WO2001099131A2 - Fluid dielectric variable capacitor - Google Patents
Fluid dielectric variable capacitor Download PDFInfo
- Publication number
- WO2001099131A2 WO2001099131A2 PCT/US2001/018702 US0118702W WO0199131A2 WO 2001099131 A2 WO2001099131 A2 WO 2001099131A2 US 0118702 W US0118702 W US 0118702W WO 0199131 A2 WO0199131 A2 WO 0199131A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- vanes
- vane
- fluid
- pairs
- housing
- Prior art date
Links
- 239000003990 capacitor Substances 0.000 title claims abstract description 60
- 239000012530 fluid Substances 0.000 title claims abstract description 59
- 238000000034 method Methods 0.000 claims abstract description 8
- 238000002347 injection Methods 0.000 claims description 9
- 239000007924 injection Substances 0.000 claims description 9
- 230000001419 dependent effect Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000001816 cooling Methods 0.000 abstract description 2
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000009835 boiling Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000005405 multipole Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/01—Details
- H01G5/013—Dielectrics
- H01G5/0132—Liquid dielectrics
Definitions
- the present invention generally relates to the field of variable capacitors. More particularly, the present invention relates to a novel liquid filled variable capacitor that operates at high frequency and high RF power.
- Variable capacitors are used in a variety of different capacities and come in a number of different forms.
- An area of particular importance, in terms of the utility of variable capacitors, is the field of semiconductor RF fabrication apparatus in which an RF field is provided to establish a plasma with which various fabrication processes can be carried out.
- RF power is supplied from a source to an electrode that is in communication with a plasma region within a chamber.
- Variable capacitors are used in RF power match networks to match the impedance of the electrode and the plasma, constituting an electrical load, to the impedance of a source which delivers RF power to the plasma.
- the purpose of a match network is to increase the energy transfer efficiency between the load and the source.
- One of the RF components used in the match network is an RF power capacitor.
- the most commonly used RF power capacitors are vacuum variable capacitors, which have one set of movable concentric tubes forming a first plate and one set of fixed concentric tubes forming a second plate.
- the movable tubes are connected to a bellows. The movement of the bellows brings the movable concentric tubes in and out interdigitally between the fixed concentric tubes.
- the capacitance of a capacitor is generally determined by its ability to store energy based upon the amount of charge accumulated on overlapped surfaces.
- the larger the capacitor the greater the amount of stored charge, generally. This can be more easily seen from the equation:
- vacuum variable capacitor Another problem with the vacuum variable capacitor is its degradation over time, due to the wear and tear of the bellows from repeated flexing. Additionally, the inductance of the vacuum bellows changes with time. Yet another problem with the vacuum variable capacitor is that the inductance of the bellows is in series with the capacitance. This inductance causes the self-resonance point of the capacitor to occur at a lower frequency. Therefore, high frequency operations of this type vacuum variable capacitor are limited. Additionally, vacuum variable capacitors have a very large power loss at high frequencies and large amplitude RF power.
- the capacitor provides variable frequency, impedance, and pulse length without changing the capacitor or PFL (pulse forming line) hardware.
- the capacitor is constructed from two or more conducting surfaces and a dielectric fluid mixture separating the conducting surfaces.
- a fluid supply system furnishes the dielectric fluid mixture to the conducting surfaces and provides for varying of the dielectric constant of the fluid and thus the capacitor operating characteristics, by varying the mixture composition.
- the fluid supply system has a mixing tank connected to both a supply of high dielectric constant fluid and a supply of low dielectric constant fluid. The high dielectric constant fluid and low dielectric constant fluid are mixed to obtain a dielectric fluid having the desired dielectric constant.
- a pump conveys the dielectric fluid between the mixing tank and the conducting surfaces while a heat exchanger controls the temperature of the dielectric fluid.
- U.S. Patent No. 5,867,360 issued on 2 February 1999, assigned to Murata Manufacturing Co., Ltd., Nagaokakyo, Japan and entitled " Variable capacitor” describes a variable capacitor having a stator with a stator electrode and a rotor with a rotor electrode.
- the rotor and stator are both housed in a recess section of a casing while allowing the recess section to be closed by a cover, enabling the rotor to be brought into stable close contact with the stator.
