WO1999034896A1 - Filter for use in gas-conducting lines or circuits - Google Patents

Filter for use in gas-conducting lines or circuits Download PDF

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Publication number
WO1999034896A1
WO1999034896A1 PCT/EP1999/000008 EP9900008W WO9934896A1 WO 1999034896 A1 WO1999034896 A1 WO 1999034896A1 EP 9900008 W EP9900008 W EP 9900008W WO 9934896 A1 WO9934896 A1 WO 9934896A1
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WO
WIPO (PCT)
Prior art keywords
filter
gas
housing
layer
circuits
Prior art date
Application number
PCT/EP1999/000008
Other languages
German (de)
French (fr)
Inventor
Josef RÖMER
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Publication of WO1999034896A1 publication Critical patent/WO1999034896A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B43/00—Arrangements for separating or purifying gases or liquids; Arrangements for vaporising the residuum of liquid refrigerant, e.g. by heat
    • F25B43/003—Filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • B01D39/2055—Carbonaceous material
    • B01D39/2058—Carbonaceous material the material being particulate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0415—Beds in cartridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26—Drying gases or vapours
    • B01D53/261—Drying gases or vapours by adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04—Additives and treatments of the filtering material
    • B01D2239/0407—Additives and treatments of the filtering material comprising particulate additives, e.g. adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/06—Filter cloth, e.g. knitted, woven non-woven; self-supported material
    • B01D2239/065—More than one layer present in the filtering material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/20—Organic adsorbents
    • B01D2253/202—Polymeric adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/80—Water
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/414—Further details for adsorption processes and devices using different types of adsorbents
    • B01D2259/4141—Further details for adsorption processes and devices using different types of adsorbents within a single bed
    • B01D2259/4145—Further details for adsorption processes and devices using different types of adsorbents within a single bed arranged in series
    • B01D2259/4148—Multiple layers positioned apart from each other

Definitions

  • the present invention has for its object to significantly improve a filter of the type mentioned in relation to the removal of water contaminants.
  • the layer first flowed through by the gas consists of SAP and the further layer consists of activated carbon.
  • the SAP layer upstream of the activated carbon has the task of removing water vapor residues, e.g. due to insufficient degassing of the oil of a compressor or the metal parts used.
  • the activated carbon which would otherwise have to absorb this water fraction, is kept free for the adsorption of the oil mist. Long service life of the filter can be achieved.
  • the filter 1 comprises the housing 2 with gas inlet 3, filter insert 4 and gas outlet 5.
  • the gas entering through the gas inlet 3 flows around the outside of the cylindrical filter insert 4 and enters the filter insert 4 through the free end face (located below in the figure). It leaves the filter insert 4 through the line 6 in the region of its upper end face and the gas outlet 5.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Pipeline Systems (AREA)

Abstract

The invention relates to a filter (1) for use in gas-conducting lines or circuits, whereby the filter (1) comprises a housing (2) with a gas inlet (3) and gas outlet (5). A filter layer (7, 8) through which gas flows is located in said housing. In order to improve the removal of water contaminants, the invention provides that a layer (7) through which gas flows and which is located in the housing (2) is comprised of a synthetic superabsorber.

