WO1999060614A1 - A wafer buffer station and a method for a per-wafer transfer between work stations - Google Patents
A wafer buffer station and a method for a per-wafer transfer between work stations Download PDFInfo
- Publication number
- WO1999060614A1 WO1999060614A1 PCT/US1999/009602 US9909602W WO9960614A1 WO 1999060614 A1 WO1999060614 A1 WO 1999060614A1 US 9909602 W US9909602 W US 9909602W WO 9960614 A1 WO9960614 A1 WO 9960614A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- station
- wafers
- wafer
- processing
- work
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
Definitions
- This invention relates to a method and an apparatus for improving throughput
- invention relates to a method and apparatus for improving and optimizing the rate of
- FIG. 1 One such station is depicted in Figure 1 and generally
- the station 10 comprises a transfer chamber 11 with a suitable
- Two load lock chambers 13 are mounted on two other facets of the transfer
- mini-environment also called Factory Interface, FI
- a robot schematically indicated at 14 operates to transfer the
- the mini-environment serves as a clean
- Such a mini-environment may be a
- Fremont, CA Fremont, CA. It includes an enclosure 16 and several (four in this example) wafer
- the enclosure 16 houses a track robot 19 for
- the robot 19 is available from Equipe Technologies of Sunnyvale, CA.
- the robot 19 is also known as
- the work stations could be differently structured and, for instance, comprise
- pods or cassettes
- transferring the pods between stations can increase the number
- processing line and between adjacent work stations so as to eliminate, or at least
- the present invention provides a method of transfer of wafers between two
- preceding stations adjacent work stations, hereinafter called the "preceding" or A stations and the
- the transfer of wafers to and from the buffer station is carried on by the transfer of wafers to and from the buffer station.
- the buffer station can be a simple stage having
- the buffer station includes an inspection or
- Fig. 1 is a schematic plan view of a work station according to the prior
- Fig. 2 is a schematic plan view of individual wafer transfer between
- Fig. 3 is a schematic plan view of a second embodiment of the
- Fig. 4 is a schematic plan view of a third embodiment of the present
- Fig. 5 is a schematic plan view of a fourth embodiment of the present
- Fig. 6 is a cut-away view of a buffer station suitable for use in the
- Fig. 2 schematically illustrates an embodiment of the invention, comprising
- the pod loaders by numerals 33-36 and 43-46; and the wafer aligners are
- a buffer station 50 is placed between the two mini-
- the buffer station can be implemented as a simple support
- ca be a part of the mini-environments, or can include an inspection and/or
- the buffer station 50 includes an inspection tool 51, such as, for example
- the inspection tool 51 is schematically indicated as comprising a mechanical structure 52, which
- Said wafer is rotated by turntable 53 and is scanned by scanning means, not
- the scanning may be carried out by laser beams and the wafer be classified
- reaction being defined by the intensity of the light scattered by each
- the inspection tool 51 may comprise one or more
- the wafer may be held stationary and the optical head
- the wafers are individually
- wafers are classified as approved or suspect wafers, according to said
- a wafer inspection or control apparatus as described in the said patent application is located
- Suspect wafers can be taken offline to another apparatus,
- Transfers of the individual wafers are preferably carried out by robots 36
- the amount of wafers that are so individually transferred is controlled by the
- FAB controller so as to maximize throughput, or, in other words, to eliminate or
- loading station A and unloading station B or, if more than two successive stations are
- the production rate in a work station is determined not only by the time required for the various process stages, but also by
- station A the overall throughput of station A is increase; and if station B, at a particular time,
- this embodiment has the further advantage that they are inspected/controlled in
- control is generally statistical in nature.
- a statistical control is generally statistical in nature.
- wafer transfer should receive as pertinent data inputs: a) the programmed processing
- a program can be formulated to determine the ratio
- a sampling plan may be implemented. If the wafer is to be inspected, the
- inspection tool 51 inspects the wafer and, upon completion, indicated to the controller
- track robot 43 retrieves the wafer from buffer station 50 and
- processing requires the fab controller to synchronize the operations of the track robots
- FIG. 1 also depicts (in broken lines) an optional dedicated robot 55. This
- robot can be used to transfer wafers from the mini-environment 31 of station 30 to the
- robot 55 may remove it from the fabrication line
- buffer station 50 has no operative function. Rather, it merely serves as a waiting
- the buffer station 50 may include a table 56 supporting a
- the buffer station is
- a buffer station 50' is inserted partially in station 30 and partially in station 40, and
- buffer station 50' may include several chucks 58' for holding several wafers. This
- Figure 6 depicts parts of the two mini-environments 31 and 41
- Track robot 36 is depicted with its arm vertically retrieved
- track robot 43 is depicted with its arm partially vertically elevated.
- a wafer 59 is depicted resting on the middle chuck.
- track robot 36 can place wafers on the chucks on its own
- track robot 43 can retrieve the wafer on its own pace.
- one or more wafer pods connected to any of pod loaders 33-36 and 43-46, can be any of pod loaders 33-36 and 43-46.
- buffer used as a "buffer" pod for pods in a queue for the inspection station 51.
