JPH04115153A - Oxygen gas sensor - Google Patents
Oxygen gas sensorInfo
- Publication number
- JPH04115153A JPH04115153A JP2236241A JP23624190A JPH04115153A JP H04115153 A JPH04115153 A JP H04115153A JP 2236241 A JP2236241 A JP 2236241A JP 23624190 A JP23624190 A JP 23624190A JP H04115153 A JPH04115153 A JP H04115153A
- Authority
- JP
- Japan
- Prior art keywords
- oxygen gas
- electrode
- gas
- solid electrolyte
- oxygen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 title claims abstract description 25
- 229910001882 dioxygen Inorganic materials 0.000 title claims abstract description 25
- 239000007789 gas Substances 0.000 claims abstract description 12
- 239000007784 solid electrolyte Substances 0.000 claims abstract description 11
- 239000000463 material Substances 0.000 claims abstract description 9
- 229910052709 silver Inorganic materials 0.000 claims abstract description 8
- 229910052718 tin Inorganic materials 0.000 claims abstract description 6
- BYMUNNMMXKDFEZ-UHFFFAOYSA-K trifluorolanthanum Chemical compound F[La](F)F BYMUNNMMXKDFEZ-UHFFFAOYSA-K 0.000 claims abstract description 6
- 238000001514 detection method Methods 0.000 abstract description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052760 oxygen Inorganic materials 0.000 abstract description 7
- 239000001301 oxygen Substances 0.000 abstract description 7
- 229910052737 gold Inorganic materials 0.000 abstract description 6
- 229910002319 LaF3 Inorganic materials 0.000 abstract description 4
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- 239000013078 crystal Substances 0.000 abstract description 2
- 239000010409 thin film Substances 0.000 abstract description 2
- 230000008020 evaporation Effects 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 abstract 2
- 238000010276 construction Methods 0.000 abstract 1
- 239000003792 electrolyte Substances 0.000 abstract 1
- 239000010931 gold Substances 0.000 description 10
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 9
- 229910052697 platinum Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- -1 AuXAg or Sn Chemical compound 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は酸素ガスを検知するセンサに関する。[Detailed description of the invention] (Industrial application field) The present invention relates to a sensor for detecting oxygen gas.
（従来の技術）
酸素ガスを検知するセンサとして、第４図に示すような
積層型センサが知られている。この積層型センサは固体
電解質１１の一面側にエポキシ樹脂１２によってガラス
チューブ１３の一端を当て、このガラスチューブ１３に
て固体電解質１１の一面側に形成した参照電極１４を囲
んで被検ガス雰囲気から遮断し、更に固体電解質１１の
他面側に検知電極１５を形成し、これら参照電極１４及
び検知電極１５にｐｔ線１６を接続している。(Prior Art) A laminated sensor as shown in FIG. 4 is known as a sensor for detecting oxygen gas. In this stacked sensor, one end of a glass tube 13 is applied to one side of a solid electrolyte 11 using an epoxy resin 12, and the glass tube 13 surrounds a reference electrode 14 formed on one side of the solid electrolyte 11 to prevent the gas from being detected from the atmosphere. Further, a sensing electrode 15 is formed on the other side of the solid electrolyte 11, and a PT wire 16 is connected to the reference electrode 14 and the sensing electrode 15.
（発明が解決しようとする課題）
上述した積層型センサにあっては、参照電極が被検ガス
から遮断される構造としているため、参照電極へ参照ガ
スを導入するか、固体参照電極を用いなければならず、
センサ自体の構造の簡略化の妨げになっている。(Problems to be Solved by the Invention) In the above-mentioned stacked sensor, the reference electrode has a structure that is shielded from the sample gas, so it is necessary to introduce a reference gas into the reference electrode or use a solid reference electrode. Not necessarily,
This hinders the simplification of the structure of the sensor itself.
（課題を解決するための手段）
上記課題を解決すべく本発明は、固体電解質の表面で且
つ酸素ガスを含んだ被検ガスに晒される部分に酸素ガス
に対して不活性な材料からなる対極を検知電極と離して
形成した。(Means for Solving the Problems) In order to solve the above problems, the present invention provides a counter electrode made of a material inert to oxygen gas on the surface of a solid electrolyte and at a portion exposed to a test gas containing oxygen gas. was formed separately from the sensing electrode.
（作用）
ＡｕＸＡｇ又はＳｎ等の酸素ガスに対して不活性な材料
で対極を構成すれば、検知ガス中の酸素分圧に比例して
起電力が増加する。(Function) If the counter electrode is made of a material that is inert to oxygen gas, such as AuXAg or Sn, the electromotive force will increase in proportion to the oxygen partial pressure in the detection gas.
（実施例） 以下に本発明の実施例を添付図面に基いて説明する。(Example) Embodiments of the present invention will be described below with reference to the accompanying drawings.
