WO2002009200A1 - Enhanced light-emitting diode - Google Patents
Enhanced light-emitting diode Download PDFInfo
- Publication number
- WO2002009200A1 WO2002009200A1 PCT/US2001/023359 US0123359W WO0209200A1 WO 2002009200 A1 WO2002009200 A1 WO 2002009200A1 US 0123359 W US0123359 W US 0123359W WO 0209200 A1 WO0209200 A1 WO 0209200A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- window
- algalnp
- doped
- comprised
- Prior art date
Links
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims abstract description 15
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 23
- 239000004065 semiconductor Substances 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 18
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 10
- 239000012212 insulator Substances 0.000 claims description 8
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 8
- 229910001887 tin oxide Inorganic materials 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 5
- 150000002344 gold compounds Chemical class 0.000 claims description 5
- 239000011800 void material Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 12
- 239000011787 zinc oxide Substances 0.000 claims 4
- 150000001875 compounds Chemical class 0.000 abstract description 10
- 239000010931 gold Substances 0.000 abstract description 5
- 229910052737 gold Inorganic materials 0.000 abstract description 4
- 239000010936 titanium Substances 0.000 abstract description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052719 titanium Inorganic materials 0.000 abstract description 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000005253 cladding Methods 0.000 description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 125000001475 halogen functional group Chemical group 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/14—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/10—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a light reflecting structure, e.g. semiconductor Bragg reflector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/16—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
Definitions
- This invention relates to light-emitting diodes formed of AlGalnP compounds.
- a semiconductor light-emitting diode comprises: a substrate; a light emitting structure; and a pair of electrical contacts for powering the diode, i.e., a substrate contact and a window contact.
- the substrate may be transparent or opaque; and the "substrate" contact, is formed on a surface thereof.
- the window contact is formed on a window surface.
- LED structures composed of AlGalnP compounds can be designed to emit any selected one of a range of colors by tailoring the amount of Al in the compound.
- the substrate and lower cladding layer are of n type AlGalnP compounds, it is difficult to achieve a low resistance p type AlGalnP compound for the upper cladding layer.
- a relatively high resistance upper cladding layer does not provide full use of the surface of the light emitting structure. That is, current flowing between the window and substrate -contacts tends to concentrate in a narrow "favored" path, which lies directly under the window contact. Thus, only that portion of the light emitting surface which lies in the favored path is activated.
- a number of prior art arrangements provide a "window" which is interposed between the light emitting structure and the window contact to more fully utilize the light emitting surface.
- the prior art windows range from a single thick layer of compounds other than AlGalnP to a variety of multi layer structures which "spread" the energizing current across the face of the light emitting surfaces.
- Light generated by an LED exits directly from the outer face of the light emitting surface or via the window.
- the “window” contact is formed on the outer blocks emission of light generated directly thereunder. For example, in the case of an LED having a 10 mil by 10 mil square window, a four mil round metal contact will obscure about 12.2 % of the window surface.
- the window contact cannot be measurably reduced in diameter, since the contact must be large enough to insure its adhesion to the window surface.
- Our semiconductor light-emitting diodes comprise: a substrate; a substrate electrical contact; a light emitting structure; and an improved window.
- Our window interfaces directly with the light emitting structure; and, in the following stated order comprises: a lightly doped p GaP layer; a low resistance p GaAs layer; a transparent, amorphous conducting window layer, and a metal window contact.
- the conducting layer may be formed of: Indium Tin Oxide (ITO); Tin Oxide (TO) or Zinc Oxide (ZnO). Layers of other amorphous, conductive and transparent oxide compounds also may be suitable for construction of the window layer.
- the metal contact passes through both the conducting layer and the GaAs layer to: (a) form an ohmic contact with those layers and (b) contact the GaP layer and form a Shottky diode connection therewith.
- the metal contact passes only through the conducting layer and it contacts an insulator which is formed in the GaAs layer to isolate the metal contact from the GaP layer.
- the metal window contact forms an ohmic contact with the conducting layer and the GaAs layer.
- the current path lying directly under the metal contact is eliminated and the current is widely spread over the face of the light emitting structure.
- all of the diode, other than: the metal contacts, and the conducting layer is grown in a continuous process.