Description

Filter für den Einsatz in gasführenden Leitungen oder KreisläufenFilters for use in gas pipelines or circuits
Die Erfindung bezieht sich auf einen Filter für den Einsatz in gasführenden Leitungen oder Kreisläufen, wobei der Filter ein Gehäuse mit Gaseintritt und Gasaustritt umfasst, in welchem sich eine vom Gas durchströmte Filterschicht befindet.The invention relates to a filter for use in gas-carrying lines or circuits, the filter comprising a housing with gas inlet and gas outlet, in which there is a filter layer through which gas flows.
Bei der Belüftung von Vakuumanlagen wird meist mit Umgebungsluft, bei UHV-Anlagen meist mit reinem oder reinstem Stickstoff aus einer Druckflasche oder aus Abdampfgas von verflüssigtem Stickstoff belüftet. Dabei wird immer ein gewisser Anteil von Wasserdampf mitgeschleppt, der sich auf die Innenwände von Vakuumanlagen niederschlägt und beim nächsten Evakuierungsprozess die Abpumpzeit verlängert. Auch in Pressluftanlagen und in Lufttrocknungsanlagen wird häufig mit reinen und reinsten Gasen gearbeitet.When ventilating vacuum systems, ventilation is usually carried out with ambient air, in UHV systems mostly with pure or ultrapure nitrogen from a pressure bottle or from exhaust gas from liquefied nitrogen. A certain amount of water vapor is always carried along, which is deposited on the inner walls of vacuum systems and increases the pumping time during the next evacuation process. In compressed air systems and in air drying systems, too, pure and purest gases are often used.
Ein Beispiel für ein Reinstgas-Kreislauf ist der Helium-Kreislauf einer Tieftemperatur-Kältemaschine, wie sie beispielsweise aus der US-A-29 06 101 oder der DE- A-31 20 233 bekannt sind. Maschinen dieser Art werden mit Helium als Arbeitsgas betrieben. Dieses wird in einem geschlossenen Kreislauf geführt. Der Kreislauf umfasst einen Kompressor, mit dessen Hilfe das Arbeitsgas auf einen Druck von etwa 20 bar gebracht wird. Durch ein mehrfaches Kuppeln der Heliumleitungen kommt es immer wieder zu Wasserdampfverschleppungen in das Helium- Reinstgas. Diese Verschleppungen führen zu Leistungsverringerungen der Kältemaschine.An example of a high-purity gas cycle is the helium cycle of a low-temperature refrigeration machine, as are known for example from US-A-29 06 101 or DE-A-31 20 233. Machines of this type are operated with helium as the working gas. This is done in a closed cycle. The circuit includes a compressor, with the help of which the working gas is brought to a pressure of about 20 bar. By Coupling the helium lines several times leads to water vapor being carried over into the high-purity helium gas. These carry-over lead to reduced performance of the chiller.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, einen Filter der eingangs erwähnten Art in Bezug auf die Beseitigung von Wasserverunreinigungen erheblich zu verbessern.The present invention has for its object to significantly improve a filter of the type mentioned in relation to the removal of water contaminants.
Erfindungsgemäß wird diese Aufgabe dadurch gelöst, dass sich im Filter eine vom Gas durchströmte Schicht befindet, die aus einem synthetischen Superabsorber besteht.According to the invention, this object is achieved in that there is a layer in the filter through which the gas flows and which consists of a synthetic superabsorber.
Synthetische Suberabsorber sind superabsorbierende Polymere (SAP) , die bereits im Hygienebereich (Babywindeln, Pflaster usw.) eingesetzt werden. Superabsorber der hier betroffenen Art werden beispielsweise im "Hoechst High Chem Magazin" 16/1994, Seiten 25 bis 30, beschrieben.Synthetic suberabsorbers are superabsorbent polymers (SAP) that are already used in the hygiene sector (baby diapers, plasters, etc.). Superabsorbers of the type concerned here are described, for example, in "Hoechst High Chem Magazine" 16/1994, pages 25 to 30.
Durch den Einsatz von SAP lässt sich entweder das Bauvolumen eines Filters drastisch reduzieren oder der Reinheitsgrad des Gases bezüglich einer Wasserverunreinigung erheblich verbessern. Dieses liegt an der Tatsache, dass SAP das bis zu 1000-fache ihres Eigengewichtes an Wasser aufnehmen können. Ein Filter mit dem herkömmlich benutzten Adsorptionsmittel Aktiv-Kohle kann nur bis etwa dem doppelten seines Eigengewichtes an Wasser aufnehmen. Dabei sinkt gleichzeitig seine Aufnahmekapazität für andere Medien wie z.B. Öl.The use of SAP can either drastically reduce the construction volume of a filter or significantly improve the degree of purity of the gas with regard to water pollution. This is due to the fact that SAP can absorb up to 1000 times its own weight in water. A filter with the conventionally used adsorbent activated carbon can only absorb up to about twice its own weight in water. At the same time, its absorption capacity for other media, e.g. Oil.
Beim Einsatz eines SAP-Absorbers im Belüftungsgasstrom einer Vakuumanlage wird der Wasserdampf zuverlässig zurückgehalten, die Vakuumanlage also mit völlig trockenem Gas belüftet. Beim nächsten Evakuierungsprozess ist die Pumpzeit verkürzt. Bei UHV-Anlagen kann häufig auf ein erneutes Ausheizen verzichtet werden.When using a SAP absorber in the ventilation gas flow of a vacuum system, the water vapor is reliably retained, i.e. the vacuum system is ventilated with completely dry gas. The next evacuation process is the pumping time is shortened. With UHV systems, it is often not necessary to bake out again.
Besonders vorteilhaft ist es, wenn sich im Filter zwei Filterschichten befinden, von denen die zuerst vom Gas durchströmte Schicht aus SAP und die weitere Schicht aus Aktivkohle besteht. Die der Aktivkohle vorgeschaltete SAP-Schicht hat bei einer Ausführungsform dieser Art die Aufgabe, Wasserdampfreste, die z.B. aus einer unzureichenden Entgasung des Öls eines Kompressors oder der verwendeten Metallteile herrühren, zu binden. Dadurch wird die Aktivkohle, die ansonsten diesen Wasseranteil aufnehmen müsste, für die Adsorption des Ölne- bels freigehalten. Lange Standzeiten des Filters können dadurch erreicht werden.It is particularly advantageous if there are two filter layers in the filter, of which the layer first flowed through by the gas consists of SAP and the further layer consists of activated carbon. In one embodiment of this type, the SAP layer upstream of the activated carbon has the task of removing water vapor residues, e.g. due to insufficient degassing of the oil of a compressor or the metal parts used. As a result, the activated carbon, which would otherwise have to absorb this water fraction, is kept free for the adsorption of the oil mist. Long service life of the filter can be achieved.
Vorteile und Einzelheiten der Erfindung sollen an Hand eines in der Figur dargestellten Filters erläutert werden.Advantages and details of the invention will be explained using a filter shown in the figure.
Der Filter 1 umfasst das Gehäuse 2 mit Gaseintritt 3, Filtereinsatz 4 und Gasaustritt 5. Das durch den Gaseintritt 3 eintretende Gas umströmt das Äußere des zylindrischen Filtereinsatzes 4 und tritt durch die freie (in der Figur unten gelegene) Stirnseite in den Filtereinsatz 4 ein. Sie verlässt den Filtereinsatz 4 durch die im Bereich seiner oberen Stirnseite befindliche Leitung 6 und den Gasaustritt 5.The filter 1 comprises the housing 2 with gas inlet 3, filter insert 4 and gas outlet 5. The gas entering through the gas inlet 3 flows around the outside of the cylindrical filter insert 4 and enters the filter insert 4 through the free end face (located below in the figure). It leaves the filter insert 4 through the line 6 in the region of its upper end face and the gas outlet 5.
Im Filtereinsatz 4 finden sich zwei Filterschichten 7 und 8, die von Trennschichten 9, 10, 11, z.B. aus Trennfilz, in ihrer Position gehalten werden. Die zuerst durchströmte Schicht 7 besteht aus SAP und hält Wasserdampfreste durch Absorption zurück. Die Schicht 8 besteht aus Aktivkohle. Sie dient der Adsorption eventuell vorhandener Ölnebel . In the filter insert 4 there are two filter layers 7 and 8, which are separated by separating layers 9, 10, 11, e.g. made of felt, held in place. The first flow through layer 7 consists of SAP and retains water vapor residues by absorption. Layer 8 consists of activated carbon. It serves to adsorb any oil mist that may be present.