第１図は本発明に係る酸素ガスセンサとしての平面型セ
ンサの断面図であり、平面型センサ１は固体電解質２の
一面側に検知電極３及び対極４を離間して形成し、これ
ら検知電極３及び対極４にＰｔ線５．５を接続している
。FIG. 1 is a sectional view of a planar sensor as an oxygen gas sensor according to the present invention. The planar sensor 1 has a sensing electrode 3 and a counter electrode 4 spaced apart from each other on one side of a solid electrolyte 2. A Pt wire 5.5 is connected to the counter electrode 4.
ここで、固体電解質２としてはＬａＦ３（フッ化ランタ
ン）の単結晶を用い、検知電極３としてはＰｔ（プラチ
ナ）を用い、対極４としてはＡｕ（金）、Ａｇ（銀）又
はＳｎ（スズ）のように常温付近で酸素ガスに対して不
活性な材料を用いる。Here, a single crystal of LaF3 (lanthanum fluoride) is used as the solid electrolyte 2, Pt (platinum) is used as the detection electrode 3, and Au (gold), Ag (silver) or Sn (tin) is used as the counter electrode 4. Use a material that is inert to oxygen gas at around room temperature, such as.
第２図は従来の積層型センサの検知電極をＰｔとＡｕで
構成した場合の１００℃と２５℃における酸素分圧（対
数）と起電力との関係を示すグラフであり、このグラフ
から明らかなように、１００℃では検知電極としてＰｔ
、Ａｕのいずれを用いても検知ガス中の酸素分圧に比例
して起電力が増加するが、２５℃においてはＡｕを検知
電極の材料とした場合には酸素分圧変化に対する起電力
変化は殆んと見られず、Ａｕは常温付近では酸素ガスに
対して不活性といえる。従って、常温付近であればＡｕ
を検知電極ではなく対極として用いればこの酸素ガスセ
ンサとしては対極を被検ガスから遮断する必要はなくな
る。Figure 2 is a graph showing the relationship between oxygen partial pressure (logarithm) and electromotive force at 100°C and 25°C when the detection electrode of a conventional multilayer sensor is composed of Pt and Au. As shown, at 100°C, Pt is used as the sensing electrode.
or Au, the electromotive force increases in proportion to the oxygen partial pressure in the sensing gas, but at 25°C, when Au is used as the material for the sensing electrode, the electromotive force changes with respect to the oxygen partial pressure change. It is hardly seen, and it can be said that Au is inert to oxygen gas at around room temperature. Therefore, if the temperature is around room temperature, Au
If this oxygen gas sensor is used as a counter electrode instead of a sensing electrode, there is no need to isolate the counter electrode from the gas to be detected.
更にＡｇ及びＳｎについても同様の実験を行なった結果
、Ａｕと同様に常温付近では酸素ガスに対して不活性で
あった。したがって、Ａｇ及びＳｎを平面型センサ１の
対極４の材料として用いてもよい。Further, similar experiments were conducted with respect to Ag and Sn, and the results showed that, like Au, they were inert to oxygen gas at around room temperature. Therefore, Ag and Sn may be used as the material for the counter electrode 4 of the flat sensor 1.
また対極４はＡｕ、Ａｇ又はＳｎを蒸着またはスパッタ
リングすることで形成し、検知電極３は例えばＬａＦ３
の表面にＰｔの薄膜を蒸着またはスパッタリングするこ
とで形成する。Further, the counter electrode 4 is formed by vapor deposition or sputtering of Au, Ag, or Sn, and the sensing electrode 3 is formed by, for example, LaF3.
A thin film of Pt is formed by vapor deposition or sputtering on the surface of the Pt.
（効果）
以上に説明したように本発明によれば、ＬａＦ３（フッ
化ランタン）からなる固体電解質の表面で且つ酸素ガス
を含んだ被検ガスに晒される部分に、Ａｕ、Ａｇ又はＳ
ｎ等の酸素ガスに対して不活性な材料からなる対極を形
成したので、検知ガス中の酸素分圧に比例して起電力が
増加し、したがって十分に酸素ガスセンサとして使用す
ることができる。(Effects) As explained above, according to the present invention, Au, Ag, or S
Since the counter electrode is made of a material that is inert to oxygen gas such as n, the electromotive force increases in proportion to the partial pressure of oxygen in the detection gas, so that it can be used satisfactorily as an oxygen gas sensor.
しかも、従来のごとく参照電極を被検ガスから遮断する
構造にする必要がないので構造が簡略になり、センサ自
体の小型化を達成できる。Moreover, since there is no need to create a structure in which the reference electrode is isolated from the sample gas as in the conventional case, the structure is simplified and the sensor itself can be miniaturized.
