WO1999041566A1 - Method and apparatus to determine fly height of a recording head - Google Patents
Method and apparatus to determine fly height of a recording head Download PDFInfo
- Publication number
- WO1999041566A1 WO1999041566A1 PCT/US1998/020311 US9820311W WO9941566A1 WO 1999041566 A1 WO1999041566 A1 WO 1999041566A1 US 9820311 W US9820311 W US 9820311W WO 9941566 A1 WO9941566 A1 WO 9941566A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- light
- detector module
- measurement system
- fly height
- disc
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B5/60—Fluid-dynamic spacing of heads from record-carriers
- G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
- G11B7/09—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B7/0908—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for focusing only
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/122—Flying-type heads, e.g. analogous to Winchester type in magnetic recording
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1387—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/1055—Disposition or mounting of transducers relative to record carriers
- G11B11/10576—Disposition or mounting of transducers relative to record carriers with provision for moving the transducers for maintaining alignment or spacing relative to the carrier
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/1055—Disposition or mounting of transducers relative to record carriers
- G11B11/1058—Flying heads
Definitions
- the present invention relates to disc storage systems of the type used to store information. More specifically, the invention relates to an apparatus for determining fly height in a head/gimbal assembly of such a disc storage system.
- Disc storage systems are known in the art and are used to store information for later retrieval .
- Such disc storage systems include a rotating disc which carries information thereon.
- a transducing head (or, in some instances, a read back head) is positioned over a surface of the disc while the disc rotates at high speed.
- the head is carried on a slider which is designed to "fly" just over the surface of the rotating disc.
- the head may then be used to write information from the disc.
- Such information may be, for example, magnetically or optically encoded of the disc surface.
- Increased storage density is becoming increasingly important.
- One technique known to increase storage density is to decrease the "fly height" of the head. Fly height is defined as the distance between the disc surface and the head or slider during operation of the storage system. A reduced fly height allows information to be written or read back more precisely and such information can be stored in a smaller area (i.e., at a higher density).
- fly height is measured before assembling the head and slider assemblies into disc drives.
- One technique to measure fly height is by measuring electrical capacitance between the head and the disc.
- Another common technique to measure fly height is using optical interferometry in which a transparent test disc is used to fly the slider. Light is shined through the disc onto the slider from a source on the other side of the disc. Using known techniques, the reflected light can be examined to determine fly height.
- U.S. Patent No. 5,280,340, issued January 18, 1994 to Lacy describes a number of such techniques for measuring fly height .
- Another technique used to measure and characterize a head is to measure the read back signal provided by the head during operation.
- the signal can be examined for many different parameters, including signal strength, intersymbol interference, off-track sensitivity, etc.
- U.S. Patent No. 5,068,754 issued November 26, 1991 describes a method and apparatus for measuring bit shift in a magnetic disc drive .
- Optical discs provide an alternative to purely magnetic based recording media.
- Optical disc drives can be used to obtain high storage densities.
- An approach to increase the storage density involves reducing the spot size using near-field recording.
- Near-field recording involves optical components mounted on a slider within a distance roughly on the order of a wavelength or less of the surface of the disc. Then, the energy transmitted through the optics is transferred to the surface of the disc through evanescent coupling.
- a Solid Immersion Lens (SIL) or the like can be used - 3 - along with an objective lens to produce an ultra small spo .
- SIL Solid Immersion Lens
- optical storage systems data is in the form of marks carried on the surface of the disc which are detected using the reflected laser light.
- compact discs are currently used to store digital data such as computer programs or digitized music.
- compact discs are permanently recorded during manufacture.
- WORM write-once read-many
- Other types of systems are erasable, such as phase change and magneto-optic (M-0) systems. Phase change systems detect data by sensing a change in reflectivity.
- M-0 systems read data by measuring the rotation of the incident light polarization due to the storage medium.
- the invention features a measurement system for estimating the fly height of a recording head relative to a spinning disc.