- U.S. Patent No. 3,996,503 issued on 7 December 1976, assigned to Tokyo Incorporated, Tokyo, Japan and entitled "Variable Capacitor” describes a variable capacitor which includes a plurality of stator plates supported on spaced parallel rods. A plurality of rotor plates supported on a shaft are arranged so that each rotor plate is placed a predetermined distance from the surface of the adjacent stator plate. This is accomplished by spacer members disposed between the adjacent stator plates as well as between the adjacent rotor plates. Each spacer member is made of metal wire, with a circular cross-section, and is shaped in the form of a ring. Use of the metal wire having a predetermined dimension is much more convenient than a tube or sleeve. Consequently fixing the distance between the stator plates and between the rotor plates can be performed with high accuracy.
- the present invention provides a capacitor and method for varying the capacitance of the capacitor in order to accurately match load and source impedances.
- the capacitor comprises a housing and a number of pairs of fixed first vanes positioned within the housing and forming a first plate of the capacitor.
- the capacitor also includes a number of pairs of second vanes forming a second plate of the capacitor and mounted to rotate interdigitally between the number of pairs of first fixed vanes.
- the capacitor includes means for circulating a dielectric fluid between the first and second pairs of vanes. It can also be a gas such as SF6 even though that gas has little heat capacity and must be flowed at high rates. SF6 gas also has a dielectric constant close to 1 so the capacitance per unit area for a fixed separation between capacitor plates, or vanes, is a factor of 3 less than flourinert.
- FIG. 1 is a cross-sectional view illustrating basic components of an exemplary liquid filled variable capacitor device according to the present invention
- FIG. 2 is a side cross-sectional view of the device of FIG. 1;
- FIG. 3 illustrates a top view of the device of FIG. 1 depicting the fixed vanes and the rotating vanes;
- FIG. 4 illustrates a top view of the device of FIG. 1 with overlapping surface areas
- FIG. 5 is a graph illustrating the capacitance of the device of FIG. lversus the rotor vane angle
- FIGs. 6A and 6B are simplified pictorial views of two forms of construction for a motor which may be included in a capacitor device according to the present invention
- FIG. 7 is an alternative side view of the device of the mvention illustrating means for rotating the rotor, circulating fluid, and detecting bubbles.
- FIG. 1 illustrates one embodiment of a variable capacitor according to the present invention.
- the amount of stored energy in a capacitor is dependent on the amount of accumulated charge on overlapped surfaces of the device. The greater the overlapped surface areas, the greater the capacitance.
- a cylindrical housing 2 forms a stator 4 together with a first number of vanes 8 conductively and fixedly attached to an inner surface of housing 2.
- the first number of vanes 8 provides a portion of the surfaces that are needed for accumulation of charges and constitute a first plate of the capacitor.
- the first number of vanes 8 are attached to the inner surface of the housing 2 in a manner which forms a number of different pairs of vanes 8a, 8b positioned inside the housing 2 and spaced apart along a longitudinal axis 10 of housing 2, from the bottom to the top of the housing 2, as shown in FIG. 2.
- Vanes 8 a and 8b of each pair lie in a common plane perpendicular to the longitudinal axis 10. However, the vanes 8a, 8b are at diametrically opposite sides of the inner surface.
- a rotor 14 with a second number of vanes 18 attached thereto is positioned within housing 2.
- a top 3 and a bottom 5 are provided, as shown in FIG. 2, to form a seal for housing 2.
- FIG. 2 is a side cross-sectional view of the device taken along a plane I-I of FIG. 3 and with rotor 14 rotated by 90° relative to the position shown in FIGs.l and 3.
- the rotor 14 includes an elongated shaft 16 having the second number of vanes 18 attached thereto.
- the vanes 18 are composed of a second number of vane pairs 18a, 18b, vane 18a of each pair being diametrically opposite vane 18b of the pair. Vanes 18 constitute a second plate of the capacitor.
- FIG. 3 illustrates a top view of the device of the invention with rotor 14 in a same position as in FIG. 1.
- the rotor 14 is positioned substantially in the center of the stator 4.
- Each vane 18 extends over about l A of a full circle.
- surfaces thereof come to overlap surfaces of the first number of vane pairs 8a, 8b in regions 11, as seen in FIG. 4, which, in turn, varies the capacitance of the device.
- the amount of the overlapping surface area of regions 11 is proportional to the capacitance as seen from equation (2).
- the device would have a greater capacitance in the position of FIG. 4 than in the positions of FIG. 3, since the amount of overlapping surface areas 11 is larger in the position of FIG. 4.
