WO2002048747A3 - Guide d'onde comportant un canal dans un substrat optique - Google Patents

Guide d'onde comportant un canal dans un substrat optique Download PDF

Info

Publication number
WO2002048747A3
WO2002048747A3 PCT/FR2001/004014 FR0104014W WO0248747A3 WO 2002048747 A3 WO2002048747 A3 WO 2002048747A3 FR 0104014 W FR0104014 W FR 0104014W WO 0248747 A3 WO0248747 A3 WO 0248747A3
Authority
WO
WIPO (PCT)
Prior art keywords
channel
waveguide
substrate
optical substrate
guide layer
Prior art date
Application number
PCT/FR2001/004014
Other languages
English (en)
Other versions
WO2002048747A8 (fr
WO2002048747A2 (fr
Inventor
Stephane Tisserand
Laurent Roux
Frank Torregrossa
Francois Flory
Ludovic Escoubas
Emmanuel Drouard
Original Assignee
Ion Beam Services
Stephane Tisserand
Laurent Roux
Frank Torregrossa
Francois Flory
Ludovic Escoubas
Emmanuel Drouard
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ion Beam Services, Stephane Tisserand, Laurent Roux, Frank Torregrossa, Francois Flory, Ludovic Escoubas, Emmanuel Drouard filed Critical Ion Beam Services
Priority to EP01270789A priority Critical patent/EP1342112A2/fr
Priority to AU2002219315A priority patent/AU2002219315A1/en
Priority to US10/450,671 priority patent/US7756377B2/en
Priority to CA2431797A priority patent/CA2431797C/fr
Priority to JP2002549999A priority patent/JP2004515815A/ja
Publication of WO2002048747A2 publication Critical patent/WO2002048747A2/fr
Publication of WO2002048747A3 publication Critical patent/WO2002048747A3/fr
Publication of WO2002048747A8 publication Critical patent/WO2002048747A8/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1347—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion implantation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/121—Channel; buried or the like

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

L'invention présente un guide d'onde comportant un canal (12) sur un substrat optique (11), l'indice de réfraction de ce canal étant supérieur à celui du substrat. Ce guide d'onde comporte au moins une couche guidante (13) agencée sur le canal, l'indice de cette couche guidante étant supérieur à celui du substrat. De plus, le canal (12) est intégré dans le substrat (11). Avantageusement, le guide comporte de plus une couche de recouvrement (14) disposée sur la couche guidante (13), l'indice de cette couche de recouvrement étant inférieur à celui de la couche guidante et à celui du canal. L'invention vise également une méthode de fabrication de ce guide d'onde.
PCT/FR2001/004014 2000-12-15 2001-12-14 Guide d'onde comportant un canal dans un substrat optique WO2002048747A2 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP01270789A EP1342112A2 (fr) 2000-12-15 2001-12-14 Guide d'onde comportant un canal dans un substrat optique
AU2002219315A AU2002219315A1 (en) 2000-12-15 2001-12-14 Waveguide comprising a channel on an optical substrate
US10/450,671 US7756377B2 (en) 2000-12-15 2001-12-14 Waveguide comprising a channel on an optical substrate
CA2431797A CA2431797C (fr) 2000-12-15 2001-12-14 Guide d'onde comportant un canal sur un substrat optique
JP2002549999A JP2004515815A (ja) 2000-12-15 2001-12-14 光学基板上にチャンネルを含む導波路

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR00/16549 2000-12-15
FR0016549A FR2818390B1 (fr) 2000-12-15 2000-12-15 Guide d'onde comportant un canal sur un substrat optique

Publications (3)

Publication Number Publication Date
WO2002048747A2 WO2002048747A2 (fr) 2002-06-20
WO2002048747A3 true WO2002048747A3 (fr) 2002-08-22
WO2002048747A8 WO2002048747A8 (fr) 2003-02-06

Family

ID=8857837

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2001/004014 WO2002048747A2 (fr) 2000-12-15 2001-12-14 Guide d'onde comportant un canal dans un substrat optique

Country Status (8)

