WO2002025327A3 - Manufacturing a fiber bragg grating and a mask used in the fabrication of a fiber bragg grating - Google Patents

Manufacturing a fiber bragg grating and a mask used in the fabrication of a fiber bragg grating Download PDF

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Publication number
WO2002025327A3
WO2002025327A3 PCT/US2001/029178 US0129178W WO0225327A3 WO 2002025327 A3 WO2002025327 A3 WO 2002025327A3 US 0129178 W US0129178 W US 0129178W WO 0225327 A3 WO0225327 A3 WO 0225327A3
Authority
WO
WIPO (PCT)
Prior art keywords
fiber bragg
bragg grating
fabrication
stitching errors
mask used
Prior art date
Application number
PCT/US2001/029178
Other languages
French (fr)
Other versions
WO2002025327A2 (en
Inventor
Jason Zweiback
Joshua E Rothenberg
Jan Popelek
Roger F Caldwell
Original Assignee
Phaeton Comm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/757,386 external-priority patent/US6707967B2/en
Priority claimed from US09/957,443 external-priority patent/US6833954B2/en
Application filed by Phaeton Comm filed Critical Phaeton Comm
Priority to AU2001292764A priority Critical patent/AU2001292764A1/en
Priority to CA002422460A priority patent/CA2422460A1/en
Publication of WO2002025327A2 publication Critical patent/WO2002025327A2/en
Publication of WO2002025327A3 publication Critical patent/WO2002025327A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
    • G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
    • G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
    • G02B6/02133—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference
    • G02B6/02138—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference based on illuminating a phase mask

Abstract

The invention reduces the effects of stitching errors from re-scaling or re-positioning in the fabrication of fiber Bragg gratings or the mask used in such fabrication. A first embodiment of the invention preferably uses characteristics of stitching errors to compensate for the stitching errors themselves. By increasing the number of stitching errors, errors caused by the stitching errors can be reduced. A second embodiment uses continuous writing of the desired pattern, wherein the desired pattern is snapped to a grid that can be written by the fabrication equipment. Using continuous writing eliminates stitching errors in the resulting gratings.
PCT/US2001/029178 2000-09-20 2001-09-19 Manufacturing a fiber bragg grating and a mask used in the fabrication of a fiber bragg grating WO2002025327A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2001292764A AU2001292764A1 (en) 2000-09-20 2001-09-19 Manufacturing a fiber bragg grating and a mask used in the fabrication of a fiber bragg grating
CA002422460A CA2422460A1 (en) 2000-09-20 2001-09-19 Manufacturing a fiber bragg grating and a mask used in the fabrication of a fiber bragg grating

Applications Claiming Priority (12)

Application Number Priority Date Filing Date Title
US23431800P 2000-09-20 2000-09-20
US60/234,318 2000-09-20
US23587300P 2000-09-27 2000-09-27
US60/235,873 2000-09-27
US24159400P 2000-10-18 2000-10-18
US60/241,594 2000-10-18
US24342300P 2000-10-25 2000-10-25
US60/243,423 2000-10-25
US09/757,386 US6707967B2 (en) 2000-09-20 2001-01-08 Efficient sampled bragg gratings for WDM applications
US09/757,386 2001-01-08
US09/957,443 2001-09-18
US09/957,443 US6833954B2 (en) 2000-09-20 2001-09-18 Lithographic method for manufacturing a mask used in the fabrication of a fiber Bragg grating

Publications (2)

Publication Number Publication Date
WO2002025327A2 WO2002025327A2 (en) 2002-03-28
WO2002025327A3 true WO2002025327A3 (en) 2004-03-25

Family

ID=27559248

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/029178 WO2002025327A2 (en) 2000-09-20 2001-09-19 Manufacturing a fiber bragg grating and a mask used in the fabrication of a fiber bragg grating

Country Status (3)

Country Link
AU (1) AU2001292764A1 (en)
CA (1) CA2422460A1 (en)
WO (1) WO2002025327A2 (en)

Non-Patent Citations (8)

* Cited by examiner, † Cited by third party
Title
ALBERT J ET AL: "MINIMIZATION OF PHASE ERROR IN LONG FIBER BRAGG GRATING PHASE MASKSMADE USING ELECTRON BEAM LITHOGRAPHY", IEEE PHOTONICS TECHNOLOGY LETTERS, IEEE INC. NEW YORK, US, vol. 8, no. 10, 1 October 1996 (1996-10-01), pages 1334 - 1336, XP000628950, ISSN: 1041-1135 *
CHAKARIAN V ET AL: "System architecture choices for an advanced mask writer (100-130 nm)", PROCEEDINGS OF THE SPIE, vol. 3873, 15 September 1999 (1999-09-15) - 17 September 1999 (1999-09-17), pages 1 - 15, XP002245923 *
ERIKSSON U ET AL: "DESIGN OF FIBER GRATINGS FOR TOTAL DISPERSION COMPENSATION", OPTICS LETTERS, OPTICAL SOCIETY OF AMERICA, WASHINGTON, US, vol. 19, no. 14, 15 July 1994 (1994-07-15), pages 1028 - 1030, XP000455026, ISSN: 0146-9592 *
HILL K O; MELTZ G: "Fiber Bragg Grating Technology Fundamentals and Overview", JOURNAL OF LIGHTWAVE TECHNOLOGY, vol. 15, no. 8, August 1997 (1997-08-01), pages 1263 - 1276, XP002248916 *
MORGANTE C G; HAMAKER H: "The ALTA 3700: Extending the Application Space of the ALTA 3500 Laser Recticle Writer", PROCEEDINGS OF THE SPIE, vol. 4066, 12 April 2000 (2000-04-12) - 13 April 2000 (2000-04-13), pages 1 - 11, XP002245924 *
PFEIFFER H C ET AL: "EL-4, A NEW GENERATION ELECTRON-BEAM LITHOGRAPHY SYSTEM", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 11, no. 6, 1 November 1993 (1993-11-01), pages 2332 - 2341, XP000423368, ISSN: 0734-211X *
RISHTON S A ET AL: "Raster shaped beam pattern generation", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 17, no. 6, November 1999 (1999-11-01), pages 2927 - 2931, XP002137368, ISSN: 0734-211X *
TIBERIO R C; CARR D W; ROOKS M J; MIHAILOV S J; BILODEAU F; ALBERT J; STRYCKMAN D; JOHNSON D C; HILL K O; MCCLELLAND A W; HUGHES B: "Fabrication of electron beam generated, chirped, phase mask (1070.11-1070.66nm) for fiber Bragg grating dispersion compensator", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, vol. 16, no. 6, November 1998 (1998-11-01), pages 3237 - 3240, XP002245922 *

Also Published As

Publication number Publication date
CA2422460A1 (en) 2002-03-28
AU2001292764A1 (en) 2002-04-02
WO2002025327A2 (en) 2002-03-28

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