WO2002080232A3 - Substrate storage pod access device - Google Patents

Substrate storage pod access device Download PDF

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Publication number
WO2002080232A3
WO2002080232A3 PCT/US2002/009741 US0209741W WO02080232A3 WO 2002080232 A3 WO2002080232 A3 WO 2002080232A3 US 0209741 W US0209741 W US 0209741W WO 02080232 A3 WO02080232 A3 WO 02080232A3
Authority
WO
WIPO (PCT)
Prior art keywords
enclosure
access
door
substrate storage
access device
Prior art date
Application number
PCT/US2002/009741
Other languages
French (fr)
Other versions
WO2002080232A2 (en
Inventor
Alex D Todorov
Mila M Genov
Original Assignee
Genmark Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Genmark Automation Inc filed Critical Genmark Automation Inc
Publication of WO2002080232A2 publication Critical patent/WO2002080232A2/en
Publication of WO2002080232A3 publication Critical patent/WO2002080232A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover

Abstract

Access to the interior of a substrate storage pod (22) in which substrates such as semiconductor wafers are stored is gained using an access device (20) provided within a micro environment enclosure (26). The access device (20) has a telescoping enclosure door (21) which, in an extended position, serves to close a port (28) of the enclosure (26) and seal the enclosure (26) from the outside. When access is desired, a translational motion assembly (36) grips the pod door (32) and pulls it into a recess (30) in the enclosure door (21). A transverse motion assembly (63) then pulls the enclosure door (21), along with the pod door (32) in the recess (30), to a contracted position such that the port (28) becomes unobstructed, permitting access to the interior of the substrate storage pod (22) from the enclosure (26). The process is reversed when access is to be terminated.
PCT/US2002/009741 2001-03-29 2002-03-28 Substrate storage pod access device WO2002080232A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US82308301A 2001-03-29 2001-03-29
US09/823,083 2001-03-29

Publications (2)

Publication Number Publication Date
WO2002080232A2 WO2002080232A2 (en) 2002-10-10
WO2002080232A3 true WO2002080232A3 (en) 2002-11-21

Family

ID=25237739

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/009741 WO2002080232A2 (en) 2001-03-29 2002-03-28 Substrate storage pod access device

Country Status (1)

Country Link
WO (1) WO2002080232A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1512956A3 (en) * 2003-09-03 2006-04-26 FEI Company Method of expetiously using a focused-beam apparatus to extract samples for analysis from workpieces

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6042324A (en) * 1999-03-26 2000-03-28 Asm America, Inc. Multi-stage single-drive FOUP door system
US6082951A (en) * 1998-01-23 2000-07-04 Applied Materials, Inc. Wafer cassette load station

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6082951A (en) * 1998-01-23 2000-07-04 Applied Materials, Inc. Wafer cassette load station
US6042324A (en) * 1999-03-26 2000-03-28 Asm America, Inc. Multi-stage single-drive FOUP door system

Also Published As

Publication number Publication date
WO2002080232A2 (en) 2002-10-10

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