第１図は本発明に係る酸素ガスセンサの断面図、第２図
は積層型酸素ガスセンサを用いて温度と酸素ガスに対す
る活性度との関係を示すグラフ、第３図は本発明に係る
酸素ガスセンサを用いた場合の酸素分圧と起電力との関
係を示すグラフ、第４図は従来の酸素ガスセンサの断面
図である。
尚、図面中１は本発明に係る平面型センサ、２は固体電
解質、３は検知電極、４は対極、５はＰｔ線である。
第１図FIG. 1 is a cross-sectional view of the oxygen gas sensor according to the present invention, FIG. 2 is a graph showing the relationship between temperature and activity for oxygen gas using a stacked oxygen gas sensor, and FIG. 3 is a graph showing the oxygen gas sensor according to the present invention. FIG. 4 is a graph showing the relationship between oxygen partial pressure and electromotive force when used, and is a sectional view of a conventional oxygen gas sensor. In the drawings, 1 is a flat sensor according to the present invention, 2 is a solid electrolyte, 3 is a detection electrode, 4 is a counter electrode, and 5 is a Pt wire. Figure 1
Claims (2)
質の表面に検知電極を形成し、この検知電極と離れた固
体電解質の表面で且つ被検ガスに晒される部分に酸素ガ
スに対して不活性な材料からなる対極を形成したことを
特徴とする酸素ガスセンサ。(1) A sensing electrode is formed on the surface of a solid electrolyte made of LaF_3 (lanthanum fluoride), and a portion of the solid electrolyte that is remote from the sensing electrode and exposed to the test gas is inert to oxygen gas. An oxygen gas sensor characterized by forming a counter electrode made of a material.
Ａｇ又はＳｎから構成されることを特徴とする請求項（
１）に記載の酸素ガスセンサ。(2) The sensing electrode is made of Pt, and the counter electrode is made of Au.
Claim characterized in that it is composed of Ag or Sn (
The oxygen gas sensor described in 1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2236241A JP2946697B2 (en) | 1990-09-06 | 1990-09-06 | Oxygen gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2236241A JP2946697B2 (en) | 1990-09-06 | 1990-09-06 | Oxygen gas sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04115153A true JPH04115153A (en) | 1992-04-16 |
| JP2946697B2 JP2946697B2 (en) | 1999-09-06 |
Family
ID=16997873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2236241A Expired - Lifetime JP2946697B2 (en) | 1990-09-06 | 1990-09-06 | Oxygen gas sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2946697B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0677741A2 (en) * | 1994-04-12 | 1995-10-18 | Matsushita Electric Industrial Co., Ltd. | Oxygen sensor |
| WO2002042756A3 (en) * | 2000-11-22 | 2003-02-27 | Panametrics | Thin film ppb oxygen sensor |
| JP2008043943A (en) * | 2006-07-21 | 2008-02-28 | Nippon Soken Inc | Catalyst material, electrode for gas sensor including the same, gas sensor and manufacturing method for them |
-
1990
- 1990-09-06 JP JP2236241A patent/JP2946697B2/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0677741A2 (en) * | 1994-04-12 | 1995-10-18 | Matsushita Electric Industrial Co., Ltd. | Oxygen sensor |
| EP0677741A3 (en) * | 1994-04-12 | 1996-05-01 | Matsushita Electric Ind Co Ltd | Oxygen sensor. |
| WO2002042756A3 (en) * | 2000-11-22 | 2003-02-27 | Panametrics | Thin film ppb oxygen sensor |
| US6557393B1 (en) | 2000-11-22 | 2003-05-06 | Panametrics, Inc. | Thin film ppb oxygen sensor |
| JP2008043943A (en) * | 2006-07-21 | 2008-02-28 | Nippon Soken Inc | Catalyst material, electrode for gas sensor including the same, gas sensor and manufacturing method for them |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2946697B2 (en) | 1999-09-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6222376B1 (en) | Capacitive moisture detector and method of making the same | |
| JPS60239657A (en) | Moisture-sensitive element and manufacture thereof | |
| US4816888A (en) | Sensor | |
| US4322968A (en) | Temperature compensated plug-in type oxygen detector for exhaust gas | |
| JPH04115153A (en) | Oxygen gas sensor | |
| US4280115A (en) | Humidity sensor | |
| US4433320A (en) | Dew sensor | |
| JPH07280767A (en) | Humidity sensor and humidity measuring method | |
| JPH02165034A (en) | Hydrogen gas sensor | |
| JPS6122256B2 (en) | ||
| JPS60192247A (en) | Detector | |
| JPS63263426A (en) | Sensor element | |
| JP3677921B2 (en) | Oxygen concentration detection element | |
| JPS5810642A (en) | Dew condensation sensor | |
| JPS6073448A (en) | Atmosphere sensor | |
| JP2937497B2 (en) | Humidity sensor | |
| JPH07198651A (en) | Thin film type gas sensor | |
| JP2893878B2 (en) | Gas sensor | |
| JPH03140859A (en) | Oxygen sensor | |
| JPH04115154A (en) | Hydrogen gas sensor | |
| JPH06265516A (en) | Oxygen/humidity sensor | |
| JPS6117945A (en) | Humidity element | |
| JP5256423B2 (en) | Pressure sensor element and pressure sensor | |
| JPS6122257B2 (en) | ||
| JPH0110590Y2 (en) |