WO2002063237A3 - Interferometer - Google Patents

Interferometer Download PDF

Info

Publication number
WO2002063237A3
WO2002063237A3 PCT/GB2002/000469 GB0200469W WO02063237A3 WO 2002063237 A3 WO2002063237 A3 WO 2002063237A3 GB 0200469 W GB0200469 W GB 0200469W WO 02063237 A3 WO02063237 A3 WO 02063237A3
Authority
WO
WIPO (PCT)
Prior art keywords
information
clock frequency
interferometer
interferometer phase
phase information
Prior art date
Application number
PCT/GB2002/000469
Other languages
French (fr)
Other versions
WO2002063237A2 (en
Inventor
David Steven Smith
Simon Richard Hattersley
Original Assignee
Image Automation Ltd
David Steven Smith
Simon Richard Hattersley
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0103065A external-priority patent/GB2372097A/en
Priority claimed from GB0103066A external-priority patent/GB2372098A/en
Application filed by Image Automation Ltd, David Steven Smith, Simon Richard Hattersley filed Critical Image Automation Ltd
Priority to AU2002228216A priority Critical patent/AU2002228216A1/en
Publication of WO2002063237A2 publication Critical patent/WO2002063237A2/en
Publication of WO2002063237A3 publication Critical patent/WO2002063237A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02042—Confocal imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
    • G01P3/366—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light by using diffraction of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/50—Systems of measurement based on relative movement of target
    • G01S17/58—Velocity or trajectory determination systems; Sense-of-movement determination systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Power Engineering (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A method for processing cyclic interferometer phase information into target displacement information comprising sampling the cyclic interferometer phase information at a first clock frequency, and encoding the said information for analysis at a second lower clock frequency.
PCT/GB2002/000469 2001-02-07 2002-02-04 Interferometer WO2002063237A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002228216A AU2002228216A1 (en) 2001-02-07 2002-02-04 Interferometer

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GB0103065A GB2372097A (en) 2001-02-07 2001-02-07 Multiple beam interferometer
GB0103066A GB2372098A (en) 2001-02-07 2001-02-07 Interferometer signal processing
GB0103066.7 2001-02-07
GB0103065.9 2001-02-07

Publications (2)

Publication Number Publication Date
WO2002063237A2 WO2002063237A2 (en) 2002-08-15
WO2002063237A3 true WO2002063237A3 (en) 2002-11-21

Family

ID=26245696

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2002/000469 WO2002063237A2 (en) 2001-02-07 2002-02-04 Interferometer

Country Status (2)

Country Link
AU (1) AU2002228216A1 (en)
WO (1) WO2002063237A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7715015B2 (en) * 2007-10-25 2010-05-11 Optoplan As Adaptive mixing for high slew rates
US8151646B2 (en) 2008-10-24 2012-04-10 Raytheon Company Differential mode laser detection and ranging device
US9829374B2 (en) 2012-10-12 2017-11-28 Advanced Systems & Technologies, Inc. Method and system for conformal imaging vibrometry
US9274135B2 (en) 2012-10-12 2016-03-01 Advanced Systems & Technologies, Inc. Method and system for conformal imaging vibrometry

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3106025A1 (en) * 1981-02-19 1982-09-02 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Method and device for rapid measurement of local velocity components in a velocity field
DE19522272A1 (en) * 1995-06-20 1997-01-09 Bosch Gmbh Robert Laser vibrometer for vibration measurements

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3106025A1 (en) * 1981-02-19 1982-09-02 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Method and device for rapid measurement of local velocity components in a velocity field
DE19522272A1 (en) * 1995-06-20 1997-01-09 Bosch Gmbh Robert Laser vibrometer for vibration measurements

Also Published As

Publication number Publication date
WO2002063237A2 (en) 2002-08-15
AU2002228216A1 (en) 2002-08-19

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