- the stator 4 and the rotor 14 may each have a large number of vanes 8, 18, which can each have a small diameter.
- construction of the device in accordance with the present invention shifts the self-resonance point to a higher frequency. The result is that higher operational frequencies and lower power losses may be achieved using a fluid dielectric variable capacitor provided in accordance with the instant invention.
- angles 34a, 34b formed by side edges 9 of vanes 8a, 8b with respect to the orientation of the vanes 8 within the stator 4 at the minimum capacitance setting. These angles allow for the best ratio of C max to C min
- angle ⁇ Shown also in FIG. 4 is angle ⁇ , which reflects the degree of rotation of the rotor 14. As shown in the graph of FIG. 5, the capacitance C is at 100% of its maximum value when the rotation angle ⁇ is at 90 degrees. However, when the capacitance C is at 100% of its maximum value, the heat generated in the device is also at its maximum.
- vanes 8 are separated from vanes 18 by distances d, which term is defined in connection with equation (2).
- the capacitance C of equation (2) is inversely proportional to the distance d between stator and rotor vane surfaces.
- Electrodes 28a and 28b are fixed in any suitable manner to respective vanes 8 and 18 to provide electrical connections for the device.
- the entire rotary vane assembly is sealed inside the housing 2 and may be rotated by a motor, such as a stepper motor, having a stator which is magnetically, or inductively, coupled to a rotor.
- a motor such as a stepper motor
- FIGs. 6A and 6B Two embodiments of such a motor are shown in FIGs. 6A and 6B.
- the motor includes a stator composed of a multipole core 22A and windings 23 A is disposed outside of housing 2, for example adjacent top 3, and a rotor composed of permanent magnets 24A carried by a coupling plate 25A disposed inside housing 2 and is secured to capacitor rotor 14.
- top 3 is made of a nonmagnetic material. Because the stator and rotor are magnetically coupled, housing 2 need not be provided with a separate sealing structure for the motor.
- Coupling plate 25 A may be made of an electrical insulating material to prevent RF power from being transferred from the capacitor to the motor stator.
- Arrow 26 indicates the distance set between coupling plate 25A and the first stator vane 8 to minimize capacitive coupling therebetween.
- Motor 22 may be constructed according to principles known in the art, as disclosed, for example, in McGraw-Hill Encyclopedia of Science and Technology, 7 th Edition, Vol. 17, pp 417-420, McGraw-Hill, Inc, New York, 1992, and in published European Patent Application 0 175 903, published April 2, 1986.
- FIG. 6B shows a second embodiment which differs from that of FIG. 6 A only with respect to the orientation of the stator and rotor.
- the stator and rotor are configured and position to be magnetically coupled via top 3 of housing 2; in FIG. 6B they are coupled via the side wall of housing 2.
- Components 22B-25B of FIG. 6B are functionally identical to components 22A-25A of FIG. 6A.
- the capacitor rotor and motor rotor could be suspended on a bearing as a single assembly.
- a simple high torque motor with low inertia may provide rotational motion.
- the motor can also rotate in either direction to ensure the fastest response to attain a required capacitance. Because the motor requires a small amount of power to move the second vane pairs 18a, 18b, the device may be manufactured to be small in size.
- the motor should be able to rotate in small steps.
- the step size is preferably less than 1°.
- An alternative is to use a servomotor. A servomotor would have less inertia than a stepper motor and would eliminate step size considerations.
- heat is removed by circulating fluid 36 between the first vane pairs 8a, 8b and the second vane pairs 18a, 18b as the rotor 14 rotates, as also seen in FIG. 2.
- the fluid 36 is injected through fluid injection ports 38 at one side of shaft 14 and evacuated through exhaust ports 38 ⁇ at the other side of shaft 14, i.e. diametrically opposite ports 38.
- the fluid 36 serves two purposes. First, the fluid 36 serves as the capacitor's dielectric material, and can be selected to enhance the maximum potential difference which the capacitor can withstand without experiencing a voltage breakdown. Secondly, the fluid 36 functions as a coolant for removing heat.
- the number of injection ports 38, and the number of exhaust ports 38 ⁇ each preferably corresponds to the number of second vane pairs 18a, 18b.
- the ports 38 and 38 ⁇ are defined by holes through the side wall housing 2.
- the ports 38 and 38" are positioned roughly opposite to edges of each vane 18 of the vane pairs 18a, 18b respectively.