Country Link
US (1) US7756377B2 (fr)
EP (1) EP1342112A2 (fr)
JP (1) JP2004515815A (fr)
CN (1) CN1486440A (fr)
AU (1) AU2002219315A1 (fr)
CA (1) CA2431797C (fr)
FR (1) FR2818390B1 (fr)
WO (1) WO2002048747A2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2818755B1 (fr) * 2000-12-26 2004-06-11 Ion Beam Services Dispositif optiquement actif comportant un canal sur un substrat optique
FR2857104B1 (fr) * 2003-07-03 2005-11-11 Silios Technologies Filtre en longueur d'onde comportant plusieurs cellules composees du meme materiau
FR2871812B1 (fr) * 2004-06-16 2008-09-05 Ion Beam Services Sa Implanteur ionique fonctionnant en mode plasma pulse
FR2902575B1 (fr) * 2006-06-14 2008-09-05 Ion Beam Services Sa Appareil de caracterisation optique du dopage d'un substrat
GB201202128D0 (en) * 2012-02-08 2012-03-21 Univ Leeds Novel material
WO2021178331A1 (fr) * 2020-03-03 2021-09-10 Psiquantum, Corp. Déphaseur utilisant un sandwich de matériau électro-optique

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4789642A (en) * 1987-03-26 1988-12-06 The United States Of America As Represented By The Secretary Of The Air Force Method for fabricating low loss crystalline silicon waveguides by dielectric implantation
EP0380138A2 (fr) * 1989-01-26 1990-08-01 Nippon Sheet Glass Co. Ltd. Méthode de fabrication d'un guide d'ondes
US5019519A (en) * 1988-03-11 1991-05-28 Kokusai Denshin Denwa Kabushiki Kaisha Method for the manufacture of optical semiconductor device
EP0510883A2 (fr) * 1991-04-25 1992-10-28 AT&T Corp. Dispositif optique plane
US5395793A (en) * 1993-12-23 1995-03-07 National Research Council Of Canada Method of bandgap tuning of semiconductor quantum well structures
GB2306694A (en) * 1995-10-17 1997-05-07 Northern Telecom Ltd Strip-loaded planar optical waveguide

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2152464B1 (fr) * 1971-09-16 1974-05-31 Thomson Csf
US5163118A (en) * 1986-11-10 1992-11-10 The United States Of America As Represented By The Secretary Of The Air Force Lattice mismatched hetrostructure optical waveguide
FR2613085B1 (fr) * 1987-03-25 1989-06-09 Carenco Alain Procede pour augmenter localement les indices de refraction d'un materiau electro-optique utilisable en optique guidee et materiau obtenu par ce procede
JPH06235833A (ja) * 1993-02-09 1994-08-23 Nikon Corp 光導波路
US5911018A (en) * 1994-09-09 1999-06-08 Gemfire Corporation Low loss optical switch with inducible refractive index boundary and spaced output target
WO1998055889A1 (fr) * 1997-06-04 1998-12-10 Rainbow Photonics Ag Guide d'ondes a bande et procede permettant de le produire
FR2818755B1 (fr) * 2000-12-26 2004-06-11 Ion Beam Services Dispositif optiquement actif comportant un canal sur un substrat optique
US20030077060A1 (en) * 2001-10-23 2003-04-24 Datong Chen Planar lightwave circuit optical waveguide having a circular cross section
FR2871812B1 (fr) * 2004-06-16 2008-09-05 Ion Beam Services Sa Implanteur ionique fonctionnant en mode plasma pulse

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4789642A (en) * 1987-03-26 1988-12-06 The United States Of America As Represented By The Secretary Of The Air Force Method for fabricating low loss crystalline silicon waveguides by dielectric implantation
US5019519A (en) * 1988-03-11 1991-05-28 Kokusai Denshin Denwa Kabushiki Kaisha Method for the manufacture of optical semiconductor device
EP0380138A2 (fr) * 1989-01-26 1990-08-01 Nippon Sheet Glass Co. Ltd. Méthode de fabrication d'un guide d'ondes
EP0510883A2 (fr) * 1991-04-25 1992-10-28 AT&T Corp. Dispositif optique plane
US5395793A (en) * 1993-12-23 1995-03-07 National Research Council Of Canada Method of bandgap tuning of semiconductor quantum well structures
GB2306694A (en) * 1995-10-17 1997-05-07 Northern Telecom Ltd Strip-loaded planar optical waveguide

Also Published As

Publication number Publication date
JP2004515815A (ja) 2004-05-27
WO2002048747A8 (fr) 2003-02-06
AU2002219315A1 (en) 2002-06-24
CA2431797A1 (fr) 2002-06-20
CA2431797C (fr) 2011-06-14
US7756377B2 (en) 2010-07-13
FR2818390A1 (fr) 2002-06-21
US20040071428A1 (en) 2004-04-15
CN1486440A (zh) 2004-03-31
WO2002048747A2 (fr) 2002-06-20
FR2818390B1 (fr) 2003-11-07
EP1342112A2 (fr) 2003-09-10

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