WO2001006543A3 - Microelectromechanical device with moving element - Google Patents

Microelectromechanical device with moving element Download PDF

Info

Publication number
WO2001006543A3
WO2001006543A3 PCT/IL2000/000431 IL0000431W WO0106543A3 WO 2001006543 A3 WO2001006543 A3 WO 2001006543A3 IL 0000431 W IL0000431 W IL 0000431W WO 0106543 A3 WO0106543 A3 WO 0106543A3
Authority
WO
WIPO (PCT)
Prior art keywords
moving element
substrate
microelectromechanical device
mems
plane
Prior art date
Application number
PCT/IL2000/000431
Other languages
French (fr)
Other versions
WO2001006543A2 (en
Inventor
Roberto Igal Chertkow
Original Assignee
Memlink Ltd
Roberto Igal Chertkow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memlink Ltd, Roberto Igal Chertkow filed Critical Memlink Ltd
Priority to JP2001511714A priority Critical patent/JP2003523833A/en
Priority to EP00946255A priority patent/EP1218790A2/en
Priority to CA002379537A priority patent/CA2379537A1/en
Priority to IL14747500A priority patent/IL147475A0/en
Priority to AU60125/00A priority patent/AU6012500A/en
Publication of WO2001006543A2 publication Critical patent/WO2001006543A2/en
Publication of WO2001006543A3 publication Critical patent/WO2001006543A3/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
    • G02B6/266—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/051—Translation according to an axis parallel to the substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3572—Magnetic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3576—Temperature or heat actuation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3578—Piezoelectric force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • H04Q2011/0007—Construction
    • H04Q2011/0026—Construction using free space propagation (e.g. lenses, mirrors)
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • H04Q2011/0007—Construction
    • H04Q2011/0026—Construction using free space propagation (e.g. lenses, mirrors)
    • H04Q2011/003—Construction using free space propagation (e.g. lenses, mirrors) using switches based on microelectro-mechanical systems [MEMS]
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • H04Q2011/0052—Interconnection of switches
    • H04Q2011/0056—Clos
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04Q—SELECTING
    • H04Q11/00—Selecting arrangements for multiplex systems
    • H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
    • H04Q11/0005—Switch and router aspects
    • H04Q2011/0052—Interconnection of switches
    • H04Q2011/0058—Crossbar; Matrix

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

A microelectromechanical (MEMS) device (100) has a substrate (102) and a generally planar moving element (106), such as a mirror, disposed in parallel to the surface (108) of the substrate. An actuator is operatively engageable with the moving element (106) for selectively actuating the moving element (106) between a first position in a plane horizontal to the surface of the substrate and a second position in that plane. The MEMS device (100) may be effectively used as an optical switch. Various different actuators can be used. Preferably, the device is fabricated using a surface micromachining process.
PCT/IL2000/000431 1999-07-20 2000-07-20 Microelectromechanical device with moving element WO2001006543A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2001511714A JP2003523833A (en) 1999-07-20 2000-07-20 Micro-electromechanical device with moving elements
EP00946255A EP1218790A2 (en) 1999-07-20 2000-07-20 Microelectromechanical device with moving element
CA002379537A CA2379537A1 (en) 1999-07-20 2000-07-20 Microelectromechanical device with moving element
IL14747500A IL147475A0 (en) 1999-07-20 2000-07-20 Microelectromechanincal device with moving element
AU60125/00A AU6012500A (en) 1999-07-20 2000-07-20 Microelectromechanical device with moving element

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US14462899P 1999-07-20 1999-07-20
US60/144,628 1999-07-20
US17049499P 1999-12-13 1999-12-13
US17049299P 1999-12-13 1999-12-13
US60/170,492 1999-12-13
US60/170,494 1999-12-13

Publications (2)

Publication Number Publication Date
WO2001006543A2 WO2001006543A2 (en) 2001-01-25
WO2001006543A3 true WO2001006543A3 (en) 2001-05-25

Family

ID=27386137

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2000/000431 WO2001006543A2 (en) 1999-07-20 2000-07-20 Microelectromechanical device with moving element

Country Status (6)

Country Link
EP (1) EP1218790A2 (en)
JP (1) JP2003523833A (en)
AU (1) AU6012500A (en)
CA (1) CA2379537A1 (en)
IL (1) IL147475A0 (en)
WO (1) WO2001006543A2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6556739B1 (en) 2001-02-13 2003-04-29 Omm, Inc. Electronic damping of MEMS devices using a look-up table
US6571029B1 (en) 2001-02-13 2003-05-27 Omm, Inc. Method for determining and implementing electrical damping coefficients
US6590697B2 (en) * 2001-10-04 2003-07-08 Megasense VOA with a movable focusing mirror
ES2258735T3 (en) * 2002-11-19 2006-09-01 Baolab Microsystems S.L. MINIATURIZED ELECTROOPTIC DEVICE AND CORRESPONDING USES.
US7190245B2 (en) 2003-04-29 2007-03-13 Medtronic, Inc. Multi-stable micro electromechanical switches and methods of fabricating same
US7388459B2 (en) * 2003-10-28 2008-06-17 Medtronic, Inc. MEMs switching circuit and method for an implantable medical device
JP4634057B2 (en) * 2004-03-17 2011-02-16 アンリツ株式会社 Optical cavity
EP1747611A2 (en) 2004-05-19 2007-01-31 Baolab Microsystems S.L. Regulator circuit and corresponding uses
JP6353249B2 (en) * 2014-03-20 2018-07-04 北陸電気工業株式会社 Display element and display device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5914801A (en) * 1996-09-27 1999-06-22 Mcnc Microelectromechanical devices including rotating plates and related methods

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5914801A (en) * 1996-09-27 1999-06-22 Mcnc Microelectromechanical devices including rotating plates and related methods
US6134042A (en) * 1996-09-27 2000-10-17 Mcnc Reflective mems actuator with a laser

Also Published As

Publication number Publication date
EP1218790A2 (en) 2002-07-03
AU6012500A (en) 2001-02-05
CA2379537A1 (en) 2001-01-25
WO2001006543A2 (en) 2001-01-25
JP2003523833A (en) 2003-08-12
IL147475A0 (en) 2002-08-14

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