WO2002036301A3 - Installation docking pedestal for_wafer fabrication equipment - Google Patents

Installation docking pedestal for_wafer fabrication equipment Download PDF

Info

Publication number
WO2002036301A3
WO2002036301A3 PCT/US2001/045427 US0145427W WO0236301A3 WO 2002036301 A3 WO2002036301 A3 WO 2002036301A3 US 0145427 W US0145427 W US 0145427W WO 0236301 A3 WO0236301 A3 WO 0236301A3
Authority
WO
WIPO (PCT)
Prior art keywords
support
manufacturing equipment
frame
pedestal
wafer fabrication
Prior art date
Application number
PCT/US2001/045427
Other languages
French (fr)
Other versions
WO2002036301A2 (en
Inventor
Ronald Schauer
John Charles Davies
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of WO2002036301A2 publication Critical patent/WO2002036301A2/en
Publication of WO2002036301A3 publication Critical patent/WO2002036301A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/01—Frames, beds, pillars or like members; Arrangement of ways
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention provides support apparatus for manufacturing equipment comprising a support pedestal having (1) a plurality of support legs, including at least one support leg aligned to each one of a plurality of load-bearing mounting feet found on the bottom of the manufacturing equipment to be supported by the pedestal, and a frame disposed on the plurality of support legs; and/or (2) a frame with an outline which substantially duplicates the bottom outline of the manufacturing equipment to be supported, and a plurality of support legs coupled to the frame. The support apparatus additionally may comprise at least one facilities connection locator fixedly mounted to the support frame so as to provide facilities connection locations for aligning facilities supply lines to the manufacturing equipment.
PCT/US2001/045427 2000-11-03 2001-10-31 Installation docking pedestal for_wafer fabrication equipment WO2002036301A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US70643500A 2000-11-03 2000-11-03
US09/706,435 2000-11-03

Publications (2)

Publication Number Publication Date
WO2002036301A2 WO2002036301A2 (en) 2002-05-10
WO2002036301A3 true WO2002036301A3 (en) 2003-02-13

Family

ID=24837550

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/045427 WO2002036301A2 (en) 2000-11-03 2001-10-31 Installation docking pedestal for_wafer fabrication equipment

Country Status (2)

Country Link
US (1) US20020069610A1 (en)
WO (1) WO2002036301A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003214376A1 (en) * 2002-03-01 2003-09-16 Trikon Technologies Limited Pedestal for mounting semiconductor fabrication equipments
US7506593B2 (en) 2002-10-23 2009-03-24 Kinetics Systems, Inc. Microfabrication tool pedestal and method of use
MX2011003007A (en) * 2008-09-18 2011-06-27 Ekco Patent & Ip Holdings Pty Ltd Unitised building system.
JP5667822B2 (en) * 2010-09-21 2015-02-12 株式会社日立製作所 Parts mounting structure in the windmill tower
EP3183741A4 (en) * 2014-08-19 2018-05-09 Intel Corporation Consumable interface plate for tool install
TW202345262A (en) * 2022-03-23 2023-11-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Semiconductor processing system and method of assembly

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4510980A (en) * 1983-11-16 1985-04-16 Shopsmith, Inc. Table assembly for a multipurpose tool
WO2000054930A2 (en) * 1999-03-15 2000-09-21 Boehringer Werkzeugmaschinen Gmbh Machine tool

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4573302A (en) * 1985-03-11 1986-03-04 Caretto Robert J Method of constructing houses
US5875601A (en) * 1998-07-21 1999-03-02 International Business Machines Corporation Kit of anchoring mechanism parts to protect against earthquake-induced motions in electrical equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4510980A (en) * 1983-11-16 1985-04-16 Shopsmith, Inc. Table assembly for a multipurpose tool
WO2000054930A2 (en) * 1999-03-15 2000-09-21 Boehringer Werkzeugmaschinen Gmbh Machine tool

Also Published As

Publication number Publication date
US20020069610A1 (en) 2002-06-13
WO2002036301A2 (en) 2002-05-10

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Legal Events

Date Code Title Description
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

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