WO2002099943A3 - Conduction assembly for a cathode of an arc evaporation device - Google Patents

Conduction assembly for a cathode of an arc evaporation device Download PDF

Info

Publication number
WO2002099943A3
WO2002099943A3 PCT/EP2002/006087 EP0206087W WO02099943A3 WO 2002099943 A3 WO2002099943 A3 WO 2002099943A3 EP 0206087 W EP0206087 W EP 0206087W WO 02099943 A3 WO02099943 A3 WO 02099943A3
Authority
WO
WIPO (PCT)
Prior art keywords
target
cathode
electrically conductive
arc
evaporation device
Prior art date
Application number
PCT/EP2002/006087
Other languages
German (de)
French (fr)
Other versions
WO2002099943B1 (en
WO2002099943A2 (en
Inventor
Hermann Curtins
Original Assignee
Swiss Plas Com Ag
Hermann Curtins
Gabriel Herbert M
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Swiss Plas Com Ag, Hermann Curtins, Gabriel Herbert M filed Critical Swiss Plas Com Ag
Priority to AU2002314134A priority Critical patent/AU2002314134A1/en
Priority to EP02740681A priority patent/EP1393344A2/en
Publication of WO2002099943A2 publication Critical patent/WO2002099943A2/en
Publication of WO2002099943A3 publication Critical patent/WO2002099943A3/en
Publication of WO2002099943B1 publication Critical patent/WO2002099943B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32577—Electrical connecting means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention relates to an assembly for conducting current to a target (16), which forms a cathode of an arc evaporation device, in order to evaporate said target using at least one arc spot generated by an arc that flows between the anode and the cathode. At least the periphery of the target is connected to a fixing device (20) in an electrically conductive manner. The aim of the invention is to guarantee the desired uniform evaporation of the target material. To achieve this, several electrically conductive connections (38, 40), which run in the peripheral region of the target and which in turn are interconnected in an electrically conductive manner by means of an electrical connection (42), originate from the fixing device (20) and/or the target (16).
PCT/EP2002/006087 2001-06-05 2002-06-04 Conduction assembly for a cathode of an arc evaporation device WO2002099943A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2002314134A AU2002314134A1 (en) 2001-06-05 2002-06-04 Conduction assembly for a cathode of an arc evaporation device
EP02740681A EP1393344A2 (en) 2001-06-05 2002-06-04 Conduction assembly for a cathode of an arc evaporation device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2001126985 DE10126985A1 (en) 2001-06-05 2001-06-05 Arrangement for guiding a current to a target forming the cathode of an electric arc vaporizing device comprises electrically conducting lines running from a holder and/or the target and electrically connected via a connection
DE10126985.4 2001-06-05

Publications (3)

Publication Number Publication Date
WO2002099943A2 WO2002099943A2 (en) 2002-12-12
WO2002099943A3 true WO2002099943A3 (en) 2003-04-10
WO2002099943B1 WO2002099943B1 (en) 2003-10-30

Family

ID=7687060

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/006087 WO2002099943A2 (en) 2001-06-05 2002-06-04 Conduction assembly for a cathode of an arc evaporation device

Country Status (5)

Country Link
EP (1) EP1393344A2 (en)
CN (1) CN1513199A (en)
AU (1) AU2002314134A1 (en)
DE (1) DE10126985A1 (en)
WO (1) WO2002099943A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10256417A1 (en) * 2002-12-02 2004-06-09 Pvt Plasma Und Vakuum Technik Gmbh Arc evaporation device
EP1835524A1 (en) * 2006-03-16 2007-09-19 Sulzer Metco AG Fastening means for sputtering source
SE542687C2 (en) 2018-06-27 2020-06-23 Impact Coatings Ab Publ Arc source system for a cathode

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5203980A (en) * 1990-10-26 1993-04-20 Multi-Arc Oberflachentechnik Gmbh Large surface cathode arrangement of uniform consumption
EP0548032A2 (en) * 1991-12-13 1993-06-23 UNICOAT S.r.l. Electric arc evaporator
US5278861A (en) * 1990-12-06 1994-01-11 Innovatique S.A. Method of treating metals by deposition of materials and furnace for implementing said method
EP0899772A2 (en) * 1997-08-30 1999-03-03 United Technologies Corporation Cathodic arc vapor deposition apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5203980A (en) * 1990-10-26 1993-04-20 Multi-Arc Oberflachentechnik Gmbh Large surface cathode arrangement of uniform consumption
US5278861A (en) * 1990-12-06 1994-01-11 Innovatique S.A. Method of treating metals by deposition of materials and furnace for implementing said method
EP0548032A2 (en) * 1991-12-13 1993-06-23 UNICOAT S.r.l. Electric arc evaporator
EP0899772A2 (en) * 1997-08-30 1999-03-03 United Technologies Corporation Cathodic arc vapor deposition apparatus

Also Published As

Publication number Publication date
DE10126985A1 (en) 2002-12-12
AU2002314134A1 (en) 2002-12-16
WO2002099943B1 (en) 2003-10-30
WO2002099943A2 (en) 2002-12-12
CN1513199A (en) 2004-07-14
EP1393344A2 (en) 2004-03-03

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