- the fluid is injected into a cavity 39 formed in the interior of the housing 2 at very high speed. The speed is determined by heat load. As long as the heat is taken out the flow is sufficient.
- the rate of heat removal is directly proportional to the Nusselt number or non-dimensional wall temperature gradient and, therefore, proportional to the flow velocity.
- High speed injection is necessary to remove bubbles that may form and tend to accumulate on surfaces of electrodes 28a, 28b of the stator 4 and the rotor 14.
- Careful design of the device is required in order to prevent generation of bubbles by cavitation.
- the direction of the fluid flow is generally parallel to the surfaces of the vanes 18a, 18b as shown in FIG. 2. This design ensures the rapid removal of the heat generated by the high RF voltage existing across the fluid 36 and between the first 8a, 8b and second 18a, 18b vane pairs.
- High speed injection of the fluid 36 consequently helps to prevent an RF breakdown in the fluid 36.
- the high speed facilitates the desorbing of any gas, which would, in turn, forms bubbles. If formed, the bubbles drift toward high field points of the RF field of the device.
- the RF field increases in intensity and may cause the breakdown in the fluid 36. This breakdown could occur at a relatively modest RF field, if the flow is not strong enough to remove the bubbles from the electrode surface.
- FIG. 7 illustrates that fluid 36 is pumped ) by a pumping mechanism 30 from outside the housing 2 via injection ports 38, through cavity 39 and then via exhaust ports 38'. Within cavity 39, fluid 36 flows past all of the vanes, as shown in FIG. 2. Also illustrated in FIG. 7 is a bubble detection mechanism 32 which could be an optical, microwave, or ultrasonic mechanism which detects bubbles by monitoring the fluid. If bubbles are detected or, in the alternative, the RF power drops, the fluid speed is increased.
- detection mechanisms are well known in the art.
- the detection mechanisms can be the same as those that detect particulates. These are laser diffraction systems that can determine both the number and dimension distribution of particules or bubbles (i.e. phase-Doppler anemometry).
- the removal of the heat will allow the device to operate at high current levels while still remaining within acceptable temperature limits.
- the operating temperature limit is determined by the boiling temperature of the fluid 36. At temperatures below the boiling point, the dielectric constant is relatively constant.
- the boiling temperature of dielectric fluids in general varies with the molecular weight of the fluids. However, higher molecular weight fluids are more expensive. Thus, a fluid is chosen for the system that provides a balance between cost and performance.
- One fluid that is presently preferred is commercially available Flourinert® fluid.
- a coating or layer of dielectric material having a dielectric constant much higher than that of the fluid is placed on one or both electrodes 28a, 28b.
- the fluid would now pass between a coated or bare electrode in order to facilitate heat removal.
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2001275439A AU2001275439A1 (en) | 2000-06-20 | 2001-06-11 | Fluid dielectric variable capacitor |
US10/323,917 US6690568B2 (en) | 2000-06-20 | 2002-12-20 | Fluid dielectric variable capacitor |
US10/611,909 US6825090B2 (en) | 2000-06-20 | 2003-07-03 | Fluid dielectric variable capacitor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US21273800P | 2000-06-20 | 2000-06-20 | |
US60/212,738 | 2000-06-20 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/323,917 Continuation US6690568B2 (en) | 2000-06-20 | 2002-12-20 | Fluid dielectric variable capacitor |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2001099131A2 true WO2001099131A2 (en) | 2001-12-27 |
WO2001099131A3 WO2001099131A3 (en) | 2002-08-08 |
Family
ID=22792233
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/018702 WO2001099131A2 (en) | 2000-06-20 | 2001-06-11 | Fluid dielectric variable capacitor |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU2001275439A1 (en) |
WO (1) | WO2001099131A2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0693759A1 (en) * | 1994-07-21 | 1996-01-24 | Comet Technik AG | Rotary variable capacitor |
-
2001
- 2001-06-11 AU AU2001275439A patent/AU2001275439A1/en not_active Abandoned
- 2001-06-11 WO PCT/US2001/018702 patent/WO2001099131A2/en active Application Filing
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0693759A1 (en) * | 1994-07-21 | 1996-01-24 | Comet Technik AG | Rotary variable capacitor |
Also Published As
Publication number | Publication date |
---|---|
AU2001275439A1 (en) | 2002-01-02 |
WO2001099131A3 (en) | 2002-08-08 |
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