- the fly height measurement system includes a source of light, a slider, a detector module and a processor.
- the slider includes an objective lens positioned such that light from the source hits the objective lens and is directed to the surface of the disc.
- the detector module receives light reflected from the disc.
- the processor estimates the fly height of the slider based on detector module output.
- the detector module receives light transmitted through the disc. The transmitted light is not spatially dispersed based on wavelength. Again, the processor estimates the fly height based on detector module output .
- the invention features a method of determining fly height of a slider relative to spinning disc comprising: a) directing light to an objective lens located on the slider; b) measuring a property of light propagating from a disc with a detector module positioned to receive the propagating light, where light directed at the detector is not spatially dispersed based on wavelength; and c) estimating the fly height based on the output of the detector.
- the detector module for performing the method can include a lens and a two element detector and wherein the fly height is estimated by evaluating the difference in signals from the two elements of the detector and comparing the difference with values from a standard curve.
- the detector module comprises a polarization beam splitter and two light sensitive elements each configured to measure one component of the split beam.
- the detector module comprises a detector array, and wherein the fly height is estimated by examining an intensity distribution, a phase distribution or a polarization distribution measured by the detector array.
- Fig. 2 is a sectional, side view of a slider and its support arm with the cross section taken through the center of the slider.
- Fig. 3 is a schematic side view of an embodiment of a detector module with two light sensitive elements for use in the measuring system of Fig. 1, where any covering is made transparent to expose the internal components of the detector module.
- Fig. 4 is a schematic side view of an embodiment of a detector module with a polarization beam splitter for use in the measuring system of Fig. 1, where any covering is made transparent to expose the internal components of the detector module.
- Fig. 5 is a schematic side view of an embodiment of a detector module incorporating an array detector for use in the measuring system of Fig. 1, where any covering is made transparent to expose the internal components of the detector module.
- Fig. 6 is a plot of polarization ratio as a function of fly height for five different SiN thicknesses on the surface of an aluminum coated test disc.
- Fig. 7 is a plot of polarization ratio as a function of fly height for different numerical apertures of the objective lens.
- Fig. 8 is a plot of percent reflectivity as a function of fly height for five different SiN thicknesses on a glass test disc .
- Fig. 9 is a plot of percent reflectivity as a function of fly height for five different numerical apertures of the objective lens.
- Fig. 10 is a plot of reflectivity as a function of fly height with and without a 50% stop.
- Fig. 11 is a plot of polarization ratio as function of fly height with a 50% stop for two different thicknesses of SiN on the test disc.
- Fig. 12 is a plot of polarization difference as a function of fly height for a disc having an optical stack of magneto-optical material.
- Fig. 13 is a plot of percent reflectance, polarization ratio and polarization sum as a function of fly height obtained with a disc having an optical stack of magneto-optical material.
- Fig. 14 is a two dimensional plot of intensity of the x-polarized component of reflected light obtained following reflection of an x-polarized incident field for four different fly heights above an aluminum coated disc: a) 0 nm fly height, b) 100 nm fly height, c) 200 nm fly height, and d) 400 nm fly height.
- Fig. 15 is a two dimensional plot of phase of the x-polarized component of reflected light obtained following reflection of an x-polarized incident field for four different fly heights above an aluminum coated disc: a) 0 nm fly height, b) 100 nm fly height, c) 200 nm fly height, and d) 400 nm fly height.
- a slider with an objective lens can be used to obtain the distance, i.e. fly height, from the slider to a spinning disc. Only a single source of monochromatic - 7 - or quasi-monochromatic light is needed. The distance between the slider and the disc is held approximately constant to make the measurement.
- Light propagating from the disc is directed to a detector. For example, light reflected from the disc back through the objective lens can be directed by a beam splitter to a detector. Alternatively, the light transmitted through the disc can be directed to a detector.
