WO2002048702A3 - Material sensor with protective layer - Google Patents

Material sensor with protective layer Download PDF

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Publication number
WO2002048702A3
WO2002048702A3 PCT/IB2001/002393 IB0102393W WO0248702A3 WO 2002048702 A3 WO2002048702 A3 WO 2002048702A3 IB 0102393 W IB0102393 W IB 0102393W WO 0248702 A3 WO0248702 A3 WO 0248702A3
Authority
WO
WIPO (PCT)
Prior art keywords
protective layer
material sensor
measuring
layer
concentration
Prior art date
Application number
PCT/IB2001/002393
Other languages
German (de)
French (fr)
Other versions
WO2002048702A2 (en
Inventor
Felix Mayer
Mark Hornung
Rene Hummel
Original Assignee
Sensirion Ag
Felix Mayer
Mark Hornung
Rene Hummel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensirion Ag, Felix Mayer, Mark Hornung, Rene Hummel filed Critical Sensirion Ag
Priority to AU2002220975A priority Critical patent/AU2002220975A1/en
Publication of WO2002048702A2 publication Critical patent/WO2002048702A2/en
Publication of WO2002048702A3 publication Critical patent/WO2002048702A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Abstract

A sensor for measuring the concentration of a material in a gas or a fluid, in particular a humidity sensor, is arranged on a semiconductor substrate (1). A measuring layer (4) is arranged on the substrate (1) the properties of which are dependant upon the concentration to be measured. A protective layer (5) is arranged over the measuring layer, which at least partially comprises a polymer, permeable to the material to be measured, preferably a polyorganosiloxane. An improvement in working life, in particular in corrosive environments may be achieved by means of the protective layer.
PCT/IB2001/002393 2000-12-15 2001-12-10 Material sensor with protective layer WO2002048702A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002220975A AU2002220975A1 (en) 2000-12-15 2001-12-10 Material sensor with protective layer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH24542000 2000-12-15
CH2454/00 2000-12-15

Publications (2)

Publication Number Publication Date
WO2002048702A2 WO2002048702A2 (en) 2002-06-20
WO2002048702A3 true WO2002048702A3 (en) 2002-10-17

Family

ID=4569357

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2001/002393 WO2002048702A2 (en) 2000-12-15 2001-12-10 Material sensor with protective layer

Country Status (2)

Country Link
AU (1) AU2002220975A1 (en)
WO (1) WO2002048702A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8110906B2 (en) 2007-01-23 2012-02-07 Infineon Technologies Ag Semiconductor device including isolation layer
US7923823B2 (en) 2007-01-23 2011-04-12 Infineon Technologies Ag Semiconductor device with parylene coating
DE102009004393A1 (en) * 2009-01-08 2010-11-11 Eads Deutschland Gmbh Accumulating humidity sensor
EP2287596B1 (en) * 2009-08-11 2014-03-19 Sensirion AG Sensor with glob-top and method for manufacturing the same
DE102013204663A1 (en) * 2013-03-18 2014-09-18 Robert Bosch Gmbh Humidity sensor for determining a humidity of a measuring medium in an environment of the humidity sensor and method for protecting a humidity sensor
FR3041758B1 (en) * 2015-09-29 2017-09-15 Commissariat Energie Atomique DEVICE AND METHOD FOR QUANTIFYING A GASEOUS ENTITY FLOW WITHIN A POROUS MEDIUM

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4473813A (en) * 1981-09-28 1984-09-25 Hitachi, Ltd. Humidity sensor with improved protective layering
GB2178539A (en) * 1985-06-26 1987-02-11 Eps Group Limited Improvements in or relating to a humidity sensor
EP0259012A1 (en) * 1986-08-28 1988-03-09 Nippon Mining Company Limited Electronic hygrometer and electronic thermohygrometer
EP0798554A2 (en) * 1996-03-25 1997-10-01 Motorola, Inc. Sensor and method of fabrication

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4473813A (en) * 1981-09-28 1984-09-25 Hitachi, Ltd. Humidity sensor with improved protective layering
GB2178539A (en) * 1985-06-26 1987-02-11 Eps Group Limited Improvements in or relating to a humidity sensor
EP0259012A1 (en) * 1986-08-28 1988-03-09 Nippon Mining Company Limited Electronic hygrometer and electronic thermohygrometer
EP0798554A2 (en) * 1996-03-25 1997-10-01 Motorola, Inc. Sensor and method of fabrication

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
BALTES H ET AL: "THE ELECTRONIC NOSE IN LILLIPUT", IEEE SPECTRUM, IEEE INC. NEW YORK, US, vol. 35, no. 9, September 1998 (1998-09-01), pages 35 - 38, XP000848942, ISSN: 0018-9235 *

Also Published As

Publication number Publication date
AU2002220975A1 (en) 2002-06-24
WO2002048702A2 (en) 2002-06-20

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