- FIGS. 1 A and IB are top and side views of a prior art LED
- FIGS. 2 A and 2B are top and side views of a first embodiment of an LED in accordance with the present invention.
- Fig. 3 is a side view of a second embodiment of an LED in accordance with the present invention. DETAILED DESCRIPTION
- the top view representations of Figs. 1A and 2 A are drawn to scale; however the side view representations of Figs. IB and 2B are not to scale.
- the top view of Figure 1A represents an LED having a 10 mil by 10 mil square window 105 with a 4 mil circular metal contact 105.
- the window contact is gold.
- the prior art LED of Fig. IB comprises a metal substrate contact 101, an "n" GaAs substrate 102, an "n" cladding layer 103; an active region 104; a p cladding layer 105; and a metal window contact 106.
- current which flows between the window contact 106 and the substrate contact 101 concentrates in a "favored" path directly under the window contact 101.
- FIG. 2A represents an LED having a 10 mil by 10 mil square amorphous transparent layer 209 surrounding a 5 mil circular metal contact 210.
- elements 201 through 206 form a light emitting diode; and the first embodiment of our improved window comprises elements 207 through 210.
- the elements 203 through 208 are grown in sequence upon substrate 202 which is a single crystal n doped GaAs wafer.
- Element 203 is an optional Distributed Bragg Reflector (DBR); layer 204 is an n AlGalnP lower cladding layer; element 205 is an active region; layer 206 is a p AlGalnP upper cladding layer; 207 is a lightly doped p GaP first window layer; 5 208 is a low resistance p GaAs second window layer; 209 is an amorphous, transparent conducting layer; and 210 is a metal window contact.
- DBR Distributed Bragg Reflector
- layers 207 through 209, and contact 210 form our improved window.
- First window layer 207 is formed of p doped GaP.
- Second window 0 layer 208 is formed of p doped GaAs.
- Layer 209 is formed of an amorphous conducting material having a thickness of 100 to 1,000 nm; and window contact 210 is formed of gold or of a gold compound.
- the conducting layer may be formed of: Indium Tin Oxide (ITO); Tin Oxide (TO) or Zinc Oxide (ZnO).
- Contact 210 may be formed of Ti ⁇ Au. 5 Layers 203 through 208 are grown in a continuous MOCND process.
- the reactor temperature is then reduced to a value below the growth temperature and the flow of the growth gases is stopped.
- the remaining cool down of the reactor to room 0 temperature includes a period of annealing of the GaAs layer 208 at a temperature of about 600 degrees C. This avoids passivation of the p dopant in layer 208.
- the completed wafer, as formed above, is removed from the MOCND reactor and completion of the remainder of the LED of Fig. 2b is implemented as follows.
- the amorphous conducting layer e.g. ITO, is installed by sputtering on 5 top of the second layer 208.
- a hole is etched through layers 209 and 208 to reach layer 207.
- a titanium ⁇ gold compound is then evaporated into the resulting void and over layer 209 as illustrated in Fig. 2B.
- the interface between contact 210 and the lightly doper GaP layer 207 forms a Shottky diode.
- the Shottky 0 diode inhibits flow of energizing current directly from contact 210 to layer 207.
- Our enhanced window structure of Fig. 2B eliminates the favored current path through the LED directly under the window contact 210; and widely distributes the energizing current quite evenly over a substantial portion of the face of the active layer. Accordingly, the light emitted through the window is increased without increasing either the surface area of the active layer; or the energizing current requirements.
- Fig. 3 illustrates schematically the second embodiment of our improved window. Those elements of Fig. 3 which are unchanged from Fig. 2B retain the numbers of Fig. 2.
- Our window of Fig. 3 further includes insulator 311 which is formed in layer 208 after a hole has been etched in the amorphous layer 209 and in the GaAs layer 208. Insulator 211 is formed by evaporation of Silicon Oxide. The thickness of the insulator may be equal to, or slightly greater than, the thickness of layer 208.
- a titanium ⁇ gold metal contact 210 is evaporated in the unfilled portion hole and on top of amorphous layer 209.
- the metal window contact 210 forms an ohmic connection with amorphous layer 209 and is insulated from the first layer 207.