- the detector measures one or more properties of the reflected (transmitted) light. Suitable properties for obtaining the distance measurement include polarization, intensity distribution and/or phase distribution, for example. The properties are correlated with distance properties such that using subsequent measurements a microprocessor can monitor the detector output and provide an output related to fly height .
- Particularly suitable optical recording heads include near-field optical recording heads.
- Near-field optical recording heads have a fly height generally on the order of a wavelength of light or less.
- the optics mounted on the slider are coupled to the surface of the disc through evanescent coupling due to the small separation.
- the slider optics generally include an - 8 - objective lens that focuses the light onto, or slightly below, the bottom surface of the slider.
- the slider optics on near-field recording heads generally also include a S_olid Immersion Lens (SIL) or the like to reduce spot size.
- SIL S_olid Immersion Lens
- an embodiment of a measurement system to measure light reflected from the disc includes a light source 100, a beam splitter 102, a slider 104, a detector module 106 and processor 108.
- the measurement system is positioned relative to a disc spinning system with slider 104 near the surface 110 of a disc 112 when the disc is in position.
- the disc spinning system includes a motor 114 such as a spindle motor for spinning disc 112.
- the measurement system optionally can include a power meter 116 positioned to receive a portion of the incident light from source 100 reflected by beam splitter 102.
- the measurement system is configured to measure light transmitted through the disc 112.
- beam splitter 102 can be removed or replaced with a polarizer. Additional optical elements, such as mirrors and lenses, can be used to direct the transmitted light to the detector as desired.
- Light source 100 generally outputs monochromatic or quasi-monochromatic light along light path 118. Suitable light sources include a mercury arc lamp, a light emitting diode, a diode laser and the like.
- Light path 118 passes through beam splitter 102. Transmitted light follows split light path 120.
- a partial polarizing beam splitter can be used if the detection system is sensitive to polarized light.
- a polarizing beam splitter can be used to increase the polarization ratio, for example, if the polarization ratio (I to I s ) of the source is relatively low, such as a laser diode with a polarization ratio of about 100 to 1.
- a partial polarizing beam splitter is used, transmitted light along split light path 120 is partially plane polarized. Light with partially orthogonal polarization is reflected at 90 degrees relative to the incident direction. The reflected incident light is directed to power meter 116, if desired. Transmitted light continues along light path
- slider 104 generally is at the end of arm 122, which can be a flexure spring suspension arm.
- Slider 104 includes an objective lens 124.
- Objective lens 124 can be mounted on slider base 126 using spacers 128.
- Slider 104 optionally includes slider optics 130.
- Slider optics 130 help to optically couple objective lens 124 with the surface of disc 110 to minimize distortions due to changing index of refraction.
- Suitable slider optics 130 include S_olid Immersion Lenses (SILs) or the like. Preferred sliders are part of near- field optical recording heads.
- Objective lens 124 is placed within split light path 120 and creates a focused light path 132. Referring to Fig.
- Disc 112 generally is a test disc specifically designed for the distance measurement. The surface characteristics can be selected based on the properties of the detector module 106 and the corresponding type of measurement.
- surface 110 of disc 112 can be transparent or reflecting.
- surface 110 of disc 112 can have a coating, if appropriate.
- a pre- embossed media such as those with pits and grooves can be used, if desired.
- a portion of a data storage disc can have a specific portion reserved for use as a test disc.
- disc 112 is a reflecting, aluminum coated disc.
- the aluminum coated disc can optionally include a thin layer of an optically transparent material such as SiN.
- the thin film generally would have a thickness on the order of a wavelength or less.
- the thickness of the SiN layer alters the properties of the reflected light.
- the air-incident surface of the SiN can be coated with a lubricant .
- Another embodiment of disc 112 includes a glass disc, with or without a thin-film layer such as SiN. For this type of disc, reflectivity is a particularly suitable measurement for determining fly height .
- a third embodiment of test disc 112 is a glass or aluminum coated disc with an optical stack containing magneto-optical (MO) media.
