WO2002005322A3 - Automatic slit/gate valve - Google Patents
Automatic slit/gate valve Download PDFInfo
- Publication number
- WO2002005322A3 WO2002005322A3 PCT/US2001/020919 US0120919W WO0205322A3 WO 2002005322 A3 WO2002005322 A3 WO 2002005322A3 US 0120919 W US0120919 W US 0120919W WO 0205322 A3 WO0205322 A3 WO 0205322A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- gate valve
- slit
- linking mechanism
- door
- automatic slit
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/182—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of toggle links
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
- Power-Operated Mechanisms For Wings (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2001271715A AU2001271715A1 (en) | 2000-07-07 | 2001-06-30 | Automatic slit/gate valve |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US21686800P | 2000-07-07 | 2000-07-07 | |
US60/216,868 | 2000-07-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002005322A2 WO2002005322A2 (en) | 2002-01-17 |
WO2002005322A3 true WO2002005322A3 (en) | 2002-05-30 |
Family
ID=22808800
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/020919 WO2002005322A2 (en) | 2000-07-07 | 2001-06-30 | Automatic slit/gate valve |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU2001271715A1 (en) |
TW (1) | TW530321B (en) |
WO (1) | WO2002005322A2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4079157B2 (en) * | 2005-04-12 | 2008-04-23 | 東京エレクトロン株式会社 | Gate valve device and processing system |
US7281700B2 (en) | 2005-04-12 | 2007-10-16 | Tokyo Electron Limited | Gate valve apparatus for vacuum processing system |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2117495A (en) * | 1982-03-29 | 1983-10-12 | Varian Associates | High speed vacuum gate valve |
US4721282A (en) * | 1986-12-16 | 1988-01-26 | Lam Research Corporation | Vacuum chamber gate valve |
JPH05272662A (en) * | 1992-03-25 | 1993-10-19 | Fujitsu Ltd | Gate valve |
JPH10339377A (en) * | 1997-06-06 | 1998-12-22 | Nec Corp | Gate valve |
-
2001
- 2001-06-30 AU AU2001271715A patent/AU2001271715A1/en not_active Abandoned
- 2001-06-30 WO PCT/US2001/020919 patent/WO2002005322A2/en active Application Filing
- 2001-07-06 TW TW90116673A patent/TW530321B/en active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2117495A (en) * | 1982-03-29 | 1983-10-12 | Varian Associates | High speed vacuum gate valve |
US4721282A (en) * | 1986-12-16 | 1988-01-26 | Lam Research Corporation | Vacuum chamber gate valve |
JPH05272662A (en) * | 1992-03-25 | 1993-10-19 | Fujitsu Ltd | Gate valve |
JPH10339377A (en) * | 1997-06-06 | 1998-12-22 | Nec Corp | Gate valve |
Also Published As
Publication number | Publication date |
---|---|
WO2002005322A2 (en) | 2002-01-17 |
AU2001271715A1 (en) | 2002-01-21 |
TW530321B (en) | 2003-05-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2000045422A3 (en) | Inflatable slit/gate valve | |
EP1197978A3 (en) | Open/close switch mechanism having simple configuration | |
WO2001071226A3 (en) | Thermally actuated microvalve assembly | |
CA2465992A1 (en) | Oil filter apparatus | |
EP1164241A3 (en) | Latch assembly and vehicle including such a latch assembly | |
WO2001029432A3 (en) | Operating device for a rotatable closing element of a valve | |
GB2390410B (en) | Closure for a pressure vessel and method | |
CA2373421A1 (en) | Injection nozzle and method for injection molding | |
CA2409202A1 (en) | Powered sliding panel with secondary articulation for a motor vehicle | |
EP0913610A3 (en) | Solenoid valve | |
CA2263718A1 (en) | Valve assembly | |
AU4031901A (en) | Control of the movement of a sliding or swinging and sliding door in its end closing area | |
AU4448997A (en) | Pneumatic valve actuator | |
CA2302713A1 (en) | Backflow valve | |
AU2002217857A1 (en) | Toilet and method of operation | |
BR9902155A (en) | Lock for vehicle doors | |
WO2002008643A3 (en) | Valve | |
EP0963508A4 (en) | Adjustment mechanism for valves | |
WO2002005322A3 (en) | Automatic slit/gate valve | |
CA2323257A1 (en) | Compact expanding gate valve | |
CA2326985A1 (en) | Hydraulic valve for a camera dolly | |
CA2452860A1 (en) | Resistance assembly for hookstick operated switching assembly | |
WO1999035423A3 (en) | Quick-acting valve | |
WO2004101985A3 (en) | Fluid injection device | |
BR9806638A (en) | Lock for a motor vehicle door |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
AK | Designated states |
Kind code of ref document: A3 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A3 Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG |
|
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
REG | Reference to national code |
Ref country code: DE Ref legal event code: 8642 |
|
122 | Ep: pct application non-entry in european phase | ||
NENP | Non-entry into the national phase |
Ref country code: JP |