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP99921607A EP1082755A1 (en) | 1998-05-18 | 1999-04-30 | A wafer buffer station and a method for a per-wafer transfer between work stations |
KR1020007012929A KR20010043705A (en) | 1998-05-18 | 1999-04-30 | A wafer buffer station and a method for a per-wafer transfer between work stations |
JP2000550142A JP2002516485A (en) | 1998-05-18 | 1999-04-30 | Transfer method for each wafer between wafer buffer station and work station |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US8022298A | 1998-05-18 | 1998-05-18 | |
US09/080,222 | 1998-05-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999060614A1 true WO1999060614A1 (en) | 1999-11-25 |
Family
ID=22156019
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1999/009602 WO1999060614A1 (en) | 1998-05-18 | 1999-04-30 | A wafer buffer station and a method for a per-wafer transfer between work stations |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1082755A1 (en) |
JP (1) | JP2002516485A (en) |
KR (1) | KR20010043705A (en) |
WO (1) | WO1999060614A1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1134641A1 (en) * | 2000-03-16 | 2001-09-19 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
WO2003060964A1 (en) * | 2002-01-15 | 2003-07-24 | Applied Materials, Inc. | Apparatus and method for improving throughput in a cluster tool for semiconductor wafer processing |
WO2003100837A2 (en) * | 2002-05-23 | 2003-12-04 | Applied Materials, Inc. | Large substrate test system |
US7075323B2 (en) | 2004-07-29 | 2006-07-11 | Applied Materials, Inc. | Large substrate test system |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7578650B2 (en) * | 2004-07-29 | 2009-08-25 | Kla-Tencor Technologies Corporation | Quick swap load port |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0187249A2 (en) * | 1984-11-30 | 1986-07-16 | Kabushiki Kaisha Toshiba | Apparatus for producing semiconductor devices |
EP0429270A2 (en) * | 1989-11-20 | 1991-05-29 | Kokusai Electric Co., Ltd. | Continuous etching method and apparatus therefor |
EP0475604A1 (en) * | 1990-08-29 | 1992-03-18 | Hitachi, Ltd. | Vacuum processing apparatus and cleaning method therefor |
US5286296A (en) * | 1991-01-10 | 1994-02-15 | Sony Corporation | Multi-chamber wafer process equipment having plural, physically communicating transfer means |
WO1994014185A1 (en) * | 1992-12-04 | 1994-06-23 | Materials Research Corporation | Wafer processing machine vacuum front end method and apparatus |
EP0837494A2 (en) * | 1996-10-21 | 1998-04-22 | Applied Materials, Inc. | Method and apparatus for priority based scheduling of wafer processing within a multiple chamber semiconductor wafer processing tool |
-
1999
- 1999-04-30 KR KR1020007012929A patent/KR20010043705A/en not_active Application Discontinuation
- 1999-04-30 WO PCT/US1999/009602 patent/WO1999060614A1/en not_active Application Discontinuation
- 1999-04-30 JP JP2000550142A patent/JP2002516485A/en not_active Withdrawn
- 1999-04-30 EP EP99921607A patent/EP1082755A1/en not_active Withdrawn
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0187249A2 (en) * | 1984-11-30 | 1986-07-16 | Kabushiki Kaisha Toshiba | Apparatus for producing semiconductor devices |
EP0429270A2 (en) * | 1989-11-20 | 1991-05-29 | Kokusai Electric Co., Ltd. | Continuous etching method and apparatus therefor |
EP0475604A1 (en) * | 1990-08-29 | 1992-03-18 | Hitachi, Ltd. | Vacuum processing apparatus and cleaning method therefor |
US5286296A (en) * | 1991-01-10 | 1994-02-15 | Sony Corporation | Multi-chamber wafer process equipment having plural, physically communicating transfer means |
WO1994014185A1 (en) * | 1992-12-04 | 1994-06-23 | Materials Research Corporation | Wafer processing machine vacuum front end method and apparatus |
EP0837494A2 (en) * | 1996-10-21 | 1998-04-22 | Applied Materials, Inc. | Method and apparatus for priority based scheduling of wafer processing within a multiple chamber semiconductor wafer processing tool |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1134641A1 (en) * | 2000-03-16 | 2001-09-19 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
US6506009B1 (en) | 2000-03-16 | 2003-01-14 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
US6955517B2 (en) | 2000-03-16 | 2005-10-18 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
US7234908B2 (en) | 2000-03-16 | 2007-06-26 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
KR100905565B1 (en) * | 2000-03-16 | 2009-07-02 | 어플라이드 머티어리얼스, 인코포레이티드 | Apparatus for storing and moving a cassette |
WO2003060964A1 (en) * | 2002-01-15 | 2003-07-24 | Applied Materials, Inc. | Apparatus and method for improving throughput in a cluster tool for semiconductor wafer processing |
WO2003100837A2 (en) * | 2002-05-23 | 2003-12-04 | Applied Materials, Inc. | Large substrate test system |
WO2003100837A3 (en) * | 2002-05-23 | 2004-03-04 | Applied Materials Inc | Large substrate test system |
JP2005528786A (en) * | 2002-05-23 | 2005-09-22 | アプライド マテリアルズ インコーポレイテッド | Large board inspection system |
US7129694B2 (en) | 2002-05-23 | 2006-10-31 | Applied Materials, Inc. | Large substrate test system |
US7075323B2 (en) | 2004-07-29 | 2006-07-11 | Applied Materials, Inc. | Large substrate test system |
Also Published As
Publication number | Publication date |
---|---|
JP2002516485A (en) | 2002-06-04 |
EP1082755A1 (en) | 2001-03-14 |
KR20010043705A (en) | 2001-05-25 |
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