- MO magneto-optical
- Detector module 106 can include - 11 - elements to measure one or more of these distance dependent properties and provide an output to processor 108, for example, by way of cable 144. If necessary, a analog-to-digital converter or other signal conditioners can be included to prepare the signal for processor 108.
- the selection of a suitable detection approach and test disc may be based on the acceptable tolerances in fly height and the ranges of expected deviation from acceptable values of fly height. To perform the measurements, the disc is spun at a fixed speed. After a brief transient period, the slider obtains a relatively constant height above the disc surface. The measurements then are performed.
- the optical head is aligned with the light path by maximizing the light reflected back into the detector module.
- the output of detector modules set forth herein are correlated to fly height .
- the correlation is obtained, which can be stored in memory 146 of processor 108.
- a first embodiment of detector module 106 includes an optional slit aperture 150, a lens 152, an optional iris diaphragm 154 and a two element detector 156.
- Slit aperture 150 can reduce noise.
- Lens 152 focuses light onto detector 156.
- Optional iris diaphragm 154 can be placed either before or after lens 152 in the light path.
- iris diaphragm 154 is placed after lens 152 between lens 152 and two element detector 156.
- Iris diaphragm 154 can be used as a central aperture stop such as a half aperture (50%) stop. Iris diaphragm 154 generally reduces the contribution of reflected light near normal incidence with respect to the disc - 12 - surface to enhance the contribution of light waves having higher angles of incidence.
- Two element detector 154 has light sensitive elements 158 (A) , 160 (B) .
- the focus signal can be correlated with the distance of the disc 110 to slider 104.
- detector module 106 includes a central aperture stop 170 such as an iris diaphragm, an optional waveplate 172, a polarization beam splitter 174, and light sensitive elements 176 (C) , 178 (D) .
- a central aperture stop 170 such as an iris diaphragm
- an optional waveplate 172 such as an optional waveplate 172
- a polarization beam splitter 174 such as an optional waveplate 172
- D light sensitive elements 176 (C) , 178 (D) .
- Different polarizations generally reflect differently from the surface of disc 110.
- the difference in reflectivity generally depends on the distance between slider 104 and disc 110.
- Waveplate 172 can be used to alter the polarization of the light following path 140 prior to striking polarization beam splitter 174.
- the waveplate can be a half waveplate placed at 22.5 degrees or a quarter waveplate placed at 45 degrees.
- polarization ratio as a function of fly height was evaluated with an aluminum coated test disc using a experimental arrangement shown schematically in Fig. 1A.
- the polarization ratio is - 13 - defined as the ratio of y-polarized light to x-polarized light in the reflected beam when the incident light is purely x-polarized.
- the objective lens had a numerical aperture of 0.65, and the SIL had a numerical aperture of 2.15.
- the RIM intensity at the objective lens was 0.28.
- the effect of SiN thickness on the aluminum coated disc also was evaluated with respect to the polarization ratio (PR) as a function of fly height.
- PR polarization ratio
- Different SiN thicknesses produce PR curves as functions of fly height with different effective ranges corresponding to regions over which the curve changes monotonically .
- this correlation can be stored and used in subsequent fly height measurements.
- fly height can be measured over a 500 nm range with good accuracy without requiring monotonic curves for a particular SiN thickness over the effective range.
- measurements obtained with different numerical apertures of the objective lens demonstrate that the technique accommodates a wide range of numerical apertures .
- Fig. 8 Measurement of percent reflectivity as a function of fly height are plotted in Fig. 8 for five different thicknesses of SiN.
- the reflectivity was measured relative to the measurement of a power meter corresponding to element 114 of Fig. 1.
- the reflectivity curve has a monotonic range of about 250 nm for the particular numerical aperture of the objective lens.
- the effective range of the reflectivity measurements is a mild function of numerical aperture since the fly height at the first - 14 - maximum of the reflectivity does not change significantly for different values of numerical aperture .