Claims

ANSPRÜCHE EXPECTATIONS
1. Filter (1) für den Einsatz in gasführenden Leitungen oder Kreisläufen, wobei der Filter (1) ein Gehäuse (2) mit Gaseintritt (3) und Gasaustritt (5) umfasst, in welchem sich eine vom Gas durchströmte Filterschicht (7, 8) befindet, dadurch gekennzeichnet, dass sich im Gehäuse (2) eine vom Gas durchströmte Schicht (7), bestehend aus einem synthetischen Superabsorber, befindet.1. Filter (1) for use in gas-carrying lines or circuits, the filter (1) comprising a housing (2) with gas inlet (3) and gas outlet (5), in which a filter layer (7, 8) through which gas flows ), characterized in that in the housing (2) there is a gas-flowing layer (7) consisting of a synthetic superabsorber.
2. Filter (1) nach Anspruch 1, dadurch gekennzeichnet, dass sich im Gehäuse (2) zwei Filterschichten2. Filter (1) according to claim 1, characterized in that there are two filter layers in the housing (2)
(7, 8) befinden, von denen die zuerst vom Gas durchströmte Schicht (7) aus dem Superabsorber und die weitere Schicht (8) aus Aktivkohle besteht.(7, 8), of which the layer (7) through which the gas flows first consists of the super absorber and the further layer (8) consists of activated carbon.
3. Filter (1) nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass sich im Filtergehäuse (2) ein zylindrischer Filtereinsatz (4) befindet, in dem sich die Filterschichten (7, 8) befinden.3. Filter (1) according to claim 1 or 2, characterized in that there is a cylindrical filter insert (4) in the filter housing (2), in which the filter layers (7, 8) are located.
4. Filter (1) nach Anspruch 3, dadurch gekennzeichnet, dass sich im Filtereinsatz (4) aus Filz bestehende Trennschichten (9, 10, 11) befinden, die die Lage der Filterschichten sichern. Tieftemperatur-Kältemaschine mit einem geschlossenen Helium-Kreislauf, der mit einem Kompressor ausgerüstet ist, dadurch gekennzeichnet, dass der Kreislauf mit einem Filter (1) nach einem der Ansprüche 1 bis 4 ausgerüstet ist.4. Filter (1) according to claim 3, characterized in that in the filter insert (4) consisting of felt separating layers (9, 10, 11) are located, which secure the position of the filter layers. Low-temperature refrigeration machine with a closed helium circuit, which is equipped with a compressor, characterized in that the circuit is equipped with a filter (1) according to one of claims 1 to 4.
Vakuumanlage mit einer Belüftungsleitung, dadurch gekennzeichnet, dass die Belüftungsleitung mit einem Filter (1) nach einem der Ansprüche 1 bis 4 ausgerüstet ist. Vacuum system with a ventilation line, characterized in that the ventilation line is equipped with a filter (1) according to one of claims 1 to 4.
PCT/EP1999/000008 1998-01-10 1999-01-05 Filter for use in gas-conducting lines or circuits WO1999034896A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE29800319.8 1998-01-10
DE29800319U DE29800319U1 (en) 1998-01-10 1998-01-10 Filters for use in gas pipelines or circuits