- This second embodiment serves to eliminate the favorite current path under the window contact 210 and widely spreads the energizing current across the surface of active layer 205.
- Our window structures can be used with any LED composed of AlGalnP compounds without limitation of the form of the light emitting structure; and with or without the optional Distributed Bragg Reflector.
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES01954944.3T ES2524298T3 (en) | 2000-07-26 | 2001-07-25 | Enhanced Light Emitting Diode |
EP01954944.3A EP1320899B1 (en) | 2000-07-26 | 2001-07-25 | Enhanced light-emitting diode |
AU2001277158A AU2001277158A1 (en) | 2000-07-26 | 2001-07-25 | Enhanced light-emitting diode |
CA002412421A CA2412421C (en) | 2000-07-26 | 2001-07-25 | Enhanced light-emitting diode |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/626,441 US6459098B1 (en) | 2000-07-26 | 2000-07-26 | Window for light emitting diode |
US09/626,441 | 2000-07-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2002009200A1 true WO2002009200A1 (en) | 2002-01-31 |
Family
ID=24510380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/023359 WO2002009200A1 (en) | 2000-07-26 | 2001-07-25 | Enhanced light-emitting diode |
Country Status (6)
Country | Link |
---|---|
US (2) | US6459098B1 (en) |
EP (1) | EP1320899B1 (en) |
AU (1) | AU2001277158A1 (en) |
CA (1) | CA2412421C (en) |
ES (1) | ES2524298T3 (en) |
WO (1) | WO2002009200A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7700960B2 (en) | 2006-01-09 | 2010-04-20 | Seoul Opto Device Co., Ltd. | Light emitting diode with ITO layer and method for fabricating the same |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3814151B2 (en) * | 2001-01-31 | 2006-08-23 | 信越半導体株式会社 | Light emitting element |
DE10261676A1 (en) * | 2002-12-31 | 2004-07-22 | Osram Opto Semiconductors Gmbh | Light emitting diode chip comprises epitaxial semiconductor sequence having protective layer and electromagnetic radiation emitting active zone, used for high efficiency semiconductor light emitting diodes |
US6958494B2 (en) * | 2003-08-14 | 2005-10-25 | Dicon Fiberoptics, Inc. | Light emitting diodes with current spreading layer |
US7250635B2 (en) * | 2004-02-06 | 2007-07-31 | Dicon Fiberoptics, Inc. | Light emitting system with high extraction efficency |
US7229573B2 (en) * | 2004-04-20 | 2007-06-12 | Gelcore, Llc | Ce3+ and Eu2+ doped phosphors for light generation |
US20070040502A1 (en) * | 2004-04-20 | 2007-02-22 | Gelcore Llc | High CRI LED lamps utilizing single phosphor |
US20060049414A1 (en) * | 2004-08-19 | 2006-03-09 | Chandran Ramachandran G | Novel oxynitride phosphors |
US7432536B2 (en) * | 2004-11-04 | 2008-10-07 | Cree, Inc. | LED with self aligned bond pad |
US7439668B2 (en) * | 2005-03-01 | 2008-10-21 | Lumination Llc | Oxynitride phosphors for use in lighting applications having improved color quality |
DE102005061797B4 (en) | 2005-12-23 | 2020-07-09 | Osram Opto Semiconductors Gmbh | Luminescence diode chip with current spreading layer and method for its production |
US20070277874A1 (en) * | 2006-05-31 | 2007-12-06 | David Francis Dawson-Elli | Thin film photovoltaic structure |
US20080070340A1 (en) * | 2006-09-14 | 2008-03-20 | Nicholas Francis Borrelli | Image sensor using thin-film SOI |
JP5052636B2 (en) * | 2010-03-11 | 2012-10-17 | 株式会社東芝 | Semiconductor light emitting device |
KR101081135B1 (en) | 2010-03-15 | 2011-11-07 | 엘지이노텍 주식회사 | Light emitting device, method for fabricating the light emitting device and light emitting device package |
US9070851B2 (en) | 2010-09-24 | 2015-06-30 | Seoul Semiconductor Co., Ltd. | Wafer-level light emitting diode package and method of fabricating the same |