- the measurement range can be improved significantly with the addition of a central aperture stop either in the incident beam or in the reflected beam prior to the detectors, as shown in Fig. 3.
- the effect of a 50% stop on a reflectivity measurement can be seen in Fig. 10.
- the lens for these measurements did not have a SiN coating.
- the 50% stop corresponds to a pupil radius of 0.707 relative to a maximum clear aperture radius of 1.0. With a numerical aperture of 0.65, the 50% stop increases the effective range to about 500 nm.
- the polarization ratio as a function of fly height was obtained with a 50% stop for two aluminum coated discs having different SiN thicknesses. The 50% stop greatly enhanced the sensitivity of the polarization ratio measurements.
- Fig. 12 measurements of polarization differences were made as a function of fly height with a disc coated with an optical stack containing MO media. Similar measurements of percent reflectivity (REF) , percent sum, and polarization ratio are presented in Fig. 13. "Reflectivity” is the total intensity of the beam returning through the lens, while “sum” is the is the total intensity measured after reflection from a partially polarizing beam splitter. These measurements were made with a 50% stop in the reflected beam. All of the measurements shown in Figs. 14 and 15 show good characteristics indicating their suitableness for measurements up to about 500 nm fly height .
- detector module 106 A third embodiment of detector module 106 is depicted in Fig. 5. In this embodiment, detector module - 15 -
- 106 includes an optional slit aperture 190, a polarizer 192 and a detector array 194.
- This embodiment can also include an iris diaphragm.
- Polarizer 192 preferably is oriented at 0, 45 or 90 degrees relative to the initial polarization depending on the measurement desired. The polarizer is rotated between the preferred values or other values to measure the intensity distribution for different polarization states. Similar information can be obtained from a measurement with the polarizer and a second measurement without the polarizer.
- Detector array 194 can be a CCD array or any other light sensitive array or appropriate dimensions. Detector array 194 can have a one dimensional array or a two dimensional array of light sensitive elements. The intensity pattern measured with detector array 194 will reflect the distance between slider 104 and disc 112.
- Fig. 14 depicts intensity distribution of the x-polarized field component of the reflected beam obtained with an aluminum coated test disc and x-polarized incident light. The measurements may be made using an array detector. The intensity distribution is shown for four fly heights.
- Fig. 15 depicts the phase distribution of the x-polarized field component of the reflected beam for four fly heights. Since the intensity distribution and phase distribution vary with fly height these can be used to calculate fly height. In the case of the phase distributions, measurements based on the focus sensor of the detector module in Fig. 3 are particularly suitable measurements for the calculation of fly height. - 16 -
- light or “optical” refers to radiation of any wavelength and are not limited to visible radiation.
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Head (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/155,460 US6688743B1 (en) | 1998-02-17 | 1998-09-29 | Method and apparatus to determine fly height of a recording head |
DE19882972T DE19882972T1 (en) | 1998-02-17 | 1998-09-29 | Method and apparatus for determining the head of a recording head |
GB0019398A GB2349694B (en) | 1998-02-17 | 1998-09-29 | Method and apparatus to determine fly height of a recording head |
KR1020007009024A KR20010041003A (en) | 1998-02-17 | 1998-09-29 | Method and apparatus to determine fly height of a recording head |
JP2000531705A JP2002503801A (en) | 1998-02-17 | 1998-09-29 | Method and apparatus for determining flying height of recording head |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US7496698P | 1998-02-17 | 1998-02-17 | |
US60/074,966 | 1998-02-17 |
Publications (1)
