B2 (en) * 2007-01-30 2013-07-10 東レ株式会社 Laminated polishing pad
WO2009123659A1 (en) * 2008-04-01 2009-10-08 Innopad, Inc. Polishing pad with controlled void formation
KR101050274B1 (en) 2009-12-31 2011-07-19 한국생산기술연구원 Abrasive pad containing polishing pad and method for manufacturing same
JP2012101298A (en) * 2010-11-08 2012-05-31 Ritsumeikan Polishing pad
JP2015127094A (en) * 2015-03-04 2015-07-09 学校法人立命館 Polishing pad

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4927432A (en) * 1986-03-25 1990-05-22 Rodel, Inc. Pad material for grinding, lapping and polishing
US5197999A (en) * 1991-09-30 1993-03-30 National Semiconductor Corporation Polishing pad for planarization

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4728552A (en) * 1984-07-06 1988-03-01 Rodel, Inc. Substrate containing fibers of predetermined orientation and process of making the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4927432A (en) * 1986-03-25 1990-05-22 Rodel, Inc. Pad material for grinding, lapping and polishing
US5197999A (en) * 1991-09-30 1993-03-30 National Semiconductor Corporation Polishing pad for planarization

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1341643A4 *

Also Published As

Publication number Publication date
JP2004528997A (en) 2004-09-24
EP1341643A4 (en) 2004-06-09
CA2441419A1 (en) 2002-12-19
EP1341643A2 (en) 2003-09-10
WO2002100593A2 (en) 2002-12-19
AU2001297847A1 (en) 2002-12-23

Similar Documents

Publication Publication Date Title
CA2355512A1 (en) Absorbent article using continuous filaments and absorbent sheet
WO2005110675A3 (en) Polishing pad
CN100431509C (en) Absorptive article
GB2369799B (en) Layered polyurethane materials
WO2007033678A3 (en) A wound dressing
EP1114592A3 (en) Artificial leather shoe and artificial leather suited therefor
WO1997042366A3 (en) Durable spunlaced fabric structures
AR022261A1 (en) HIGH RESISTANCE ABSORBENT STRUCTURE
WO2005094443A3 (en) Reinforced fibrous insulation product and method of reinforcing same
EP1314410A3 (en) Multi layered wound dressing
MXPA05008510A (en) Absorbent article with improved surface material.
EP2025454A3 (en) Improved chemical mechanical polishing pad and methods of making and using same
PL370108A1 (en) Power transmission belt
WO2008069838A3 (en) Layered non-woven structure
WO2002100593A3 (en) Polishing pads with polymer filled fibrous web, and methods for fabricating and using same
PT1081284E (en) Absorbent paper product comprising at least three plies, and process for making the same
CA2477929A1 (en) Fibre laminate and method for manufacturing a fibre laminate
CN1853519B (en) Shoes base and fishing shoes
CO5031319A1 (en) COMPOSITE MATERIAL NOT WOVEN, HYDRAULICALLY WRAPPED, STRONG, SOFT, AND METHOD FOR MANUFACTURING
CA2656561A1 (en) Non-woven structure and methods of making the same
WO2002091964A3 (en) A wound dressing
CA2461845A1 (en) Method of producing a fibrous laminate
JP2001275713A (en) Felt sole for footwear and its manufacturing method
WO2000004936A3 (en) Textile including super absorbent fibers
KR100755299B1 (en) hydrous gel sheet for makeup and production method of the same

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PH PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2003503398

Country of ref document: JP

Ref document number: 2441419

Country of ref document: CA

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
WWE Wipo information: entry into national phase

Ref document number: 2001274075

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 2001274075

Country of ref document: EP

REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

WWW Wipo information: withdrawn in national office

Ref document number: 2001274075

Country of ref document: EP