WO2002042756A3 - Thin film ppb oxygen sensor - Google Patents

Thin film ppb oxygen sensor Download PDF

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Publication number
WO2002042756A3
WO2002042756A3 PCT/US2001/050187 US0150187W WO0242756A3 WO 2002042756 A3 WO2002042756 A3 WO 2002042756A3 US 0150187 W US0150187 W US 0150187W WO 0242756 A3 WO0242756 A3 WO 0242756A3
Authority
WO
WIPO (PCT)
Prior art keywords
electrodes
heater
oxygen
sensor
oxygen sensor
Prior art date
Application number
PCT/US2001/050187
Other languages
French (fr)
Other versions
WO2002042756A2 (en
Inventor
Yuzef Gokhfeld
Robert H Hammond
Yu Shen
Gary Parece
Original Assignee
Panametrics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panametrics filed Critical Panametrics
Priority to EP01985129A priority Critical patent/EP1340067B1/en
Priority to JP2002544645A priority patent/JP4265912B2/en
Publication of WO2002042756A2 publication Critical patent/WO2002042756A2/en
Publication of WO2002042756A3 publication Critical patent/WO2002042756A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4075—Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/304—Gas permeable electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)

Abstract

An oxygen sensor has a sensor body formed of a crystalline material such as zirconia with first and second electrodes disposed on a single surface thereof. The electrodes are arranged to induce irionic oxygen transport in the body along current paths in the c rystalline material at the electrode surface. The electrodes may be interdigitated or juxtaposed porous electrodes that define an exposed surface pattern of ionic conduction for sensing, and the electrodes are preferably poisoned to inhibit cross sensitivity to reactive components, such as hydrogen, that may be present in the environment. The electrodes may effect electrode-limited superionic conduction in a thin slice of single crystal material, or a polycrystalline yttria-stabilized zirconia film sensing body, and operate at a relatively low temperature in the range of 250-400 °C, preferably about 300-350 °C, with negligible leakage current or cross sensitivity, allowing reliable measurement of oxygen concentrations in the ppb range. The oxygen sensor may be fabricated together with a heater such as a resistive heating element deposited on the back face of the sensor body, or the sensor body may be attached to a heater chip. One such heater chip includes both a heating electrode, and a resistive thermal device that may, for example, provide a feedback or control signal for controlling heating temperature in the desired range. The sensors may be lithographically formed in arrays with suitable lead pads, then scored and separated, and mounted on heater chips, providing a self-contained integrated unit of versatile application.
PCT/US2001/050187 2000-11-22 2001-11-07 Thin film ppb oxygen sensor WO2002042756A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP01985129A EP1340067B1 (en) 2000-11-22 2001-11-07 Thin film ppb oxygen sensor
JP2002544645A JP4265912B2 (en) 2000-11-22 2001-11-07 Thin film ppb oxygen sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/721,376 2000-11-22
US09/721,376 US6557393B1 (en) 2000-11-22 2000-11-22 Thin film ppb oxygen sensor

Publications (2)

Publication Number Publication Date
WO2002042756A2 WO2002042756A2 (en) 2002-05-30
WO2002042756A3 true WO2002042756A3 (en) 2003-02-27

Family

ID=24897723

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/050187 WO2002042756A2 (en) 2000-11-22 2001-11-07 Thin film ppb oxygen sensor

Country Status (4)

Country Link
US (1) US6557393B1 (en)
EP (1) EP1340067B1 (en)
JP (1) JP4265912B2 (en)
WO (1) WO2002042756A2 (en)

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Publication number Priority date Publication date Assignee Title
WO2004009390A2 (en) * 2002-07-19 2004-01-29 Board Of Regents, The University Of Texas System Time-resolved exhaust emissions sensor
US8658013B2 (en) * 2005-12-01 2014-02-25 Delphi Technologies, Inc. Sensor and sensing method
US7864322B2 (en) * 2006-03-23 2011-01-04 The Research Foundation Of State University Of New York Optical methods and systems for detecting a constituent in a gas containing oxygen in harsh environments
DE102006062053A1 (en) * 2006-12-29 2008-07-03 Robert Bosch Gmbh Sensor unit manufacturing method for determining physical characteristic i.e. oxygen concentration, of gas mixture i.e. exhaust gas, involves separating areas of output electrode such that two electrodes are formed from areas, respectively
JP2010525367A (en) * 2007-04-27 2010-07-22 セラマテック・インク Particulate matter sensor
US20090056416A1 (en) * 2007-08-30 2009-03-05 Nair Balakrishnan G Ceramic Particulate Matter Sensor With Low Electrical Leakage
JP5339754B2 (en) * 2008-03-19 2013-11-13 新コスモス電機株式会社 Oxygen gas concentration measurement method
US7998417B2 (en) * 2008-08-22 2011-08-16 Board Of Regents, University Of Texas System Particulate matter sensor with a heater
US7891232B2 (en) * 2008-11-21 2011-02-22 Board Of Regents, The University Of Texas System Rigid particulate matter sensor
US8161796B2 (en) * 2009-04-16 2012-04-24 Emisense Technologies Llc Particulate matter sensor with an insulating air gap
WO2011153441A2 (en) * 2010-06-04 2011-12-08 Board Of Regents Of The University Of Texas System Highly epitaxial thin films for high temperature/highly sensitive chemical sensors for critical and reducing environment
US8210716B2 (en) * 2010-08-27 2012-07-03 Quarkstar Llc Solid state bidirectional light sheet for general illumination
US8338199B2 (en) * 2010-08-27 2012-12-25 Quarkstar Llc Solid state light sheet for general illumination
US8461602B2 (en) 2010-08-27 2013-06-11 Quarkstar Llc Solid state light sheet using thin LEDs for general illumination
US8198109B2 (en) * 2010-08-27 2012-06-12 Quarkstar Llc Manufacturing methods for solid state light sheet or strip with LEDs connected in series for general illumination
US8192051B2 (en) * 2010-11-01 2012-06-05 Quarkstar Llc Bidirectional LED light sheet
US8410726B2 (en) * 2011-02-22 2013-04-02 Quarkstar Llc Solid state lamp using modular light emitting elements
US8314566B2 (en) 2011-02-22 2012-11-20 Quarkstar Llc Solid state lamp using light emitting strips
DE102014217402A1 (en) * 2014-09-01 2016-03-03 Robert Bosch Gmbh Method and device for diagnosing the function of an exhaust gas sensor
FR3035220A1 (en) * 2015-04-20 2016-10-21 Commissariat Energie Atomique "ELECTRONIC DEVICE FOR MEASURING AT LEAST ONE ELECTRICAL CHARACTERISTIC OF AN OBJECT"
US11480542B2 (en) 2019-11-26 2022-10-25 Delphi Technologies Ip Limited Particulate matter sensor and electrode pattern thereof