Publications (1)

Publication Number Publication Date
WO1999034896A1 true WO1999034896A1 (en) 1999-07-15

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WO (1) WO1999034896A1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008075237A2 (en) * 2006-12-18 2008-06-26 Schlumberger Canada Limited Differential filters for stopping water during oil production
US8205673B2 (en) 2006-12-18 2012-06-26 Schlumberger Technology Corporation Differential filters for removing water during oil production
WO2014039351A1 (en) * 2012-09-10 2014-03-13 Entegris, Inc. Apparatus for preventing microparticle and dust migration in layered bed purification devices
US9694319B2 (en) 2012-02-10 2017-07-04 Entegris, Inc. Gas purifier
WO2020191197A1 (en) * 2019-03-19 2020-09-24 Basf Corporation Filter unit for adsorbing water and gas and systems and methods of use thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6299670B1 (en) * 1999-06-10 2001-10-09 Saes Pure Gas, Inc. Integrated heated getter purifier system

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US4787949A (en) * 1986-06-30 1988-11-29 Facet Automotive Filter Co. Method of manufacturing highly water absorbent pleated filter laminate
EP0588214A2 (en) * 1992-09-14 1994-03-23 Minnesota Mining And Manufacturing Company Superabsorbent fiber compositions demonstrating efficient retention of exhaled heat and moisture
WO1995003015A1 (en) * 1993-07-19 1995-02-02 Bjoern Per Ole A valve device for absorption of the gas components

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US4787949A (en) * 1986-06-30 1988-11-29 Facet Automotive Filter Co. Method of manufacturing highly water absorbent pleated filter laminate
EP0588214A2 (en) * 1992-09-14 1994-03-23 Minnesota Mining And Manufacturing Company Superabsorbent fiber compositions demonstrating efficient retention of exhaled heat and moisture
WO1995003015A1 (en) * 1993-07-19 1995-02-02 Bjoern Per Ole A valve device for absorption of the gas components

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008075237A2 (en) * 2006-12-18 2008-06-26 Schlumberger Canada Limited Differential filters for stopping water during oil production
WO2008075237A3 (en) * 2006-12-18 2008-08-21 Schlumberger Ca Ltd Differential filters for stopping water during oil production
GB2457197A (en) * 2006-12-18 2009-08-12 Schlumberger Holdings Differential filters for stopping water during oil production
US7637320B2 (en) 2006-12-18 2009-12-29 Schlumberger Technology Corporation Differential filters for stopping water during oil production
GB2457197B (en) * 2006-12-18 2011-06-15 Schlumberger Holdings Differential filters for stopping water during oil production
US8205673B2 (en) 2006-12-18 2012-06-26 Schlumberger Technology Corporation Differential filters for removing water during oil production
US9694319B2 (en) 2012-02-10 2017-07-04 Entegris, Inc. Gas purifier
US10245554B2 (en) 2012-02-10 2019-04-02 Entegris, Inc. Gas purifier
WO2014039351A1 (en) * 2012-09-10 2014-03-13 Entegris, Inc. Apparatus for preventing microparticle and dust migration in layered bed purification devices
WO2020191197A1 (en) * 2019-03-19 2020-09-24 Basf Corporation Filter unit for adsorbing water and gas and systems and methods of use thereof

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