Publication Number | Publication Date |
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WO1999041566A1 true WO1999041566A1 (en) | 1999-08-19 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/US1998/020311 WO1999041566A1 (en) | 1998-02-17 | 1998-09-29 | Method and apparatus to determine fly height of a recording head |
Country Status (6)
Country | Link |
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JP (1) | JP2002503801A (en) |
KR (1) | KR20010041003A (en) |
CN (1) | CN1146718C (en) |
DE (1) | DE19882972T1 (en) |
GB (1) | GB2349694B (en) |
WO (1) | WO1999041566A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003021583A1 (en) | 2001-08-31 | 2003-03-13 | Sony Corporation | Optical pickup device and recording/reproducing device |
EP1437719A2 (en) * | 2002-11-25 | 2004-07-14 | Sony Corporation | Optical pickup device, recording and reproducing apparatus and method for detecting near-field gap |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050094258A1 (en) * | 2003-10-31 | 2005-05-05 | Hamamatsu Photonics K.K. | Solid immersion lens moving device and microscope using the same |
US7505143B2 (en) * | 2005-05-17 | 2009-03-17 | Kla-Tencor Corporation | Dynamic reference plane compensation |
JP5198393B2 (en) * | 2009-09-03 | 2013-05-15 | 株式会社東芝 | Height detection device |
WO2014188379A1 (en) * | 2013-05-23 | 2014-11-27 | Applied Materials Israel, Ltd. | An evaluation system and a method for evaluating a substrate |
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US5486924A (en) * | 1991-10-23 | 1996-01-23 | Phase Metrics | Method and apparatus for measurement of roughness and hardness of a surface |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US5715060A (en) * | 1996-03-11 | 1998-02-03 | Carnegie Mellon University | Apparatus and method for measuring linear nanometric distances using evanescent radiation |
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1998
- 1998-09-29 GB GB0019398A patent/GB2349694B/en not_active Expired - Fee Related
- 1998-09-29 KR KR1020007009024A patent/KR20010041003A/en active IP Right Grant
- 1998-09-29 JP JP2000531705A patent/JP2002503801A/en active Pending
- 1998-09-29 WO PCT/US1998/020311 patent/WO1999041566A1/en active IP Right Grant
- 1998-09-29 DE DE19882972T patent/DE19882972T1/en not_active Withdrawn
- 1998-09-29 CN CNB988136244A patent/CN1146718C/en not_active Expired - Fee Related
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US5486924A (en) * | 1991-10-23 | 1996-01-23 | Phase Metrics | Method and apparatus for measurement of roughness and hardness of a surface |
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WO2003021583A1 (en) | 2001-08-31 | 2003-03-13 | Sony Corporation | Optical pickup device and recording/reproducing device |
EP1422702A1 (en) * | 2001-08-31 | 2004-05-26 | Sony Corporation | Optical pickup device and recording/reproducing device |
EP1422702A4 (en) * | 2001-08-31 | 2006-12-27 | Sony Corp | Optical pickup device and recording/reproducing device |
US7440383B2 (en) | 2001-08-31 | 2008-10-21 | Sony Corporation | Optical pickup device and recording and/or reproducing apparatus |
EP1437719A2 (en) * | 2002-11-25 | 2004-07-14 | Sony Corporation | Optical pickup device, recording and reproducing apparatus and method for detecting near-field gap |
EP1437719A3 (en) * | 2002-11-25 | 2007-03-07 | Sony Corporation | Optical pickup device, recording and reproducing apparatus and method for detecting near-field gap |
US7230902B2 (en) | 2002-11-25 | 2007-06-12 | Sony Corporation | Optical pickup device, recording and reproducing apparatus and gap detection method |
US7414947B2 (en) | 2002-11-25 | 2008-08-19 | Sony Corporation | Optical pickup device, recording and reproducing apparatus and gap detection method |
Also Published As
Publication number | Publication date |
---|---|
CN1290339A (en) | 2001-04-04 |
KR20010041003A (en) | 2001-05-15 |
GB2349694B (en) | 2002-09-18 |
GB0019398D0 (en) | 2000-09-27 |
CN1146718C (en) | 2004-04-21 |
GB2349694A (en) | 2000-11-08 |
DE19882972T1 (en) | 2001-02-01 |
JP2002503801A (en) | 2002-02-05 |
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