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739341A (en) * 1980-08-22 1982-03-04 Toyota Motor Corp Oxygen sensor
JPS57137848A (en) * 1981-02-19 1982-08-25 Nissan Motor Co Ltd Oxygen concentration measuring element
US4947125A (en) * 1985-10-01 1990-08-07 Honda Motor Co., Ltd. Method and device for determining oxygen in gases
US4946577A (en) * 1988-10-04 1990-08-07 Ngk Insulators, Ltd. Oxygen sensor
JPH04115153A (en) * 1990-09-06 1992-04-16 Toto Ltd Oxygen gas sensor
RU2022264C1 (en) * 1992-03-16 1994-10-30 Институт высокотемпературной электрохимии Уральского отделения РАН Material for electrodes of electrochemical sensors of oxygen
RU2053506C1 (en) * 1993-06-10 1996-01-27 Институт химической физики РАН в п.Черноголовка Solid electrolyte sensor for gas analysis
EP0849591A1 (en) * 1996-12-20 1998-06-24 Ngk Insulators, Ltd. Gas sensor
EP0959348A2 (en) * 1998-05-18 1999-11-24 NGK Spark Plug Co. Ltd. Sensor element and gas sensor

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5334077B2 (en) * 1973-08-29 1978-09-19
JPS60236059A (en) * 1984-05-09 1985-11-22 Hitachi Chem Co Ltd Sensor for combustion safety device
JPS62198748A (en) * 1986-02-26 1987-09-02 Sharp Corp Oxygen sensor
JP2815125B2 (en) * 1991-07-31 1998-10-27 新コスモス電機株式会社 Contact combustion type gas detection element
US5344549A (en) * 1991-10-11 1994-09-06 The United States Of America As Represented By The United States Department Of Energy Oxygen partial pressure sensor
SE512866C2 (en) * 1995-02-21 2000-05-29 Volvo Ab Device for analyzing exhaust gases
JP3648063B2 (en) * 1997-09-22 2005-05-18 日本特殊陶業株式会社 Gas sensor, gas sensor system using the same, and method of manufacturing gas sensor

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739341A (en) * 1980-08-22 1982-03-04 Toyota Motor Corp Oxygen sensor
JPS57137848A (en) * 1981-02-19 1982-08-25 Nissan Motor Co Ltd Oxygen concentration measuring element
US4947125A (en) * 1985-10-01 1990-08-07 Honda Motor Co., Ltd. Method and device for determining oxygen in gases
US4946577A (en) * 1988-10-04 1990-08-07 Ngk Insulators, Ltd. Oxygen sensor
JPH04115153A (en) * 1990-09-06 1992-04-16 Toto Ltd Oxygen gas sensor
RU2022264C1 (en) * 1992-03-16 1994-10-30 Институт высокотемпературной электрохимии Уральского отделения РАН Material for electrodes of electrochemical sensors of oxygen
RU2053506C1 (en) * 1993-06-10 1996-01-27 Институт химической физики РАН в п.Черноголовка Solid electrolyte sensor for gas analysis
EP0849591A1 (en) * 1996-12-20 1998-06-24 Ngk Insulators, Ltd. Gas sensor
EP0959348A2 (en) * 1998-05-18 1999-11-24 NGK Spark Plug Co. Ltd. Sensor element and gas sensor

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
DATABASE WPI Section Ch Week 199525, Derwent World Patents Index; Class E36, AN 1995-192562, XP002216618 *
DATABASE WPI Section Ch Week 199644, Derwent World Patents Index; Class J04, AN 1996-441716, XP002216619 *
PATENT ABSTRACTS OF JAPAN vol. 006, no. 108 (P - 123) 18 June 1982 (1982-06-18) *
PATENT ABSTRACTS OF JAPAN vol. 006, no. 237 (P - 157) 25 November 1982 (1982-11-25) *
PATENT ABSTRACTS OF JAPAN vol. 016, no. 368 (P - 1398) 7 August 1992 (1992-08-07) *

Also Published As

Publication number Publication date
EP1340067A2 (en) 2003-09-03
JP2005500509A (en) 2005-01-06
WO2002042756A2 (en) 2002-05-30
JP4265912B2 (en) 2009-05-20
EP1340067B1 (en) 2011-08-31
US6557393B1 (en) 2003-05-06

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