WO2002088654A3 - Semiconductor component, particularly a micromechanical pressure sensor - Google Patents

Semiconductor component, particularly a micromechanical pressure sensor Download PDF

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Publication number
WO2002088654A3
WO2002088654A3 PCT/DE2002/001151 DE0201151W WO02088654A3 WO 2002088654 A3 WO2002088654 A3 WO 2002088654A3 DE 0201151 W DE0201151 W DE 0201151W WO 02088654 A3 WO02088654 A3 WO 02088654A3
Authority
WO
WIPO (PCT)
Prior art keywords
semiconductor component
pressure sensor
electrode
micromechanical pressure
membrane
Prior art date
Application number
PCT/DE2002/001151
Other languages
German (de)
French (fr)
Other versions
WO2002088654A2 (en
Inventor
Andreas Junger
Hubert Benzel
Heinz Eschrich
Juergen Nitsche
Frank Schaefer
Heinz-Georg Vossenberg
Original Assignee
Bosch Gmbh Robert
Andreas Junger
Hubert Benzel
Heinz Eschrich
Juergen Nitsche
Frank Schaefer
Heinz-Georg Vossenberg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert, Andreas Junger, Hubert Benzel, Heinz Eschrich, Juergen Nitsche, Frank Schaefer, Heinz-Georg Vossenberg filed Critical Bosch Gmbh Robert
Publication of WO2002088654A2 publication Critical patent/WO2002088654A2/en
Publication of WO2002088654A3 publication Critical patent/WO2002088654A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Abstract

The invention relates to, in particular, a semiconductor component, particularly a micromechanical pressure sensor (200), comprising a membrane electrode (206), a cavity (208), which is located underneath the membrane, and a bottom electrode (202, 203), which is also located underneath the membrane. In order to improve the reliability of the semiconductor component, the invention provides, in particular, a bottom electrode that is comprised of a first and a second electrode (202, 203), whereby the second electrode (203) surrounds the first electrode (202) to a large extent.
PCT/DE2002/001151 2001-05-02 2002-03-28 Semiconductor component, particularly a micromechanical pressure sensor WO2002088654A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10121394.8 2001-05-02
DE2001121394 DE10121394A1 (en) 2001-05-02 2001-05-02 Semiconductor component, in particular a micromechanical pressure sensor

Publications (2)

Publication Number Publication Date
WO2002088654A2 WO2002088654A2 (en) 2002-11-07
WO2002088654A3 true WO2002088654A3 (en) 2003-05-08

Family

ID=7683412

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2002/001151 WO2002088654A2 (en) 2001-05-02 2002-03-28 Semiconductor component, particularly a micromechanical pressure sensor

Country Status (2)

Country Link
DE (1) DE10121394A1 (en)
WO (1) WO2002088654A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012204588A1 (en) 2012-03-22 2013-09-26 Robert Bosch Gmbh Detecting device for use in pressure sensor for detecting absolute pressure of e.g. oil in automated transmission of motor car, has membrane including side directly or indirectly exposed to pressure, and sensor element detecting pressure

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4612599A (en) * 1983-03-24 1986-09-16 Karlheinz Ziegler Capacitive pressure sensor
DE4041578A1 (en) * 1990-12-22 1992-07-02 Bosch Gmbh Robert SENSOR
DE4231120A1 (en) * 1992-09-17 1994-03-24 Vdo Schindling Pressure sensor for gases or liquids - has carrier plate connected to diaphragm, and electrode surfaces of plate and diaphragm on opposite sides
US5631428A (en) * 1994-11-24 1997-05-20 Siemens Aktiengesellschaft Capacitive semiconductor pressure sensor
US5912499A (en) * 1992-12-28 1999-06-15 Commissariat A L'energie Atomique Pressure transducer comprising a sealed transducer with a rigid diaphragm
EP0947816A2 (en) * 1998-03-31 1999-10-06 Hitachi, Ltd. Capacitive type pressure sensor
US6240777B1 (en) * 1997-10-07 2001-06-05 Robert Bosch Gmbh Sensor having a membrane

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4612599A (en) * 1983-03-24 1986-09-16 Karlheinz Ziegler Capacitive pressure sensor
DE4041578A1 (en) * 1990-12-22 1992-07-02 Bosch Gmbh Robert SENSOR
DE4231120A1 (en) * 1992-09-17 1994-03-24 Vdo Schindling Pressure sensor for gases or liquids - has carrier plate connected to diaphragm, and electrode surfaces of plate and diaphragm on opposite sides
US5912499A (en) * 1992-12-28 1999-06-15 Commissariat A L'energie Atomique Pressure transducer comprising a sealed transducer with a rigid diaphragm
US5631428A (en) * 1994-11-24 1997-05-20 Siemens Aktiengesellschaft Capacitive semiconductor pressure sensor
US6240777B1 (en) * 1997-10-07 2001-06-05 Robert Bosch Gmbh Sensor having a membrane
EP0947816A2 (en) * 1998-03-31 1999-10-06 Hitachi, Ltd. Capacitive type pressure sensor

Also Published As

Publication number Publication date
WO2002088654A2 (en) 2002-11-07
DE10121394A1 (en) 2002-11-07

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