CN103872205B (en) * | 2011-12-31 | 2016-10-26 | 聚灿光电科技股份有限公司 | Uniformly light-emitting LED |
CN205944139U (en) | 2016-03-30 | 2017-02-08 | 首尔伟傲世有限公司 | Ultraviolet ray light -emitting diode spare and contain this emitting diode module |
CN113471342B (en) * | 2021-06-30 | 2022-12-02 | 厦门士兰明镓化合物半导体有限公司 | LED epitaxial structure and LED chip |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5717226A (en) * | 1996-09-18 | 1998-02-10 | Industrial Technology Research Institute | Light-emitting diodes and method of manufacturing the same |
US5789768A (en) | 1997-06-23 | 1998-08-04 | Epistar Corporation | Light emitting diode having transparent conductive oxide formed on the contact layer |
US5797226A (en) | 1996-12-16 | 1998-08-25 | Mackarvich; Charles J. | Drive anchor for manufactured home |
US6072203A (en) * | 1997-03-25 | 2000-06-06 | Kabushiki Kaisha Toshiba | Semiconductor device |
US6225648B1 (en) * | 1999-07-09 | 2001-05-01 | Epistar Corporation | High-brightness light emitting diode |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04132274A (en) * | 1990-09-21 | 1992-05-06 | Eastman Kodak Japan Kk | Light emitting diode |
JPH0513809A (en) * | 1991-07-03 | 1993-01-22 | Nec Corp | Semiconductor light emitting element |
JP2783210B2 (en) * | 1995-09-04 | 1998-08-06 | 日本電気株式会社 | Surface-emitting diode |
-
2000
- 2000-07-26 US US09/626,441 patent/US6459098B1/en not_active Expired - Lifetime
-
2001
- 2001-07-25 AU AU2001277158A patent/AU2001277158A1/en not_active Abandoned
- 2001-07-25 WO PCT/US2001/023359 patent/WO2002009200A1/en active Application Filing
- 2001-07-25 EP EP01954944.3A patent/EP1320899B1/en not_active Expired - Lifetime
- 2001-07-25 ES ES01954944.3T patent/ES2524298T3/en not_active Expired - Lifetime
- 2001-07-25 CA CA002412421A patent/CA2412421C/en not_active Expired - Lifetime
-
2002
- 2002-06-13 US US10/167,698 patent/US6580096B2/en not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5717226A (en) * | 1996-09-18 | 1998-02-10 | Industrial Technology Research Institute | Light-emitting diodes and method of manufacturing the same |
US5797226A (en) | 1996-12-16 | 1998-08-25 | Mackarvich; Charles J. | Drive anchor for manufactured home |
US6072203A (en) * | 1997-03-25 | 2000-06-06 | Kabushiki Kaisha Toshiba | Semiconductor device |
US5789768A (en) | 1997-06-23 | 1998-08-04 | Epistar Corporation | Light emitting diode having transparent conductive oxide formed on the contact layer |
US6225648B1 (en) * | 1999-07-09 | 2001-05-01 | Epistar Corporation | High-brightness light emitting diode |
Non-Patent Citations (1)
Title |
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See also references of EP1320899A4 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7700960B2 (en) | 2006-01-09 | 2010-04-20 | Seoul Opto Device Co., Ltd. | Light emitting diode with ITO layer and method for fabricating the same |
DE112006002927B4 (en) * | 2006-01-09 | 2010-06-02 | Seoul Opto Device Co. Ltd., Ansan | Light-emitting diode with ITO layer and method for producing such |
US7998761B2 (en) | 2006-01-09 | 2011-08-16 | Seoul Opto Device Co., Ltd. | Light emitting diode with ITO layer and method for fabricating the same |
Also Published As
Publication number | Publication date |
---|---|
US6580096B2 (en) | 2003-06-17 |
US6459098B1 (en) | 2002-10-01 |
EP1320899A4 (en) | 2007-02-21 |
CA2412421A1 (en) | 2002-01-31 |
US20020154496A1 (en) | 2002-10-24 |
EP1320899A1 (en) | 2003-06-25 |
ES2524298T3 (en) | 2014-12-05 |
CA2412421C (en) | 2006-05-16 |
AU2001277158A1 (en) | 2002-02-05 |
EP1320899B1 (en) | 2014-09-10 |
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