WO2002016051A3 - Surface cleaning and modification processes, methods and apparatus using physicochemically modified dense fluid sprays - Google Patents
Surface cleaning and modification processes, methods and apparatus using physicochemically modified dense fluid sprays Download PDFInfo
- Publication number
- WO2002016051A3 WO2002016051A3 PCT/US2001/026546 US0126546W WO0216051A3 WO 2002016051 A3 WO2002016051 A3 WO 2002016051A3 US 0126546 W US0126546 W US 0126546W WO 0216051 A3 WO0216051 A3 WO 0216051A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- present
- methods
- surface cleaning
- contaminants
- reactive
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C5/00—Devices or accessories for generating abrasive blasts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/003—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods using material which dissolves or changes phase after the treatment, e.g. ice, CO2
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Cleaning In General (AREA)
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/362,598 US20040011378A1 (en) | 2001-08-23 | 2001-08-23 | Surface cleaning and modification processes, methods and apparatus using physicochemically modified dense fluid sprays |
AU2001288402A AU2001288402A1 (en) | 2000-08-23 | 2001-08-23 | Surface cleaning and modification processes, methods and apparatus using physicochemically modified dense fluid sprays |
US11/465,762 US7901540B2 (en) | 2000-08-23 | 2006-08-18 | Dense fluid delivery apparatus |
US13/016,836 US8021489B2 (en) | 2000-08-23 | 2011-01-28 | Substrate treatment process |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US22688200P | 2000-08-23 | 2000-08-23 | |
US60/226,882 | 2000-08-23 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10362598 A-371-Of-International | 2001-08-23 | ||
US11/465,762 Division US7901540B2 (en) | 2000-08-23 | 2006-08-18 | Dense fluid delivery apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002016051A2 WO2002016051A2 (en) | 2002-02-28 |
WO2002016051A3 true WO2002016051A3 (en) | 2002-06-06 |
Family
ID=22850811
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/026546 WO2002016051A2 (en) | 2000-08-23 | 2001-08-23 | Surface cleaning and modification processes, methods and apparatus using physicochemically modified dense fluid sprays |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU2001288402A1 (en) |
WO (1) | WO2002016051A2 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6748960B1 (en) | 1999-11-02 | 2004-06-15 | Tokyo Electron Limited | Apparatus for supercritical processing of multiple workpieces |
US7767145B2 (en) | 2005-03-28 | 2010-08-03 | Toyko Electron Limited | High pressure fourier transform infrared cell |
US7789971B2 (en) | 2005-05-13 | 2010-09-07 | Tokyo Electron Limited | Treatment of substrate using functionalizing agent in supercritical carbon dioxide |
BRPI0520574A2 (en) | 2005-09-30 | 2009-05-19 | Airbus Espana Sl | surface treatment method of composite material structures with atmospheric plasma beams |
US20080216870A1 (en) * | 2007-01-19 | 2008-09-11 | Air Liquid Industrial U.S. Lp | Dry Ice Blasting With Ozone-Containing Carrier Gas |
WO2009064490A2 (en) * | 2007-11-14 | 2009-05-22 | The State Of Oregon Acting By & Through The State Board Of Higher Education On Behalf Of Oregon State University | Microchannel structures having bonded layers including height control features |
US8277741B2 (en) | 2008-10-28 | 2012-10-02 | Mccabe Colin Adam | Anti-germicidal and/or antimicrobial apparatus for reducing and/or eliminating germs and/or bacteria from the soles of footwear and method for use |
EP3536434A1 (en) * | 2018-03-06 | 2019-09-11 | Newfrey LLC | Protective gas mouthpiece and joining device for joining a stud to a workpiece comprising the same |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0391035A2 (en) * | 1989-04-03 | 1990-10-10 | Hughes Aircraft Company | Dense fluid photochemical process for substrate treatment |
US5054421A (en) * | 1986-07-14 | 1991-10-08 | Mitsubishi Denki K.K. | Substrate cleaning device |
US5326406A (en) * | 1991-07-31 | 1994-07-05 | Kawasaki Steel Corporation | Method of cleaning semiconductor substrate and apparatus for carrying out the same |
US5725154A (en) * | 1995-08-18 | 1998-03-10 | Jackson; David P. | Dense fluid spray cleaning method and apparatus |
US5782253A (en) * | 1991-12-24 | 1998-07-21 | Mcdonnell Douglas Corporation | System for removing a coating from a substrate |
US5967156A (en) * | 1994-11-07 | 1999-10-19 | Krytek Corporation | Processing a surface |
-
2001
- 2001-08-23 WO PCT/US2001/026546 patent/WO2002016051A2/en active Application Filing
- 2001-08-23 AU AU2001288402A patent/AU2001288402A1/en not_active Abandoned
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5054421A (en) * | 1986-07-14 | 1991-10-08 | Mitsubishi Denki K.K. | Substrate cleaning device |
EP0391035A2 (en) * | 1989-04-03 | 1990-10-10 | Hughes Aircraft Company | Dense fluid photochemical process for substrate treatment |
US5326406A (en) * | 1991-07-31 | 1994-07-05 | Kawasaki Steel Corporation | Method of cleaning semiconductor substrate and apparatus for carrying out the same |
US5782253A (en) * | 1991-12-24 | 1998-07-21 | Mcdonnell Douglas Corporation | System for removing a coating from a substrate |
US5967156A (en) * | 1994-11-07 | 1999-10-19 | Krytek Corporation | Processing a surface |
US5725154A (en) * | 1995-08-18 | 1998-03-10 | Jackson; David P. | Dense fluid spray cleaning method and apparatus |
Also Published As
Publication number | Publication date |
---|---|
WO2002016051A2 (en) | 2002-02-28 |
AU2001288402A1 (en) | 2002-03-04 |
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